公开(公告)号：US20160284602A1

公开(公告)日：2016-09-29

申请号：US14669055

申请日：2015-03-26

Applicant: International Business Machines Corporation ,  Globalfoundries, Inc. ,  STMicroelectronics, Inc.

Inventor： Xiuyu Cai ,  Qing Liu ,  Ruilong Xie ,  Chun-Chen Yeh

IPC: H01L21/8238 ,  H01L21/306 ,  H01L21/308 ,  H01L21/66 ,  H01L21/768

CPC classification number: H01L21/823871 ,  H01L21/30625 ,  H01L21/3085 ,  H01L21/82385 ,  H01L22/12 ,  H01L22/30

Abstract: A technique relates to fabricating a macro for measurements utilized in dual spacer, dual epitaxial transistor devices. The macro is fabricated according to a fabrication process. The macro is a test layout of a semiconductor structure having n-p bumps at junctions between NFET areas and PFET areas. Optical critical dimension (OCD) spectroscopy is performed to obtain the measurements of the n-p bumps on the macro. An amount of chemical mechanical polishing is determined to remove the n-p bumps on the macro based on the measurements of the n-p bumps on the macro. Chemical mechanical polishing is performed to remove the n-p bumps on the macro. The amount previously determined for the macro is utilized to perform chemical mechanical polishing for each of the dual spacer, dual epitaxial layer transistor devices having been fabricated under the fabrication process of the macro in which the fabrication process produced the n-p bumps.

Abstract translation: 技术涉及制造用于双间隔物，双外延晶体管器件中的测量的宏。 宏是根据制造工艺制造的。 该宏是在NFET区域和PFET区域之间的结处具有n-p个凸起的半导体结构的测试布局。 执行光临界尺度（OCD）光谱以获得宏观上的n-p凸块的测量。 基于宏观上的n-p凸块的测量，确定了一定量的化学机械抛光以去除宏观上的n-p凸块。 进行化学机械抛光以除去宏观上的n-p凸块。 先前为宏确定的量用于对在制造工艺产生n-p个凸块的宏的制造过程中制造的每个双间隔物，双外延层晶体管器件进行化学机械抛光。

公开(公告)号：US09431540B2

公开(公告)日：2016-08-30

申请号：US14288766

申请日：2014-05-28

Applicant: STMICROELECTRONICS, INC. ,  GLOBALFOUNDRIES Inc. ,  INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Qing Liu ,  Ruilong Xie ,  Xiuyu Cai ,  Chun-chen Yeh

IPC: H01L29/66 ,  H01L29/165 ,  H01L29/78

CPC classification number: H01L29/66795 ,  H01L21/02164 ,  H01L21/02178 ,  H01L21/0228 ,  H01L21/31105 ,  H01L21/823814 ,  H01L21/823821 ,  H01L27/0924 ,  H01L29/0847 ,  H01L29/1033 ,  H01L29/165 ,  H01L29/785 ,  H01L29/7851

Abstract: A method for making a semiconductor device includes forming laterally spaced-apart semiconductor fins above a substrate. At least one dielectric layer is formed adjacent an end portion of the semiconductor fins and within the space between adjacent semiconductor fins. A pair of sidewall spacers is formed adjacent outermost semiconductor fins at the end portion of the semiconductor fins. The at least one dielectric layer and end portion of the semiconductor fins between the pair of sidewall spacers are removed. Source/drain regions are formed between the pair of sidewall spacers.

Abstract translation: 制造半导体器件的方法包括在衬底上形成横向间隔开的半导体鳍片。 在半导体鳍片的端部附近和相邻的半导体鳍片之间的空间内形成至少一个电介质层。 在半导体翅片的端部处邻近最外半导体翅片形成一对侧壁间隔物。 去除该对侧壁间隔物之间​​的至少一个电介质层和半导体翅片的端部。 源极/漏极区域形成在该对侧壁间隔物之间​​。

公开(公告)号：US09419111B2

公开(公告)日：2016-08-16

申请号：US14748270

申请日：2015-06-24

Applicant: STMICROELECTRONICS, INC.

