公开(公告)号：US09488542B2

公开(公告)日：2016-11-08

申请号：US14823851

申请日：2015-08-11

Applicant: FREESCALE SEMICONDUCTOR, INC.

Inventor： Chad S. Dawson ,  Peter T. Jones

IPC: G01G19/56 ,  G01L25/00 ,  G01L1/04 ,  G01L1/14 ,  G01L9/00 ,  G01L27/00

CPC classification number: G01L25/00 ,  G01L1/04 ,  G01L1/142 ,  G01L1/148 ,  G01L9/0073 ,  G01L27/002

Abstract: A pressure sensor (20) includes a test cell (32) and sense cell (34). The sense cell (34) includes an electrode (42) formed on a substrate (30) and a sense diaphragm (68) spaced apart from the electrode (42) to produce a sense cavity (64). The test cell (32) includes an electrode (40) formed on the substrate (30) and a test diaphragm (70) spaced apart from the electrode (40) to produce a test cavity (66). Both of the cells (32, 34) are sensitive to pressure (36). However, a critical dimension (76) of the sense diaphragm (68) is less than a critical dimension (80) of the test diaphragm (70) so that the test cell (32) has greater sensitivity (142) to pressure (36) than the sense cell (34). Parameters (100) measured at the test cell (32) are utilized to estimate a sensitivity (138) of the sense cell (34).

公开(公告)号：US20160209279A1

公开(公告)日：2016-07-21

申请号：US15083131

申请日：2016-03-28

Applicant: Wacom Co., Ltd.

Inventor： Masayuki Obata

IPC: G01L1/14 ,  B41J2/175 ,  G01B7/14

CPC classification number: G01L1/144 ,  B41J2/17546 ,  G01B7/003 ,  G01B7/14 ,  G01L1/148 ,  G06F3/03545 ,  G06F3/046 ,  Y10T137/8242

Abstract: An electronic ink cartridge includes, in a direction of a central axis within a cylindrical body, a core body extended out from a distal end of the cylindrical body, a coupling member disposed on a side of a proximal end of the cylindrical body, a coil housed between the core body and the coupling member and having a predetermined inductance, and a pressure sensitive element whose capacitance changes according to pressure applied to the core body. Two terminals of the coil are electrically connected respectively to two terminals of the pressure sensitive element to thereby form two terminals of a resonance circuit formed by the coil and the pressure sensitive element. A connecting terminal electrically connected to at least one of the two terminals of the resonance circuit is disposed on a proximal end surface side of the coupling member to be accessible thereon from outside.

Abstract translation: 一种电子墨盒，在圆柱体内的中心轴方向上包括从圆柱体的远端延伸的芯体，设置在圆柱体的近端一侧的耦合构件，线圈 容纳在芯体和耦合构件之间并且具有预定的电感，以及其电容根据施加到芯体的压力而变化的压敏元件。 线圈的两个端子分别电连接到压敏元件的两个端子，从而形成由线圈和压敏元件形成的谐振电路的两个端子。 电连接到谐振电路的两个端子中的至少一个端子的连接端子设置在耦合构件的近端表面侧上，以便从外部接近。

公开(公告)号：US09383283B2

公开(公告)日：2016-07-05

申请号：US14157235

申请日：2014-01-16

Applicant: Kavlico Corporation

Inventor： Marcos A. Nassar ,  Ernest W. Cordan ,  Mark L. Urban

IPC: G01L9/12 ,  G01L9/00 ,  G01L1/14 ,  H01G5/16

CPC classification number: G01L9/12 ,  G01L1/148 ,  G01L9/0016 ,  G01L9/0072 ,  H01G5/16 ,  Y10T29/41

Abstract: A capacitive pressure transducer of an embodiment of the present invention capacitively couples two electrodes on a substrate with a diaphragm electrode to form a transducing circuit without the need for a physical connection between the electrodes. Embodiments of the present invention have a substrate with a coupling electrode and a sensing electrode and an attached diaphragm with a diaphragm electrode. A spacer positioned between the substrate and the diaphragm provides for a cavity that defines a gap between the sensing electrode and the diaphragm electrode. A dielectric spacer may be positioned over the coupling electrode to increase the capacitance between the coupling electrode and the diaphragm electrode. The capacitive pressure transducer has similar electrical characteristics as existing capacitive pressure transducers, is easier to manufacture, and has long-term reliability and durability improvements brought about by the elimination of mechanical interconnects and additional conductive materials.

