摘要:
A Phospho Silicate Glass layer is used for an insulation layer between a lower wiring layer including a refractory metal silicide and an upper wiring layer in a semiconductor device of a multilevel interconnection structure. A reflow treatment is performed on the Phospho Silicate Glass layer using steam. A part of the lower wiring layer is oxidized during the reflow treatment, and the resistivity of the lower wiring layer is simultaneously lowered during the reflow treatment.
摘要:
A method for fabricating a semiconductor device is disclosed which includes a step of forming contact holes in insulating films on a substrate, forming a silicate glass layer containing an impurity over the entire surface, and performing the phosphorus getter treatment using POCl.sub.3 at a high temperature. Even when the phosphorus getter treatment is performed after the formation of the contact holes, the substrate or electrodes exposed through the contact holes may not be reduced in thickness or damaged. The impurity may be diffused into the substrate from the silicate glass layer through the contact holes.
摘要:
To improve a performance of a semiconductor device having a capacitance element. An MIM type capacitance element, an electrode of which is formed with comb-shaped metal patterns composed of the wirings, is formed over a semiconductor substrate. A conductor pattern, which is a dummy gate pattern for preventing dishing in a CMP process, and an active region, which is a dummy active region, are disposed below the capacitance element, and these are coupled to shielding metal patterns composed of the wirings and then connected to a fixed potential. Then, the conductor pattern and the active region are disposed so as not to overlap the comb-shaped metal patterns in the wirings in a planar manner.
摘要:
The invention provides a laminate of a substrate, a polyimide film, and a coupling treatment layer interposed therebetween, which provides different delamination strengths between the substrate and the polyimide film to form a prescribed pattern. The invention also provides a method for producing such a laminate formed from at least a substrate and a polyimide film, whereby, using a film obtained by plasma treatment of at least the surface facing the substrate as the polyimide film, coupling agent treatment is performed on at least one of the surfaces facing the substrate and the polyimide film to form a coupling treatment layer, deactivation treatment is performed on a portion of the coupling treatment layer to form a pre-determined pattern, and then pressing and heating are performed with the substrate and polyimide film overlapping.
摘要:
To improve a performance of a semiconductor device having a capacitance element. An MIM type capacitance element, an electrode of which is formed with comb-shaped metal patterns composed of the wirings, is formed over a semiconductor substrate. A conductor pattern, which is a dummy gate pattern for preventing dishing in a CMP process, and an active region, which is a dummy active region, are disposed below the capacitance element, and these are coupled to shielding metal patterns composed of the wirings and then connected to a fixed potential. Then, the conductor pattern and the active region are disposed so as not to overlap the comb-shaped metal patterns in the wirings in a planar manner.
摘要:
Disclosed is an active energy ray-curing composition containing an active energy ray-curing prepolymer (A) obtainable by a reaction of an acrylic-based prepolymer having a hydroxyl group and an acrylic monomer (a4) having an isocyanate group, an active energy ray-curing compound (B) having a benzotriazole group, another active energy ray-curing compound (C) differing from the (A) component and the (B) component, and inorganic oxide particles (D). The acrylic-based prepolymer having the hydroxyl group is a copolymer that includes an acrylic monomer (a1) having a piperidinyl group, an acrylic monomer (a2) having a hydroxyl group, etc., as monomer units.
摘要:
The invention provides a laminate of a substrate, a polyimide film, and a coupling treatment layer interposed therebetween, which provides different delamination strengths between the substrate and the polyimide film to form a prescribed pattern. The invention also provides a method for producing such a laminate formed from at least a substrate and a polyimide film, whereby, using a film obtained by plasma treatment of at least the surface facing the substrate as the polyimide film, coupling agent treatment is performed on at least one of the surfaces facing the substrate and the polyimide film to form a coupling treatment layer, deactivation treatment is performed on a portion of the coupling treatment layer to form a pre-determined pattern, and then pressing and heating are performed with the substrate and polyimide film overlapping.
摘要:
A recording system includes a recording device, an information processing apparatus, a recording control unit, and an information processing control unit. The recording control unit manages data files recoded on first recording media and a second recording medium using a directory structure having directories of first recording media and a directory, serving as an entry folder, of the second recording medium under a root directory, selects, in response to a data file and an information file detailing category information being written in the entry folder, a first recording medium based on the category information, and controls the recording device to record the selected data file on the selected medium. The information processing control unit controls, in response to a data file and category information being specified, a writing operation so that the specified data file and the information file are written in the entry folder.
摘要:
An actinic energy ray curable adhesive contains a urethane resin (D) and a epoxy resin (E). The urethane resin (D) is prepared by reacting a diol ingredient (A1) having no (meth)acryloyl group, an optional diol ingredient (A2) having no (meth)acryloyl group, no carbonate structure and no alicyclic structure, a polyol ingredient (B) having a (meth)acryloyl group and two or more hydroxyl groups in a molecule, and a polyisocyanate ingredient (C) together. The ingredient (A1) is selected from a diol (a1) having a carbonate structure and an alicyclic structure in a molecule, a combination of a diol (a2) having no alicyclic structure but having a carbonate structure, and a diol (a3) having no carbonate structure but having an alicyclic structure, and a combination of a diol (a1) and at least one of the diol (a2) and the diol (a3).
摘要:
To improve a performance of a semiconductor device having a capacitance element. An MIM type capacitance element, an electrode of which is formed with comb-shaped metal patterns composed of the wirings, is formed over a semiconductor substrate. A conductor pattern, which is a dummy gate pattern for preventing dishing in a CMP process, and an active region, which is a dummy active region, are disposed below the capacitance element, and these are coupled to shielding metal patterns composed of the wirings and then connected to a fixed potential. Then, the conductor pattern and the active region are disposed so as not to overlap the comb-shaped metal patterns in the wirings in a planar manner.