Process And Apparatus For Forming Oxide Film, And Electronic Device Material
    82.
    发明申请
    Process And Apparatus For Forming Oxide Film, And Electronic Device Material 审中-公开
    用于形成氧化膜和电子器件材料的工艺和装置

    公开(公告)号:US20100048033A1

    公开(公告)日:2010-02-25

    申请号:US12612471

    申请日:2009-11-04

    IPC分类号: H01L21/314

    摘要: An oxide film-forming apparatus, comprising: a process chamber for disposing an electronic device substrate at a predetermined position; water vapor supply means for supplying water vapor into the process chamber; and plasma exciting means for activating the water vapor with plasma, whereby the surface of the electronic device substrate can be irradiated with the plasma based on the water vapor.

    摘要翻译: 一种氧化膜形成装置,包括:处理室,用于将电子器件基板设置在预定位置; 用于将水蒸汽供应到处理室中的水蒸气供应装置; 以及用于用等离子体激活水蒸气的等离子体激发装置,由此可以基于水蒸气照射等离子体的电子器件基板的表面。

    Semiconductor Storage Device and Method for Manufacturing the Same
    84.
    发明申请
    Semiconductor Storage Device and Method for Manufacturing the Same 失效
    半导体存储装置及其制造方法

    公开(公告)号:US20090072327A1

    公开(公告)日:2009-03-19

    申请号:US11576499

    申请日:2005-09-30

    摘要: [Problems] To provide a semiconductor storage device with excellent electrical characteristics (write/erase characteristics) by means of favorable nitrogen concentration profile of a gate insulating film, and to provide a method for manufacturing such a device.[Means for Solving Problems] a semiconductor device fabricating method according to a first aspect of the invention, a method for fabricating a semiconductor storage device that operates by transferring charges through a gate insulating film formed between a semiconductor substrate and a gate electrode, includes a step for introducing an oxynitriding species previously diluted by plasma excitation gas, into a plasma processing apparatus, generating an oxynitriding species by means of a plasma, and forming an oxynitride film on the semiconductor substrate as the gate insulating film. The oxynitriding species contains NO gas at a ratio of 0.00001 to 0.01% to the total volume of gas introduced into the plasma processing apparatus.

    摘要翻译: [问题]通过栅极绝缘膜的有利的氮浓度分布,提供具有优异的电特性(写/擦除特性)的半导体存储装置,并提供制造这种器件的方法。 解决问题的手段根据本发明的第一方面的半导体器件制造方法,一种制造半导体存储器件的方法,所述半导体存储器件通过在半导体衬底和栅电极之间形成的栅极绝缘膜转移电荷而工作,包括: 将先前由等离子体激发气体稀释的氮氧化物质引入等离子体处理装置,通过等离子体产生氮氧化物质,并在半导体衬底上形成氧氮化物膜作为栅极绝缘膜的步骤。 氮氧化物质相对于引入等离子体处理装置的气体的总体积含有0.00001〜0.01%的NO气体。

    Confocal microspectroscope
    87.
    发明授权
    Confocal microspectroscope 有权
    共聚焦显微镜

    公开(公告)号:US07315039B2

    公开(公告)日:2008-01-01

    申请号:US11020456

    申请日:2004-12-22

    申请人: Junichi Kitagawa

    发明人: Junichi Kitagawa

    IPC分类号: G01N23/04

    摘要: There is disclosed a confocal microspectroscope comprising an excitation light source having two or more semiconductor light sources formed on the same chip by a semiconductor process and covering a predetermined wavelength region, a semiconductor light source control unit for controlling on/off of the semiconductor light sources, and a microscope main body having a scanning unit for scanning light from the excitation light source on a specimen and a confocal detector for detecting the light emitted from the specimen, wherein wavelengths of the light emitted from the two or more semiconductor light sources differ by a predetermined wavelength.

    摘要翻译: 公开了一种共聚焦显微镜,其包括通过半导体工艺在同一芯片上形成并覆盖预定波长区域的具有两个或更多个半导体光源的激发光源,用于控制半导体光源的开/关的半导体光源控制单元 以及显微镜主体,具有用于扫描来自激光光源的样本的光的扫描单元和用于检测从样本发射的光的共焦检测器,其中从两个或更多个半导体光源发射的光的波长相差 预定波长。

    Process and apparatus for forming oxide film, and electronic device material
    88.
    发明申请
    Process and apparatus for forming oxide film, and electronic device material 失效
    用于形成氧化膜的方法和设备以及电子器件材料

    公开(公告)号:US20070128880A1

    公开(公告)日:2007-06-07

    申请号:US11508871

    申请日:2006-08-24

    IPC分类号: C23C16/00 H01L21/31

    摘要: An oxide film-forming apparatus, comprising: a process chamber for disposing an electronic device substrate at a predetermined position; water vapor supply means for supplying water vapor into the process chamber; and plasma exciting means for activating the water vapor with plasma, whereby the surface of the electronic device substrate can be irradiated with the plasma based on the water vapor.

    摘要翻译: 一种氧化膜形成装置,包括:处理室,用于将电子器件基板设置在预定位置; 用于将水蒸汽供应到处理室中的水蒸气供应装置; 以及用于用等离子体激活水蒸气的等离子体激发装置,由此可以基于水蒸气照射等离子体的电子器件基板的表面。

    Light scanning type confocal microscope
    90.
    发明申请
    Light scanning type confocal microscope 有权
    光扫描型共聚焦显微镜

    公开(公告)号:US20050286048A1

    公开(公告)日:2005-12-29

    申请号:US11154968

    申请日:2005-06-16

    申请人: Junichi Kitagawa

    发明人: Junichi Kitagawa

    IPC分类号: G01N21/64

    CPC分类号: G01N21/6458

    摘要: A light scanning type confocal microscope includes a light source unit that projects an excitation light beam, a scanning optical system that scans the excitation light beam, an objective lens that applies the excitation light beam to a sample, a separation optical element that separates the excitation light and detection light generated by the sample, a confocal detection unit that obtains a confocal effect, and a spectral detection device that spectrally detects the detection light. The spectral detection device has a spectroscopic element that spectrally separates the detection light, a light extracting unit that extracts light in a wavelength band from the light spectrally separated by the spectroscopic element, a detector that detects the light extracted by the light extracting unit, and a wavelength band shifting unit that shifts a wavelength band of light to be extracted by the light extracting unit.

    摘要翻译: 光扫描型共聚焦显微镜包括投射激发光束的光源单元,扫描激发光束的扫描光学系统,将激发光束施加到样本的物镜;分离光学元件,其分离激发 由样品产生的光和检测光,获得共焦效应的共焦检测单元以及光谱检测检测光的光谱检测装置。 光谱检测装置具有光谱分离检测光的分光元件,从由分光元件光谱分离的光提取波长带的光的光提取单元,检测由光提取单元提取的光的检测器,以及 波长带移位单元,其移位由光提取单元提取的光的波长带。