P-SI TFT AND METHOD FOR FABRICATING THE SAME, ARRAY SUBSTRATE AND METHOD FOR FABRICATING THE SAME, AND DISPLAY DEVICE
    80.
    发明申请
    P-SI TFT AND METHOD FOR FABRICATING THE SAME, ARRAY SUBSTRATE AND METHOD FOR FABRICATING THE SAME, AND DISPLAY DEVICE 有权
    P-SI TFT及其制造方法,阵列基板及其制造方法及显示装置

    公开(公告)号:US20170018652A1

    公开(公告)日:2017-01-19

    申请号:US15122066

    申请日:2016-02-22

    Abstract: A method for fabricating a Polysilicon Thin-Film Transistor is provided. The method includes forming a polysilicon active layer, forming a first gate insulation layer and a first gate electrode sequentially on the active layer, conducting a first ion implantation process on the active layer by using the first gate electrode as a mask to form two doped regions at ends of the active layer, forming a second gate insulation layer and a second gate electrode sequentially on the first gate insulation layer and the first gate electrode, and conducting a second ion implantation process on the active layer by using the second gate electrode as another mask to form two source/drain implantation regions at two outer sides of the doped regions of the active layer. Accordingly, impurity concentration of the two doped regions is smaller than that of the two source/drain implantation regions.

    Abstract translation: 提供了制造多晶硅薄膜晶体管的方法。 该方法包括形成多晶硅有源层,顺序地在有源层上形成第一栅极绝缘层和第一栅电极,通过使用第一栅电极作为掩模在有源层上进行第一离子注入工艺以形成两个掺杂区域 在有源层的端部,顺序地在第一栅极绝缘层和第一栅电极上形成第二栅极绝缘层和第二栅电极,并且通过使用第二栅电极作为另一栅电极在有源层上进行第二离子注入工艺 掩模以在有源层的掺杂区域的两个外侧形成两个源极/漏极注入区域。 因此,两个掺杂区域的杂质浓度小于两个源极/漏极注入区域的杂质浓度。

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