摘要:
An apparatus for baking a semiconductor wafer having a resist pattern thereon includes a baking oven in which the semiconductor wafer is placed and heated, and a first hot plate which is provided in the baking oven to heat an entire bottom surface of the semiconductor wafer. The apparatus also includes a gas supply unit having a gas introducing path, through which the purge gas is introduced into the baking oven, and a gas exhaust path, through which the purge gas is exhausted out of the baking oven. A gas temperature controller controls a temperature of the purge gas in order that the purge gas flowing around a peripheral edge or outer portion of the wafer has a higher temperature than that around the center or inner portion of the wafer.
摘要:
A spindle apparatus of a machine tool comprises a main spindle rotatably supported in a housing via bearings. A helium circulation system is provided for introducing helium, lower in density and fluid pressure than air, through a helium supply port into a gap on the outer periphery of the main spindle within the housing, and for discharging helium to the outside through a helium discharge port. The main spindle is rotated in an atmosphere of the helium. The spindle apparatus is simple in structure, but can minimize the power loss of the main spindle and reduce the motor power, and also gives a cooling effect.
摘要:
A camera having a flexible printed board on which a semiconductor element is flip-chip-bonded, a light-shieldable member such as a housing, a lens barrel, or an outer member. An element formation surface of a semiconductor element flip-chip-bonded on the flexible printed board is arranged to oppose the light-shieldable member.
摘要:
A slip control system for a torque converter with a lockup clutch comprises a controller from which a slip control signal is outputted to a slip control actuator of the torque converter. The controller is arranged to calculate a reference value of a lockup clutch engagement pressure on the basis of a characteristic of the torque converter, to calculate a difference canceling lockup clutch engagement pressure for adjusting an actual slip rotation speed to the target slip rotation speed, to obtain the sum of the lockup clutch engagement pressure reference value and the difference canceling lockup clutch engagement pressure as a lockup clutch engagement pressure command value, and to output the control signal indicative of the lockup clutch engagement pressure command value to the actuator.
摘要:
A fluorosilicon network polymer prepared by the reaction of a tetraholosilane of the formula 1: SiX4 with an organohologen compound of the formula 2: RZ , an insulating coating prepared therefrom, semiconductor devices coated therewith, and processes for producing the same. In said formulas, R represents at least monofluorinated alkyl or aryl; and X and Z represent each independently boromine, iodine or chlorine.
摘要:
The present invention relates to battery parts comprising molded pieces made of polyolefin resin, whose surface to be bonded are treated so as to have at least one functional group selected from the group consisting of hydroxyl group, carboxyl group, carbonyl group, fluorosulfuryl group, sulfonic group and its metallic bases, said molded pieces being bonded together with reactive hot-melt adhesive.
摘要:
A control system for controlling a lock-up clutch of a torque converter employed in an automatic transmission of a vehicle, the lock-up clutch being controllable by a pressure differential between apply and release pressures comprises a detector for detecting a demand of change (decrease/increase) in the pressure differential, a pressure-differential setting circuit for setting a target pressure differential in response to the demand of change in the pressure differential, and a pressure-differential filter having a desired dynamic characteristic and being responsive to the target pressure differential for outputting a filtered pressure-differential command value via a filtering process based on the desired dynamic characteristic. A pressure-differential regulation circuit is connected to the pressure-differential filter for receiving the filtered pressure-differential command value as an input information data to generate an output indicative of a duty ratio to be output to a lock-up solenoid valve and for regulating the pressure differential in accordance with the duty ratio.
摘要:
A soil remedying process for the soil contaminated with a volatile pollutant, which comprises the steps of forming in a probe a remediation site containing a microorganism which can degrade the volatile pollutant, introducing the volatile pollutant into the remediation site in the probe, and degrading the volatile pollutant by the microorganism.
摘要:
A process for continuously preparing a wet powder of PTFE, comprising the step of continuously slurrying a PTFE aqueous dispersion with a high shear machine, and the step of continuously granulating the slurry by using vertical agitator. The process can be carried out for a long time without trouble, and can continuously provide a dry powder having good powder properties. The powder properties can be controlled by regulating operation conditions.