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公开(公告)号：US06933500B2
公开(公告)日：2005-08-23
申请号：US10620958
申请日：2003-07-16
申请人： Kazutoshi Kaji , Shohei Terada , Tadashi Otaka
发明人： Kazutoshi Kaji , Shohei Terada , Tadashi Otaka
CPC分类号： H01J37/28 , H01J37/05 , H01J2237/2594
摘要： An electron microscope is provided, which enables an observation with high resolution. The electron microscope is able to detect the deviation of an electron beam relative to the opening of a slit quantitatively, thereby shifting the electron beam accurately to the center of the opening of slit so as to execute energy selection. The electron microscope has an energy filter control unit for adjusting a relative position between an electron beam and a slit by shifting the position of electron beam based on a signal delivered by an energy filter electron beam detector. Also a method for controlling an energy filter is provided, which includes the steps of shifting the position of an electron beam, determining the position of electron beam and letting the electron beam pass through the center of an opening of the slit by controlling the position of slit or position of electron beam.
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公开(公告)号：US06930306B2
公开(公告)日：2005-08-16
申请号：US10807116
申请日：2004-03-24
CPC分类号： H01J37/1471 , H01J37/05 , H01J37/28 , H01J2237/2802
摘要： A scanning transmission electron microscope has an electron beam energy analyzer (energy filter) to observe electron beam energy loss spectra and element distribution images. This electron microscope further includes a deflection coil provided on the upstream side of a magnetic sector to correct for the electron beam path in a plane normal to the optical axis and make the electron beam incident to the energy filter, a deflection coil for correcting for the electron beam path in the energy axis direction of an energy dispersion surface formed by the magnetic sector, and a control unit for controlling the exciting conditions of the deflection coils.
摘要翻译： 扫描透射电子显微镜具有电子束能量分析器（能量滤波器），用于观察电子束能量损失谱和元素分布图像。 该电子显微镜还包括设置在磁性扇区的上游侧的偏转线圈，以校正垂直于光轴的平面中的电子束路径，并使电子束入射到能量滤波器，偏转线圈用于校正 由磁扇形成的能量分散面的能量轴方向的电子束路径，以及用于控制偏转线圈的激励条件的控制单元。
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公开(公告)号：US20050127295A1
公开(公告)日：2005-06-16
申请号：US11052586
申请日：2005-02-07
申请人： Kazutoshi Kaji , Shohei Terada , Tadashi Otaka
发明人： Kazutoshi Kaji , Shohei Terada , Tadashi Otaka
CPC分类号： H01J37/28 , H01J37/05 , H01J2237/2594
摘要： An electron microscope is provided, which enables an observation with high resolution. The electron microscope is able to detect the deviation of an electron beam relative to the opening of a slit quantitatively, thereby shifting the electron beam accurately to the center of the opening of slit so as to execute energy selection. The electron microscope has an energy filter control unit for adjusting a relative position between an electron beam and a slit by shifting the position of electron beam based on a signal delivered by an energy filter electron beam detector. Also a method for controlling an energy filter is provided, which includes the steps of shifting the position of an electron beam, determining the position of electron beam and letting the electron beam pass through the center of an opening of the slit by controlling the position of slit or position of electron beam.
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公开(公告)号：US06844548B2
公开(公告)日：2005-01-18
申请号：US10360605
申请日：2003-02-07
IPC分类号： H01J37/05 , H01J37/26 , H01J37/147
CPC分类号： H01J37/261 , H01J2237/057 , H01J2237/262
摘要： A Wien filter is provided in which a less amount of secondary aberration is produced than conventional. This filter has 12 poles. These poles have front ends facing the optical axis. These front ends have a 12-fold rotational symmetry about the optical axis within the XY-plane perpendicular to the optical axis.
摘要翻译： 提供了一种维纳滤波器，其中比常规产生少量的二次像差。 该过滤器有12个极。 这些极具有面向光轴的前端。 这些前端在垂直于光轴的XY平面内围绕光轴具有12倍的旋转对称性。
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公开(公告)号：US6015973A
公开(公告)日：2000-01-18
申请号：US951247
申请日：1997-10-16
申请人： Hiromi Nunome
发明人： Hiromi Nunome
CPC分类号： H01J49/46
摘要： There is disclosed an energy filter having polepieces which form lenses and are mounted at accuracies that can be easily checked. The positions of the lenses can be easily readjusted. The lenses are mounted to a base plate and stacked on top of each other between two polepieces via two spacers. The polepieces form magnetic poles. These lenses are mounted to the base plate with screws so as to form a passage.
