Flexible high performance microbolometer detector material fabricated via controlled ion beam sputter deposition process
    71.
    发明授权
    Flexible high performance microbolometer detector material fabricated via controlled ion beam sputter deposition process 失效
    通过受控离子束溅射沉积工艺制造的灵活的高性能微辐射热计探测器材料

    公开(公告)号:US06322670B2

    公开(公告)日:2001-11-27

    申请号:US08770894

    申请日:1996-12-31

    IPC分类号: C01B3300

    CPC分类号: C23C14/083 C23C14/46 G01J5/20

    摘要: A microbolometer film material VOx having a value such that the thermal coefficient of resistance is between 0.005 and 0.05. The film material may be formed on a wafer. The VOx material properties can be changed or modified by controlling certain parameters in the ion beam sputter deposition environment. There is sufficient control of the oxidation process to permit non-stoichometric formation of VOx films. The process is a low temperature process (less than 100 degrees C.). Argon is used for sputtering a target of vanadium in an environment wherein the oxygen level is controlled to determine the x of VOx. The thickness of the film is controlled by the time of the deposition. Other layers may be deposited as needed to form pixels for a bolometer array.

    摘要翻译: 具有使得电阻热系数在0.005和0.05之间的值的微伏热镀膜材料VOx。 膜材料可以形成在晶片上。 可以通过控制离子束溅射沉积环境中的某些参数来改变或修改VOx材料性质。 有足够的氧化过程控制来允许VOx薄膜的非堆积形成。 该过程是低温过程(低于100摄氏度)。 氩气用于在其中控制氧水平以确定VO x的x的环境中溅射钒靶。 膜的厚度由沉积时间控制。 可根据需要沉积其它层以形成辐射热计阵列的像素。

    Low power infrared scene projector array and method of manufacture
    72.
    发明授权
    Low power infrared scene projector array and method of manufacture 失效
    低功率红外场景投影阵列及其制造方法

    公开(公告)号:US5600148A

    公开(公告)日:1997-02-04

    申请号:US367492

    申请日:1994-12-30

    CPC分类号: H01L27/16 G01J5/023

    摘要: An array for projecting thermal images and a method of making same. The array of the present invention combines a two-tier architecture created with special processing whereby each pixel member resides on an elevated platform directly over discrete pixel control electronics and electrically conducting traces couple a plurality of pixels so that they can be controlled to project thermal images at equal to or faster than video frame rates. Microlens assemblies coupled to each discrete pixel improves the thermal efficiency of the array for certain applications. In the method of fabrication, a semiconductor microbridge-type structure obtains with the use of sacrificial layers under deposited pixel members in a compact array so that the pixel electronics reside beneath their associated pixel and the array electronics inhabit the same chip as the array thereby improving fill factor and time constant of the resulting array.

    摘要翻译: 用于投影热图像的阵列及其制造方法。 本发明的阵列组合了通过特殊处理创建的两层结构,其中每个像素构件驻留在升高的平台上,直接位于离散像素控制电子器件上,导电迹线耦合多个像素,使得它们可被控制以投射热图像 等于或快于视频帧速率。 耦合到每个离散像素的微透镜组件改善了阵列对某些应用的热效率。 在制造方法中,半导体微桥型结构以紧凑的阵列在沉积的像素构件下使用牺牲层获得,使得像素电子器件驻留在其相关联的像素之下,并且阵列电子器件与阵列居住在相同的芯片上,从而改善 所得数组的填充因子和时间常数。

    Optical monitor for direct thickness control of transparent films
    73.
    发明授权
    Optical monitor for direct thickness control of transparent films 失效
    用于透明膜直接厚度控制的光学监视器

    公开(公告)号:US4582431A

    公开(公告)日:1986-04-15

    申请号:US540245

    申请日:1983-10-11

    申请人: Barrett E. Cole

    发明人: Barrett E. Cole

    IPC分类号: C23C14/54 G01B11/06 G01B11/02

    CPC分类号: G01B11/0683 C23C14/547

    摘要: Precise thickness control for high performance optical coatings is provided in an optical coating system utilizing an optical monitor. The optical monitor utilizes a light source and detecting arrangement that measures a sample optical element through the expedient of a light path altering structure that is not coincident with the axis of rotation of a deposition carrousel structure that supports optical elements being coated. The light source and detector arrangements can be mounted conveniently outside of the vacuum chamber of the optical coating system.

