摘要:
Embodiments of a front-end pre-concentrator module, a back-end pre-concentrator module and a gas analysis subsystem are disclosed, as well as gas analysis systems using combinations of the front-end pre-concentrator module, the back-end pre-concentrator module and the gas analysis subsystem. Embodiments of disposable and re-usable moisture removal filters are disclosed for use alone or in combination with a gas analysis system.
摘要:
The disclosure describes an apparatus including a substrate and a gas chromatograph having a fluid inlet and a fluid outlet and being mounted to the substrate. A detector array having a fluid inlet and a fluid outlet and is mounted to the substrate, and the fluid inlet of the detector array is fluidly coupled to the fluid outlet of the gas chromatograph. A control is circuit coupled to the gas chromatograph and to the detector array such that the control circuit can communicate with the gas chromatograph and to the detector array, and a readout circuit is coupled to the detector array and to the control circuit such that the readout circuit can communicate with the control circuit and the detector array. Other embodiments are disclosed and claimed.
摘要:
The disclosure describes a cascaded gas chromatograph including a first gas chromatograph having a first temperature control and a second gas chromatograph coupled to the first gas chromatograph. The first and second chromatographs have individual temperature controls that can be controlled independently of each other. Other embodiments are disclosed and claimed.
摘要:
Sensing structures are provided which are designed using non-conventional designs. These sensing structures have improved sensitivity and noise floor at low frequencies.
摘要:
The disclosure describes an apparatus including a substrate and a gas chromatograph having a fluid inlet and a fluid outlet and being mounted to the substrate. A detector array having a fluid inlet and a fluid outlet and is mounted to the substrate, and the fluid inlet of the detector array is fluidly coupled to the fluid outlet of the gas chromatograph. A control is circuit coupled to the gas chromatograph and to the detector array such that the control circuit can communicate with the gas chromatograph and to the detector array, and a readout circuit is coupled to the detector array and to the control circuit such that the readout circuit can communicate with the control circuit and the detector array. Other embodiments are disclosed and claimed.
摘要:
According to embodiments of the present invention, vibration sensor array includes at least two microelectromechanical systems (MEMS) vibration sensors formed on a substrate. The vibration element of the first vibration sensor is a different type than the vibration element of the second vibration sensor. For example, the at least two different vibration elements may be selected from a cantilever beam, a bridge beam, a membrane, and/or an annular diaphragm.
摘要:
Sensing structures are provided which are designed using non-conventional designs. These sensing structures have improved sensitivity and noise floor at low frequencies.
摘要:
The specification discloses embodiments of an apparatus comprising a film bulk acoustic resonator (FBAR) filter comprising a piezoelectric membrane having a portion thereof sandwiched between a first electrode and a second electrode, the piezoelectric membrane being suspended from at least two edges thereof, and a heat transfer layer placed on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Also disclosed are embodiments of a process comprising sandwiching a portion of the piezoelectric membrane between a first electrode and a second electrode, suspending a piezoelectric membrane from at least two edges thereof, and placing a heat transfer layer on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Other embodiments are disclosed and claimed.
摘要:
The specification discloses embodiments of an apparatus comprising a film bulk acoustic resonator (FBAR) filter comprising a piezoelectric membrane having a portion thereof sandwiched between a first electrode and a second electrode, the piezoelectric membrane being suspended from at least two edges thereof, and a heat transfer layer placed on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Also disclosed are embodiments of a process comprising sandwiching a portion of the piezoelectric membrane between a first electrode and a second electrode, suspending a piezoelectric membrane from at least two edges thereof, and placing a heat transfer layer on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Other embodiments are disclosed and claimed.
摘要:
A process comprising, in a vacuum, depositing a bottom electrode layer and a piezoelectric layer over a cavity in a substrate, the cavity being filled with a sacrificial material, patterning and etching the piezoelectric layer and the bottom electrode layer to expose one or more edges of the bottom electrode layer and the piezoelectric layer, treating some or all of the one or more edges to prevent electrical contact between the bottom electrode layer and a top electrode layer, and depositing and etching the top electrode layer. An apparatus comprising a resonator attached to a substrate and suspended over a cavity in the substrate, the resonator comprising a bottom electrode layer and a piezoelectric layer on the bottom electrode layer, both the bottom electrode layer and the piezoelectric layer having been deposited in a vacuum, and a top electrode layer on the piezoelectric layer, wherein one or more edges of the bottom electrode layer and the piezoelectric layer include features that prevent electrical contact between the bottom electrode layer and the top electrode layer.