公开(公告)号：US20060223310A1

公开(公告)日：2006-10-05

申请号：US11096095

申请日：2005-03-31

申请人： Kenji Suzuki

发明人： Kenji Suzuki

IPC分类号： H01L21/44

CPC分类号： C23C16/52 ,  C23C16/16 ,  H01L21/28556 ,  H01L21/76843 ,  H01L21/76846 ,  H01L21/76856 ,  H01L21/76873 ,  H01L21/76874

摘要： A method for improving adhesion of Cu to a Ru layer in Cu metallization. The method includes providing a substrate in a process chamber of a deposition system, depositing a Ru layer on the substrate in a chemical vapor deposition process, and forming a Cu seed layer on the Ru layer to prevent oxidation of the Ru layer. The Cu seed layer is partially or completely oxidized prior to performing a Cu bulk plating process on the substrate. The oxidized portion of the Cu seed layer is substantially dissolved and removed from the substrate during interaction with a Cu plating solution, thereby forming a bulk Cu layer with good adhesion to the underlying Ru layer.

摘要翻译： Cu金属化时Cu改善Ru层的附着力的方法。 该方法包括在沉积系统的处理室中提供衬底，在化学气相沉积工艺中在衬底上沉积Ru层，以及在Ru层上形成Cu籽晶层以防止Ru层的氧化。 在对基材进行Cu块体电镀工艺之前，Cu籽晶层部分或完全氧化。 在与Cu电镀溶液相互作用的过程中，Cu籽晶层的氧化部分基本上被溶解并从衬底去除，从而形成具有与下面的Ru层具有良好粘附性的体Cu层。

公开(公告)号：US20060185598A1

公开(公告)日：2006-08-24

申请号：US11351546

申请日：2006-02-10

申请人： Kenji Suzuki ,  Emmanuel Guidotti ,  Gerrit Leusink ,  Masamichi Hara ,  Daisuke Kuroiwa ,  Tadahiro Ishizaka

发明人： Kenji Suzuki ,  Emmanuel Guidotti ,  Gerrit Leusink ,  Masamichi Hara ,  Daisuke Kuroiwa ,  Tadahiro Ishizaka

IPC分类号： C23C16/00

CPC分类号： C23C16/4481

摘要： A high conductance, multi-tray film precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing the deposition rate by increasing exposed surface area of film precursor. The multi-tray film precursor evaporation system includes one or more trays. Each tray is configured to support and retain film precursor in, for example, solid powder form or solid tablet form. Additionally, each tray is configured to provide for a high conductance flow of carrier gas over the film precursor while the film precursor is heated. For example, the carrier gas flows inward over the film precursor, and vertically upward through a flow channel within the stackable trays and through an outlet in the solid precursor evaporation system.

摘要翻译： 描述了与高电导蒸气传输系统耦合的高电导多托盘膜前体蒸发系统，以通过增加膜前体的暴露表面积来增加沉积速率。 多托盘膜前体蒸发系统包括一个或多个托盘。 每个托盘被构造成支撑和保持例如固体粉末形式或固体片剂形式的膜前体。 此外，每个托盘构造成在膜前体被加热的同时提供载气在膜前体上的高电导流。 例如，载体气体向内流过膜前体，并且垂直向上流过可堆放托盘内的流动通道并通过固体前驱物蒸发系统中的出口。

公开(公告)号：US20060182886A1

公开(公告)日：2006-08-17

申请号：US11058676

申请日：2005-02-15

申请人： Emmanuel Guidotti ,  Kenji Suzuki ,  Gerrit Leusink ,  Fenton McFeely

发明人： Emmanuel Guidotti ,  Kenji Suzuki ,  Gerrit Leusink ,  Fenton McFeely

IPC分类号： C23C16/00 ,  B05C11/00

CPC分类号： C23C16/4481 ,  C23C16/16 ,  C23C16/4404 ,  C23C16/4405 ,  C23C16/45565

摘要： A method and system for improved delivery of a solid precursor. A chemically inert coating is provided on system components in a precursor delivery line to reduce decomposition of a relatively unstable precursor vapor in the precursor delivery line, thereby allowing increased delivery of the precursor vapor to a processing zone for depositing a layer on a substrate. The solid precursor can, for example, be a ruthenium carbonyl or a rhenium carbonyl. The inert coating can, for example, be a CxFy-containing polymer, such as polytetrafluoroethylene or ethylene-chlorotrifluoroethylene. Other benefits of using an inert coating include easy periodic cleaning of deposits from the precursor delivery line.

