Apparatus and method for detecting arcs
    71.
    发明授权
    Apparatus and method for detecting arcs 失效
    电弧检测装置及方法

    公开(公告)号:US08332170B2

    公开(公告)日:2012-12-11

    申请号:US12772565

    申请日:2010-05-03

    Abstract: The apparatus for detecting arc occurred in chamber for plasma treatment used for manufacturing semiconductor or LCD panel comprises, a sensor module for sensing the arc; a processor module for processing data from the sensor module; wherein the sensor module includes RGB color sensor for sensing color data of the arc occurred in the chamber, the RGB color sensor is a sensor sensable at least one of red color or green color or blue color of the arc, the apparatus detects the arc by sensing data of color and chroma and brightness of the arc.

    Abstract translation: 在用于制造半导体或LCD面板的等离子体处理室中检测电弧的装置包括:用于感测电弧的传感器模块; 处理器模块,用于处理来自传感器模块的数据; 其中传感器模块包括RGB颜色传感器,用于感测在室中发生的电弧的颜色数据,RGB颜色传感器是可感测到电弧的红色或绿色或蓝色中的至少一种的传感器,该装置通过 感测电弧的颜色和色度和亮度的数据。

    Adaptive displaying scheme
    72.
    发明授权
    Adaptive displaying scheme 有权
    自适应显示方案

    公开(公告)号:US08319723B2

    公开(公告)日:2012-11-27

    申请号:US12671583

    申请日:2008-07-30

    Applicant: Lars Nørgaard

    Inventor: Lars Nørgaard

    Abstract: A method and a system for improving the psychovisual experience of watching a display are presented. Measurements on the ambient light are performed by a sensor element, from which characteristics of the ambient light are derived. These are subsequently applied in a light-source adjustment model to determine the output of the light-source element. Moreover, a method and a system for adjusting the output of a light-source element by a feed-back loop involving the output from the light-source element and the input to a sensor element are revealed. In addition, the sensor element is also employed for adjusting the output of an electronic display by applying the results of the measurements to a preference model.

    Abstract translation: 提出了一种提高观看表演心理体验的方法和系统。 通过传感器元件对环境光进行测量,从而导出环境光的特性。 随后将其应用于光源调节模型中以确定光源元件的输出。 此外,揭示了一种用于通过涉及从光源元件的输出和到传感器元件的输入的反馈回路调整光源元件的输出的方法和系统。 此外,传感器元件还用于通过将测量结果应用于偏好模型来调节电子显示器的输出。

    TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND PHOTOMETRIC ANALYZER
    73.
    发明申请
    TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND PHOTOMETRIC ANALYZER 审中-公开
    可调干涉滤光片,光学模块和光学分析仪

    公开(公告)号:US20120212823A1

    公开(公告)日:2012-08-23

    申请号:US13398066

    申请日:2012-02-16

    CPC classification number: G01J3/26 G01J3/51 G02B26/001

    Abstract: An etalon as a tunable interference filter includes a first substrate, a second substrate, a fixed mirror, a movable mirror, and an electrostatic actuator. The respective mirrors are formed by stacking one layer of a TiO2 film and one layer of an alloy film. A film thickness dimension of the TiO2 film and a film thickness dimension of the Ag alloy film are set to film thicknesses such that reflectance of a reference wavelength may be target reflectance and reflectance of a set wavelength may be lower than that of the case where the reflection film is formed only by the metal film.

