Wafer and stage alignment using photonic devices
    81.
    发明授权
    Wafer and stage alignment using photonic devices 失效
    使用光子器件的晶圆和阶段对准

    公开(公告)号:US07808657B2

    公开(公告)日:2010-10-05

    申请号:US11770105

    申请日:2007-06-28

    CPC classification number: G01B11/002

    Abstract: A position sensing system for an optical metrology system, includes a plurality of photonic devices distributed on a carrier for providing a photonic response when interrogated with a measuring light, wherein a collective photonic response from the plurality indicates the position of the carrier. A method and an optical metrology system are also provided.

    Abstract translation: 用于光学测量系统的位置感测系统包括分布在载体上的多个光子器件,用于当用测量光询问时提供光子响应,其中来自多个的集体光子响应指示载体的位置。 还提供了一种方法和光学测量系统。

    MOLD MANAGEMENT SYSTEM AND METHOD THEREOF
    82.
    发明申请
    MOLD MANAGEMENT SYSTEM AND METHOD THEREOF 审中-公开
    模具管理系统及其方法

    公开(公告)号:US20100228648A1

    公开(公告)日:2010-09-09

    申请号:US12582777

    申请日:2009-10-21

    CPC classification number: G05B19/4065 G05B2219/50276 G06Q10/087 G06Q10/1093

    Abstract: A mold management system connected to a shopping floor control (SFC) system is operable to manage a plurality of molds. Each of the plurality of molds bears an exclusive barcode containing basic information of the mold. The mold management system includes a query module, a selection module, an input registration module, and a notification module. The query module queries basic information for requested molds in a database, and production information from the SFC system to obtain a scheduled usage history of the requested molds. The selection module selects a mold with usage history most exceeding the scheduled usage history to be outbound. The input registration module updates a usage history of the outbound mold when the outbound mold is to be inbound. The notification module determines whether the inbound mold is to be discarded based on the updated usage history.

    Abstract translation: 连接到购物楼控制(SFC)系统的模具管理系统可操作以管理多个模具。 多个模具中的每一个具有包含模具的基本信息的专用条形码。 模具管理系统包括查询模块,选择模块,输入注册模块和通知模块。 查询模块查询数据库中请求的模具的基本信息,以及来自SFC系统的生产信息,以获取所请求模具的计划使用历史。 选择模块选择使用历史记录最多超过预定使用历史的模具进行出站。 输入登记模块在出站模具进场时更新出站模具的使用历史记录。 通知模块基于更新的使用历史来确定是否要丢弃入站模具。

    SYSTEM AND METHOD FOR PROVIDING EDUCATIONAL COURSES
    83.
    发明申请
    SYSTEM AND METHOD FOR PROVIDING EDUCATIONAL COURSES 审中-公开
    提供教育课程的制度和方法

    公开(公告)号:US20100196869A1

    公开(公告)日:2010-08-05

    申请号:US12757225

    申请日:2010-04-09

    CPC classification number: G09B5/00

    Abstract: A system and method for providing educational course data includes receiving identification data of a first educational course of a first educational institution from a client machine and retrieving educational course equivalency data from a database based on the identification data. The educational course equivalency data is transmitted to the client machine. The educational course equivalency data may include identification data of a second educational course of a second educational institution. The educational course equivalency data may indicate that the first and second educational courses are directly equivalent. The method may also include retrieving course information related to the second educational course based on a request and transmitting the course information to the client machine.

    Abstract translation: 用于提供教育课程数据的系统和方法包括从客户端机器接收第一教育机构的第一教育课程的识别数据,并且基于识别数据从数据库中检索教育课程等价数据。 教育课程的等值数据传送到客户端机器。 教育课程等价数据可以包括第二教育机构的第二教育课程的识别数据。 教育课程等值数据可能表明第一和第二教育课程是直接相等的。 该方法还可以包括基于请求检索与第二教育课程相关的课程信息,并将课程信息发送给客户端机器。

    NEAR INFRARED DYE COMPOSITION
    84.
    发明申请
    NEAR INFRARED DYE COMPOSITION 有权
    近红外组合物

    公开(公告)号:US20100186178A1

    公开(公告)日:2010-07-29

    申请号:US12359258

    申请日:2009-01-23

    CPC classification number: C09B67/0007

    Abstract: A near infrared dye composition includes a microcapsule that includes an inner core region and an outer shell. The inner core region includes a cross-linked polymer-near infrared dye aggregate. The outer shell includes nanoparticles.

    Abstract translation: 近红外染料组合物包括包含内芯区域和外壳体的微胶囊。 内芯区域包括交联聚合物近红外染料聚集体。 外壳包括纳米颗粒。

    Layered devices with crosslinked polymer and methods of preparing the same
    85.
    发明申请
    Layered devices with crosslinked polymer and methods of preparing the same 有权
    具有交联聚合物的分层器件及其制备方法

    公开(公告)号:US20100133515A1

    公开(公告)日:2010-06-03

    申请号:US11700447

    申请日:2007-01-30

    Abstract: The present invention is drawn to a layered organic device, and a method of forming the same. The method includes steps of applying a first solvent-containing organic layer to a substrate and removing solvent from the first solvent-containing organic layer to form a first solidified organic layer. Additional steps include applying a second solvent-containing organic layer to the first solidified organic layer and removing solvent from the second solvent-containing organic layer to form a second solidified organic layer. The first solidified organic layer can be crosslinked, which suppresses negative impact to components in the first solidified organic layer when the solvent of the second solvent-containing organic layer is deposited on the first solidified organic layer.