摘要翻译： 一种用于改进固体前体递送的方法和系统。 在前体输送管线中的系统组分上提供化学惰性的涂层，以减少前体输送管线中相对不稳定的前体蒸汽的分解，从而允许增加前体蒸气的输送到用于在基底上沉积层的处理区域。 固体前体可以是例如羰基钌或羰基铼。 惰性涂层可以是例如聚四氟乙烯或乙烯 - 三氟氯乙烯的聚合物。 使用惰性涂层的其他优点包括容易地从前体输送管线定期清洁沉积物。

公开(公告)号：US20060112882A1

公开(公告)日：2006-06-01

申请号：US10998420

申请日：2004-11-29

申请人： Kenji Suzuki ,  Emmanuel Guidotti ,  Gerrit Leusink ,  Masamichi Hara ,  Daisuke Kuroiwa

发明人： Kenji Suzuki ,  Emmanuel Guidotti ,  Gerrit Leusink ,  Masamichi Hara ,  Daisuke Kuroiwa

IPC分类号： C23C16/00

CPC分类号： C23C16/4481 ,  C23C16/16

摘要： A high conductance, multi-tray solid precursor evaporation system coupled with a high conductance vapor delivery system is described for increasing deposition rate by increasing exposed surface area of solid precursor. The multi-tray solid precursor evaporation system includes a base tray with one or more upper trays. Each tray is configured to support and retain film precursor in, for example, solid powder form or solid tablet form. Additionally, each tray is configured to provide for a high conductance flow of carrier gas over the film precursor while the film precursor is heated. For example, the carrier gas flows inward over the film precursor, and vertically upward through a flow channel within the stackable trays and through an outlet in the solid precursor evaporation system.

公开(公告)号：US20060093267A1

公开(公告)日：2006-05-04

申请号：US10541088

申请日：2004-01-29

申请人： Takahiro Arakida ,  Kenji Suzuki

发明人： Takahiro Arakida ,  Kenji Suzuki

IPC分类号： G02B6/26

CPC分类号： G02B6/125 ,  G02B6/2804 ,  G02B6/4246

摘要： To provide an optical waveguide and an optical transmitting and receiving module able to perform a transmitting operation and a receiving operation simultaneously, wherein a linearly first waveguide 21 that one side is coupled to an optical fiber 3 and the other side is coupled to a light receiving element 4, and a second waveguide 22 that one side is coupled so as to make an acute angle θ with the side of the first waveguide 21 to be coupled to the light receiving element 4 and the other is coupled to a light emitting element 5 are provided. By controlling a shape of the second waveguide 22, the receiving signal light from the optical fiber 3 is received to the light receiving element 4, and is not guided to the second waveguide 22. Therefore, the receiving operation and the transmitting operation can be preformed at the same time. Namely, when the transmitting optical signal is the incident of light from the light emitting element 5 to the second waveguide 22, the optical signal is guided by the second waveguide 22 toward the first waveguide 21, coupled to the first waveguide 21, and guided toward the optical fiber 3.

摘要翻译： 为了提供能够同时执行发送操作和接收操作的光波导和光发送和接收模块，其中一侧耦合到光纤3并且另一侧的线性第一波导21耦合到光接收 元件4和第二波导22，其一侧被联接以便使与第一波导21的侧面成锐角的角度θ耦合到光接收元件4而另一侧耦合到发光元件5 提供。 通过控制第二波导22的形状，来自光纤3的接收信号光被接收到光接收元件4，并且不被引导到第二波导22。 因此，可以同时进行接收操作和发送操作。 也就是说，当发射光信号是从发光元件5到第二波导22的光的入射时，光信号被第二波导管22引导到与第一波导21耦合的第一波导21，并被引向 光纤3。

公开(公告)号：US06953493B2

公开(公告)日：2005-10-11

申请号：US10796890

申请日：2004-03-09

申请人： Kunio Nakayama ,  Kenji Suzuki ,  Manabu Yoshida ,  Kenji Yajima ,  Toshihiro Tomita

发明人： Kunio Nakayama ,  Kenji Suzuki ,  Manabu Yoshida ,  Kenji Yajima ,  Toshihiro Tomita

IPC分类号： B01D53/22 ,  B01D65/10 ,  B01D69/10 ,  B01D69/12 ,  B01D71/02 ,  B01D179/00

CPC分类号： B01D69/10 ,  B01D53/228 ,  B01D67/0051 ,  B01D69/12 ,  B01D71/028 ,  B01D2323/12 ,  Y10S55/05

摘要： This invention provides a DDR type zeolite membrane, characterized in that it is formed as a membrane on a substrate and its main component is silica, and that each single gas permeance at room temperature and 100° C. are different, respectively among at least two types of gases selected from a group consisting of carbon dioxide (CO2), hydrogen (H2), oxygen (O2), nitrogen (N2), methane (CH4), normal butane (n-C4H10), isobutane (i-C4H10), sulfur hexafluoride (SF6), ethane (C2H6), ethylene (C2H4), propane (C3H8), propylene (C3H6), carbon monoxide (CO), and nitrogen monoxide (NO).

