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81.发明申请Barrier metal film production apparatus, barrier metal film production method, metal film production method, and metal film production apparatus 审中-公开阻隔金属膜制造装置，阻隔金属膜制造方法，金属膜制造方法以及金属膜制造装置公开(公告)号：US20070087577A1
公开(公告)日：2007-04-19
申请号：US11638511
申请日：2006-12-14
CPC分类号： H01L21/7685 , C23C8/36 , C23C16/14 , C23C16/34 , C23C16/40 , C23C16/4488 , C23C16/452 , C23C16/507 , C23C16/56 , C23F4/00 , H01L21/28556 , H01L21/76843 , H01L21/76846 , H01L21/76856 , H01L21/76862 , H01L21/76876 , H01L21/76888 , H01L2221/1078
摘要： A Cl2 gas plasma is generated at a site within a chamber between a substrate and a metal member. The metal member is etched with the Cl2 gas plasma to form a precursor. A nitrogen gas is excited in a manner isolated from the chamber accommodating the substrate. A metal nitride is formed upon reaction between excited nitrogen and the precursor, and formed as a film on the substrate. After film formation of the metal nitride, a metal component of the precursor is formed as a film on the metal nitride on the substrate. In this manner, a barrier metal film with excellent burial properties and a very small thickness is produced at a high speed, with diffusion of metal being suppressed and adhesion to the metal being improved.
摘要翻译： 在衬底和金属构件之间的室内的位置处产生Cl 2/2气体等离子体。 用Cl 2 H 2气体等离子体蚀刻金属构件以形成前体。 以与容纳基板的室隔离的方式激发氮气。 在被激发的氮和前体之间反应时形成金属氮化物，并在基板上形成膜。 在金属氮化物成膜后，在基板上的金属氮化物上形成前体的金属成分作为膜。 以这种方式，以高速度产生具有优异的埋藏性能和非常小的厚度的阻挡金属膜，其中金属的扩散被抑制并且对金属的粘附性得到改善。
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公开(公告)号：US20060191481A1
公开(公告)日：2006-08-31
申请号：US11391241
申请日：2006-03-29
IPC分类号： C23C16/00
CPC分类号： C23C16/45565 , C23C16/08 , C23C16/14 , C23C16/4488 , C23C16/452 , C23C16/505 , H01L21/28556
摘要： An apparatus for forming a metal film, including a reaction vessel for housing a substrate, a precursor feeding device for bubbling a carrier gas through a liquid organometallic complex, vaporizing the organometallic complex, producing a precursor from the vaporized organometallic complex, and feeding the precursor into the reaction vessel, a rotating magnetic field generator for creating a rotating magnetic field in a space above the substrate, and a second plasma generator for generating a plasma from a reducing gas fed into the reaction vessel.
摘要翻译： 一种用于形成金属膜的装置，包括用于容纳基底的反应容器，用于使载气鼓泡通过液体有机金属络合物的前体进料装置，汽化有机金属配合物，从蒸发的有机金属络合物制备前体，以及将前体 旋转磁场发生器，用于在衬底上方的空间中产生旋转磁场;以及第二等离子体发生器，用于从进料到反应容器中的还原气体产生等离子体。
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公开(公告)号：US20060191477A1
公开(公告)日：2006-08-31
申请号：US11391251
申请日：2006-03-29
IPC分类号： C23C16/00
CPC分类号： C23C16/45565 , C23C16/08 , C23C16/14 , C23C16/4488 , C23C16/452 , C23C16/505 , H01L21/28556
摘要： An apparatus for forming a metal film, including a reaction vessel in which a substrate to be treated is placed, a raw material gas feed pipe inserted into the inlet vessel for feeding chlorine or hydrogen chloride, a spiral tube attached to the inner end of the raw material gas feed pipe, having a raw material gas flow passage whose inner surface is made of copper, and equipped with a heating element, an atomic reducing gas producing device for producing an atomic reducing gas within the reaction vessel, at least in the neighborhood of the substrate to be treated, and an evacuation device for evacuating any gas from the reaction vessel and the raw material gas flow passage.