    Abstract translation: 本发明涉及层状有机器件及其形成方法。 该方法包括将第一含溶剂的有机层施加到基底上并从第一含溶剂的有机层除去溶剂以形成第一固化有机层的步骤。 附加步骤包括将第二含溶剂的有机层施加到第一固化有机层并从第二含溶剂的有机层除去溶剂以形成第二固化的有机层。 当第一固化有机层的溶剂沉积在第一固化有机层上时,第一固化有机层可以交联,这抑制了对第一固化有机层中的组分的负面影响。

    Metrology tool recipe validator using best known methods
    86.
    发明授权
    Metrology tool recipe validator using best known methods 失效
    计量工具配方验证器使用最有名的方法

    公开(公告)号:US07716009B2

    公开(公告)日:2010-05-11

    申请号:US11936971

    申请日:2007-11-08

    Abstract: A method of preparing recipes of operating a metrology tool, wherein each recipe includes a set of instructions for measuring at least one dimension in a microelectronic feature. There is provided a desired recipe having instructions for measuring one or more desired dimensions, the desired recipe or portion thereof including a summary of parameters relating to metrology tool function with respect to the microelectronic feature dimension to be measured. The method includes comparing the instructions in the desired recipe with the instructions in a database, identifying differences between the instructions in the desired recipe and the instructions in the database, modifying the instructions in the desired recipe to conform to the instructions in the database, verifying the desired recipe prior to using the modified desired recipe by the metrology tool, and using the desired recipe to execute a microelectronic feature measurement on the metrology tool.

    Abstract translation: 一种制备操作计量工具的配方的方法,其中每个配方包括用于测量微电子特征中的至少一个维度的指令集。 提供了具有用于测量一个或多个期望尺寸的指令的期望配方,所需的配方或其部分包括与待测量的微电子特征尺寸有关的计量工具功能的参数的总结。 该方法包括将期望配方中的指令与数据库中的指令进行比较,识别所需配方中的指令与数据库中的指令之间的差异,修改所需配方中的指令以符合数据库中的指令,验证 在由计量工具使用修改的所需配方之前使用期望的配方,并且使用期望的配方在计量工具上执行微电子特征测量。

    Illuminating Device Which Accesses Natural Energy
    87.
    发明申请
    Illuminating Device Which Accesses Natural Energy 有权
    使用自然能源的照明装置

    公开(公告)号:US20100073921A1

    公开(公告)日:2010-03-25

    申请号:US12234646

    申请日:2008-09-20

    Applicant: Jian-Lin ZHOU

    Inventor: Jian-Lin ZHOU

    Abstract: An illuminating device which accesses natural energy is an independent cylindrical unit, an interior is provided with a once-through passage to absorb solar thermal radiation wave which then operates on air molecules inside the once-through passage to increase an ionization speed, so as to form resultant force. The resultant force is then converted into mechanical energy which operates a suspended air screw to rotate, so as to drive a magneto generator to convert into an electric current which is used for illuminating through an access control

    Abstract translation: 进入自然能的照明装置是独立的圆柱形单元,内部设置有一个一次通过的通道,以吸收太阳热辐射波,该太阳热辐射波对该直通通道内的空气分子进行操作,以提高电离速度,从而 形成合力。 然后将合力转化为机械能,其操作悬浮空气螺杆以旋转,以便驱动磁发电机转换成用于通过进入控制器照明的电流

    CHARACTERIZING FILMS USING OPTICAL FILTER PSEUDO SUBSTRATE
    89.
    发明申请
    CHARACTERIZING FILMS USING OPTICAL FILTER PSEUDO SUBSTRATE 有权
    使用光学过滤芯片表征膜

    公开(公告)号:US20090186427A1

    公开(公告)日:2009-07-23

    申请号:US12015795

    申请日:2008-01-17

    CPC classification number: G01N21/8422 G01B11/0625 G01B11/0641 G01B11/0683

    Abstract: A system and method of characterizing a parameter of an ultra thin film, such as a gate oxide layer. A system is disclosed that includes a structure having a pseudo substrate positioned below an ultra thin film, wherein the pseudo substrate includes an optical mirror for enhancing an optical response; and a system for characterizing the ultra thin film by applying a light source to the ultra thin film and analyzing the optical response.

    Abstract translation: 表征超薄膜(例如栅极氧化物层)的参数的系统和方法。 公开了一种包括具有位于超薄膜下方的伪衬底的结构的系统,其中所述伪衬底包括用于增强光学响应的​​光学镜; 以及通过将光源施加到超薄膜并分析光学响应来表征超薄膜的系统。

    DETERMINING SIGNAL QUALITY OF OPTICAL METROLOGY TOOL
    90.
    发明申请
    DETERMINING SIGNAL QUALITY OF OPTICAL METROLOGY TOOL 审中-公开
    确定光学计量学工具的信号质量

    公开(公告)号:US20090182529A1

    公开(公告)日:2009-07-16

    申请号:US12013614

    申请日:2008-01-14

    CPC classification number: G01B21/045 G03F7/70508 G03F7/70625

    Abstract: A method, system and computer program product for determining a signal quality of an optical metrology tool are disclosed. A method comprises: collecting a data pool regarding measurements of a target made by the optical metrology tool, the data pool including a wavelength of incident light used in a measurement; and statistically analyzing the data pool to obtain a wavelength specific signal quality of the optical metrology tool.

    Abstract translation: 公开了一种用于确定光学测量工具的信号质量的方法,系统和计算机程序产品。 一种方法包括:收集关于由光学测量工具制作的目标的测量的数据池,所述数据池包括在测量中使用的入射光的波长; 并统计分析数据池,以获得光学计量工具的波长特定信号质量。

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