Handheld gas analysis systems for point-of-care medical applications
    82.
    发明授权
    Handheld gas analysis systems for point-of-care medical applications 有权
    手持式气体分析系统,用于护理点医疗应用

    公开(公告)号:US08087283B2

    公开(公告)日:2012-01-03

    申请号:US12140822

    申请日:2008-06-17

    IPC分类号: G01N30/02

    摘要: The disclosure describes an apparatus including a substrate and a gas chromatograph having a fluid inlet and a fluid outlet and being mounted to the substrate. A detector array having a fluid inlet and a fluid outlet and is mounted to the substrate, and the fluid inlet of the detector array is fluidly coupled to the fluid outlet of the gas chromatograph. A control is circuit coupled to the gas chromatograph and to the detector array such that the control circuit can communicate with the gas chromatograph and to the detector array, and a readout circuit is coupled to the detector array and to the control circuit such that the readout circuit can communicate with the control circuit and the detector array. Other embodiments are disclosed and claimed.

    摘要翻译: 本公开描述了一种包括基底和气相色谱仪的装置,其具有流体入口和流体出口并且被安装到基底。 具有流体入口和流体出口并且安装到基底的检测器阵列,并且检测器阵列的流体入口流体地耦合到气相色谱仪的流体出口。 控制电路耦合到气相色谱仪和检测器阵列,使得控制电路可与气相色谱仪和检测器阵列连通,并且读出电路耦合到检测器阵列和控制电路,使得读出 电路可以与控制电路和检测器阵列进行通信。 公开和要求保护其他实施例。

    Handheld gas analysis systems for point-of-care medical applications
    85.
    发明申请
    Handheld gas analysis systems for point-of-care medical applications 有权
    手持式气体分析系统,用于护理点医疗应用

    公开(公告)号:US20090308136A1

    公开(公告)日:2009-12-17

    申请号:US12140822

    申请日:2008-06-17

    IPC分类号: G01N30/02

    摘要: The disclosure describes an apparatus including a substrate and a gas chromatograph having a fluid inlet and a fluid outlet and being mounted to the substrate. A detector array having a fluid inlet and a fluid outlet and is mounted to the substrate, and the fluid inlet of the detector array is fluidly coupled to the fluid outlet of the gas chromatograph. A control is circuit coupled to the gas chromatograph and to the detector array such that the control circuit can communicate with the gas chromatograph and to the detector array, and a readout circuit is coupled to the detector array and to the control circuit such that the readout circuit can communicate with the control circuit and the detector array. Other embodiments are disclosed and claimed.

    摘要翻译: 本公开描述了一种包括基底和气相色谱仪的装置,其具有流体入口和流体出口并且被安装到基底。 具有流体入口和流体出口并且安装到基底的检测器阵列,并且检测器阵列的流体入口流体地耦合到气相色谱仪的流体出口。 控制电路耦合到气相色谱仪和检测器阵列,使得控制电路可与气相色谱仪和检测器阵列连通,并且读出电路耦合到检测器阵列和控制电路,使得读出 电路可以与控制电路和检测器阵列进行通信。 公开和要求保护其他实施例。

    Vibration spectrum sensor array having differing sensors
    86.
    发明授权
    Vibration spectrum sensor array having differing sensors 有权
    振动频谱传感器阵列具有不同的传感器

    公开(公告)号:US07600429B2

    公开(公告)日:2009-10-13

    申请号:US11407640

    申请日:2006-04-20

    申请人: Li-Peng Wang

    发明人: Li-Peng Wang

    IPC分类号: G01D21/00

    CPC分类号: G01H11/06 G01H1/14

    摘要: According to embodiments of the present invention, vibration sensor array includes at least two microelectromechanical systems (MEMS) vibration sensors formed on a substrate. The vibration element of the first vibration sensor is a different type than the vibration element of the second vibration sensor. For example, the at least two different vibration elements may be selected from a cantilever beam, a bridge beam, a membrane, and/or an annular diaphragm.