摘要翻译： 公开了一种能量过滤器，其具有形成透镜的杆，并且可以容易地检查的精度安装。 透镜的位置可以轻松重新调整。 透镜通过两个间隔件安装到基板并且彼此堆叠在两个极片之间。 极杆形成磁极。 这些透镜用螺钉安装到基板上以形成通道。
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公开(公告)号：US5969366A
公开(公告)日：1999-10-19
申请号：US860748
申请日：1997-09-08
IPC分类号： H01J37/05 , H01J37/30 , H01J37/317
CPC分类号： H01J37/3171 , H01J37/3007 , H01J2237/04756
摘要： A post mass selection decel lens (9) is located between the exit aperture (55) of the mass selection chamber (47) and the entry (74) to the electron confinement tube (69) of the PFS. The lens comprises a first electrode (65) at the substrate potential, a second electrode (60) at the flight tube potential, and a field electrode (61) between them at a relatively high (negative) potential sufficient to provide focusing of the ion beam at the first electrode. The first electrode is larger than the beam to avoid deflecting ions at the periphery of the aperture out of the beam. The first electrode has an aperture which is smaller than that of the field electrode. The field electrode is at least -5 kV relative to the flight tube, that is substantially more than required for electron suppression. Additional apertures are provided between the process chamber and the mass selection chamber to improve evacuation.
摘要翻译： PCT No.PCT / GB96 / 02740 Sec。 371日期：1997年9月8日 102（e）1997年9月8日PCT PCT 1996年11月8日PCT公布。 第WO97 / 17716号公报 日期1997年5月15日后质量选择减速透镜（9）位于质量选择室（47）的出口孔（55）和PFS的电子限制管（69）的入口（74）之间。 该透镜包括在基底电位处的第一电极（65），处于飞行管电位的第二电极（60）和位于它们之间的场电极（61），其处于相对高（负）电位，足以提供离子的聚焦 光束在第一电极处。 第一电极大于光束，以避免将光圈外围的离子偏离光束。 第一电极具有小于场电极的孔径。 场电极相对于飞行管至少为-5kV，这实质上大于电子抑制所需要的。 在处理室和质量选择室之间提供额外的孔，以改善抽气。
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公开(公告)号：US5744796A
公开(公告)日：1998-04-28
申请号：US744366
申请日：1996-11-07
申请人： Keizo Kinoshita , Seiji Samukawa , Tetsu Mieno
发明人： Keizo Kinoshita , Seiji Samukawa , Tetsu Mieno
CPC分类号： H01J37/32935 , H01J49/14
摘要： In a mass spectrometer, a DC power supply amplifier is additionally provided in a circuit for generating an accelerating voltage of an electron beam for ionizing radicals. A "potential for ionization of radicals" is applied as a reference voltage of the accelerating voltage of the radical ionizing electron beam, and an output signal of the mass spectrometer is measured as a background signal strength. Then, the DC power supply amplifier is controlled to alternately supply the "potential for ionization of radicals" and a "potential slightly lower than a potential for dissociative ionization of parent gas or dissociative ionization of parent radicals", as the accelerating voltage of the radical ionizing electron beam. A difference between the background signal strength and the output signal of the mass spectrometer when the "potential slightly lower than a potential for dissociative ionization of parent gas or dissociative ionization of parent radicals" is applied as the accelerating voltage of the radical ionizing electron beam, reflects the density of radicals.
摘要翻译： 在质谱仪中，在用于产生用于电离自由基的电子束的加速电压的电路中另外提供直流电源放大器。 作为自由基电离电子束的加速电压的基准电压，施加“自由基离子化的电位”，并且测量质谱仪的输出信号作为背景信号强度。 然后，控制直流电源放大器交替地提供“自由基电离的潜力”和“母体气体离解电离的潜力或亲本自由基的离解电离的潜力”，作为激进的加速电压 电离电子束。 作为自由基电离电子束的加速电压，使用“电位略低于母体的离子化离子化电位或母体自由基的离解电离的电位”时的质谱仪的背景信号强度和输出信号之间的差异， 反映了自由基的密度。
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公开(公告)号：US5449914A
公开(公告)日：1995-09-12
申请号：US218343
申请日：1994-03-25
申请人： Harald Rose , Stephan Uhlemann , Eugen Weimer
发明人： Harald Rose , Stephan Uhlemann , Eugen Weimer
CPC分类号： H01J37/05 , H01J49/46 , H01J2237/055 , H01J2237/057 , H01J2237/26
摘要： The invention relates to an electron energy filter for electron microscopes as well as to an electron microscope equipped with such a filter. The filter comprises three sector magnets with the deflection field in the first sector magnet being homogeneous. The deflection field in each of the two other sector magnets is an inhomogeneous gradient field. To generate the gradient field, the pole pieces of the two other sector magnets have the form of segments of truncated double cones. The electron beam passes the first homogeneous sector magnet twice. Multipole elements are arranged in front of, behind and between the three sector magnets. The filter has a large dispersion also for high-energy electrons while at the same time providing a compact configuration. All second-order aberrations and the significant second-rank aberrations are corrected by means of the multiple elements.
