公开(公告)号：US20250079198A1

公开(公告)日：2025-03-06

申请号：US18816488

申请日：2024-08-27

Applicant: Elemental Scientific, Inc.

Inventor： Jacob Unnerstall ,  Brianna Dufek ,  Daniel R. Wiederin ,  Suhas Ketkar ,  Austin Schultz ,  Kyle W. Uhlmeyer ,  Beau A. Marth

IPC: H01L21/67 ,  H01L21/02

Abstract: Systems and methods are described for systems and methods for integrated decomposition and scanning of a semiconducting wafer for organic and inorganic impurities. In an aspect, a method includes, but is not limited to, positioning a nozzle above a surface of a semiconducting wafer, the semiconducting wafer supported adjacent to or within an interior of a chamber body; introducing a first scan fluid including one or more organic fluids to an inlet port of the nozzle; directing a portion of the first scan fluid onto the surface of the semiconducting wafer to permit interaction between the scan fluid and one or more organic contaminants present on the surface of the semiconducting wafer; and removing the first scan fluid containing at least a portion of the one or more organic contaminants from the surface of the semiconducting wafer via the nozzle.

公开(公告)号：US12169207B2

公开(公告)日：2024-12-17

申请号：US17127189

申请日：2020-12-18

Applicant: Elemental Scientific, Inc.

Inventor： Jeremiah Meints ,  Maurice Reijnen

IPC: G01N35/10 ,  G01N35/00 ,  G01N35/02

Abstract: A sample introduction system is described that provides temperature-controlled handling and transfer of a sample from an autosampler, through a transfer line, to a heated environment proximate an analytical device. A system embodiment includes, but is not limited to, an autosampler including a temperature-controlled deck to support one or more sample containers; a heating unit including one or more heating elements to one or more fluids to be introduced to a sample removed from the one or more sample containers; a transfer line fluidically coupled with the autosampler and including a heating element configured to transfer heat to fluid flowing through the transfer line; and a sample handling system fluidically coupled with the transfer line and configured to fluidically couple with an analysis device, the sample handling system including a housing and a heating element configured to control a temperature of an environment defined by the housing.

公开(公告)号：US20240302392A1

公开(公告)日：2024-09-12

申请号：US18608274

申请日：2024-03-18

Applicant: Elemental Scientific, Inc.

Inventor： Tyler Yost ,  Jonathan Hein ,  Jae Seok Lee ,  Dong Cherl Park

IPC: G01N35/00

CPC classification number: G01N35/00613 ,  G01N35/00871 ,  G01N2035/009

Abstract: A sample analysis system is available that can include a remote sampling system, at least one analyzer, and a controller. The remote sampling system can include a plurality of sample sources for providing a corresponding sample therefrom; and a plurality of sample collection devices selectively coupled to any of the plurality of sample sources for receiving at least one of the samples therefrom. The at least one analyzer can be coupled to the plurality of the sample collection devices for receiving at least one of the samples therefrom. The controller can be coupled with the remote sampling system and the at least one analyzer, the controller configured to control which of the sample sources is actively coupled to a given sample collection device at a given time.

公开(公告)号：US12055530B2

公开(公告)日：2024-08-06

申请号：US17125222

申请日：2020-12-17

Applicant: Elemental Scientific, Inc.

Inventor： Alexander Lang ,  Brianna Dufek ,  Daniel R. Wiederin

IPC: G01N30/00 ,  G01N30/72 ,  H01J49/00 ,  H01J49/04 ,  H01J49/10 ,  H01J49/40

CPC classification number: G01N30/724 ,  H01J49/0036 ,  H01J49/0422 ,  H01J49/045 ,  H01J49/105 ,  H01J49/40

Abstract: An embodiment of an analysis system can include an initial multi-port valve, at least one intermediate multi-port valve, a further multi-port valve, and a time-of-flight mass spectrometer (TOF-MS). The initial multi-port valve can be configured to receive a sample. The at least one intermediate multi-port valve can be fluidly connected to the initial multi-port valve and configured to receive the sample from the initial multi-port valve. A given intermediate multi-port valve can have an ion-exchange column associated therewith. The given intermediate multi-port valve can be configured selectably to one of direct the sample through the ion-exchange column associated therewith (in a speciation mode) or bypass the ion-exchange column (in an infusion mode). The further multi-port valve can be fluidly connected with the at least one intermediate multi-port valve and configured to receive the sample from therefrom. The time-of-flight mass spectrometer (TOF-MS) can be fluidly connected to the further multi-port valve.

公开(公告)号：US12025241B2

公开(公告)日：2024-07-02

申请号：US17978346

申请日：2022-11-01

Applicant: Elemental Scientific, Inc.

Inventor： Daniel R. Wiederin ,  Brad Prucha ,  Jeremiah Meints ,  Jonathan Hein

IPC: F16K37/00 ,  F16K11/074 ,  G01N35/10

CPC classification number: F16K37/005 ,  F16K11/074 ,  F16K37/0058 ,  G01N35/1016

Abstract: A valve system includes, but is not limited to, a rotary valve; an actuator coupled with the rotary valve, wherein the actuator comprises a power connection fed from electronics associated with the actuator or coupled to the actuator; an actuator cap coupled with the actuator, the actuator cap configured to allow the power connection to pass through; a valve collar configured to be attached to the actuator cap, wherein the valve collar comprises an electronic feedthrough passage for the power connection; a sensor housing adjacent to the rotary valve and configured to support one or more sensors; and a retainer portion coupled with the rotary valve, the retainer portion configured to couple with the actuator cap through mating of respective retainer pins and apertures to allow electrical connection between the power connector and the sensor connector while remaining fixed with respect to the valve collar.