    摘要翻译: 在使用光学显示器的光学涂层系统中提供了用于高性能光学涂层的精确厚度控制。 光学监视器利用光源和检测装置,其通过与支撑被涂覆的光学元件的沉积转盘结构的旋转轴线不一致的光路改变结构来测量样品光学元件。 光源和检测器装置可以方便地安装在光学涂层系统的真空室外面。

    High performance detection pixel
    76.
    发明授权
    High performance detection pixel 有权
    高性能检测像素

    公开(公告)号:US08314769B2

    公开(公告)日:2012-11-20

    申请号:US12769097

    申请日:2010-04-28

    IPC分类号: G09G3/34 G01J5/00

    摘要: A pixel having a reflector situated on a substrate. A temperature sensitive resistor may be situated over at least a portion of the reflector. An insulator may be situated on the resistor. The resistor and insulator may effectively be very thin films. A flat metal mesh or grid may be situated on the insulator. The grid, insulator and resistor may be supported by two or more posts at approximately one-fourth of a wavelength from the reflector. The wavelength may be that of the radiation to be sensed by the pixel. The thermal mass of the combination of the temperature sensitive resistor, insulator and grid may be less than several times the thermal mass of the grid. Since the grid may be so thin for low noise performance and high sensitivity, the grid can have a flatness assured to a desired extent with stiffeners attached to portions of it.

    摘要翻译: 具有位于基板上的反射器的像素。 温度敏感电阻器可以位于反射器的至少一部分上方。 绝缘体可以位于电阻器上。 电阻和绝缘体可能有效地是非常薄的薄膜。 平面金属网或栅格可以位于绝缘体上。 栅格,绝缘体和电阻器可以由距离反射器大约四分之一波长的两个或更多个柱支撑。 波长可以是由像素感测的辐射的波长。 温度敏感电阻,绝缘体和电网组合的热质量可能小于电网热质量的几倍。 由于栅格可能如此薄以使低噪声性能和高灵敏度,因此栅格可以具有平坦度,并将其保持在希望的程度上,并具有附着于其部分的加强件。

    Carbon nanotube sensor
    77.
    发明授权
    Carbon nanotube sensor 有权
    碳纳米管传感器

    公开(公告)号:US08294008B2

    公开(公告)日:2012-10-23

    申请号:US11435341

    申请日:2006-05-16

    IPC分类号: G01N27/403

    摘要: Carbon nanotubes are formed on projections on a substrate. A metal, such as nickel is deposited on the substrate with optional platforms, and heated to form the projections. Carbon nanotubes are formed from the projections by heating in an ethylene, methane or CO atmosphere. A heat sensor is also formed proximate the carbon nanotubes. When exposed to IR radiation, the heat sensor detects changes in temperature representative of the IR radiation. In a gas sensor, a thermally isolated area, such as a pixel is formed on a substrate with an integrated heater. A pair of conductors each have a portion adjacent a portion of the other conductor with projections formed on the adjacent portions of the conductors. Multiple carbon nanotubes are formed between the conductors from one projection to another. IV characteristics of the nanotubes are measured between the conductors in the presence of a gas to be detected.

    摘要翻译: 在基板上的突起上形成碳纳米管。 诸如镍的金属被沉积在具有可选平台的基板上,并被加热以形成突起。 通过在乙烯,甲烷或CO气氛中加热从突起形成碳纳米管。 在碳纳米管附近也形成热传感器。 当暴露于IR辐射时,热传感器检测表示IR辐射的温度变化。 在气体传感器中,在具有集成加热器的基板上形成诸如像素的热隔离区域。 一对导体各自具有与另一个导体的一部分相邻的部分,其中突起形成在导体的相邻部分上。 在一个投影到另一个投影的导体之间形成多个碳纳米管。 在存在待检测气体的情况下,在导体之间测量纳米管的IV特性。

    Mesotube burn-in manifold
    78.
    发明授权
    Mesotube burn-in manifold 有权
    中间管燃烧式歧管

