公开(公告)号：US5357109A

公开(公告)日：1994-10-18

申请号：US65899

申请日：1993-05-25

申请人： Osamu Kusumoto

发明人： Osamu Kusumoto

IPC分类号： C01G9/02 ,  G01B7/34 ,  G01B21/00 ,  G01N27/00 ,  G01N37/00 ,  G01Q30/10 ,  G01Q60/16 ,  G01Q70/08 ,  H01J9/14 ,  H01J37/26 ,  H01J37/28

CPC分类号： G01Q60/16 ,  B82Y15/00 ,  B82Y35/00 ,  G01Q70/12 ,  Y10S977/878 ,  Y10S977/879

摘要： A probe for a scanning tunneling microscope and manufacturing method therefor in which tetrapod-shaped whiskers of zinc oxide are placed on a conductive material which is adhered on a tip part of a fine wire of platinized iridium in a manner that three legs of the tetrapod contact the conductive material; the conductive material is heated for melting only the conductive material; and cooling the melted conductive material for being hardened, thereby the stem part of the whisker is inserted into the conductive material.

摘要翻译： 用于扫描隧道显微镜的探针及其制造方法，其中将氧化锌的四足形晶须放置在导电材料上，该导电材料以四极接触的三条腿的方式粘附在镀铂铱细线的末端部分 导电材料; 导电材料被加热仅熔化导电材料; 并将熔融的导电材料冷却以进行硬化，从而将晶须的茎部插入到导电材料中。

公开(公告)号：US5260926A

公开(公告)日：1993-11-09

申请号：US870335

申请日：1992-04-17

申请人： Ryo Kuroda ,  Toshihiko Miyazaki ,  Kunihiro Sakai ,  Kiyoshi Takimoto

发明人： Ryo Kuroda ,  Toshihiko Miyazaki ,  Kunihiro Sakai ,  Kiyoshi Takimoto

IPC分类号： G01B11/00 ,  G01B11/30 ,  G01B21/30 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q30/04 ,  G01Q30/10 ,  G01Q60/24 ,  G01Q60/40 ,  G01Q70/06 ,  G01Q70/14 ,  G01Q80/00 ,  G11B9/00 ,  G11B9/14 ,  G11B7/00

CPC分类号： G11B9/1427 ,  G11B9/14 ,  B82Y10/00 ,  Y10S977/874 ,  Y10S977/947

摘要： An information processor comprises a plurality of probes disposed so as to face to a recording medium containing an information, and a plurality of elastic members such as cantilevers supporting the respective probes. The processor reads the information by detecting each displacement of the elastic members. For the detection of displacement, the processor has an optical system for radiating a scanning light beam to the elastic members together with an optical system for detecting a reflected light from the elastic members, or alternatively has a means for detecting each displacement individually such as optically integrated optical members or piezoelectric layers provided to the elastic members.

公开(公告)号：US5148026A

公开(公告)日：1992-09-15

申请号：US794229

申请日：1991-11-19

申请人： Miyoko Watanabe ,  Kuniyoshi Tanaka

发明人： Miyoko Watanabe ,  Kuniyoshi Tanaka

IPC分类号： G01B7/34 ,  G01N27/00 ,  G01Q10/06 ,  G01Q30/10 ,  G01Q30/18 ,  H01J37/00

CPC分类号： G01Q10/065 ,  B82Y35/00 ,  Y10S977/851

摘要： A probe arranged to oppose a sample is coupled to a driving portion constituted by an actuator capable of obtaining a large expansion/contraction amount and an actuator capable of obtaining a small expansion/contraction amount. In order to keep the gap length between the sample and the probe constant, a first gap length control system drives the actuator and a second gap length control system having a driving time constant smaller than that of the first gap length control system drives the actuator in response to changes in gap length between the sample and the probe.

公开(公告)号：US5059792A

公开(公告)日：1991-10-22

申请号：US593742

申请日：1990-10-05

申请人： Hiroyasu Kaga

发明人： Hiroyasu Kaga

IPC分类号： H01J37/06 ,  G01Q30/10 ,  H01J1/30 ,  H01J1/304 ,  H01J37/07 ,  H01J37/073

CPC分类号： H01J37/073 ,  H01J2237/06316

摘要： A thermal field emission electron gun having a Ti/W chip wherein the fore end of the chip is formed to have a radius of curvature of 2000 .ANG. or above, whereby the drift of the FE noise is small and a lithography apparatus of high serviceability ratio is obtained.