Abstract translation: 本发明实施例的电容式压力换能器将衬底上的两个电极与隔膜电极电容耦合以形成转换电路，而不需要电极之间的物理连接。 本发明的实施例具有具有耦合电极和感测电极的基板以及具有隔膜电极的附接膜片。 位于基板和隔膜之间的间隔件提供限定感测电极和隔膜电极之间的间隙的空腔。 电介质间隔物可以位于耦合电极上方，以增加耦合电极和隔膜电极之间的电容。 电容式压力传感器具有与现有的电容式压力传感器相似的电特性，易于制造，并且通过消除机械互连和附加的导电材料而带来长期的可靠性和耐久性改善。

公开(公告)号：US09312397B2

公开(公告)日：2016-04-12

申请号：US13722422

申请日：2012-12-20

Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.

Inventor： Ignaz Eisele ,  Martin Heigl ,  Karl Haberger

IPC: H01L29/84 ,  H01L21/02 ,  H01L29/78 ,  B81B1/00 ,  B81C1/00 ,  G01L9/00 ,  G01L1/14 ,  H01L29/51

CPC classification number: H01L29/84 ,  B81B1/00 ,  B81C1/00 ,  G01L1/148 ,  G01L9/0073 ,  H01L21/02 ,  H01L29/51 ,  H01L29/78

Abstract: A transistor structure includes a first terminal region, a second terminal region and a channel region therebetween in a semiconductor substrate. Additionally, the transistor structure includes a control electrode associated with the channel region, the control electrode having a control electrode portion which is elastically deflectable under the action of a force and spaced apart from the channel region. The distance between the control electrode portion and the channel region is changed based on the action of force.

Abstract translation: 晶体管结构在半导体衬底中包括第一端子区域，第二端子区域和它们之间的沟道区域。 另外，晶体管结构包括与沟道区相关联的控制电极，控制电极具有控制电极部分，该控制电极部分在力作用下可弹性偏转并与沟道区间隔开。 基于力的作用改变控制电极部分和沟道区域之间的距离。

公开(公告)号：US09255852B2

公开(公告)日：2016-02-09

申请号：US14136145

申请日：2013-12-20

Applicant: TEXAS INSTRUMENTS DEUTSCHLAND GmbH

Inventor： Kai Gossner

IPC: G01L1/16 ,  G01L1/14 ,  G01C19/5719 ,  G01P15/125 ,  H01G5/38

CPC classification number: G01L1/148 ,  G01C19/5719 ,  G01P15/125 ,  H01G5/38

Abstract: The present disclosure relates to an apparatus comprising at least one sensing capacitor and a controller, wherein the controller is configured to receive a signal from the at least one sensing capacitor indicative of a change of charge of the sensing capacitor, and wherein the controller is configured to determine an amount of force applied to the sensing capacitor, an acceleration of the sensing capacitor, a torsion of the sensing capacitor, a vibration of the sensing capacitor or a pulling force applied to the sensing capacitor based on the change of charge of the at least one sensing capacitor.

Abstract translation: 本公开涉及包括至少一个感测电容器和控制器的装置，其中所述控制器被配置为从所述至少一个感测电容器接收指示感测电容器的电荷变化的信号，并且其中所述控制器被配置 以确定施加到感测电容器的力的大小，感测电容器的加速度，感测电容器的扭矩，感测电容器的振动或施加到感测电容器的拉力，基于该电容器的电荷变化 至少一个感测电容器。

公开(公告)号：US20150346046A1

公开(公告)日：2015-12-03

申请号：US14823851

申请日：2015-08-11

Applicant: FREESCALE SEMICONDUCTOR, INC.