    公开(公告)号:US07918706B2

    公开(公告)日:2011-04-05

    申请号:US11807561

    申请日:2007-05-29

    申请人: Barrett E. Cole

    发明人: Barrett E. Cole

    IPC分类号: H01J9/38

    摘要: A two chamber system with fill gas in one chamber and vacuum in the other provides a means of burning in one or more vacuum tubes while avoiding contamination from environmental gases. Vacuum tubes are often burned in after being sealed. Some processes burn-in the tubes before sealing them. The burn in process can take days and provide ample opportunity for environmental gases to contaminate the vacuum tube. The vacuum tube's fill tube passes through the vacuum chamber and into the fill gas chamber. Environmental gases leaking past the fill tube are evacuated by the vacuum. Similarly, fill gas leaking past the fill tube is also evacuated to vacuum. As such, the environmental gases are drawn away before contaminating the vacuum tube.

    摘要翻译: 具有一个室中的填充气体和另一个室中的真空的两室系统提供了在一个或多个真空管中燃烧的装置,同时避免环境气体的污染。 真空管经常在密封后燃烧。 一些过程在密封它们之前烧坏管。 燃烧过程可能需要几天时间,为环境气体提供充足的机会污染真空管。 真空管的填充管通过真空室并进入填充气室。 通过填充管泄漏的环境气体被真空排空。 类似地,通过填充管泄漏的填充气体也被抽真空。 因此,在污染真空管之前,环境气体被抽走。

    Multiple beam wide band CRDS cavity sensor and detector
    79.
    发明授权
    Multiple beam wide band CRDS cavity sensor and detector 有权
    多波束宽带CRDS腔体传感器和探测器

    公开(公告)号:US07884938B2

    公开(公告)日:2011-02-08

    申请号:US12361765

    申请日:2009-01-29

    申请人: Barrett E. Cole

    发明人: Barrett E. Cole

    IPC分类号: G01N21/00

    摘要: A common multi-gas ring down detector incorporates a cavity that has a piezoelectric mirror and at least two displaced mirrors to define two different transit paths in the cavity. The two paths intersect at the piezoelectric mirror at different angles. Two different laser beams having first and second different wavelengths, can be coupled to the cavity, at different times, by driving the piezoelectric mirror axially. Beam outputs can be evaluated to establish the presence of selected gases in the cavity.

    摘要翻译: 常见的多气体环形降低检测器包括具有压电反射镜和至少两个位移反射镜以在腔体中限定两个不同传输路径的空腔。 两个路径在压电反射镜处以不同的角度相交。 具有第一和第二不同波长的两种不同的激光束可以通过轴向驱动压电反射镜而在不同的时间耦合到空腔。 可以评估光束输出以确定腔中选定气体的存在。

    METAL-TO-METAL SEAL UTILIZING A FLANGED PINCH-OFF TUBE AND RELATED APPARATUS AND METHOD
    80.
    发明申请
    METAL-TO-METAL SEAL UTILIZING A FLANGED PINCH-OFF TUBE AND RELATED APPARATUS AND METHOD 审中-公开
    金属对金属密封件,利用法兰封闭管及相关装置和方法

    公开(公告)号:US20100127459A1

    公开(公告)日:2010-05-27

    申请号:US12323110

    申请日:2008-11-25

    IPC分类号: F16J15/40

    摘要: An apparatus includes a manifold having a passageway through the manifold and a seal fitting extension. The seal fitting extension includes a shoulder portion having a metal seal ring. The apparatus also includes a pinch-off tube having a flange in sealed contact with the metal seal ring of the shoulder portion of the manifold. The apparatus could further include a backing element in contact with the flange of the pinch-off tube, where the backing element forces the flange into contact with the metal seal ring. In addition, the apparatus could include a sealing nut in contact with the backing element, where the sealing nut causes the backing element to force the flange into contact with the metal seal ring.

    摘要翻译: 一种装置包括具有通过歧管的通道和密封配件延伸部的歧管。 密封配件延伸部包括具有金属密封环的肩部。 该设备还包括具有与歧管的肩部的金属密封环密封接触的凸缘的夹紧管。 该装置还可以包括与夹紧管的凸缘接触的背衬元件,其中背衬元件迫使凸缘与金属密封环接触。 此外,该装置可以包括与背衬元件接触的密封螺母,其中密封螺母使背衬元件迫使凸缘与金属密封环接触。