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    Air bearing for MEMS based motor
    72.
    发明授权
    Air bearing for MEMS based motor 失效
    基于MEMS的电机的空气轴承

    公开(公告)号：US07088019B2

    公开(公告)日：2006-08-08

    申请号：US10730472

    申请日：2003-12-08

    Applicant: Akio Takada ,  Ching Biing Yeo ,  Cheow Tong Cheng ,  Shun Kayama

    Inventor： Akio Takada ,  Ching Biing Yeo ,  Cheow Tong Cheng ,  Shun Kayama

    IPC: H02K7/08

    CPC classification number: H02K21/24 ,  B81B5/00 ,  B81B2201/0242 ,  B81B2201/038 ,  F16C17/045 ,  F16C17/10 ,  F16C33/107 ,  H02K7/088

    Abstract: A MEMS (micro-electromechanical system) device having a rotor 44, a stator 43 and a shaft 27 connected to the stator 43 and around which the rotor 44 rotates. Grooves 47 are formed in a portion of the rotor 44, such that when the rotor 44 rotates an air bearing is formed for supporting the rotor 44 and maintaining its distance from the shaft 27 and stator 43. The rotor 44 is formed from joining two substrates 13, 23. One of the substrates 13 includes a surface having openings 7 including frustoconical walls, and one of the substrates 23 includes a surface having openings 15 including walls perpendicular to the surface of the substrate. The openings in the two substrates are in register with each other so that pairs of the openings form chambers 24. Each chamber 24 is provided with a shaft 27, which is positioned with a wide section of the shaft trapped in the chamber 24. The wide section of the shaft has a frustoconical surface facing the frustoconical walls of the chamber 24.

    Abstract translation: 具有转子44，定子43和连接到定子43并且转子44旋转的轴27的MEMS（微机电系统）装置。 凹槽47形成在转子44的一部分中，使得当转子44旋转时，形成用于支撑转子44并保持其与轴27和定子43的距离的空气轴承。 转子44通过连接两个基板13,23而形成。 基板13中的一个包括具有包括截头圆锥形壁的开口7的表面，并且其中一个基板23包括具有开口15的表面，该表面具有垂直于基板表面的壁。 两个基板中的开口彼此对准，使得成对的开口形成室24。 每个室24设置有轴27，轴27被定位成具有被捕获在室24中的轴的宽部分。 轴的宽部分具有面向腔室24的截头圆锥形壁的截头圆锥体表面。

    Electrostatic bimorph actuator
    73.
    发明授权
    Electrostatic bimorph actuator 有权

    公开(公告)号：US07053519B2

    公开(公告)日：2006-05-30

    申请号：US10112369

    申请日：2002-03-29

    Applicant: Michael J. Sinclair

    Inventor： Michael J. Sinclair

    IPC: H02N1/00

    CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

    Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

    Microelectromechanical system based sensors, sensor arrays, sensing systems, sensing methods and methods of fabrication
    75.
    发明授权
    Microelectromechanical system based sensors, sensor arrays, sensing systems, sensing methods and methods of fabrication 失效
    基于微机电系统的传感器，传感器阵列，感测系统，感测方法和制造方法

    公开(公告)号：US06844214B1

    公开(公告)日：2005-01-18

    申请号：US10604850

    申请日：2003-08-21

    Applicant: Ping Mei ,  Decai Sun ,  Robert A. Street

    Inventor： Ping Mei ,  Decai Sun ,  Robert A. Street

    IPC: B81B3/00 ,  H01L21/00 ,  H01L23/48 ,  H01R11/22

    CPC classification number: B81B3/0021 ,  B81B2201/0292 ,  B81B2201/038 ,  B81B2201/047 ,  B81B2203/0118 ,  B81C2201/0167 ,  H01R12/52

    Abstract: A microelectromechanical system (MEMS) based sensor comprises: a substrate defining a plane; a first conductive material layer having a first stress, a first portion of the first conductive material layer being connected to the substrate and extending in a substantially parallel direction to the plane defined by the substrate and a second portion being disconnected from the substrate and extending in a substantially non-parallel direction to the plane defined by the substrate; and a sensor material layer formed over at least the second portion of the first conductive material layer, the sensor material layer having a second stress that is less than the first stress of the first conductive material layer. The stresses form a stress gradient that bends the second portion of the first conductive material layer and the sensor material layer formed over the second portion of the first conductive material layer away from the substrate.