摘要翻译： 一种用于形成金属膜的装置，包括其中放置待处理基板的反应容器，插入入口容器中用于供给氯或氯化氢的原料气体进料管，附接到待处理基材的内端的螺旋管 原料气体供给管，其内表面由铜制成的原料气体流路，配置有加热元件，至少在邻近区域内配置有用于在反应容器内制造原子还原气体的原子生成气体生成装置 以及用于从反应容器和原料气体流路中排出任何气体的排气装置。
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公开(公告)号：US20060177583A1
公开(公告)日：2006-08-10
申请号：US11391242
申请日：2006-03-29
CPC分类号： C23C16/45565 , C23C16/08 , C23C16/14 , C23C16/4488 , C23C16/452 , C23C16/505 , H01L21/28556
摘要： A method for forming a metal film, including bringing a raw material gas containing a halogen into contact with a hot metallic filament, thereby etching the filament with the raw material gas to produce a precursor composed of a metallic component contained in the filament and the halogen contained in the raw material gas, producing an atomic reducing gas by heating a reducing gas to a high temperature, passing the precursor through the atomic reducing gas to remove the halogen from the precursor, and directing the resulting metallic ion or neutral metal onto a substrate to form a thin metal film on the substrate.
摘要翻译： 一种形成金属膜的方法，包括使含有卤素的原料气体与热金属细丝接触，由此用原料气体蚀刻细丝，以制造由长丝中包含的金属成分构成的前体和卤素 包含在原料气体中，通过将还原气体加热至高温来制造原子还原气体，使前体通过原子还原气体从前体除去卤素，并将得到的金属离子或中性金属导向基板 以在基板上形成薄金属膜。
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公开(公告)号：US20050230830A1
公开(公告)日：2005-10-20
申请号：US11132223
申请日：2005-05-19
申请人： Hitoshi Sakamoto , Naoki Yahata , Toshihiko Nishimori , Yoshiyuki Ooba , Hiroshi Tonegawa , Ikumasa Koshiro , Yuzuru Ogura
发明人： Hitoshi Sakamoto , Naoki Yahata , Toshihiko Nishimori , Yoshiyuki Ooba , Hiroshi Tonegawa , Ikumasa Koshiro , Yuzuru Ogura
IPC分类号： C23C16/08 , C23C16/14 , C23C16/44 , C23C16/448 , H01J37/32 , H01L21/285 , H01L21/44 , H01L21/768
CPC分类号： H01J37/321 , C23C16/08 , C23C16/14 , C23C16/4488 , H01J37/32357 , H01J2237/3326 , H01L21/28556 , H01L21/76879
摘要： In a metal film production apparatus, a copper plate member is etched with a Cl2 gas plasma within a chamber to form a precursor comprising a Cu component and a Cl2 gas; and the temperatures of the copper plate member and a substrate and a difference between their temperatures are controlled as predetermined, to deposit the Cu component of the precursor on the substrate, thereby forming a film of Cu. In this apparatus, Cl* is formed in an excitation chamber of a passage communicating with the interior of the chamber to flow a Cl2 gas, and the Cl* is supplied into the chamber to withdraw a Cl2 gas from the precursor adsorbed onto the substrate, thereby promoting a Cu film formation reaction. The apparatus has a high film formation speed, can use an inexpensive starting material, and can minimize impurities remaining in the film.
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86.发明授权
公开(公告)号：US5372702A
公开(公告)日：1994-12-13
申请号：US871917
申请日：1992-04-22
申请人： Takashi Kojima , Hitoshi Sakamoto
发明人： Takashi Kojima , Hitoshi Sakamoto
CPC分类号： C04B35/532 , C04B35/83
摘要： The improved composition for use in the production of composite carbon materials comprises a mesophase pitch containing at least 80% of an optical anisotropic phase and having a softening point of no higher than 250.degree. C., and sulfur present in an amount of 6-35 parts by weight per 100 parts by weight of said mesophase pitch. Said composition may be heated together with an aggregate and subsequently shaped to yield a composite carbon material. The improved process for producing a composite carbon material comprises impregnating an aggregate with said composition as it is melted, shaping the mixture in a temperature range of 150.degree.-350.degree. C, and then carbonizing the shaped part.