Inventor： Qing Liu ,  Prasanna Khare ,  Nicolas Loubet

IPC: H01L21/336 ,  H01L29/66 ,  H01L21/8238 ,  H01L21/84 ,  H01L29/78 ,  H01L29/08 ,  H01L21/265 ,  H01L29/417 ,  H01L21/225

CPC classification number: H01L27/0886 ,  H01L21/2253 ,  H01L21/26506 ,  H01L21/26513 ,  H01L21/2658 ,  H01L21/26586 ,  H01L21/823418 ,  H01L21/823431 ,  H01L21/823821 ,  H01L21/845 ,  H01L29/0847 ,  H01L29/41783 ,  H01L29/41791 ,  H01L29/66795 ,  H01L29/66803 ,  H01L29/785

Abstract: A multi-fin FINFET device may include a substrate and a plurality of semiconductor fins extending upwardly from the substrate and being spaced apart along the substrate. Each semiconductor fin may have opposing first and second ends and a medial portion therebetween, and outermost fins of the plurality of semiconductor fins may comprise an epitaxial growth barrier on outside surfaces thereof. The FINFET may further include at least one gate overlying the medial portions of the semiconductor fins, a plurality of raised epitaxial semiconductor source regions between the semiconductor fins adjacent the first ends thereof, and a plurality of raised epitaxial semiconductor drain regions between the semiconductor fins adjacent the second ends thereof.

公开(公告)号：US09406751B2

公开(公告)日：2016-08-02

申请号：US14296818

申请日：2014-06-05

Applicant: STMICROELECTRONICS, INC. ,  GLOBALFOUNDRIES Inc. ,  INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Qing Liu ,  Xiuyu Cai ,  Ruilong Xie ,  Chun-chen Yeh

IPC: H01L29/08 ,  H01L27/12 ,  H01L29/786 ,  H01L21/84 ,  H01L21/8238

CPC classification number: H01L21/823807 ,  H01L21/76895 ,  H01L21/823814 ,  H01L21/823871 ,  H01L21/823878 ,  H01L21/84 ,  H01L27/1203 ,  H01L29/0847 ,  H01L29/7842 ,  H01L29/7848 ,  H01L29/786 ,  H01L29/78684

Abstract: A method for making a semiconductor device is provided. Raised source and drain regions are formed with a tensile strain-inducing material, after thermal treatment to form source drain extension regions, to thereby preserve the strain-inducing material in desired substitutional states.

Abstract translation: 提供一种制造半导体器件的方法。 在热处理之后，用拉伸应变诱导材料形成凸起的源极和漏极区域以形成源极漏极延伸区域，从而将应变诱导材料保持在期望的替代状态。

公开(公告)号：US20160211171A1

公开(公告)日：2016-07-21

申请号：US15081749

申请日：2016-03-25

Applicant: International Business Machines Corporation ,  STMicroelectronics, Inc.

Inventor： Nicolas Loubet ,  Qing Liu ,  Shom Ponoth

IPC: H01L21/762 ,  H01L21/311 ,  H01L21/84

CPC classification number: H01L21/76283 ,  H01L21/31111 ,  H01L21/76232 ,  H01L21/84

Abstract: Isolation trenches are etched through an active silicon layer overlying a buried oxide on a substrate into the substrate, and through any pad dielectric(s) on the active silicon layer. Lateral epitaxial growth of the active silicon layer forms protrusions into the isolation trenches to a lateral distance of at least about 5 nanometers, and portions of the isolation trenches around the protrusions are filled with dielectric. Raised source/drain regions are formed on portions of the active silicon layer including a dielectric. As a result, misaligned contacts passing around edges of the raised source/drain regions remain spaced apart from sidewalls of the substrate in the isolation trenches.

Abstract translation: 通过将衬底上的掩埋氧化物覆盖在衬底中以及通过有源硅层上的任何焊盘电介质的有源硅层蚀刻隔离沟槽。 有源硅层的横向外延生长在隔离沟槽中形成至少约5纳米的横向距离的突起，并且围绕突起的部分隔离沟槽被电介质填充。 在包括电介质的有源硅层的部分上形成凸起的源极/漏极区。 结果，穿过凸起的源极/漏极区域的边缘的不对准触点保持与隔离沟槽中的衬底的侧壁间隔开。

公开(公告)号：US20160181381A1

公开(公告)日：2016-06-23

申请号：US14577431

申请日：2014-12-19

Applicant: STMicroelectronics, Inc. ,  International Business Machines Corporation ,  GlobalFoundries Inc

Inventor： Qing Liu ,  Xiuyu Cai ,  Ruilong Xie ,  Chun-Chen Yeh

IPC: H01L29/417 ,  H01L29/66 ,  H01L29/06 ,  H01L29/78

CPC classification number: H01L29/41783 ,  H01L29/0653 ,  H01L29/66545 ,  H01L29/66795 ,  H01L29/7848 ,  H01L29/785

Abstract: A FinFET device includes a semiconductor fin, a gate electrode extending over a channel of the fin and sidewall spacers on each side of the gate electrode. A dielectric material is positioned on each side of a bottom portion of said fin, with an oxide material on each side of the fin overlying the dielectric material. A recessed region, formed in the fin on each side of the channel region, is delimited by the oxide material. A raised source region fills the recessed region and extends from the fin on a first side of the gate electrode to cover the oxide material to a height which is in contact with the sidewall spacer. A raised drain region fills the recessed region and extends from the fin on a second side of the gate electrode to cover the oxide material to a height which is in contact with the sidewall spacer.

