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81.
公开(公告)号:US20240357794A1
公开(公告)日:2024-10-24
申请号:US18645043
申请日:2024-04-24
Applicant: Micron Technology, Inc.
Inventor: Litao Yang , Haitao Liu , Kamal M. Karda , Si-Woo Lee
IPC: H10B12/00
CPC classification number: H10B12/00
Abstract: Systems, methods and apparatus are provided for two transistor cells for vertical three-dimensional memory. The memory has pairs of serially connected transistors, each pair of serially connected transistors having an independent first source/drain region and a shared second source/drain region separated by channel regions; horizontally oriented access lines separated from the channel regions by a gate dielectric material; and vertically oriented digit lines electrically coupled to the first source/drain regions of the serially connected transistors.
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82.
公开(公告)号:US20240274194A1
公开(公告)日:2024-08-15
申请号:US18435434
申请日:2024-02-07
Applicant: Micron Technology, Inc.
Inventor: Kamal M. Karda , Si-Woo Lee , Haitao Liu
CPC classification number: G11C16/0483 , G11C5/063 , H10B41/27
Abstract: Some embodiments include apparatuses in which one of the apparatuses includes a first conductive structure, a second conductive structure, a third conductive structure, and a memory cell. The memory cell includes a semiconductor portion located on a first level of the apparatus and coupled to the first conductive structure, and a charge storage structure located on the first level coupled to the semiconductor portion and separated from the second conductive structure. The third conductive structure is located on a second level of the apparatus adjacent the semiconductor portion, and including first, second, and third conductive regions. The third conductive region is located between the first and second conductive regions and has a material different from a material of the first conductive region and a material of the second conductive region.
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公开(公告)号:US20240188280A1
公开(公告)日:2024-06-06
申请号:US18511007
申请日:2023-11-16
Applicant: Micron Technology, Inc.
Inventor: Kamal M. Karda , Si-Woo Lee , Scott E. Sills , Haitao Liu
IPC: H10B12/00 , H01L29/06 , H01L29/08 , H01L29/423 , H01L29/66 , H01L29/775 , H01L29/786
CPC classification number: H10B12/31 , H01L29/0673 , H01L29/0847 , H01L29/42392 , H01L29/66439 , H01L29/775 , H01L29/78696 , H10B12/05 , H10B12/488
Abstract: Systems, methods and apparatus are provided for a twin channel access device, twin storage node memory cell in a vertical three-dimensional memory. The memory cell has a horizontally oriented access device having a first source/drain region and a second source/drain region separated by a first channel region. The first channel is actuated by a first gate separated from the first channel region by a first gate dielectric. The access device further includes a third source/drain region and a fourth source/drain region separated by a second channel region. The second channel is actuated by a second gate separated from the second channel region by a second gate dielectric. The first and the second gate are connected. A horizontally oriented storage node is coupled to the second and/or fourth source/drain regions of the twin channel access device.
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公开(公告)号:US20240074144A1
公开(公告)日:2024-02-29
申请号:US18387641
申请日:2023-11-07
Applicant: Micron Technology, Inc.
Inventor: Yuichi Yokoyama , Si-Woo Lee
IPC: H10B12/00
CPC classification number: H10B12/30 , H10B12/488 , H10B12/50
Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having a bottom electrode contact for an array of vertically stacked memory cells. The bottom electrode contact is formed in a periphery region. The bottom electrode contact is electrically coupled to a number of bottom electrodes of capacitors that are also formed in the periphery region.
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公开(公告)号:US20240057317A1
公开(公告)日:2024-02-15
申请号:US17886917
申请日:2022-08-12
Applicant: Micron Technology, Inc.
Inventor: Sangmin Hwang , Si-Woo Lee
IPC: H01L27/108
CPC classification number: H01L27/10826 , H01L27/10897 , H01L27/10879
Abstract: A variety of applications can include apparatus having a recessed channel FinFET. The recessed channel FinFET can include one or more fin structures between the source region and the drain region, where the one or more fin structures are recessed from a top level of the source region and from a top level of the drain region. The recessed channel FinFET can include a gate recessed from the top level of a source region and a drain region, where the gate can be separated from tip regions of the fin structures by a gate dielectric defining a channel between the source region and the drain region. Recessed channel FinFETs can be structured in a periphery to an array of a memory device and can be fabricated in a process merged with forming access lines to the array.