摘要翻译： 本发明涉及一种用于电子显微镜的电子能量过滤器以及配有这种过滤器的电子显微镜。 滤波器包括三扇形磁体，其中第一扇形磁体中的偏转场是均匀的。 两个其他扇形磁体中的每一个中的偏转场是不均匀的梯度场。 为了产生梯度场，两个其他扇形磁体的极片具有截顶双锥段的形式。 电子束通过第一均匀扇形磁体两次。 多极元件布置在三个扇形磁体之前，后面和之间。 该滤波器对于高能电子也具有大的色散，同时提供紧凑的结构。 通过多个元素校正所有二阶像差和显着的二次像差。
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公开(公告)号：US5444243A
公开(公告)日：1995-08-22
申请号：US291048
申请日：1994-08-15
申请人： Teruo Kohhashi , Hideo Matsuyama
发明人： Teruo Kohhashi , Hideo Matsuyama
CPC分类号： H01J37/05 , H01J49/288 , H01J49/466 , H01J2237/1508 , H01J2237/24485
摘要： A Wien filter is used with secondary electrons that are emitted from a primary electron beam scanning a sample surface in a scanning electron microscope (SEM) used as an energy analyzer or a spin rotater with charged particle beams. The beam is focussed into an interior area of the filter that has magnetic and electric fields generated to cross one another. The beam intersects the crossed fields perpendicularly. The faces of either the magnetic pole pieces or the electrodes have a shape approximating the shape of a portion of a hyperbola, while the other of the faces are substantially planar. Auxiliary electrodes extend parallel to the beam's path of travel between the electrodes. The filter provides a wide area that enables stigmatic focussing of a wide diameter beam.
摘要翻译： Wien滤波器被用于从用作能量分析仪的扫描电子显微镜（SEM）中的一次电子束发射的二次电子或带有带电粒子束的旋转旋转器。 光束被聚焦到过滤器的内部区域中，其具有产生的彼此交叉的磁场和电场。 光束垂直与交叉的场相交。 磁极片或电极的表面具有近似于双曲线的一部分的形状的形状，而另一个面基本上是平面的。 辅助电极平行于电极之间的行进路径延伸。 该过滤器提供了一个广泛的区域，可以实现对直径较大的梁的盯梢。
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公开(公告)号：US5289010A
公开(公告)日：1994-02-22
申请号：US987122
申请日：1992-12-08
申请人： Juda L. Shohet
发明人： Juda L. Shohet
IPC分类号： H01J27/18 , H01J37/05 , H01J37/317
CPC分类号： H01J27/18 , H01J37/05 , H01J37/32412 , H01J2237/053 , H01J2237/31705
摘要： Plasma source ion implantation is carried out within an evacuated chamber having a target, such as a semiconductor wafer, supported on a target stage, with pulses of high voltage applied to the target periodically to implant ions from a plasma into the target. The ions in the plasma are purified after formation of the plasma by passing the plasma through an ion cyclotron resonance system composed of excitation electrodes and ion collector electrodes surrounding an ion purification region, with a magnet providing a unidirectional magnetic field through the ion purification region. A radio frequency time varying electric field from the excitation electrodes drives unwanted ions having charge-to-mass ratios greater than or less than that of the desired ion species to resonance with the electric field. During resonance, the undesired ions are driven outwardly in expanding spirals until reaching the ion collector plates, where the unwanted ions are removed. The purified plasma is passed to a plasma implantation region within the chamber from which the desired ions are implanted into the target as pulses of voltage are applied to the target. The ion purification may be carried out in a periodic manner between the repetitive pulses of voltage that are applied to the target.
摘要翻译： 等离子体源离子注入在具有负载在目标载物台上的目标物例如半导体晶片的真空室内进行，其中周期性地向目标施加高电压的脉冲，以将离子从等离子体注入到靶中。 等离子体中的离子通过使等离子体通过由激发电极和围绕离子净化区域的离子集电极组成的离子回旋共振系统，通过离子净化区域提供单向磁场的磁体而被纯化。 来自激发电极的射频时变电场驱动具有大于或小于所需离子种类的电荷质量比的不需要的离子，使其与电场共振。 在共振期间，不需要的离子在扩展螺旋中被向外驱动，直到到达不需要的离子去除的离子收集板。 纯化的等离子体被传递到腔室内的等离子体注入区域，当将脉冲的电压施加到靶材上时，将期望的离子注入到靶中。 离子纯化可以在施加到目标的电压的重复脉冲之间以周期性方式进行。
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