公开(公告)号：US20080237798A1

公开(公告)日：2008-10-02

申请号：US11867000

申请日：2007-10-04

申请人： Ming-Daou Lee ,  Chia-Hua Ho ,  Erh-Kun Lai ,  Kuang-Yeu Hsieh

发明人： Ming-Daou Lee ,  Chia-Hua Ho ,  Erh-Kun Lai ,  Kuang-Yeu Hsieh

IPC分类号： H01L27/06 ,  H01L21/02

CPC分类号： H01L27/101 ,  H01L28/20 ,  H01L45/04 ,  H01L45/1233 ,  H01L45/146 ,  H01L45/147 ,  H01L45/1608 ,  H01L45/1675

摘要： A memory cell and a process for manufacturing the same are provided. In the process, a first electrode layer is formed on a conductive layer over a substrate, and then a transition metal layer is formed on the first electrode layer. After that, the transition metal layer is subjected to a plasma oxidation step to form a transition metal oxide layer as a precursor of a data storage layer, and a second electrode layer is formed on the transition metal oxide layer. A memory cell is formed after the second electrode layer, the transition metal oxide layer and the first electrode layer are patterned into a second electrode, a data storage layer and a first electrode, respectively.

摘要翻译： 提供了一种存储单元及其制造方法。 在该工艺中，在衬底上的导电层上形成第一电极层，然后在第一电极层上形成过渡金属层。 之后，对过渡金属层进行等离子体氧化工序，形成作为数据存储层的前体的过渡金属氧化物层，在过渡金属氧化物层上形成第二电极层。 在第二电极层，过渡金属氧化物层和第一电极层分别形成第二电极，数据存储层和第一电极之后形成存储单元。

公开(公告)号：US20080099826A1

公开(公告)日：2008-05-01

申请号：US11588830

申请日：2006-10-27

申请人： Erh-Kun Lai ,  Yen-Hao Shih ,  Tzu-Hsuan Hsu ,  Shih-Chih Lee ,  Jung-Yu Hsieh ,  Kuang-Yeu Hsieh

发明人： Erh-Kun Lai ,  Yen-Hao Shih ,  Tzu-Hsuan Hsu ,  Shih-Chih Lee ,  Jung-Yu Hsieh ,  Kuang-Yeu Hsieh

IPC分类号： H01L29/792

CPC分类号： H01L21/28282 ,  G11C16/0466 ,  H01L29/513 ,  H01L29/66833 ,  H01L29/792

摘要： Memory cells including a semiconductor layer having at least two source/drain regions disposed below a surface of the semiconductor layer and separated by a channel region; a lower insulating layer disposed above the channel region; a charge storage layer disposed above the lower insulating layer; an upper insulating multi-layer structure disposed above the charge storage layer, wherein the upper insulating multi-layer structure comprises a polysilicon material layer interposed between a first dielectric layer and a second dielectric layer; and a gate disposed above the upper insulating multi-layer structure are described along with arrays thereof and methods of operation.

摘要翻译： 存储单元包括具有至少两个源极/漏极区域的半导体层，所述源极/漏极区域设置在半导体层的表面下方并被沟道区域分隔开; 设置在通道区域上方的下绝缘层; 电荷存储层，其设置在所述下绝缘层的上方; 上部绝缘多层结构，其设置在所述电荷存储层上方，其中所述上部绝缘多层结构包括介于第一介电层和第二介电层之间的多晶硅材料层; 并且设置在上绝缘多层结构上方的栅极及其阵列及其操作方法。

公开(公告)号：US20060226467A1

公开(公告)日：2006-10-12

申请号：US11100518

申请日：2005-04-07

申请人： Hang-Ting Lue ,  Min-Ta Wu ,  Erh-Kun Lai ,  Yen-Hao Shih ,  Chia-Hua Ho ,  Kuang-Yeu Hsieh

发明人： Hang-Ting Lue ,  Min-Ta Wu ,  Erh-Kun Lai ,  Yen-Hao Shih ,  Chia-Hua Ho ,  Kuang-Yeu Hsieh

IPC分类号： H01L29/788

CPC分类号： H01L27/11568 ,  G11C16/0475 ,  H01L27/115 ,  H01L29/40117 ,  H01L29/4232 ,  H01L29/792

摘要： A semiconductor device includes a semiconductor substrate. The semiconductor substrate includes a first inversion region, a second inversion region, and a channel region between the first inversion region and the second inversion region. The semiconductor device further includes a control gate over the channel region and at least one sub-gate over the first and second inversion regions, wherein the control gate does not extend over the at least one sub-gate.

