公开(公告)号：US4831737A

公开(公告)日：1989-05-23

申请号：US81879

申请日：1987-08-04

申请人： Peter Grund

发明人： Peter Grund

IPC分类号： B23Q17/22 ,  B23Q11/00 ,  G01B5/00

CPC分类号： B23Q11/0003 ,  G01B5/0014

摘要： An apparatus for compensating for the thermal expansion of two machine parts which are relatively movable in longitudinal guideways. The apparatus comprises a rule, a support rod longitudinally disposed on the movable machine part for supporting the rule, and an electric scanning head mounted on the stationary machine part. The support rod is made of a material which exhibits negligible thermal expansion in the concerned temperature range. The forward end of the support rod is rigidly secured to the forward end of the movable machine part while the rear end thereof is movably guided on that machine part. The rear end of the rule is fixed to the rear end of the support rod. The scanning head is disposed on the stationary machine part in such a way that any thermal expansion of the stationary machine part cannot affect the location of the scanning head.

摘要翻译： 用于补偿在纵向导轨中相对移动的两个机器部件的热膨胀的装置。 该装置包括规则，纵向设置在可移动机器部分上用于支撑规则的支撑杆和安装在固定机器部分上的电动扫描头。 支撑杆由在相关温度范围内显示出可忽略的热膨胀的材料制成。 支撑杆的前端刚性地固定到可移动机器部件的前端，而其后端在该机器部件上可移动地被引导。 规则的后端固定在支撑杆的后端。 扫描头设置在固定机器部分上，使得固定机器部件的任何热膨胀不会影响扫描头的位置。

公开(公告)号：US4728232A

公开(公告)日：1988-03-01

申请号：US941058

申请日：1986-12-12

申请人： Werner Babel

发明人： Werner Babel

IPC分类号： G01B21/02 ,  B23C9/00 ,  B23Q15/18 ,  G01B5/00 ,  B23B49/00

CPC分类号： G01B5/0014 ,  Y10S33/19 ,  Y10T408/16 ,  Y10T409/303976

摘要： A device for the temperature-responsive adjustment of the measuring points of two relatively movable machine tool parts, the device comprising a rule mounted for limited movement on a first machine part, a scanning head mounted on the second machine part, and at least one transverse rod which is disposed for axial movement in a portion of the movable machine part that is particularly subject to being heated. The transverse rod, which extends right into the heated zones at least with its inner end portion, has its outer end connected to the rule by means of a reversing drive such that elongations of the transverse rod caused by heating are converted to a horizontal shifting movement of the rule. In an alternative embodiment, a bimetallic element performs the function of the transverse rod.

摘要翻译： 一种用于两个可相对移动的机床部件的测量点的温度响应调节的装置，该装置包括安装在第一机器部件上有限运动的规则，安装在第二机器部件上的扫描头，以及至少一个横向 杆，其设置成在特别受加热的可移动机器部分的一部分中轴向移动。 至少借助于其内端部分直接延伸到加热区域中的横杆通过反向驱动使其外端与规则相连，使得由加热引起的横杆的伸长率被转换成水平移动运动 的规则。 在替代实施例中，双金属元件执行横杆的功能。

公开(公告)号：US4607435A

公开(公告)日：1986-08-26

申请号：US701995

申请日：1985-02-15

申请人： Bradford P. Boisen

发明人： Bradford P. Boisen

IPC分类号： G01B5/00 ,  G01B7/16 ,  G01B7/26

CPC分类号： G01B5/0014 ,  G01B7/16

摘要： A temperature-compensated borehole extensometer comprises a coaxial remotely anchored assembly of a rod and tube formed of materials having disparate linear coefficients of expansion, said assembly being associated with comparator transducers sensitive to relative linear movement of the rod and tube components under the influence of temperatures.

摘要翻译： 温度补偿井眼引伸计包括由具有不同的线性膨胀系数的材料形成的杆和管的同轴远程锚定组件，所述组件与在温度的影响下对杆和管部件的相对线性运动敏感的比较器传感器相关联 。

公开(公告)号：US3142120A

公开(公告)日：1964-07-28

申请号：US22492162

申请日：1962-09-20

申请人： GENEVOISE INSTR PHYSIQUE

发明人： MOTTU ANDRE H

IPC分类号： B23Q11/00 ,  G01B5/00

CPC分类号： G01B5/0014 ,  B23Q11/0003 ,  Y10S82/90 ,  Y10T82/2549

公开(公告)号：US2603001A

公开(公告)日：1952-07-15

申请号：US58043045

申请日：1945-03-01

申请人： NILES BEMENT POND CO

发明人： FOX RAYMOND S ,  DEXTER JR ALBERT M

IPC分类号： B21B38/04 ,  G01B5/00 ,  G01B5/08 ,  G01B7/06 ,  G01B7/12

CPC分类号： G01B7/10 ,  G01B5/0014 ,  G01B7/107

公开(公告)号：US769197A

公开(公告)日：1904-09-06

申请号：US1903141974

申请日：1903-02-05

申请人： BROWN & SHARPE MFG

发明人： SPALDING FRANK

CPC分类号： G01B5/0014

公开(公告)号：US20240337613A1

公开(公告)日：2024-10-10

申请号：US18747486

申请日：2024-06-19

申请人： United Semiconductor (Xiamen) Co., Ltd.