Abstract translation: FinFET器件包括半导体鳍片，在鳍片的沟道上延伸的栅极电极和在栅电极的每一侧上的侧壁间隔物。 电介质材料位于所述散热片的底部的每一侧上，其中在散热片的每侧的氧化物材料覆盖在电介质材料上。 在通道区域的每一侧的翅片上形成的凹陷区域由氧化物材料界定。 凸起的源极区域填充凹陷区域并且在栅电极的第一侧上从翅片延伸以将氧化物材料覆盖到与侧壁间隔物接触的高度。 凸起的漏极区域填充凹陷区域并且在栅电极的第二侧上从翅片延伸以将氧化物材料覆盖到与侧壁间隔物接触的高度。

公开(公告)号：US09368411B2

公开(公告)日：2016-06-14

申请号：US14596625

申请日：2015-01-14

Applicant: STMicroelectronics, Inc.

Inventor： Nicolas Loubet ,  Qing Liu

IPC: H01L21/8238 ,  H01L21/02 ,  H01L21/84

CPC classification number: H01L21/823807 ,  H01L21/02381 ,  H01L21/02532 ,  H01L21/02664 ,  H01L21/823821 ,  H01L21/845

Abstract: A SOI substrate layer formed of a silicon semiconductor material includes adjacent first and second regions. A portion of the silicon substrate layer in the second region is removed such that the second region retains a bottom portion made of the silicon semiconductor material. An epitaxial growth of a silicon-germanium semiconductor material is made on the bottom portion to produce a silicon-germanium region. The silicon region is patterned to define a first fin structure of a FinFET of a first (for example, n-channel) conductivity type. The silicon-germanium region is also patterned to define a second fin structure of a FinFET of a second (for example, p-channel) conductivity type.

Abstract translation: 由硅半导体材料形成的SOI衬底层包括相邻的第一和第二区域。 去除第二区域中的硅衬底层的一部分，使得第二区域保持由硅半导体材料制成的底部。 硅 - 锗半导体材料的外延生长在底部制成以产生硅 - 锗区。 图案化硅区域以限定第一（例如，n沟道）导电类型的FinFET的第一鳍结构。 硅 - 锗区域也被图案化以限定第二（例如p沟道）导电类型的FinFET的第二鳍结构。

公开(公告)号：US20160163850A1

公开(公告)日：2016-06-09

申请号：US14560255

申请日：2014-12-04

Applicant: STMicroelectronics, Inc. ,  International Business Machines Corporation ,  GlobalFoundries Inc

Inventor： Qing Liu ,  Ruilong Xie ,  Chun-Chen Yeh ,  Xiuyu Cai

IPC: H01L29/78 ,  H01L29/66 ,  H01L29/417 ,  H01L27/092 ,  H01L29/08

CPC classification number: H01L29/785 ,  H01L21/823418 ,  H01L21/823431 ,  H01L21/845 ,  H01L27/0886 ,  H01L27/1211 ,  H01L29/086 ,  H01L29/0869 ,  H01L29/0878 ,  H01L29/0886 ,  H01L29/41758 ,  H01L29/41791 ,  H01L29/66545 ,  H01L29/66659 ,  H01L29/66681 ,  H01L29/66795 ,  H01L29/7816 ,  H01L29/7835 ,  H01L29/7848

Abstract: A FinFET transistor includes a fin of semiconductor material with a transistor gate electrode extending over a channel region. Raised source and drain regions of first epitaxial growth material extending from the fin on either side of the transistor gate electrode. Source and drain contact openings extend through a pre-metallization dielectric material to reach the raised source and drain regions. Source and drain contact regions of second epitaxial growth material extend from the first epitaxial growth material at the bottom of the source and drain contact openings. A metal material fills the source and drain contact openings to form source and drain contacts, respectively, with the source and drain contact regions. The drain contact region may be offset from the transistor gate electrode by an offset distance sufficient to provide a laterally diffused metal oxide semiconductor (LDMOS) configuration within the raised source region of first epitaxial growth material.