摘要翻译： 半导体器件包括半导体衬底。 半导体衬底包括第一反转区域，第二反转区域和第一反转区域和第二反转区域之间的沟道区域。 所述半导体器件还包括在所述沟道区上的控制栅极以及所述第一和第二反转区域上的至少一个子栅极，其中所述控制栅极不在所述至少一个子栅极上延伸。

公开(公告)号：US08927956B2

公开(公告)日：2015-01-06

申请号：US12403186

申请日：2009-03-12

申请人： Ming-Daou Lee ,  Chia-Hua Ho ,  Erh-Kun Lai ,  Kuang-Yeu Hsieh

发明人： Ming-Daou Lee ,  Chia-Hua Ho ,  Erh-Kun Lai ,  Kuang-Yeu Hsieh

IPC分类号： H01L45/00 ,  G11C11/00 ,  G11C13/00 ,  G11C11/54 ,  G11C11/14 ,  G11C11/56

CPC分类号： G11C11/54 ,  G11C11/14 ,  G11C11/5685 ,  G11C13/0007 ,  G11C13/0069 ,  G11C2013/009 ,  G11C2213/32 ,  H01L45/04 ,  H01L45/1233 ,  H01L45/146 ,  H01L45/1633 ,  Y10S438/972

摘要： A resistance type memory device is provided. The resistance type memory device includes a first and a second conductors and a metal oxide layer. The metal oxide layer is disposed between the first and the second conductors, and the resistance type memory device is defined in a first resistivity. The resistance type memory device is defined in a second resistivity after a first pulse voltage is applied to the metal oxide layer. The resistance type memory device is defined in a third resistivity after a second pulse voltage is applied to the metal oxide layer. The second resistivity is greater than the first resistivity, and the first resistivity is greater than the third resistivity.

摘要翻译： 提供电阻型存储器件。 电阻型存储器件包括第一和第二导体和金属氧化物层。 金属氧化物层设置在第一和第二导体之间，电阻型存储装置被定义为第一电阻率。 在向金属氧化物层施加第一脉冲电压之后，将电阻型存储器件定义为第二电阻率。 在向金属氧化物层施加第二脉冲电压之后，将电阻型存储器件定义为第三电阻率。 第二电阻率大于第一电阻率，第一电阻率大于第三电阻率。

公开(公告)号：US08704205B2

公开(公告)日：2014-04-22

申请号：US13594353

申请日：2012-08-24

申请人： Shih-Hung Chen ,  Hang-Ting Lue ,  Kuang-Yeu Hsieh ,  Erh-Kun Lai ,  Yen-Hao Shih

发明人： Shih-Hung Chen ,  Hang-Ting Lue ,  Kuang-Yeu Hsieh ,  Erh-Kun Lai ,  Yen-Hao Shih

IPC分类号： H01L47/00

CPC分类号： H01L27/11582 ,  H01L27/11548 ,  H01L27/11556 ,  H01L27/11575

摘要： A semiconductor structure with improved capacitance of bit lines includes a substrate, a stacked memory structure, a plurality of bit lines, a first stair contact structure, a first group of transistor structures and a first conductive line. The first stair contact structure is formed on the substrate and includes conductive planes and insulating planes stacked alternately. The conductive planes are separated from each other by the insulating planes for connecting the bit lines to the stacked memory structure by stairs. The first group of transistor structures is formed in a first bulk area where the bit lines pass through and then connect to the conductive planes. The first group of transistor structures has a first gate around the first bulk area. The first conductive line is connected to the first gate to control the voltage applied to the first gate.

摘要翻译： 具有改善的位线电容的半导体结构包括衬底，堆叠存储器结构，多个位线，第一阶梯接触结构，第一组晶体管结构和第一导电线。 第一阶梯接触结构形成在基板上，并且包括交替堆叠的导电平面和绝缘面。 导电平面通过用于通过楼梯将位线连接到堆叠的存储器结构的绝缘平面彼此分离。 第一组晶体管结构形成在第一体积区域中，其中位线通过，然后连接到导电平面。 第一组晶体管结构在第一体积区域周围具有第一栅极。 第一导线连接到第一栅极以控制施加到第一栅极的电压。

公开(公告)号：US08488362B2

公开(公告)日：2013-07-16

申请号：US12431983

申请日：2009-04-29

申请人： Ming-Daou Lee ,  Erh-Kun Lai ,  Kuang-Yeu Hsieh ,  Wei-Chih Chien ,  Chien-Hung Yeh

发明人： Ming-Daou Lee ,  Erh-Kun Lai ,  Kuang-Yeu Hsieh ,  Wei-Chih Chien ,  Chien-Hung Yeh