发明人： Maohua Ren ,  Yuan-Chi Pai ,  Wen Yi Tan

IPC分类号： G01N25/16 ,  G01B5/00

CPC分类号： G01N25/16 ,  G01B5/0014

摘要： A reticle thermal expansion calibration method includes exposing a first group of wafers and generating a first sub-recipe, performing data mining and data parsing to generate a plurality of overlay parameters, performing a linear regression on each of the overlay parameters, and generating a first coefficient of determination for each of the overlay parameters.

公开(公告)号：US11892281B2

公开(公告)日：2024-02-06

申请号：US17655899

申请日：2022-03-22

申请人： Otsuka Electronics Co., Ltd.

发明人： Shiro Kawaguchi ,  Kazuya Nakajima ,  Hayato Takizawa ,  Goro Maeda

IPC分类号： G01B11/06 ,  G01J3/02 ,  G01J3/10 ,  G01B5/00 ,  G01N21/27 ,  G01B9/02055 ,  G01J3/28 ,  G01N21/25 ,  G01B21/04

CPC分类号： G01B11/0625 ,  G01B5/0014 ,  G01B9/0207 ,  G01B11/06 ,  G01B11/0675 ,  G01B21/045 ,  G01J3/02 ,  G01J3/027 ,  G01J3/0232 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/0297 ,  G01J3/10 ,  G01J3/28 ,  G01N21/25 ,  G01N21/274 ,  G01N21/276 ,  G01J2003/2836

摘要： An optical measurement system includes a light source, a spectroscopic detector, a reference sample, a switching mechanism that switches between a first optical path through which a sample to be measured is irradiated with light from the light source and light produced at the sample is guided to the spectroscopic detector and a second optical path through which the reference sample is irradiated with light from the light source and light produced at the reference sample is guided to the spectroscopic detector, and a processing unit that calculates, by performing correction processing based on change between a first detection result at first time and a second detection result at second time, a measurement value of the sample from a third detection result provided from the spectroscopic detector as a result of irradiation of the sample with light from the light source at third time temporally proximate to the second time.

公开(公告)号：US11761759B2

公开(公告)日：2023-09-19

申请号：US17831975

申请日：2022-06-03

申请人： MITUTOYO CORPORATION

发明人： Kohju Kasahara

IPC分类号： G01B5/008 ,  G01B21/04 ,  G01B5/00

CPC分类号： G01B21/045 ,  G01B5/008 ,  G01B5/0014 ,  G01B21/042 ,  G01B21/047

摘要： There is provided a probe unit correction method for correcting linear expansion of a probe unit to obtain an accurate measurement value. First, a probe offset value is calculated as a model. Then, a probe unit correction method includes a temperature data acquisition step of acquiring a temperature difference between a temperature at a time of calibration and a temperature of a current measurement environment, a reference tip coordinate correction step of calculating, as a reference tip correction coordinate value, a correction value of a reference tip coordinate value to which linear expansion is added, and a probe offset correction step of calculating, as a probe offset correction value, a correction value of a probe offset value to which the linear expansion is added.

公开(公告)号：US20180180396A1

公开(公告)日：2018-06-28

申请号：US15827589

申请日：2017-11-30

申请人： MITUTOYO CORPORATION

发明人： Takeshi HAGINO ,  Yuichiro YOKOYAMA

IPC分类号： G01B5/00 ,  G01B5/28 ,  G01B7/34

CPC分类号： G01B5/0014 ,  G01B5/0009 ,  G01B5/008 ,  G01B5/28 ,  G01B7/34 ,  G01N25/16

摘要： A step gauge and a reference gauge block are placed in a temperature-controlled chamber in parallel with each other. A temperature of the step gauge is changed to a first temperature and a second temperature using a measurement-target temperature adjuster and the temperature-controlled chamber. A distance between a first surface and a second surface of the step gauge is relatively measured at each of the first and second temperatures with reference to a distance between a first reference surface and a second reference surface of the reference gauge block. A coefficient of thermal expansion of the measurement target is calculated from the length of the measurement target at the first temperature and the length of the measurement target at the second temperature.