Abstract translation: FinFET晶体管包括具有在沟道区域上延伸的晶体管栅电极的半导体材料的鳍。 从晶体管栅电极的两侧的鳍延伸的第一外延生长材料的引出源区和漏区。 源极和漏极接触开口延伸穿过预金属化电介质材料以到达升高的源极和漏极区域。 第二外延生长材料的源极和漏极接触区域在源极和漏极接触开口的底部处从第一外延生长材料延伸。 金属材料填充源极和漏极接触开口，以分别与源极和漏极接触区域形成源极和漏极接触。 漏极接触区域可以从晶体管栅电极偏移足以在第一外延生长材料的升高的源极区域内提供横向扩散的金属氧化物半导体（LDMOS）配置的偏移距离。

公开(公告)号：US20160118305A1

公开(公告)日：2016-04-28

申请号：US14942504

申请日：2015-11-16

Applicant: STMicroelectronics, Inc.

Inventor： Walter Kleemeier ,  Qing Liu

IPC: H01L21/8238 ,  H01L29/78 ,  H01L21/84 ,  H01L21/02 ,  H01L29/66

CPC classification number: H01L21/823814 ,  H01L21/02529 ,  H01L21/02532 ,  H01L21/02584 ,  H01L21/8238 ,  H01L21/823821 ,  H01L21/823871 ,  H01L21/84 ,  H01L27/092 ,  H01L27/0924 ,  H01L27/1203 ,  H01L27/1211 ,  H01L29/45 ,  H01L29/456 ,  H01L29/665 ,  H01L29/66545 ,  H01L29/66628 ,  H01L29/778 ,  H01L29/7789 ,  H01L29/7838

Abstract: An integrated circuit includes a substrate supporting a transistor having a source region and a drain region. A high dopant concentration delta-doped layer is present on the source region and drain region of the transistor. A set of contacts extend through a pre-metal dielectric layer covering the transistor. A silicide region is provided at a bottom of the set of contacts. The silicide region is formed by a salicidation reaction between a metal present at the bottom of the contact and the high dopant concentration delta-doped layer on the source region and drain region of the transistor.

Abstract translation: 集成电路包括支撑具有源极区和漏极区的晶体管的衬底。 晶体管的源极区和漏极区存在高掺杂浓度的δ掺杂层。 一组触点延伸穿过覆盖晶体管的预金属介电层。 硅化物区域设置在该组触点的底部。 硅化物区域由接触底部存在的金属与晶体管的源极区域和漏极区域上的高掺杂浓度δ-掺杂层之间的水化反应形成。

公开(公告)号：US09293474B2

公开(公告)日：2016-03-22

申请号：US14739736

申请日：2015-06-15

Applicant: International Business Machines Corporation ,  STMicroelectronics, Inc. ,  Commissariat A l'Energie atomique et aux Energies alternatives

Inventor： Kangguo Cheng ,  Bruce B. Doris ,  Ali Khakifirooz ,  Qing Liu ,  Laurent Grenouillet ,  Yannick Le Tiec ,  Maud Vinet

IPC: H01L27/12 ,  H01L21/762 ,  H01L21/84 ,  H01L29/06 ,  H01L29/16 ,  H01L29/161 ,  H01L21/02

CPC classification number: H01L27/1207 ,  H01L21/02529 ,  H01L21/02532 ,  H01L21/0262 ,  H01L21/76224 ,  H01L21/76283 ,  H01L21/84 ,  H01L29/0649 ,  H01L29/1608 ,  H01L29/161

Abstract: Trenches are formed through a top semiconductor layer and a buried insulator layer of a semiconductor-on-insulator (SOI) substrate. A selective epitaxy is performed to form bulk semiconductor portions filling the trenches and in epitaxial alignment with the semiconductor material of a handle substrate. At least one dielectric layer is deposited over the top semiconductor layer and the bulk semiconductor portions, and is patterned to form openings over selected areas of the top semiconductor layer and the bulk semiconductor portions. A semiconductor alloy material is deposited within the openings directly on physically exposed surfaces of the top semiconductor layer and the bulk semiconductor portions. The semiconductor alloy material intermixes with the underlying semiconductor materials in a subsequent anneal. Within each of the SOI region and the bulk region, two types of semiconductor material portions are formed depending on whether a semiconductor material intermixes with the semiconductor alloy material.