    Abstract translation: 基于微机电系统（MEMS）的传感器包括：限定平面的基板; 具有第一应力的第一导电材料层，所述第一导电材料层的第一部分连接到所述衬底并且在基本上平行于由所述衬底限定的平面的方向上延伸，并且所述第二部分与所述衬底断开并且延伸到 基本上不平行于由衬底限定的平面的方向; 以及在所述第一导电材料层的至少第二部分上形成的传感器材料层，所述传感器材料层具有小于所述第一导电材料层的第一应力的第二应力。 应力形成应力梯度，该应力梯度使第一导电材料层的第二部分和形成在第一导电材料层的第二部分上方的传感器材料层远离衬底弯曲。

    Piezoelectric actuator array and manufacturing method
    79.
    发明申请
    Piezoelectric actuator array and manufacturing method 失效
    压电致动器阵列及制造方法

    公开(公告)号：US20040027034A1

    公开(公告)日：2004-02-12

    申请号：US10635408

    申请日：2003-08-06

    Applicant: NGK Insulators, Ltd.

    Inventor： Tatsuo Kawaguchi ,  Koji Kimura

    IPC: H01L041/08

    CPC classification number: H01L27/20 ,  B81B7/04 ,  B81B2201/038 ,  B81C3/002 ,  G02B6/3502 ,  G02B6/3514 ,  G02B6/3544 ,  G02B6/3578 ,  G02B26/0858 ,  H01L41/053

    Abstract: There is disclosed a one-dimensional piezoelectric actuator array 1 houses a piezoelectric device 35 including a plate or pillar-shaped piezoelectric member 4 and electrodes 18, 19, and having a planar form; the device 35 being driven by a piezoelectric effect of the piezoelectric member 4. The piezoelectric device 35 is formed as a whole in a planar comb shape wherein comb teeth 26 are connected to one another in one end, and portions of the comb teeth 26 work as a plurality of driving portions 31. The guide substrate 2 and piezoelectric device substrate 3 are integrally unified in such a manner that the resultant is readily usable for the formation of a multiply stuck structural body. In case of need, the array may be further provided with a guide substrate 2 having a concave portion 9 for housing at least a part of the piezoelectric device substrate 3.

    Abstract translation: 公开了一维压电致动器阵列1，其容纳包括板状或柱状的压电部件4的压电器件35和具有平面形状的电极18,19。 装置35由压电构件4的压电效应驱动。压电装置35整体形成为平面梳形，其中梳齿26在一端彼此连接，梳齿26的一部分工作 作为多个驱动部31.引导基板2和压电装置基板3以能够容易地形成多重卡住结构体的方式一体地一体化。 在需要的情况下，阵列还可以设置有具有用于容纳压电器件基板3的至少一部分的凹部9的引导基板2。

    Electrostatic bimorph actuator
    80.
    发明申请
    Electrostatic bimorph actuator 有权
    静电双压电晶片致动器

    公开(公告)号：US20030184189A1

    公开(公告)日：2003-10-02

    申请号：US10112369

    申请日：2002-03-29

    Inventor： Michael J. Sinclair

    IPC: H02N001/00

    CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

    Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

    Abstract translation: 静电双压电晶片致动器包括悬臂式柔性双压电晶臂，其在一端固定并绝缘到平面衬底。 在静电激活状态下，双压电晶片臂通常平行于平面衬底。 在松弛状态下，双压电晶片臂中的残余应力使其自由端从平面基板向外延伸。 致动器包括固定到基板并与基板绝缘并位于双压电晶片臂下方并与之对准的基板电极。 施加在双压电晶片臂和衬底电极之间的电势差使得双压电晶片臂和衬底电极之间的静电吸引力激活致动器。 作为可以使用这种致动器的示例性应用，描述了一种微电子机械光学显示系统。

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