LASER APPARATUS AND METHOD OF CONTROLLING LASER APPARATUS
    2.
    发明申请
    LASER APPARATUS AND METHOD OF CONTROLLING LASER APPARATUS 有权
    激光装置和控制激光装置的方法

    公开(公告)号:US20150139258A1

    公开(公告)日:2015-05-21

    申请号:US14602208

    申请日:2015-01-21

    IPC分类号: H01S3/097

    摘要: A laser apparatus according to embodiment may include: a laser chamber filled with a laser gain medium; a pair of electrodes disposed in the laser chamber; a charger configured to apply a charge voltage for causing a discharge to occur between the pair of the electrodes; a pulse power module configured to covert the charge voltage applied by the charger into a short pulsed voltage, and apply the short pulsed voltage between the pair of the electrodes; and a controller configured to calculate input energies Ein applied to the pair of the electrodes based on the charge voltage, calculate an integration value Einsum of the input energies Ein by integrating the calculated input energies Ein, and determine whether the integration value Einsum exceeds an integration lifetime value Einsumlife of input energy or not.

    摘要翻译: 根据实施例的激光装置可以包括:填充有激光增益介质的激光室; 设置在激光室中的一对电极; 充电器,被配置为施加用于在所述一对电极之间发生放电的充电电压; 脉冲功率模块,被配置为将由充电器施加的充电电压转换成短脉冲电压,并且在一对电极之间施加短脉冲电压; 以及控制器,被配置为基于所述充电电压来计算施加到所述一对电极的输入能量Ein,通过对所计算的输入能量Ein进行积分来计算输入能量Ein的积分值Einsum,并且确定积分值Einsum是否超过积分 输入能量的寿命值Einsumlife。

    METHOD OF CONTROLLING LASER APPARATUS AND LASER APPARATUS
    3.
    发明申请
    METHOD OF CONTROLLING LASER APPARATUS AND LASER APPARATUS 有权
    控制激光装置和激光装置的方法

    公开(公告)号:US20150188274A1

    公开(公告)日:2015-07-02

    申请号:US14579698

    申请日:2014-12-22

    摘要: A method of controlling a laser apparatus may include: exchanging a gain medium in a chamber configured to output a laser beam by exciting the gain medium; first measuring, after the exchanging, pulse energy of a laser beam which is oscillated in the chamber under a specific gas pressure and a specific charge voltage; calculating an approximate expression indicating a relationship between the pulse energy of the laser beam and the gas pressure in the chamber and the charge voltage, or a table representing a correlationship between the pulse energy, the gas pressure and the charge voltage, based on the specific pressure, the specific charge voltage and the pulse energy in the first measuring; storing the approximate expression or the table; second measuring, after the first measuring, pulse energy Er of a laser beam oscillated in the chamber; calculating pulse energy Eec which is supposed to be obtained directly after the exchanging under the gas pressure and the charge voltage in the second measuring based on the approximate expression or the table; calculating a reduction amount ΔEd of pulse energy based on the pulse energy Eec and the pulse energy Er using ΔEd=Eec−Er; and calculating a partial gas exchange amount Q for partial gas exchange in the chamber based on the reduction amount ΔEd of pulse energy.

    摘要翻译: 控制激光装置的方法可以包括:在配置成通过激励增益介质输出激光束的腔室中交换增益介质; 在交换之后,首先测量在特定气体压力和特定充电电压下在腔室中振荡的激光束的脉冲能量; 计算表示激光束的脉冲能量与腔室中的气体压力与充电电压之间的关系的近似表达式,或表示脉冲能量,气体压力和充电电压之间的相关性的表格, 压力,第一次测量中的具体充电电压和脉冲能量; 存储近似表达式或表格; 在第一次测量之后,第二次测量激光束的脉冲能量Er在腔室中振荡; 基于近似表达式或表格,计算在气体压力下的交换和第二测量中的充电电压之间直接获得的脉冲能量Eec; 使用&Dgr; Ed = Eec-Er计算基于脉冲能量Eec和脉冲能量Er的脉冲能量的减少量&Dgr; Ed; 并且基于脉冲能量的减少量&Dgr; Ed计算腔室中部分气体交换的部分气体交换量Q。