摘要翻译： 一种具有Ti / W芯片的热场发射电子枪，其中芯片的前端形成为具有2000或更大的曲率半径，由此FE噪声的漂移小，并且使用率高的光刻设备 获得。

公开(公告)号：US5055680A

公开(公告)日：1991-10-08

申请号：US503582

申请日：1990-04-03

申请人： Larry Kesmodel ,  Michael W. Kiser

发明人： Larry Kesmodel ,  Michael W. Kiser

IPC分类号： G01N23/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q30/08 ,  G01Q30/10 ,  G01Q30/18 ,  G01Q60/16 ,  G01Q70/04 ,  G02B21/00 ,  H01J37/00 ,  H01J37/20

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q30/08 ,  G01Q70/04 ,  Y10S977/872

摘要： A scanning tunneling microscope is disclosed which includes a frame assembly having upper frame members coupled to lower frame members by an external vibration isolation structure, a sample carousel configured to receive at least one sample to be scanned, and a probe carousel configured to receive at least one probe module including a probe tip. The sample and probe carousels are coupled to the upper frame members and sample and probe actuators are provided to rotate the carousels. A positioning mechanism is used to maintain a scanning distance between the probe tip and the sample carousel. A control unit controls the overall operation of the actuators to rotate the carousels and the operation of the positioning mechanism to maintain the scanning distance.

摘要翻译： 公开了一种扫描隧道显微镜，其包括框架组件，框架组件具有通过外部振动隔离结构联接到下框架构件的上框架构件，配置成接收至少一个要扫描的样本的样品转盘以及被配置为至少接收至少 一个探头模块，包括探头。 样品和探针转盘耦合到上框架构件，提供样品和探针致动器以旋转转盘。 使用定位机构来保持探针尖端和样品转盘之间的扫描距离。 控制单元控制致动器的整体操作以旋转传送带和定位机构的操作以保持扫描距离。

公开(公告)号：US4939364A

公开(公告)日：1990-07-03

申请号：US253558

申请日：1988-10-05

申请人： Tohru Ishitani ,  Tsuyoshi Ohnishi ,  Yoshimi Kawanami

发明人： Tohru Ishitani ,  Tsuyoshi Ohnishi ,  Yoshimi Kawanami

IPC分类号： H01J37/08 ,  C23F4/00 ,  G01Q30/10 ,  H01J37/305 ,  H01L21/30 ,  H01L21/302 ,  H01L21/3065

CPC分类号： H01J37/3056

摘要： A specimen or substrate cutting method of cutting or processing a predetermined portion of a specimen or substrate in a direction of depth thereof by generating a focused charged particle beam from a particle beam source and irradiating the predetermined portion of the specimen or substrate with the focused charged particle beam is disclosed in which a particle species of the charged particle beam is selected such that each of the melting point of the particle species itself and the melting point of an alloy or compound of the particle species and constituent atoms of the specimen or substrate is not lower than 3/2 times of the temperature of the specimen or substrate in units of absolute temperature. A secondary ion mass-spectroscopic analysis method is also disclosed in which the charged particle beam is used as a probe to mass-analyze secondary charged ion successively generated from the cut portion of the specimen or substrate.

摘要翻译： 一种样品或基材切割方法，其通过从粒子束源产生聚焦的带电粒子束来在其深度方向上切割或加工样品或基底的预定部分，并用聚焦的带电量照射样品或基底的预定部分 公开了粒子束，其中选择带电粒子束的粒子种类，使得颗粒物质本身的熔点和样品或基底的颗粒物质的合金或化合物的熔点和成分原子的熔点为 不低于样品或基材温度的绝对温度的3/2倍。 还公开了二次离子质谱分析方法，其中使用带电粒子束作为探针，对从样品或基底的切割部分连续产生的二次带电离子进行质量分析。