摘要翻译： 用于生产复合碳材料的改进的组合物包括含有至少80％的光学各向异性相并且软化点不高于250℃的中间相沥青，并且硫存在量为6-35 每100重量份所述中间相沥青重量份。 所述组合物可以与骨料一起加热并随后成型以产生复合碳材料。 用于生产复合碳材料的改进方法包括在熔融时将组合物浸渍在所述组合物中，在150-350℃的温度范围内使混合物成形，然后使成形部分碳化。
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87.发明授权
公开(公告)号：US4698699A
公开(公告)日：1987-10-06
申请号：US694300
申请日：1985-01-24
申请人： Hitoshi Sakamoto , Takayuki Okafuji
发明人： Hitoshi Sakamoto , Takayuki Okafuji
CPC分类号： G11B5/592
摘要： A video signal reproducing apparatus comprises a rotary magnetic head which reproduces a video signal recorded on a magnetic tape, a rotator which rotates the rotary magnetic head to cause the same to scan the magnetic tape intermittently along a oblique path thereon, a head supporting member, such as a compound piezoelectric plate element, which supports the rotary magnetic head to rotate in accordance with the rotation of the rotator and to shift the position of the rotary magnetic head in the direction of the axis for rotation thereof in response to the level of a control signal supplied thereto, and a signal generator which produces a signal acting as the control signal in a "trick" reproducing mode and having such level variations as to cause the head supporting member to have a swinging movement in a period in which the rotary magnetic head is not in contact with the magnetic head, which affects to cancel a swinging movement of the head supporting member occuring in a period in which the rotary magnetic head scans the magnetic tape.
摘要翻译： 视频信号再现装置包括：再现记录在磁带上的视频信号的旋转磁头;使旋转磁头旋转的旋转体，使旋转磁头沿其斜向路径间歇地扫描磁带;磁头支撑部件， 例如复合压电板元件，其支撑旋转磁头根据旋转体的旋转而旋转，并且响应于水平的旋转磁头沿轴线的方向移动以使其旋转的位置 提供给其的控制信号，以及信号发生器，其以“特技”再现模式产生作为控制信号的信号，并且具有这样的电平变化，使得头部支撑构件在旋转磁体 头部不与磁头接触，这影响了在w周期内发生头部支撑构件的摆动运动 旋转磁头扫描磁带。
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公开(公告)号：US4549235A
公开(公告)日：1985-10-22
申请号：US670669
申请日：1984-11-13
申请人： Hitoshi Sakamoto
发明人： Hitoshi Sakamoto
CPC分类号： G11B5/588 , Y10S358/907
摘要： An apparatus for reproducing video signals recorded on a recording medium in successive parallel tracks having a predefined pitch and which are skewed relative to a direction of movement of the medium comprises a signal transducer which repeatedly scans the recording medium in a direction along the tracks for reproducing the video signals from the successive tracks upon movement of the medium at a predetermined speed, a transducer deflecting device which is responsive to drive signals and which deflects the signal transducer in a direction transverse to the direction of the tracks, a circuit which generates a plurality of types of jump signals of different respective amplitudes to cause the transducer deflecting device to select the track scanned by the signal transducer, each type of jump signals corresponding to a displacement of the signal transducer by a respective number of track pitches, a phase detector which detects a phase signal included in the video signal reproduced by the signal transducer and which generates reproduced phase signals therefrom, a speed detector which detects the predetermined speed of the medium and which generates detected speed signals in response thereto, a selector responsive to control signals selectively supplying one of the types of jump signals to the transducer deflecting device when the signal transducer reaches an end of each of the successive tracks, and a controller responsive to the reproduced phase signals and the detected speed signals and which generates the control signals for the selector.