IPC分类号： G11C11/00

CPC分类号： H01L45/1608 ,  G11C13/0007 ,  G11C13/0069 ,  G11C2013/0083 ,  G11C2213/32 ,  G11C2213/34 ,  G11C2213/72 ,  H01L27/101 ,  H01L27/1021 ,  H01L27/112

摘要： Memory devices are described along with methods for manufacturing and methods for operating. A memory device as described herein includes a plurality of memory cells located between word lines and bit lines. Memory cells in the plurality of memory cells comprise a diode and a metal-oxide memory element programmable to a plurality of resistance states including a first and a second resistance state, the diode of the memory element arranged in electrical series along a current path between a corresponding word line and a corresponding bit line. The device further includes bias circuitry to apply bias arrangements across the series arrangement of the diode and the memory element of a selected memory cell in the plurality of memory cells.

摘要翻译： 描述存储器件以及用于制造的方法和操作方法。 如本文所述的存储器件包括位于字线和位线之间的多个存储器单元。 多个存储单元中的存储单元包括可编程为包括第一和第二电阻状态的多个电阻状态的二极管和金属氧化物存储元件，存储元件的二极管沿着电流串联布置在 对应的字线和相应的位线。 该装置还包括偏置电路，以跨越二极管的串联装置和多个存储单元中所选存储单元的存储元件施加偏置装置。

公开(公告)号：US08022489B2

公开(公告)日：2011-09-20

申请号：US11134155

申请日：2005-05-20

申请人： Hang-Ting Lue ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

发明人： Hang-Ting Lue ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

IPC分类号： H01L29/788 ,  H01L27/108 ,  H01L27/11 ,  H01L27/112

CPC分类号： H01L27/115 ,  G11C16/0408 ,  H01L21/28273 ,  H01L27/11521 ,  H01L29/42324 ,  H01L29/515

摘要： An air tunnel floating gate memory cell includes an air tunnel defined over a substrate. A first polysilicon layer (floating gate) is defined over the air tunnel. An oxide layer is disposed over the first polysilicon layer such that the oxide layer caps the first polysilicon layer and defines the sidewalls of the air tunnel. A second polysilicon layer, functioning as a word line, is defined over the oxide layer. A method for making an air tunnel floating gate memory cell is also disclosed. A sacrificial layer is formed over a substrate. A first polysilicon layer is formed over the sacrificial layer. An oxide layer is deposited over the first polysilicon layer such that the oxide layer caps the first polysilicon layer and defines the sidewalls of the sacrificial layer. A hot phosphoric acid (H3PO4) dip is used to etch away the sacrificial layer to form an air tunnel.

摘要翻译： 空气隧道浮动栅极存储单元包括限定在衬底上的空气通道。 在空气隧道上定义第一多晶硅层（浮栅）。 氧化物层设置在第一多晶硅层上，使得氧化物层覆盖第一多晶硅层并限定空气通道的侧壁。 用作字线的第二多晶硅层被定义在氧化物层上。 还公开了一种制造空气通道浮动栅极存储单元的方法。 在衬底上形成牺牲层。 在牺牲层上形成第一多晶硅层。 在第一多晶硅层上沉积氧化物层，使得氧化物层覆盖第一多晶硅层并限定牺牲层的侧壁。 使用热磷酸（H 3 PO 4）浸渍来蚀刻掉牺牲层以形成空气通道。

公开(公告)号：US20110189819A1

公开(公告)日：2011-08-04

申请号：US13083450

申请日：2011-04-08

申请人： Wei-Chih Chien ,  Kuo-Pin Chang ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

发明人： Wei-Chih Chien ,  Kuo-Pin Chang ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

IPC分类号： H01L21/8239

CPC分类号： H01L45/04 ,  H01L45/085 ,  H01L45/12 ,  H01L45/1233 ,  H01L45/144 ,  H01L45/146 ,  H01L45/147 ,  H01L45/148 ,  H01L45/1625 ,  H01L45/1633 ,  Y10S438/90

摘要： A memory device comprises first and second electrodes with a memory element and a buffer layer located between and electrically coupled to them. The memory element comprises one or more metal oxygen compounds. The buffer layer comprises at least one of an oxide and a nitride. Another memory device comprises first and second electrodes with a memory element and a buffer layer, having a thickness of less than 50 Å, located between and electrically coupled to them. The memory comprises one or more metal oxygen compounds. An example of a method of fabricating a memory device includes forming first and second electrodes. A memory, located between and electrically coupled to the first and the second electrodes, is formed; the memory comprises one or more metal oxygen compounds and the buffer layer comprises at least one of an oxide and a nitride.

