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    VARIABLE COMPRESSION RATIO APPARATUS
    1.
    发明申请
    VARIABLE COMPRESSION RATIO APPARATUS 审中-公开
    可变压缩比设备

    公开(公告)号：US20130118454A1

    公开(公告)日：2013-05-16

    申请号：US13488140

    申请日：2012-06-04

    申请人： Yoonsik Woo ,  Juhun Lee ,  Dongseok Lee ,  Eunho Lee ,  Jinkook Kong ,  Soohyung Woo

    发明人： Yoonsik Woo ,  Juhun Lee ,  Dongseok Lee ,  Eunho Lee ,  Jinkook Kong ,  Soohyung Woo

    IPC分类号： F02D15/02 ,  F02B75/04

    CPC分类号： F02B75/045 ,  F02D15/02

    摘要： A variable compression ratio (VCR) apparatus, may include a piston forming a combustion chamber, a connecting rod having one end rotatably coupled to the piston through a piston pin so as to transmit a motion of the piston to a crank shaft, dual eccentric links having one ends eccentrically connected to the one end of the connecting rod through the piston pin, and dual swing links having one ends pivotally connected to the other ends of the eccentric links, respectively, so as to pivot the eccentric links with respect to the piston pin.

    摘要翻译： 可变压缩比（VCR）装置可以包括形成燃烧室的活塞，连杆，其一端通过活塞销可旋转地联接到活塞，以便将活塞的运动传递到曲轴，双偏心连杆 其一端通过活塞销偏心地连接到连杆的一端，并且双摆动连杆具有分别枢转地连接到偏心连杆的另一端的一端，以便使偏心连杆相对于活塞 销。

    VARIABLE COMPRESSION RATIO APPARATUS WITH DUAL ECCENTRIC LINKS
    2.
    发明申请
    VARIABLE COMPRESSION RATIO APPARATUS WITH DUAL ECCENTRIC LINKS 有权
    具有双偏心连接的可变压缩比设备

    公开(公告)号：US20130042837A1

    公开(公告)日：2013-02-21

    申请号：US13296980

    申请日：2011-11-15

    申请人： Yoonsik Woo ,  Dongseok Lee ,  Jeichoon Yang ,  Changho Yang ,  Eunho Lee ,  Jinkook Kong ,  Soohyung Woo

    发明人： Yoonsik Woo ,  Dongseok Lee ,  Jeichoon Yang ,  Changho Yang ,  Eunho Lee ,  Jinkook Kong ,  Soohyung Woo

    IPC分类号： F02B75/04

    CPC分类号： F02B75/045 ,  F02B75/044 ,  F16C7/023 ,  F16C9/04 ,  F16C23/10

    摘要： A variable compression ratio (VCR) apparatus with dual eccentric links is mounted on an engine, receives combustion power of a fuel-air mixture from a piston to rotate a crank shaft and changes a compression ratio of the fuel-air mixture. The VCR apparatus may include a connecting rod having a large end portion formed at one end thereof, which is connected to the crank shaft to receive a torque of the engine, and a small end portion formed at the other end thereof, the small end portion having a coupling hole formed therein, a pair of eccentric links having one ends coupled to the coupling hole from both sides facing each other and integrally rotating, and an eccentric rod connected to the other ends of the eccentric links and rotating within a predetermined angle range. The eccentric rod may be a pair of eccentric rods.