公开(公告)号：US4766313A

公开(公告)日：1988-08-23

申请号：US20181

申请日：1987-02-26

申请人： Yoshikazu Homma ,  Yoshikazu Ishii

发明人： Yoshikazu Homma ,  Yoshikazu Ishii

IPC分类号： G01Q30/10 ,  G01Q30/16 ,  H01J37/252 ,  H01J49/24

CPC分类号： H01J49/24 ,  H01J37/252

摘要： An apparatus for quantitative secondary ion mass spectrometry comprising a sealed chamber for storing a sample containing a light impurity element which is to be analyzed, secondary ion generating means for bombarding a primary ion beam onto the sample so as to allow the sample to emit a secondary ion of the light element, and quantitative analyzing means for detecting the secondary ion so as to quantitatively analyze the light element contained in the sample. First evacuating means evacuates said sealed chamber to an ultrahigh vacuum during quantitative analysis. First cryopanel means is arranged to surround the sample, and first cooling means keeps said first cryopanel means at a cryogenic temperature during quantitative analysis so that said first cryopanel means adsorbs a gas present in said sealed chamber.

摘要翻译： 一种用于定量二次离子质谱的装置，包括用于存储包含待分析的轻杂质元素的样品的密封室，用于将一次离子束轰击到样品上以使样品发射次级的二次离子产生装置 以及用于检测二次离子以定量分析样品中所含的轻元素的定量分析装置。 在定量分析过程中，首先排空装置将所述密封室排出至超高真空。 第一冷冻板装置被布置成围绕样品，并且第一冷却装置在定量分析期间使所述第一冷冻板装置保持在低温温度，使得所述第一冷冻板装置吸附存在于所述密封室中的气体。

公开(公告)号：US4640626A

公开(公告)日：1987-02-03

申请号：US757445

申请日：1985-07-22

申请人： Ralf Schmid ,  Johann Otto ,  Daniela Bernklau ,  Erwin Knapek

发明人： Ralf Schmid ,  Johann Otto ,  Daniela Bernklau ,  Erwin Knapek

IPC分类号： G01N25/72 ,  G01Q30/02 ,  G01Q30/10 ,  G01R31/308 ,  G01R31/00

CPC分类号： G01R31/308

摘要： A method and apparatus localize weak points within an electrical circuit. The electrical circuit is covered with a liquid crystal and is heated to a temperature just below the clearing point of the liquid crystal. The liquid crystal converts into its unordered condition given a temperature increase and leakage channel within the integrated circuit are completely localized. By irradiating a three-dimensional region, at least one current is induced in the region by generating electron-hole pairs within the electrical circuit, this at least one current causing a temperature increase at at least one weak point of the electrical circuit.

摘要翻译： 一种方法和装置将电路内的弱点定位。 电路用液晶覆盖，并被加热到刚好低于液晶的清除点的温度。 鉴于温度升高，液晶转换为无序状态，集成电路内的泄漏通道完全定位。 通过照射三维区域，通过在电路内产生电子 - 空穴对，在该区域中感应至少一个电流，该至少一个电流在电路的至少一个弱点处引起温度升高。

公开(公告)号：US3567927A

公开(公告)日：1971-03-02

申请号：US3567927D

申请日：1969-04-11

申请人： NASA

发明人： BARRINGTON ALFRED E

IPC分类号： G01Q30/10 ,  G01Q30/20 ,  H01J49/14 ,  H01J37/00 ,  G01N23/00

CPC分类号： H01J49/142

摘要： An improved ion microprobe mass spectrometer type apparatus is provided that is suitable for analyzing trace amounts of a fluid. The present invention utilizes a target electrode for holding the sample, and a means for cooling the surfaces of the target to below a fixed temperature for a determined period of time. A stream of sample fluid is directed over the cooled surfaces of the target and is condensed thereon after which the target surface is sputtered by an incident, high intensity primary beam directed obliquely onto the surface thereof. Thereafter, means is provided for focusing the electrically charged ions of sample material that result in a secondary beam produced due to the bombardment of the sample layer. Additional means is provided to remove the prior material from the target surfaces after each analysis, so that the target surface is prepared for another sample layer. The invention described herein was made by an employee of the United States Government and may be manufactured and used by or for the Government for governmental purposes without the payment of any royalties thereon or therefor.

公开(公告)号：US3461332A

公开(公告)日：1969-08-12

申请号：US3461332D

申请日：1965-11-26

申请人： SHELDON EDWARD E

发明人： SHELDON EDWARD E

IPC分类号： G01Q30/10 ,  H01J29/02 ,  H01J31/50 ,  H01J43/24 ,  H01J31/26 ,  H01J39/02

CPC分类号： H01J43/24 ,  H01J29/023 ,  H01J31/507