公开(公告)号：US2490468A

公开(公告)日：1949-12-06

申请号：US70437946

申请日：1946-10-19

Applicant: RCA CORP

Inventor： PICARD ROBERT G

IPC: H01J41/06

CPC classification number: H01J41/06

公开(公告)号：US1716155A

公开(公告)日：1929-06-04

申请号：US21110427

申请日：1927-08-06

Applicant: WESTINGHOUSE ELECTRIC & MFG CO

Inventor： LLOYD SMEDE

IPC: H01J7/42 ,  H01J41/06

CPC classification number: H01J41/06 ,  H01J7/42 ,  Y10T307/74

公开(公告)号：US20230088465A1

公开(公告)日：2023-03-23

申请号：US17905441

申请日：2021-02-23

Applicant: Edwards Vacuum LLC

Inventor： Marcus Hans Robert Thierley

IPC: H01J41/20 ,  H01J41/06

Abstract: Method for the regeneration of a volume getter pump in a vacuum apparatus with a volume getter pump and an ion getter pump where the operating voltage of the ion getter pump is reduced, the current through the ion getter pump is recorded for determination of the pressure in the vacuum apparatus and then a heating element of the NEG is controlled as a function of the current of the ion getter pump for the purpose of heating the NEG material.

公开(公告)号：US11092506B2

公开(公告)日：2021-08-17

申请号：US17142404

申请日：2021-01-06

Applicant: CANON ANELVA CORPORATION

Inventor： Yohsuke Kawasaki

IPC: G01L21/34 ,  H01J41/06 ,  G01L19/06

Abstract: An ionization gauge includes an anode having a rod shape, and a cathode including a cathode plate having a through hole through which the anode extends. The cathode includes a first cathode plate including a through hole through which the anode extends, and a storage portion configured to store the electromagnetic wave source, a second cathode plate arranged separately from the first cathode plate, a third cathode plate arranged between the first cathode plate and the second cathode plate to be in contact with the first cathode plate, and a member configured to surround the first cathode plate, the second cathode plate, and the third cathode plate.

公开(公告)号：US20210123827A1

公开(公告)日：2021-04-29

申请号：US17142404

申请日：2021-01-06

Applicant: CANON ANELVA CORPORATION

Inventor： Yohsuke KAWASAKI

IPC: G01L21/34 ,  H01J41/06 ,  G01L19/06

Abstract: An ionization gauge includes an anode having a rod shape, and a cathode including a cathode plate having a through hole through which the anode extends. The cathode includes a first cathode plate including a through hole through which the anode extends, and a storage portion configured to store the electromagnetic wave source, a second cathode plate arranged separately from the first cathode plate, a third cathode plate arranged between the first cathode plate and the second cathode plate to be in contact with the first cathode plate, and a member configured to surround the first cathode plate, the second cathode plate, and the third cathode plate.

公开(公告)号：US10969291B1

公开(公告)日：2021-04-06

申请号：US17019419

申请日：2020-09-14

Applicant: CANON ANELVA CORPORATION

Inventor： Yohsuke Kawasaki

IPC: G01L21/34 ,  G01L19/06 ,  H01J41/06

Abstract: An ionization gauge includes an anode, a cathode, and an electromagnetic wave source. The cathode includes a first cathode plate having a through hole through which the anode passes, a storage portion configured to store the electromagnetic wave source, and a passage arranged between the storage portion and the through hole and configured to pass an electromagnetic wave generated by the electromagnetic wave source.

公开(公告)号：US20190043702A1

公开(公告)日：2019-02-07

申请号：US15762927

申请日：2015-09-23

Applicant: INFICON AG

Inventor： Martin WÜEST

IPC: H01J41/06 ,  G01L21/34

Abstract: The invention relates to an ionization vacuum measuring cell (10) comprising an evacuable housing (12) with a measurement connection for a vacuum to be measured at an end portion; a measurement chamber (14) in the housing (12), said measurement chamber being fluidically connected to the measurement connection, wherein the measurement chamber (14) is designed as a replaceable component; and a first and a second electrode (16, 18) in the measurement chamber (14), said electrodes being substantially coaxial to an axis and being arranged at a distance from each other. The measuring cell further comprises an electrically insulating and vacuum-tight feedthrough (20) for an electric supply to the second electrode (18) and a magnetization assembly which is designed to generate a magnetic field in the ionization chamber. According to the invention, the measurement chamber (14), in particular at least one of the electrodes (16, 18), comprises a magnetic material.

公开(公告)号：US10094728B2

公开(公告)日：2018-10-09

申请号：US15329986

申请日：2015-07-29

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Hajime Yoshida

IPC: G01L27/00 ,  G01L21/34 ,  H01J41/06 ,  H01J27/02 ,  G01N27/62 ,  H01J37/08

Abstract: Provided are: a vacuum gauge that, with a simple configuration, can accurately diagnose the degree of contamination of the vacuum gauge; and a contamination diagnosis method that, with a simple process, can accurately diagnose the degree of contamination of a vacuum gauge. Provided is a cold cathode ionization vacuum gauge that has a normal operation mode and a contamination diagnosis mode, the cold cathode ionization vacuum gauge comprising: an anode 1 and a cathode 3 that are for measuring vacuum pressure in the normal operation mode; an anode 7 and the cathode 3 that are for measuring the vacuum pressure in the contamination diagnosis mode; and a controller 10 that compares the size of a current measured between the anode 7 and the cathode 3 and the size of a current measured between the anode 1 and the cathode 3.

公开(公告)号：US09797797B2

公开(公告)日：2017-10-24

申请号：US14537593

申请日：2014-11-10

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker ,  Timothy C. Swinney ,  Brandon J. Kelly ,  Alfred A. Funari ,  Michael N. Schott ,  Kristian S. Schartau

IPC: G01L21/34 ,  H01J41/06 ,  G01L19/06 ,  H01J9/50

CPC classification number: G01L21/34 ,  G01L19/06 ,  H01J9/50 ,  H01J41/06 ,  Y02W30/828 ,  Y10T29/49007

Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.

公开(公告)号：US09588004B2

公开(公告)日：2017-03-07

申请号：US14536102

申请日：2014-11-07

Applicant: MKS Instruments, Inc.

Inventor： Gerardo A. Brucker ,  Scott C. Heinbuch

IPC: G01L21/34 ,  G01L21/32 ,  G01L21/30 ,  H05B31/26 ,  H01J37/04 ,  H01J41/02 ,  H01J41/06 ,  H01J41/00 ,  H01J37/08 ,  H01J27/00 ,  H01J27/02

CPC classification number: G01L21/34 ,  G01L21/30 ,  G01L21/32 ,  H01J27/00 ,  H01J27/02 ,  H01J37/04 ,  H01J37/08 ,  H01J41/00 ,  H01J41/02 ,  H01J41/06

Abstract: A Long Lifetime Cold Cathode Ionization Vacuum Gauge Design with an extended anode electrode having an axially directed tip, a cathode electrode, and a baffle structure. The axially directed tip of the anode electrode can have a rounded exterior with a diameter at least 10% greater than the diameter of the anode electrode.

Abstract translation: 长寿命冷阴极电离真空计设计具有带有轴向引导尖端的延伸阳极电极，阴极电极和挡板结构。 阳极电极的轴向定向的尖端可以具有圆形的外部，其直径比阳极电极的直径大至少10％。