    摘要翻译： 具有双偏心连杆的可变压缩比（VCR）装置安装在发动机上，从活塞接收燃料 - 空气混合物的燃烧功率以使曲轴旋转并改变燃料 - 空气混合物的压缩比。 VCR装置可以包括连接杆，该连杆在其一端形成有大的端部，该连杆与曲柄轴连接以接收发动机的扭矩，并且在其另一端形成小端部，小端部 具有形成在其中的联接孔，一对偏心连杆，其一端从彼此面对并整体旋转的两侧联接到联接孔，偏心杆连接到偏心连杆的另一端并在预定角度范围内旋转 。 偏心杆可以是一对偏心杆。

    PLASMA ETCHING DEVICE
    3.
    发明申请
    PLASMA ETCHING DEVICE 审中-公开
    等离子体蚀刻装置

    公开(公告)号：US20110042009A1

    公开(公告)日：2011-02-24

    申请号：US12854371

    申请日：2010-08-11

    申请人： Dongseok LEE ,  Hwankook CHAE ,  Heeseok MOON ,  Yunkwang CHOI

    发明人： Dongseok LEE ,  Hwankook CHAE ,  Heeseok MOON ,  Yunkwang CHOI

    IPC分类号： C23F1/08

    CPC分类号： H01J37/3244 ,  H01J37/32449 ,  H01J37/32623 ,  H01J37/32633 ,  H01J37/32834

    摘要： A plasma etching device is provided. The device includes a chamber, a cathode assembly, and an integral cathode liner. The chamber provides a plasma reaction space. The cathode assembly is positioned at an inner and central part of the chamber and supports a substrate. The integral cathode liner has a plurality of first vents and second vents formed at two levels and spaced apart respectively such that the uniformity of a gas flow and exhaust flow within the chamber is maintained, and is outer inserted to the cathode assembly and coupled at its lower end part to an inner surface of the chamber.

    摘要翻译： 提供了一种等离子体蚀刻装置。 该装置包括室，阴极组件和整体阴极衬套。 该室提供等离子体反应空间。 阴极组件位于腔室的内部和中心部分并且支撑衬底。 整体阴极衬套具有分别形成在两个水平面并分开间隔开的多个第一通风口和第二通风口，使得腔室内的气体流量和排气流的均匀性得以保持，并且外部插入阴极组件并在其上耦合 下端部分到腔室的内表面。

    Variable compression ratio apparatus with dual eccentric links
    7.
    发明授权
    Variable compression ratio apparatus with dual eccentric links 有权
    具有双偏心连杆的可变压缩比设备

    公开(公告)号：US08720394B2

    公开(公告)日：2014-05-13

    申请号：US13296980

    申请日：2011-11-15

    申请人： Yoonsik Woo ,  Dongseok Lee ,  Jeichoon Yang ,  Changho Yang ,  Eunho Lee ,  Jinkook Kong ,  Soohyung Woo

    发明人： Yoonsik Woo ,  Dongseok Lee ,  Jeichoon Yang ,  Changho Yang ,  Eunho Lee ,  Jinkook Kong ,  Soohyung Woo

    IPC分类号： F02B75/04

    CPC分类号： F02B75/045 ,  F02B75/044 ,  F16C7/023 ,  F16C9/04 ,  F16C23/10

    摘要： A variable compression ratio (VCR) apparatus with dual eccentric links is mounted on an engine, receives combustion power of a fuel-air mixture from a piston to rotate a crank shaft and changes a compression ratio of the fuel-air mixture. The VCR apparatus may include a connecting rod having a large end portion formed at one end thereof, which is connected to the crank shaft to receive a torque of the engine, and a small end portion formed at the other end thereof, the small end portion having a coupling hole formed therein, a pair of eccentric links having one ends coupled to the coupling hole from both sides facing each other and integrally rotating, and an eccentric rod connected to the other ends of the eccentric links and rotating within a predetermined angle range. The eccentric rod may be a pair of eccentric rods.