Inventor： CHAD S. DAWSON ,  Peter T. Jones

IPC: G01L25/00 ,  G01L1/14 ,  G01L1/04

CPC classification number: G01L25/00 ,  G01L1/04 ,  G01L1/142 ,  G01L1/148 ,  G01L9/0073 ,  G01L27/002

Abstract: A pressure sensor (20) includes a test cell (32) and sense cell (34). The sense cell (34) includes an electrode (42) formed on a substrate (30) and a sense diaphragm (68) spaced apart from the electrode (42) to produce a sense cavity (64). The test cell (32) includes an electrode (40) formed on the substrate (30) and a test diaphragm (70) spaced apart from the electrode (40) to produce a test cavity (66). Both of the cells (32, 34) are sensitive to pressure (36). However, a critical dimension (76) of the sense diaphragm (68) is less than a critical dimension (80) of the test diaphragm (70) so that the test cell (32) has greater sensitivity (142) to pressure (36) than the sense cell (34). Parameters (100) measured at the test cell (32) are utilized to estimate a sensitivity (138) of the sense cell (34).

Abstract translation: 压力传感器（20）包括测试单元（32）和感测单元（34）。 感测单元（34）包括形成在基板（30）上的电极（42）和与电极（42）间隔开的感测隔膜（68）以产生感测腔（64）。 测试电池（32）包括形成在基板（30）上的电极（40）和与电极（40）间隔开的测试膜（70），以产生测试腔（66）。 两个电池（32,34）对压力敏感（36）。 然而，感测隔膜（68）的临界尺寸（76）小于测试隔膜（70）的临界尺寸（80），使得测试电池（32）具有较高的灵敏度（142）至压力（36） 比感测单元（34）。 在测试单元（32）处测量的参数（100）用于估计感测单元（34）的灵敏度（138）。

公开(公告)号：US09127994B2

公开(公告)日：2015-09-08

申请号：US13953571

申请日：2013-07-29

Applicant: STMicroelectronics (Rousset) SAS

Inventor： Pascal Fornara ,  Christian Rivero

IPC: G01L1/00 ,  H01L29/66 ,  G01L1/14 ,  G01L11/00 ,  G01L1/22 ,  H01L27/06 ,  G01L25/00

CPC classification number: G01R31/2872 ,  G01L1/00 ,  G01L1/005 ,  G01L1/148 ,  G01L1/225 ,  G01L1/2293 ,  G01L11/00 ,  G01L25/00 ,  G01R31/2884 ,  H01L27/06 ,  H01L29/66007

Abstract: A method for manufacturing an integrated circuit includes forming in a substrate a measuring circuit sensitive to mechanical stresses and configured to supply a measurement signal representative of mechanical stresses exerted on the measuring circuit. The measuring circuit is positioned such that the measurement signal is also representative of mechanical stresses exerted on a functional circuit of the integrated circuit. A method of using the integrated circuit includes determining from the measurement signal the value of a parameter of the functional circuit predicted to mitigate an impact of the variation in mechanical stresses on the operation of the functional circuit, and supplying the functional circuit with the determined value of the parameter.

Abstract translation: 一种用于制造集成电路的方法包括在基板上形成对机械应力敏感的测量电路，并且被配置为提供表示施加在测量电路上的机械应力的测量信号。 测量电路被定位成使得测量信号也代表施加在集成电路的功能电路上的机械应力。 使用集成电路的方法包括从测量信号确定预测的功能电路的参数的值，以减轻机械应力的变化对功能电路的操作的影响，以及向功能电路提供确定的值 的参数。

公开(公告)号：US08984966B2

公开(公告)日：2015-03-24

申请号：US14347421

申请日：2012-09-20

Applicant: Femtotools AG

Inventor： Felix Beyeler ,  Simon Muntwyler ,  Wolfgang Dietze

IPC: G01L1/14 ,  G01L5/00 ,  G01L5/16

CPC classification number: G01L1/148 ,  G01L5/0057 ,  G01L5/165

Abstract: Most mechanical tests (compression testing, tensile testing, flexure testing, shear testing) of samples in the sub-mm size scale are performed under the observation with an optical microscope or a scanning electron microscope. However, the following problems exist with prior art force sensors as e.g they cannot be used for in-plane mechanical testing (a- and b-direction) of a sample; they cannot be used for vertical testing (c-direction) of a sample. In order to overcome the before mentioned drawbacks the invention comprises the following basic working principle: A force is applied to the probe (2) at the probe tip (1) of the sensor. The force is transmitted by the sensor probe (2) to the movable body (3) of the sensor. The movable body is elastically suspended by four folded flexures (4), which transduce the force into a deflection dx. This deflection is measured by an array of capacitor electrodes, called capacitive comb drive (6).