摘要翻译： 本发明提供一种DDR型沸石膜，其特征在于，其形成为基材上的膜，其主要成分为二氧化硅，室温和100℃下的单一气体渗透率分别在至少两个 选自二氧化碳（CO 2/2），氢（H 2 H 2），氧（O 2/2），氮 （N 2 H 2），甲烷（CH 3）4，正丁烷（nC 4 H 10），异丁烷（ （C 6 H 6），六氟化硫（SF 6 N），乙烷（C 2 H 6） 丙烯（C 3 H 8），乙烯（C 3 H 4），丙烯（C 3 H 8） 丙烯（C 3 H 6），一氧化碳（CO）和一氧化氮（NO）。

公开(公告)号：US20050148457A1

公开(公告)日：2005-07-07

申请号：US11052694

申请日：2005-02-07

申请人： Miyuki Yabuki ,  Kenji Suzuki ,  Shinji Nakamura ,  Toshihiro Tomita

发明人： Miyuki Yabuki ,  Kenji Suzuki ,  Shinji Nakamura ,  Toshihiro Tomita

IPC分类号： B01D53/22 ,  B01D61/36 ,  B01D67/00 ,  B01D69/10 ,  B01D69/12 ,  B01D71/02 ,  B01J29/06 ,  C01B39/04 ,  C01B39/40

CPC分类号： B01D67/0048 ,  B01D53/228 ,  B01D61/362 ,  B01D67/0051 ,  B01D67/0095 ,  B01D69/10 ,  B01D69/12 ,  B01D71/028 ,  B01D2323/08 ,  B01D2323/24 ,  C01B39/04 ,  C01B39/40

摘要： The present invention discloses a production method for a zeolite shaped body in which a tetrapropylammonium hydroxide (TPAOH) solution and tetrapropylammonium bromide (TPABr) are added to a silica sol, an obtained prepared solution is heated under a condition that crystallization and/or precipitation does not occur in the prepared solution in a sealed vessel, the heated prepared solution is dried, an obtained dry gel is shaped, and the shaped dry gel is subjected to crystallization treatment in steam, and it is possible to efficiently produce a zeolite shaped body on which a zeolite membrane can be formed and maintained without generating any crack, and which satisfies both reduction of pressure loss and maintenance or improvement of mechanical strength, when used as a gas separation membrane such as a molecular sieve membrane or a pervaporation membrane.

摘要翻译： 本发明公开了一种沸石成型体的制造方法，其中将四丙基氢氧化铵（TPAOH）溶液和四丙基溴化铵（TPABr）加入二氧化硅溶胶中，将得到的制备溶液在结晶和/或沉淀的条件下加热 在密封容器中不会发生在制备的溶液中，将加热的制备溶液干燥，获得的干凝胶成型，并将成形的干凝胶在蒸汽中进行结晶处理，并且可以有效地生产沸石成型体 可以在不产生裂纹的情况下形成和保持沸石膜，并且当用作分子筛膜或渗透蒸发膜等气体分离膜时，可以同时满足压力损失降低和维护或机械强度的提高。

公开(公告)号：US20050112886A1

公开(公告)日：2005-05-26

申请号：US10976987

申请日：2004-11-01

申请人： Koji Asakawa ,  Akira Fujimoto ,  Hitoshi Sugiyama ,  Kenichi Ohashi ,  Kenji Suzuki ,  Junichi Tonotani

发明人： Koji Asakawa ,  Akira Fujimoto ,  Hitoshi Sugiyama ,  Kenichi Ohashi ,  Kenji Suzuki ,  Junichi Tonotani

IPC分类号： H01L33/22 ,  B32B1/00 ,  H01L21/302 ,  H01L21/461

CPC分类号： H01L33/22 ,  H01L21/0271

摘要： A nanometer size roughened structure is formed on a surface of a light-emitting element, and luminous efficiency is improved. The roughened structure on the surface of the light-emitting element of the invention is formed into the following shape such that the refractive index smoothly changes: (1) the mean diameter of projections on the roughened surface is smaller than the light wavelength; (2) a pitch of the roughened surface is irregular; and (3) positions of the top and bottom of the roughened surface are distributed from their mean values within the light wavelength in order to give a smooth gradient of the refractive index. The surface of such light-emitting element is obtained by forming a thin film on the surface of the light-emitting element using a resin composition which contains a block copolymer or graft copolymer and forms a micophase-separated structure in a self-organization manner; selectively removing at least one phase of the microphase-separated structure of the thin film formed on the surface; and etching the surface of the light-emitting element using the remaining phase as an etching mask.

