Abstract:
To suppress both influence of electron emission from a cathode side surface and consumption of energy to be supplied to a heater, while being provided with a grid, an electron gun of the present invention includes: a cathode capable of emitting electrons by heating; a grid capable of controlling the electron emission; and a cathode shield which is an conductor including a material portion located in the vicinity of a side surface of the cathode and facing at least a portion of the side surface via a gap or a heat insulating material, and not being made in direct physical coupling nor in direct physical contact with the cathode.
Abstract:
Presented systems and methods facilitate efficient and effective monitoring of particle beams. In some embodiments, a radiation gun system comprises: a particle beam gun that generates a particle beam, and a gun control component that controls the gun particle beam generation characteristics, including particle beam fidelity characteristics. The particle beam characteristics can be compatible with FLASH radiation therapy. Resolution control of the particle beam generation can enable dose delivery at an intra-pulse level and micro-bunch level. The micro-bunch can include individual bunches per each 3 GHz RF cycle within the 5 to 15 μsec pulse-width. The FLASH radiation therapy dose delivery can have a bunch level resolution of approximately 4.4×10̂−6cGy/bunch.
Abstract:
An apparatus and method for producing electrons in a plasma flood gun is disclosed. The apparatus includes an indirectly heated cathode (IHC) which is contained within a pre-fabricated cartridge. This cartridge can be readily replaced in a plasma flood gun. In addition, the use of an IHC reduces the amount of contaminants that are injected into the workpiece or wafer.
Abstract:
An electron gun cathode (104) is column shaped, and emits electrons by being heated. A holder (103), which covers the bottom and sides of the electron gun cathode, has electrical conductivity and holds the electron gun cathode, and is composed of a material that does not easily react with the electron gun cathode when in a heated state, is provided. The tip of the electron gun cathode (104) protrudes from the holder (103) so as to be exposed, and electrons are emitted from the tip toward the front by applying an electric field to the tip.
Abstract:
Direct and indirect electron bombardment provide a sufficiently high degree of temperature uniformity across the emitting surface of a large-area electron source for an electron beam projection system such that a broad beam having illumination uniformity within 1% can be achieved. A diode gun is used to obtain extraction field uniformity and maintain uniformity of illumination. Power requirements and power dissipation in beam periphery truncating apertures is reduced by roughening the surface of a monocrystalline cathode or depositing materials having a higher work function thereon.
Abstract:
A voltage regulator circuit for an electron microscope incorporates step-down and step-up transformers connected between the filament supply and the filament of a regulator triode. The triode has a cathode separate from the filament, the cathode being connected to the center-tapped primary of the step-up transformer. A magnification-reducing resistor may be connected across the grid and cathode of the triode.
Abstract:
Various methods and systems are provided for a cathode of an X-ray imaging system. A method for fabricating the cathode comprises machining a plurality of focusing features on a focusing element and welding the focusing element to a base assembly.
Abstract:
The current stability of a field emission electron source and a Schottky electron source where a {100} plane of a hexaboride single crystal is used as an electron emission surface is improved. The electron source includes a tip of a hexaboride single crystal with a axis, in which a top facet of a {100} plane that is surrounded by side facets including at least four {n11} planes and at least four {n10} planes where n represents an integer of 1, 2, or 3 is formed at a front end of the tip of the hexaboride single crystal, and a total area of the side facets of the {n11} planes is more than a total area of the side facets of the {n10} planes.
Abstract:
Various methods and systems are provided for a cathode of an X-ray imaging system. A method for fabricating the cathode comprises machining a plurality of focusing features on a focusing element and welding the focusing element to a base assembly.