    Abstract translation: 作为可调谐干涉滤光器的标准具包括第一基板,第二基板,固定反射镜,可移动反射镜和静电致动器。 各反射镜通过层叠一层TiO 2膜和一层合金膜而形成。 将TiO 2膜的膜厚度和Ag合金膜的膜厚尺寸设定为膜厚,使得参考波长的反射率可以是目标反射率,并且设定波长的反射率可以低于 反射膜仅由金属膜形成。

    TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC DEVICE
    74.
    发明申请
    TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC DEVICE 有权
    可控干涉滤光片,光学模块和电子设备

    公开(公告)号:US20120212822A1

    公开(公告)日:2012-08-23

    申请号:US13397948

    申请日:2012-02-16

    Applicant: Koji KITAHARA

    Inventor: Koji KITAHARA

    CPC classification number: G01J3/26 G01J3/51 G02B26/001

    Abstract: An etalon (tunable interference filter) includes a fixed substrate, a movable substrate facing the fixed substrate, a fixed reflection film disposed on the fixed substrate, a movable reflection film disposed on the movable substrate and facing the fixed reflection film via a gap, a fixed electrode disposed on the fixed substrate, and a movable electrode disposed on the movable substrate and facing the fixed electrode. A movable insulating film is stacked on a surface of the movable electrode on the side of the fixed electrode, the movable electrode has a compressive stress, and the movable insulating film has a tensile stress.

    Abstract translation: 标准具(可调干扰滤波器)包括固定基板,面向固定基板的可动基板,设置在固定基板上的固定反射膜,设置在可移动基板上并通过间隙面向固定反射膜的可移动反射膜, 设置在固定基板上的固定电极以及配置在可动基板上并与固定电极相对的可动电极。 可动绝缘膜层叠在可动电极的固定电极一侧的表面上,可动电极具有压缩应力,可动绝缘膜具有拉伸应力。

    Output ratio adjusting method for optic sensor
    75.
    发明授权
    Output ratio adjusting method for optic sensor 有权
    光传感器的输出比调整方法

    公开(公告)号:US08247774B2

    公开(公告)日:2012-08-21

    申请号:US12453081

    申请日:2009-04-29

    Abstract: A method for adjusting output ratio of an optic sensor includes the following steps: measuring and obtaining a response spectrum of the optic sensor; analyzing optic response ratios of the response spectrum at different wavelengths; designing a ratio of light reception areas of the optic sensor, the design being carried out in accordance with three aspects of “the response spectrum” “a fixed proportional relationship being present between multiplication of the optic response ratio and the light reception area and an output of light current” and “a proportional relationship being present between the light reception area and the output of the light current”; and obtaining light current outputs of identical proportions (such as 1:1:1) or in a desired ratio (meaning any arbitrary ratio other than 1:1:1, such as 1:2:1, 1:2:3, or 3:4:5) in accordance with the design of the previous step.

    Abstract translation: 用于调整光学传感器的输出比的方法包括以下步骤:测量并获得光学传感器的响应谱; 分析不同波长的响应光谱的光响应比; 设计光传感器的光接收面积的比例,根据“响应谱”三个方面进行设计,“光响应比与光接收区域的乘法之间存在固定的比例关系,以及输出 的光电流“和”光接收区域和光电流的输出之间存在比例关系“; 并且获得相同比例的光电流输出(例如1:1:1)或以期望的比例(即除1:1:1之外的任意比例,例如1:2:1,1:2:3或 3:4:5)按照上一步的设计。

    WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL MODULE, AND LIGHT ANALYZER
    77.
    发明申请
    WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL MODULE, AND LIGHT ANALYZER 有权
    波长可变干涉滤光片,光学模块和光分析仪

    公开(公告)号:US20120120402A1

    公开(公告)日:2012-05-17

    申请号:US13219925

    申请日:2011-08-29

    CPC classification number: G02B26/001 G01J3/26 G01J3/51 G02B5/28 G02B5/284

    Abstract: A wavelength variable interference filter includes: a first movable mirror disposed on a first substrate; a second movable mirror disposed so as to be opposed to the first movable mirror with a predetermined gap interposed therebetween; and an electrostatic actuator which varies the length of the gap between the mirrors. The first substrate has a first movable portion on which the first movable mirror is disposed, and a first linkage portion which holds the first movable portion in such a manner that the first movable portion can shift in the thickness direction of the substrate. The second substrate has a second movable portion on which the second movable mirror is disposed, and a second linkage portion which holds the second movable portion in such a manner that the second movable portion can shift in the thickness direction of the substrate.