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公开(公告)号:US11849573B2
公开(公告)日:2023-12-19
申请号:US17016724
申请日:2020-09-10
Applicant: Micron Technology, Inc.
Inventor: Yuichi Yokoyama , Si-Woo Lee
CPC classification number: H10B12/30 , H10B12/488 , H10B12/50
Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having a bottom electrode contact for an array of vertically stacked memory cells. The bottom electrode contact is formed in a periphery region. The bottom electrode contact is electrically coupled to a number of bottom electrodes of capacitors that are also formed in the periphery region.
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87.
公开(公告)号:US11812603B2
公开(公告)日:2023-11-07
申请号:US16992615
申请日:2020-08-13
Applicant: Micron Technology, Inc.
Inventor: Si-Woo Lee , Scott L. Light , Song Guo
IPC: H01L27/108 , H10B12/00 , G11C5/06
CPC classification number: H10B12/315 , G11C5/063 , H10B12/0335 , H10B12/053 , H10B12/34 , H10B12/482 , H10B12/485 , H10B12/488
Abstract: A microelectronic device comprises semiconductive pillar structures each individually comprising a digit line contact region disposed laterally between two storage node contact regions. At least one semiconductive pillar structure of the semiconductive pillar structures comprises a first end portion comprising a first storage node contact region, a second end portion comprising a second storage node contact region, and a middle portion between the first end portion and the second end portion and comprising a digit line contact region, a longitudinal axis of the first end portion oriented at an angle with respect to a longitudinal axis of the middle portion. Related microelectronic devices, electronic systems, and methods are also described.
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公开(公告)号:US11696432B2
公开(公告)日:2023-07-04
申请号:US17060356
申请日:2020-10-01
Applicant: Micron Technology, Inc.
Inventor: Si-Woo Lee , Byung Yoon Kim , Kyuseok Lee , Sangmin Hwang , Mark Zaleski
IPC: H01L27/108 , H10B12/00 , G11C5/02 , G11C5/10 , H01L27/06
CPC classification number: H10B12/30 , G11C5/025 , G11C5/10 , H01L27/0688
Abstract: Systems, methods, and apparatus including multi-direction conductive lines and staircase contacts for semiconductor devices. One memory device includes an array of vertically stacked memory cells, the array including: a vertical stack of horizontally oriented conductive lines, each conductive line comprising: a first portion extending in a first horizontal direction; and a second portion extending in a second horizontal direction at an angle to the first horizontal direction.
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89.
公开(公告)号:US11469232B2
公开(公告)日:2022-10-11
申请号:US17171336
申请日:2021-02-09
Applicant: Micron Technology, Inc.
Inventor: Si-Woo Lee
IPC: H01L27/108 , H01L21/762
Abstract: Systems, methods and apparatus are provided for an array of vertically stacked memory cells having horizontally oriented access devices and storage nodes. The horizontally oriented access devices having a first source/drain regions and a second source drain regions separated by epitaxially grown channel regions. Gates opposing the channel regions formed fully around every surface of the channel region as gate all around (GAA) structures separated from a channel regions by a gate dielectrics. The memory cells have horizontally oriented storage nodes coupled to the second source/drain regions and digit lines coupled to the first source/drain regions.
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90.
公开(公告)号:US20220285357A1
公开(公告)日:2022-09-08
申请号:US17194859
申请日:2021-03-08
Applicant: Micron Technology, Inc.
Inventor: Guangjun Yang , Vinay Nair , Devesh Dadhich Shreeram , Ashwin Panday , Kangle Li , Zhiqiang Xie , Silvia Borsari , Mohd Kamran Akhtar , Si-Woo Lee
IPC: H01L27/108
Abstract: Some embodiments include an integrated assembly having digit-line-contact-regions between pairs of capacitor-contact-regions. The capacitor-contact-regions are arranged with six adjacent capacitor-contact-regions in a substantially rectangular configuration. Conductive plugs are coupled with the capacitor-contact-regions. Conductive redistribution material is coupled with the conductive plugs. Upper surfaces of the conductive redistribution material are arranged in a substantially hexagonal-close-packed configuration. Digit lines are over the digit-line-contact-regions. Insulative regions are between the digit lines and the conductive plugs. The insulative regions contain voids and/or low-k dielectric material. Capacitors are coupled with the upper surfaces of the conductive redistribution material.
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