    摘要翻译: 根据本发明的实施例,振动传感器阵列包括形成在基板上的至少两个微机电系统(MEMS)振动传感器。 第一振动传感器的振动元件与第二振动传感器的振动元件不同。 例如,至少两个不同的振动元件可以选自悬臂梁,桥梁,隔膜和/或环形隔膜。

    Film bulk acoustic resonator (FBAR) with high thermal conductivity

    公开(公告)号:US20070018538A1

    公开(公告)日:2007-01-25

    申请号:US11540546

    申请日:2006-09-28

    申请人: Li-Peng Wang

    发明人: Li-Peng Wang

    IPC分类号: H01L41/00

    CPC分类号: H03H9/564 H03H9/02102

    摘要: The specification discloses embodiments of an apparatus comprising a film bulk acoustic resonator (FBAR) filter comprising a piezoelectric membrane having a portion thereof sandwiched between a first electrode and a second electrode, the piezoelectric membrane being suspended from at least two edges thereof, and a heat transfer layer placed on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Also disclosed are embodiments of a process comprising sandwiching a portion of the piezoelectric membrane between a first electrode and a second electrode, suspending a piezoelectric membrane from at least two edges thereof, and placing a heat transfer layer on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Other embodiments are disclosed and claimed.

    Film bulk acoustic resonator (FBAR) with high thermal conductivity
    89.
    发明授权
    Film bulk acoustic resonator (FBAR) with high thermal conductivity 有权
    具有高导热性的薄膜体声共振器(FBAR)

    公开(公告)号:US07164222B2

    公开(公告)日:2007-01-16

    申请号:US10607679

    申请日:2003-06-26

    申请人: Li-Peng Wang

    发明人: Li-Peng Wang

    IPC分类号: H01L41/08

    CPC分类号: H03H9/564 H03H9/02102

    摘要: The specification discloses embodiments of an apparatus comprising a film bulk acoustic resonator (FBAR) filter comprising a piezoelectric membrane having a portion thereof sandwiched between a first electrode and a second electrode, the piezoelectric membrane being suspended from at least two edges thereof, and a heat transfer layer placed on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Also disclosed are embodiments of a process comprising sandwiching a portion of the piezoelectric membrane between a first electrode and a second electrode, suspending a piezoelectric membrane from at least two edges thereof, and placing a heat transfer layer on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Other embodiments are disclosed and claimed.

    摘要翻译: 该说明书公开了一种装置的实施例,其包括膜体积声共振器(FBAR)滤波器,其包括压电膜,该压电膜的一部分夹在第一电极和第二电极之间,压电膜从其至少两个边缘悬挂, 转印层放置在压电膜周围,但不与第一电极接触。 还公开了一种方法的实施例,包括将压电膜的一部分夹在第一电极和第二电极之间,将压电膜从其至少两个边缘悬挂起来,并将传热层放置在包围的压电膜上,但不在 与第一电极接触。 公开和要求保护其他实施例。

    Film bulk acoustic resonator (FBAR) process using single-step resonator layer deposition
    90.
    发明申请
    Film bulk acoustic resonator (FBAR) process using single-step resonator layer deposition 有权
    薄膜体声波谐振器(FBAR)工艺采用单步谐振器层沉积

    公开(公告)号:US20060284706A1

    公开(公告)日:2006-12-21

    申请号:US11154854

    申请日:2005-06-16

    IPC分类号: H03H9/56

    摘要: A process comprising, in a vacuum, depositing a bottom electrode layer and a piezoelectric layer over a cavity in a substrate, the cavity being filled with a sacrificial material, patterning and etching the piezoelectric layer and the bottom electrode layer to expose one or more edges of the bottom electrode layer and the piezoelectric layer, treating some or all of the one or more edges to prevent electrical contact between the bottom electrode layer and a top electrode layer, and depositing and etching the top electrode layer. An apparatus comprising a resonator attached to a substrate and suspended over a cavity in the substrate, the resonator comprising a bottom electrode layer and a piezoelectric layer on the bottom electrode layer, both the bottom electrode layer and the piezoelectric layer having been deposited in a vacuum, and a top electrode layer on the piezoelectric layer, wherein one or more edges of the bottom electrode layer and the piezoelectric layer include features that prevent electrical contact between the bottom electrode layer and the top electrode layer.

    摘要翻译: 一种在真空中包括在衬底上的空腔上沉积底电极层和压电层的方法,所述空腔填充有牺牲材料,图案化和蚀刻压电层和底电极层以暴露一个或多个边缘 的底部电极层和压电层,处理一个或多个边缘的一些或全部以防止底部电极层和顶部电极层之间的电接触,以及沉积和蚀刻顶部电极层。 一种装置,包括附着到衬底并悬挂在衬底中的空腔上的谐振器,谐振器包括在底部电极层上的底部电极层和压电层,底部电极层和压电层已经沉积在真空中 和压电层上的上电极层,其中底电极层和压电层的一个或多个边缘包括防止底电极层和顶电极层之间的电接触的特征。