    Abstract translation: 波长可变干涉滤光器包括:设置在第一基板上的第一可移动反射镜; 第二可移动镜,被布置成与第一可移动镜相对置,间隔开预定间隙; 以及改变反射镜之间的间隙的长度的静电致动器。 第一基板具有设置有第一可动镜的第一可动部以及第一可动部,以使第一可动部能够在基板的厚度方向上移动的方式保持第一可动部。 第二基板具有第二可移动部分,第二可移动反射镜设置在该第二可移动部分上,第二连接部分以第二可移动部分可以在基板的厚度方向上移动的方式保持第二可动部分。

    Apparatus and method for measuring color
    78.
    发明授权
    Apparatus and method for measuring color 失效
    用于测量颜色的装置和方法

    公开(公告)号:US08159666B2

    公开(公告)日:2012-04-17

    申请号:US12218339

    申请日:2008-07-14

    Abstract: Methods in a spectral measurement apparatus are disclosed. Light is received with a plurality of sensors. Each sensor generates an output signal having a frequency proportional to an intensity of light received by the sensor. First, second and third signals are generated each having a frequency proportional to an intensity of light received by a sensor of a wavelength or spectral band. A spectral characteristic of the received light is determined based on at least the first, second and third signals, which are are coupled to a processing element and input in parallel. The spectral characteristic is determined based on measuring a frequency or period of the at least first, second and third signals. Spectral data based on the determined spectral characteristic is generated by the processing element and displayed on a display device for perception by a viewer or transmitted to a data interface for transmission to an electronic device external to the spectral measurement apparatus.

    Abstract translation: 公开了光谱测量装置中的方法。 光被多个传感器接收。 每个传感器产生具有与由传感器接收的光的强度成比例的频率的输出信号。 首先,产生具有与由波长或光谱带的传感器接收的光的强度成比例的频率的第二和第三信号。 至少基于耦合到处理元件并且并行输入的第一,第二和第三信号来确定接收光的光谱特性。 基于测量至少第一,第二和第三信号的频率或周期来确定频谱特性。 基于所确定的光谱特性的光谱数据由处理元件产生并显示在显示设备上,用于感知观看者或发送到数据接口以传输到光谱测量设备外部的电子设备。

    Spectrometric measurement system and method for compensating for veiling glare
    79.
    发明授权
    Spectrometric measurement system and method for compensating for veiling glare 失效
    光谱测量系统和补偿眩光的方法

    公开(公告)号:US08111396B2

    公开(公告)日:2012-02-07

    申请号:US12225904

    申请日:2007-03-12

    CPC classification number: G01J3/2803 G01J3/0262 G01J3/36 G01J3/51

    Abstract: The present solution is directed to a measuring system and a method for determining spectrometric measurement results with high accuracy. The spectrometric measuring system, comprises a radiation source, an entrance slit, a dispersion element, and a detector with detector elements arranged in a linear or matrix-shaped manner in one or more planes. The detector has an even distribution of at least two different wavelength-selective filters on its detector elements. While detectors from photography and video applications are used for this purpose, use of the invention is not limited to the visible spectral region. Further, color filters on the pixels may be omitted or modified in the manufacturing process. It is also possible to use other types of detectors in which the wavelength-selective filters and associated detectors are arranged one behind each other in a plurality of planes in which complete color information is available to each individual picture point.

    Abstract translation: 本解决方案涉及测量系统和用于以高精度确定光谱测量结果的方法。 光谱测量系统包括辐射源,入口狭缝,分散元件和具有在一个或多个平面中以线性或矩阵形式布置的检测器元件的检测器。 检测器在其检测器元件上具有至少两个不同波长选择滤波器的均匀分布。 虽然用于摄影和视频应用的检测器用于此目的,但是本发明的使用不限于可见光谱区域。 此外,可以在制造过程中省略或修改像素上的滤色器。 也可以使用其他类型的检测器,其中波长选择滤波器和相关联的检测器在多个平面中相互排列,其中完整的颜色信息可用于每个单独的图像点。

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