摘要翻译： 用于再现记录在记录介质上的具有预定间距并且相对于介质移动方向倾斜的记录介质的视频信号的装置包括信号转换器，该信号传感器在沿着轨道的方向上重复扫描记录介质以便再现 在介质以预定速度移动时来自连续轨道的视频信号，响应于驱动信号并使信号换能器沿横向于轨道方向偏转的换能器偏转装置，产生多个 的各种振幅的跳跃信号的类型，以使换能器偏转装置选择由信号转换器扫描的轨道，每种类型的跳跃信号对应于信号换能器的位移由相应数量的轨道间距，相位检测器 检测由该再现的视频信号中包括的相位信号 信号传感器，并且其从其产生再现的相位信号;速度检测器，其检测介质的预定速度并响应于此产生检测到的速度信号;响应于选择性地将这些类型的跳跃信号提供给换能器偏转的控制信号的选择器 当信号传感器到达每个连续轨道的末端时，控制器，以及响应于再现的相位信号和检测到的速度信号并且产生用于选择器的控制信号的控制器。
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公开(公告)号：US4500097A
公开(公告)日：1985-02-19
申请号：US572320
申请日：1984-01-20
CPC分类号： G01D5/34769 , Y10S277/918
摘要： In a seal device in a displacement measuring instrument, comprising a hollow case fixed to one member, a connecting rod for imparting a displacement of the other member to a displacement detecting mechanism housed in the hollow case through the opening and seal members disposed at opposite sides of the opening, for shielding a penetrating portion of said connecting rod, to enhance the drip-proof performance, a difference is given between the positions of the forward ends of lip members constituting said seal members, whereby the forward end of the lip member disposed at one side where liquid drops are generated is projected farther than the forward end of the lip member disposed at the other side, and/or a liquid receiving groove extending along the opening is provided at least at one side of the inner surface of the hollow case, liquid drain holes are formed in the bottoms of the liquid receiving grooves, filters for excluding dust intruding from outside are provided in the liquid drain holes, and/or liquid breaking means for precluding a liquid flow intruding from outside of the hollow case are provided on the outer peripheral surface of the connecting rod.
摘要翻译： 在位移测量仪器的密封装置中，包括固定到一个构件的中空壳体，连接杆，用于通过设置在相对侧的开口和密封构件将另一构件移动到容置在中空壳体中的位移检测机构 的开口部，为了遮蔽所述连杆的贯通部，为了提高防滴漏性，在构成所述密封部件的唇部件的前端的位置之间存在差异，由此唇部件的前端设置 在产生液滴的一侧比设置在另一侧的唇缘部件的前端更远，并且/或沿着开口延伸的液体接收槽至少设置在中空部分的内表面的一侧 在液体容纳槽的底部形成液体排出孔，在液体抽屉中设置用于排除从外部侵入的灰尘的过滤器 在连接杆的外周面上设置有用于排除从中空壳体外部侵入的液体流的液体破裂装置和/或液体破坏装置。
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公开(公告)号：US4486796A
公开(公告)日：1984-12-04
申请号：US575266
申请日：1984-01-30
申请人： Hitoshi Sakamoto
发明人： Hitoshi Sakamoto
IPC分类号： H04N5/7826 , G11B5/588 , G11B21/10 , G11B27/02 , G11B27/024 , G11B5/52 , G11B21/04
CPC分类号： G11B5/588 , G11B21/10 , G11B27/024
摘要： The position of a rotary head mounted on a deflection device is controlled as the head scans successive tracks on a record medium. Tracking drive signals are generated as a function of the deviation of the head relative to a track scanned thereby. The tracking drive signal is sampled at successive locations along the trace. Previously stored samples are compared to the sucessively produced samples, and any difference is used to correct the stored sample by a predetermined amount irrespective of the actual difference. Hence, the stored samples gradually are corrected to represent the configuration of the tracks scanned by the rotary head. When the head reproduces signals from the record medium, the generated tracking drive signals are used to control the deflection device so as to make the head coincident with the track being scanned thereby. When the head is used to record signals, the stored samples are used to control the deflection device before such samples are corrected. For recording, the stored samples may be compared to reference samples, and gradually are corrected to conform to the reference samples, and used to control the deflection device so that the traces gradually conform to the configuration represented by the reference samples.
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