公开(公告)号：US11971421B2

公开(公告)日：2024-04-30

申请号：US18200711

申请日：2023-05-23

Applicant: Elemental Scientific, Inc.

Inventor： Tyler Yost ,  Jonathan Hein ,  Jae Seok Lee ,  Dong Cherl Park

IPC: G01N35/00

CPC classification number: G01N35/00613 ,  G01N35/00871 ,  G01N2035/009

Abstract: A sample analysis system is available that can include a remote sampling system, at least one analyzer, and a controller. The remote sampling system can include a plurality of sample sources for providing a corresponding sample therefrom; and a plurality of sample collection devices selectively coupled to any of the plurality of sample sources for receiving at least one of the samples therefrom. The at least one analyzer can be coupled to the plurality of the sample collection devices for receiving at least one of the samples therefrom. The controller can be coupled with the remote sampling system and the at least one analyzer, the controller configured to control which of the sample sources is actively coupled to a given sample collection device at a given time.

公开(公告)号：US11933698B2

公开(公告)日：2024-03-19

申请号：US17368056

申请日：2021-07-06

Applicant: Elemental Scientific, Inc.

Inventor： David Diaz ,  Jonathan Hein ,  Kyle W. Uhlmeyer ,  Daniel R. Wiederin ,  Tyler Yost ,  Kevin Wiederin

IPC: G01N1/28 ,  G01N1/10 ,  G01N1/14 ,  G01N35/00 ,  G01N35/10 ,  H01J49/04 ,  G01N1/00

CPC classification number: G01N1/10 ,  G01N1/14 ,  G01N35/00732 ,  G01N35/00871 ,  G01N35/1097 ,  H01J49/045 ,  G01N2001/002

Abstract: A system includes an analysis system at a first location and one or more remote sampling systems at a second location remote from the first location. A sampling system can be configured to receive a remote liquid sample. The system also includes a sample transfer line configured to transport gas from the second location to the first location. The sample transfer line is configured to selectively couple with a remote sampling for supplying a continuous liquid sample segment to the sample transfer line. The system can further include a sample receiving line at the first location. The sample receiving line is configured to selectively couple with the sample transfer line and the analysis system to receive the continuous liquid sample segment and supply the sample to an analysis device.

公开(公告)号：US11761860B2

公开(公告)日：2023-09-19

申请号：US17956229

申请日：2022-09-29

Applicant: Elemental Scientific, Inc.

Inventor： Daniel R. Wiederin ,  Kyle W. Uhlmeyer ,  Austin Schultz ,  Jacob Unnerstall ,  Kevin Wiederin

IPC: G01N1/14 ,  H01J49/40

CPC classification number: G01N1/14 ,  H01J49/40 ,  G01N2001/1445

Abstract: Systems and methods are described to maintain a liquid sample segment of a sample transmitted through a transfer line from a remote sampling to an analysis system. A system embodiment includes, but is not limited to, a sample transfer line configured to transport a liquid sample from a remote sampling system via gas pressure; a sample loop fluidically coupled with the sample transfer line, the sample loop configured to hold a sample fluid; and a backpressure chamber fluidically coupled with a gas pressure source and with the sample transfer line, the backpressure chamber configured to supply a backpressure against the liquid sample during transport through the sample transfer line.

公开(公告)号：US11694914B2

公开(公告)日：2023-07-04

申请号：US17968124

申请日：2022-10-18

Applicant: Elemental Scientific, Inc.

Inventor： Tyler Yost ,  Daniel R. Wiederin ,  Beau A. Marth ,  Jared Kaser ,  Jonathan Hein ,  Jae Seok Lee ,  Jae Min Kim ,  Stephen H. Sudyka

IPC: H01L21/67 ,  H01L21/66 ,  G01N21/73 ,  G01N33/00 ,  H01L21/677 ,  H01J49/10 ,  H01J49/00

CPC classification number: H01L21/6719 ,  G01N21/73 ,  H01J49/105 ,  H01L21/6708 ,  H01L21/6715 ,  H01L21/67051 ,  H01L21/67126 ,  H01L21/67259 ,  H01L21/67748 ,  H01L21/67772 ,  H01L22/14 ,  H01L22/34 ,  G01N2033/0095 ,  H01J49/00 ,  H01L22/12

Abstract: Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.

公开(公告)号：US20230101874A1

公开(公告)日：2023-03-30

申请号：US17949538

申请日：2022-09-21

Applicant: Elemental Scientific, Inc.

Inventor： Caleb Gilmore ,  Tyler Yost

IPC: F16K31/06 ,  F16K31/08 ,  H01J49/04 ,  H01J49/10

Abstract: Valve assemblies are described that provide magnetic coupling between a valve actuator and a valve body housing the valve rotor and stator. A valve assembly embodiment, includes, but is not limited to, a valve body, the valve body including at least one magnet, and a rotor and a stator configured to define a plurality of fluid flow passageways; a valve actuator configured to drive the rotor via a drive shaft; and an actuator mount coupled to the valve actuator and configured to magnetically couple with the at least one magnet of the valve body to magnetically couple the valve body and the valve actuator.