摘要翻译： 在发光元件的表面上形成纳米尺寸的粗糙结构，并提高发光效率。 本发明的发光元件表面上的粗糙结构形成为以下形状，使得折射率平滑地变化：（1）粗糙面上的突起的平均直径小于光波长; （2）粗糙表面的间距不规则; 和（3）粗糙表面的顶部和底部的位置从其在光波长内的平均值分布，以便给出折射率的平滑梯度。 这种发光元件的表面通过使用含有嵌段共聚物或接枝共聚物的树脂组合物在发光元件的表面上形成薄膜而以自组织形式形成微晶相分离结构而获得; 选择性地除去形成在表面上的薄膜的微相分离结构的至少一个相; 并使用剩余的相作为蚀刻掩模蚀刻发光元件的表面。

公开(公告)号：US20050108559A1

公开(公告)日：2005-05-19

申请号：US10883657

申请日：2004-07-06

申请人： Kenji Suzuki ,  Tomohiro Ono ,  Takanori Masui ,  Tomohisa Suzuki

发明人： Kenji Suzuki ,  Tomohiro Ono ,  Takanori Masui ,  Tomohisa Suzuki

IPC分类号： G03G21/00 ,  G03G15/00 ,  G06F12/14 ,  G06F12/16 ,  G06F21/64 ,  G06K19/06 ,  H04L1/00 ,  H04L9/14 ,  H04L9/32 ,  H04B1/707

CPC分类号： H04L1/0061 ,  G06K19/06009

摘要： An image forming apparatus has a replacement part equipped with a storage device installed therein. The apparatus has a code adding part adding an error detecting code to target data to be written in the storage device, and an encrypting part encrypting the data having the error detecting code added thereto in the code adding part, to generate encrypted data. In addition, the apparatus has a writing part writing the encrypted data to the storage device.

摘要翻译： 图像形成装置具有安装在其中的存储装置的替换部件。 该装置具有将检错码添加到要写入存储装置中的目标数据的代码添加部分，以及对在代码添加部分中附加有错误检测码的数据进行加密的加密部分，以生成加密数据。 此外，该装置具有将加密数据写入存储装置的写入部分。

公开(公告)号：US20050106967A1

公开(公告)日：2005-05-19

申请号：US10497541

申请日：2002-12-12

申请人： Kenji Suzuki

发明人： Kenji Suzuki

IPC分类号： B32B5/26 ,  B32B27/12 ,  D06N3/00 ,  D06N3/18 ,  D06N7/04 ,  B32B27/04 ,  B32B5/02

CPC分类号： B32B27/12 ,  B32B27/08 ,  B32B27/14 ,  B32B27/18 ,  B32B27/22 ,  B32B27/306 ,  B32B27/308 ,  B32B27/322 ,  B32B27/36 ,  B32B2307/3065 ,  B32B2307/712 ,  B32B2307/7265 ,  D06N3/0056 ,  D06N3/183 ,  D06N3/186 ,  Y10T442/2164 ,  Y10T442/2221 ,  Y10T442/223 ,  Y10T442/2238 ,  Y10T442/2279 ,  Y10T442/2287

摘要： A stainproof, waterproof sheet with excellent waterproofing property, rain streaking-preventing property, hot melt bonding property is obtained by forming a water proof resin layer comprising a synthetic resin containing no plasticizer, or a synthetic resin containing a plasticizer and/or a softener, on at least one surface of a base fabric, and then forming thereover a stainproof layer comprising a synthetic resin and fine amorphous silica particles, either with or without an intervening additive migration-preventing layer, and with optional addition of a flame retardant agent to at least one member of the waterproof resin layer, additive migration-preventing layer and stainproof layer.

摘要翻译： 通过形成包含不含增塑剂的合成树脂的防水树脂层，或含有增塑剂和/或软化剂的合成树脂，可以得到防水性优异，防雨防止性，热熔融性的防污防水片， 在基底织物的至少一个表面上，然后在其上形成包含合成树脂和细无定形二氧化硅颗粒的防污层，所述防污层具有或不具有中间添加剂迁移防止层，并且任选地添加阻燃剂至 防水树脂层，防止添加剂防止层和防污层中的至少一个。