Abstract:
The apparatus for detecting arc occurred in chamber for plasma treatment used for manufacturing semiconductor or LCD panel comprises, a sensor module for sensing the arc; a processor module for processing data from the sensor module; wherein the sensor module includes RGB color sensor for sensing color data of the arc occurred in the chamber, the RGB color sensor is a sensor sensable at least one of red color or green color or blue color of the arc, the apparatus detects the arc by sensing data of color and chroma and brightness of the arc.
Abstract:
A method and a system for improving the psychovisual experience of watching a display are presented. Measurements on the ambient light are performed by a sensor element, from which characteristics of the ambient light are derived. These are subsequently applied in a light-source adjustment model to determine the output of the light-source element. Moreover, a method and a system for adjusting the output of a light-source element by a feed-back loop involving the output from the light-source element and the input to a sensor element are revealed. In addition, the sensor element is also employed for adjusting the output of an electronic display by applying the results of the measurements to a preference model.
Abstract:
An etalon as a tunable interference filter includes a first substrate, a second substrate, a fixed mirror, a movable mirror, and an electrostatic actuator. The respective mirrors are formed by stacking one layer of a TiO2 film and one layer of an alloy film. A film thickness dimension of the TiO2 film and a film thickness dimension of the Ag alloy film are set to film thicknesses such that reflectance of a reference wavelength may be target reflectance and reflectance of a set wavelength may be lower than that of the case where the reflection film is formed only by the metal film.
Abstract:
An etalon (tunable interference filter) includes a fixed substrate, a movable substrate facing the fixed substrate, a fixed reflection film disposed on the fixed substrate, a movable reflection film disposed on the movable substrate and facing the fixed reflection film via a gap, a fixed electrode disposed on the fixed substrate, and a movable electrode disposed on the movable substrate and facing the fixed electrode. A movable insulating film is stacked on a surface of the movable electrode on the side of the fixed electrode, the movable electrode has a compressive stress, and the movable insulating film has a tensile stress.
Abstract:
A method for adjusting output ratio of an optic sensor includes the following steps: measuring and obtaining a response spectrum of the optic sensor; analyzing optic response ratios of the response spectrum at different wavelengths; designing a ratio of light reception areas of the optic sensor, the design being carried out in accordance with three aspects of “the response spectrum” “a fixed proportional relationship being present between multiplication of the optic response ratio and the light reception area and an output of light current” and “a proportional relationship being present between the light reception area and the output of the light current”; and obtaining light current outputs of identical proportions (such as 1:1:1) or in a desired ratio (meaning any arbitrary ratio other than 1:1:1, such as 1:2:1, 1:2:3, or 3:4:5) in accordance with the design of the previous step.
Abstract:
The present invention relates to a spectral detection device (100) for detecting spectral components of received light, wherein the spectral detection device (100) comprises a filtering structure (110) arranged to filter the received light and output light with a wavelength within a predetermined wavelength range; and a light sensor (120) arranged to detect the light output by the filtering structure (110), wherein the filtering structure (110) is variable to allow a variation of the predetermined wavelength range over time.The arrangement enables a compact spectral detection device that may be provided at a low cost.
Abstract:
A wavelength variable interference filter includes: a first movable mirror disposed on a first substrate; a second movable mirror disposed so as to be opposed to the first movable mirror with a predetermined gap interposed therebetween; and an electrostatic actuator which varies the length of the gap between the mirrors. The first substrate has a first movable portion on which the first movable mirror is disposed, and a first linkage portion which holds the first movable portion in such a manner that the first movable portion can shift in the thickness direction of the substrate. The second substrate has a second movable portion on which the second movable mirror is disposed, and a second linkage portion which holds the second movable portion in such a manner that the second movable portion can shift in the thickness direction of the substrate.
Abstract:
Methods in a spectral measurement apparatus are disclosed. Light is received with a plurality of sensors. Each sensor generates an output signal having a frequency proportional to an intensity of light received by the sensor. First, second and third signals are generated each having a frequency proportional to an intensity of light received by a sensor of a wavelength or spectral band. A spectral characteristic of the received light is determined based on at least the first, second and third signals, which are are coupled to a processing element and input in parallel. The spectral characteristic is determined based on measuring a frequency or period of the at least first, second and third signals. Spectral data based on the determined spectral characteristic is generated by the processing element and displayed on a display device for perception by a viewer or transmitted to a data interface for transmission to an electronic device external to the spectral measurement apparatus.
Abstract:
The present solution is directed to a measuring system and a method for determining spectrometric measurement results with high accuracy. The spectrometric measuring system, comprises a radiation source, an entrance slit, a dispersion element, and a detector with detector elements arranged in a linear or matrix-shaped manner in one or more planes. The detector has an even distribution of at least two different wavelength-selective filters on its detector elements. While detectors from photography and video applications are used for this purpose, use of the invention is not limited to the visible spectral region. Further, color filters on the pixels may be omitted or modified in the manufacturing process. It is also possible to use other types of detectors in which the wavelength-selective filters and associated detectors are arranged one behind each other in a plurality of planes in which complete color information is available to each individual picture point.
Abstract:
Provided is a device for determining the surface topology and associated color of a structure, such as a teeth segment, including a scanner for providing depth data for points along a two-dimensional array substantially orthogonal to the depth direction, and an image acquisition means for providing color data for each of the points of the array, while the spatial disposition of the device with respect to the structure is maintained substantially unchanged. A processor combines the color data and depth data for each point in the array, thereby providing a three-dimensional color virtual model of the surface of the structure. A corresponding method for determining the surface topology and associated color of a structure is also provided.