Abstract translation: 在使用光学显微镜或扫描电子显微镜的观察下进行大小尺寸刻度的样品的大多数机械试验（压缩试验，拉伸试验，挠曲试验，剪切试验）。 然而，现有技术的力传感器存在以下问题，例如它们不能用于样品的面内机械测试（a-和b-方向）; 它们不能用于样品的垂直测试（c方向）。 为了克服上述缺点，本发明包括以下基本工作原理：在传感器的探针尖端（1）处向探针（2）施加力。 传感器探针（2）将力传递到传感器的可移动体（3）。 可移动体通过四个折叠的挠曲件（4）弹性地悬挂，其将力转换成偏转dx。 该偏转通过称为电容梳驱动器（6）的电容器电极阵列来测量。

公开(公告)号：US20140331787A1

公开(公告)日：2014-11-13

申请号：US14371632

申请日：2013-01-14

Applicant: Robert Anton Brookhuis ,  Theodorus Simon Josef Lammerink ,  Remco John Wiegerink

Inventor： Robert Anton Brookhuis ,  Theodorus Simon Josef Lammerink ,  Remco John Wiegerink

IPC: G01L1/14 ,  G01R27/26 ,  G01L3/02

CPC classification number: G01L1/148 ,  G01L1/142 ,  G01L1/144 ,  G01L3/02 ,  G01L5/165 ,  G01P15/125 ,  G01R27/2605

Abstract: A sensing device for measuring force and/or torque includes a top part with a top electrode structure, a bottom part with a bottom electrode structure, and a support structure. The support structure includes spring elements for supporting the top part on the bottom part with the top electrode structure parallel to and facing the bottom electrode structure. The spring elements provide a gap between the top and bottom electrode structures and allow displacement of the top part relative to the bottom part in three orthogonal directions two parallel and one perpendicular to the bottom plate, and for rotation of the top part relative to the bottom part around three orthogonal axes, corresponding with the two parallel and one perpendicular directions. The displacement and/or rotation induce a change in distance between and/or overlap area of the top and bottom electrodes and a corresponding change of capacitance.

Abstract translation: 用于测量力和/或扭矩的感测装置包括具有顶部电极结构的顶部部分，具有底部电极结构的底部部分和支撑结构。 支撑结构包括用于支撑底部顶部的弹簧元件，顶部电极结构平行于并面向底部电极结构。 弹簧元件在顶部和底部电极结构之间提供间隙，并且允许顶部相对于底部部分在垂直于底板的平行和垂直的三个正交方向上移位，并且允许顶部部分相对于底部 部分围绕三个正交轴，对应于两个平行和一个垂直方向。 位移和/或旋转引起顶部和底部电极之间和/或重叠区域之间的距离和相应的电容变化的变化。

公开(公告)号：US20140238174A1

公开(公告)日：2014-08-28

申请号：US14189122

申请日：2014-02-25

Applicant: SEIKO EPSON CORPORATION

Inventor： Tomo Ikebe

IPC: G01L5/00 ,  B25J9/16

CPC classification number: B25J9/1694 ,  G01L1/148 ,  G01L1/16 ,  G01L1/18 ,  G01L1/20 ,  G01L1/205 ,  G01L1/22 ,  G01L5/009 ,  G01L5/161 ,  G01L5/162 ,  G01L5/167 ,  G01L5/226 ,  G05B2219/39529 ,  Y10S901/09 ,  Y10T74/20305

Abstract: A force detector includes a plate-like first member, a plate-like second member provided with a gap between the first member and itself, an elastic member provided between the first member and the second member, and a plurality of pressure-sensitive devices provided between the elastic member and the second member, wherein an area of a surface of the elastic member at the first member side is larger than an area of a surface of the elastic member at the second member side. Further, the first member and the second member respectively have plate-like shapes. Furthermore, three or more of the elastic members are provided.

Abstract translation: 力检测器包括板状第一构件，在第一构件和其本身之间设置有间隙的板状第二构件，设置在第一构件和第二构件之间的弹性构件，以及设置有多个压力敏感装置 在弹性构件和第二构件之间，弹性构件的第一构件侧的表面的面积大于第二构件侧的弹性构件的表面的面积。 此外，第一构件和第二构件分别具有板状形状。 此外，提供三个或更多个弹性构件。