摘要翻译： 存储器件包括具有存储元件的第一和第二电极以及位于它们之间并与之电耦合的缓冲层。 记忆元件包括一种或多种金属氧化合物。 缓冲层包括氧化物和氮化物中的至少一种。 另一个存储器件包括具有存储元件和缓冲层的第一和第二电极，其厚度小于50，位于它们之间并与之电耦合。 记忆体包括一种或多种金属氧化合物。 制造存储器件的方法的一个例子包括形成第一和第二电极。 形成位于第一和第二电极之间并电耦合到第一和第二电极的存储器; 存储器包括一种或多种金属氧化合物，并且缓冲层包括氧化物和氮化物中的至少一种。

公开(公告)号：US07943920B2

公开(公告)日：2011-05-17

申请号：US12836304

申请日：2010-07-14

申请人： Wei-Chih Chien ,  Kuo-Pin Chang ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

发明人： Wei-Chih Chien ,  Kuo-Pin Chang ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

IPC分类号： H01L29/04

CPC分类号： H01L45/04 ,  H01L45/085 ,  H01L45/12 ,  H01L45/1233 ,  H01L45/144 ,  H01L45/146 ,  H01L45/147 ,  H01L45/148 ,  H01L45/1625 ,  H01L45/1633 ,  Y10S438/90

摘要： A memory device comprises first and second electrodes with a memory element and a buffer layer located between and electrically coupled to them. The memory element comprises one or more metal oxygen compounds. The buffer layer comprises at least one of an oxide and a nitride. Another memory device comprises first and second electrodes with a memory element and a buffer layer, having a thickness of less than 50 Å, located between and electrically coupled to them. The memory comprises one or more metal oxygen compounds. An example of a method of fabricating a memory device includes forming first and second electrodes. A memory, located between and electrically coupled to the first and the second electrodes, is formed; the memory comprises one or more metal oxygen compounds and the buffer layer comprises at least one of an oxide and a nitride.

摘要翻译： 存储器件包括具有存储元件的第一和第二电极以及位于它们之间并与之电耦合的缓冲层。 记忆元件包括一种或多种金属氧化合物。 缓冲层包括氧化物和氮化物中的至少一种。 另一个存储器件包括具有存储元件和缓冲层的第一和第二电极，其厚度小于50，位于它们之间并与之电耦合。 记忆体包括一种或多种金属氧化合物。 制造存储器件的方法的一个例子包括形成第一和第二电极。 形成位于第一和第二电极之间并电耦合到第一和第二电极的存储器; 存储器包括一种或多种金属氧化合物，并且缓冲层包括氧化物和氮化物中的至少一种。

公开(公告)号：US07777215B2

公开(公告)日：2010-08-17

申请号：US12176183

申请日：2008-07-18

申请人： Wei-Chih Chien ,  Kuo-Pin Chang ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

发明人： Wei-Chih Chien ,  Kuo-Pin Chang ,  Erh-Kun Lai ,  Kuang Yeu Hsieh

IPC分类号： H01L47/00

CPC分类号： H01L45/04 ,  H01L45/085 ,  H01L45/12 ,  H01L45/1233 ,  H01L45/144 ,  H01L45/146 ,  H01L45/147 ,  H01L45/148 ,  H01L45/1625 ,  H01L45/1633 ,  Y10S438/90

摘要： A memory device comprises first and second electrodes with a memory element and a buffer layer located between and electrically coupled to them. The memory element comprises one or more metal oxygen compounds. The buffer layer comprises at least one of an oxide and a nitride. Another memory device comprises first and second electrodes with a memory element and a buffer layer, having a thickness of less than 50 Å, located between and electrically coupled to them. The memory comprises one or more metal oxygen compounds. An example of a method of fabricating a memory device includes forming first and second electrodes. A memory, located between and electrically coupled to the first and the second electrodes, is formed; the memory comprises one or more metal oxygen compounds and the buffer layer comprises at least one of an oxide and a nitride.

摘要翻译： 存储器件包括具有存储元件的第一和第二电极以及位于它们之间并与之电耦合的缓冲层。 记忆元件包括一种或多种金属氧化合物。 缓冲层包括氧化物和氮化物中的至少一种。 另一个存储器件包括具有存储元件和缓冲层的第一和第二电极，其厚度小于50，位于它们之间并与之电耦合。 记忆体包括一种或多种金属氧化合物。 制造存储器件的方法的一个例子包括形成第一和第二电极。 形成位于第一和第二电极之间并电耦合到第一和第二电极的存储器; 存储器包括一种或多种金属氧化合物，并且缓冲层包括氧化物和氮化物中的至少一种。