Integrated optical sensor with pinned photodiodes

    公开(公告)号:US11757054B2

    公开(公告)日:2023-09-12

    申请号:US17324619

    申请日:2021-05-19

    Inventor: Didier Dutartre

    CPC classification number: H01L31/028 G01S7/4865 H01L27/14649 H01L31/1037

    Abstract: An integrated optical sensor is formed by a pinned photodiode. A semiconductor substrate includes a first semiconductor region having a first type of conductivity located between a second semiconductor region having a second type of conductivity opposite to the first type one and a third semiconductor region having the second type of conductivity. The third semiconductor region is thicker, less doped and located deeper in the substrate than the second semiconductor region. The third semiconductor region includes both silicon and germanium. In one implementation, the germanium within the third semiconductor region has at least one concentration gradient. In another implementation, the germanium concentration within the third semiconductor region is substantially constant.

    METHOD OF MAKING A CAPACITIVE OPTICAL MODULATOR

    公开(公告)号:US20230280630A1

    公开(公告)日:2023-09-07

    申请号:US18317705

    申请日:2023-05-15

    CPC classification number: G02F1/2257 G02F1/025 G02F1/035 G02F2202/103

    Abstract: A semiconductor device can be formed by etching a cavity in a first silicon layer that overlies an insulating layer, epitaxially growing a germanium or silicon-germanium layer in the cavity, epitaxially growing a second silicon layer in the cavity, etching the second silicon layer and the germanium or silicon-germanium layer to the floor of the cavity to define a first strip in the second silicon layer and a second strip in the germanium or silicon-germanium layer, selectively etching a portion of the second strip to decrease the width of the second strip, filling cavity portions arranged on either side of the first and second strips with an insulator, depositing an upper insulating layer over the first and second strips, and bonding a layer of III-V material to the upper insulating layer.

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