    摘要翻译： 具有双偏心连杆的可变压缩比（VCR）装置安装在发动机上，从活塞接收燃料 - 空气混合物的燃烧功率以使曲轴旋转并改变燃料 - 空气混合物的压缩比。 VCR装置可以包括连接杆，该连杆在其一端形成有大的端部，该连杆与曲柄轴连接以接收发动机的扭矩，并且在其另一端形成小端部，小端部 具有形成在其中的联接孔，一对偏心连杆，其一端从彼此面对并整体旋转的两侧联接到联接孔，偏心杆连接到偏心连杆的另一端并在预定角度范围内旋转 。 偏心杆可以是一对偏心杆。

    METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE
    8.
    发明申请
    METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE 有权
    制造半导体器件的方法

    公开(公告)号：US20130164922A1

    公开(公告)日：2013-06-27

    申请号：US13728277

    申请日：2012-12-27

    申请人： HanNa CHO ,  Dongseok Lee ,  Jungpyo Hong

    发明人： HanNa CHO ,  Dongseok Lee ,  Jungpyo Hong

    IPC分类号： H01L21/308 ,  H01L21/04

    CPC分类号： H01L21/308 ,  H01L21/0337 ,  H01L21/04 ,  H01L21/31144 ,  H01L21/32137 ,  H01L27/11582 ,  H01L28/90 ,  H01L29/66545 ,  H01L29/66825

    摘要： Methods of manufacturing a semiconductor device are provided. The method may include forming an etch target layer on a substrate, forming a carbon layer doped with boron on the etch target layer, a top end portion of the carbon layer having a different boron concentration from a bottom end portion of the carbon layer, patterning the carbon layer to form at least one opening exposing the etch target layer, and etching the exposed etch target layer using the carbon layer as an etch mask.

    摘要翻译： 提供制造半导体器件的方法。 该方法可以包括在衬底上形成蚀刻目标层，在蚀刻目标层上形成掺杂有硼的碳层，碳层的顶部部分与碳层的底端部分具有不同的硼浓度，图案化 所述碳层形成暴露所述蚀刻目标层的至少一个开口，以及使用所述碳层作为蚀刻掩模蚀刻所述暴露的蚀刻目标层。

    APPARATUS FOR CONTROLLING TEMPERATURE OF ELECTROSTATIC CHUCK COMPRISING TWO-STAGE REFRIGERANT FLUID CHANNEL
    9.
    发明申请
    APPARATUS FOR CONTROLLING TEMPERATURE OF ELECTROSTATIC CHUCK COMPRISING TWO-STAGE REFRIGERANT FLUID CHANNEL 审中-公开
    用于控制包含两级制冷剂流体通道的静电罐的温度控制装置

    公开(公告)号：US20110154843A1

    公开(公告)日：2011-06-30

    申请号：US12959564

    申请日：2010-12-03

    申请人： Sungyong KO ,  Minshik KIM ,  Kwangmin LEE ,  Hwankook CHAE ,  Dongseok LEE ,  Keehyun KIM ,  Weonmook LEE

    发明人： Sungyong KO ,  Minshik KIM ,  Kwangmin LEE ,  Hwankook CHAE ,  Dongseok LEE ,  Keehyun KIM ,  Weonmook LEE

    IPC分类号： F25D31/00

    CPC分类号： H01L21/6831

    摘要： An apparatus for controlling the temperature of an electrostatic chuck is provided. The apparatus includes an electrostatic chuck including, as a fluid channel part for circulating a refrigerant, a first fluid channel formed in an outer circumference region of the internal and a second fluid channel formed in the whole internal region, and one or more chillers for supplying refrigerant controlled to different temperatures through the first fluid channel or the second fluid channel. The first and second fluid channels are formed in two up/down stages within the electrostatic chuck, thereby being independently capable of the temperatures of a center part and edge part of a wafer.

    摘要翻译： 提供一种用于控制静电卡盘的温度的装置。 该装置包括静电卡盘，该静电卡盘包括作为用于循环制冷剂的流体通道部分，形成在内部的外周区域中形成的第一流体通道和形成在整个内部区域中的第二流体通道，以及一个或多个用于供给的冷却器 制冷剂通过第一流体通道或第二流体通道控制到不同的温度。 第一和第二流体通道形成在静电卡盘内的两个上/下级中，从而独立地能够承受晶片的中心部分和边缘部分的温度。