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    Lift pin impact management
    4.
    发明授权
    Lift pin impact management 有权
    提升针撞击管理

    公开(公告)号：US06481723B1

    公开(公告)日：2002-11-19

    申请号：US09823469

    申请日：2001-03-30

    申请人： Fangli J. Hao ,  Dean Jay Larson

    发明人： Fangli J. Hao ,  Dean Jay Larson

    IPC分类号： B23B3128

    CPC分类号： H01L21/68742 ,  H01L21/6831 ,  Y10S269/903 ,  Y10T279/23 ,  Y10T279/3481

    摘要： A pin stop and method of implementation suitable for use lift pin assemblies used in semiconductor process environments is provided. The pin stop includes a pin shaft and a circular pin head with soft stop and hard stop features defined thereon. The soft stop feature is defined in a grove in the pin head surface and is configured to impact a stopping surface slowing movement of a lift pin assembly. The hard stop then impacts the stopping surface providing a constant, reliable and repeatable position of a wafer positioned on the lift pin assembly.

    摘要翻译： 提供了适用于半导体工艺环境中使用的升降销组件的销止动件和实施方法。 销止动件包括一个销轴和一个圆形销头，具有限定在其上的软停止和硬停止特征。 软停止功能被限定在销头表面中的槽中，并且被配置为冲击止动表面减缓提升销组件的运动。 然后硬停止冲击止动表面，提供定位在升降销组件上的晶片的恒定，可靠和可重复的位置。

    Apparatus for tilting and securing a heat exchanger
    5.
    发明申请
    Apparatus for tilting and securing a heat exchanger 有权
    用于倾斜和固定热交换器的装置

    公开(公告)号：US20060005943A1

    公开(公告)日：2006-01-12

    申请号：US10877379

    申请日：2004-06-25

    申请人： John Rasset ,  Jay Larson

    发明人： John Rasset ,  Jay Larson

    IPC分类号： F28F7/00

    CPC分类号： F28D1/0435 ,  F28F9/002 ,  F28F2280/10 ,  Y10T292/289 ,  Y10T292/291

    摘要： Apparatus for supporting a heat exchanger such as a condenser of an air conditioning system on a vehicle, for pivotal movement between an operational position and a position angularly related to the operational position, for such purposes as inspection, cleaning, service and maintenance, the apparatus being configured for holding the heat exchanger in the operational position, and for guiding and controlling movement thereof to the tilted position, and holding the heat exchanger in the tilted position.

    摘要翻译： 用于在车辆上支撑诸如空调系统的冷凝器的热交换器的装置，用于在操作位置和与操作位置有角度相关的位置之间的枢转运动，用于检查，清洁，维修和维护等目的 被配置为将热交换器保持在操作位置，并且用于引导和控制其向倾斜位置的移动，并且将热交换器保持在倾斜位置。

    Tolerance resistant and vacuum compliant door hinge with open-assist feature
    6.
    发明授权
    Tolerance resistant and vacuum compliant door hinge with open-assist feature 有权
    耐公差和真空兼容的门铰链具有开启辅助功能

    公开(公告)号：US06263542B1

    公开(公告)日：2001-07-24

    申请号：US09338008

    申请日：1999-06-22

    申请人： Dean Jay Larson ,  Thomas R. Sutton

    发明人： Dean Jay Larson ,  Thomas R. Sutton

    IPC分类号： H01L2134

    CPC分类号： H01L21/67126 ,  E05D3/022 ,  E05D11/084 ,  E05Y2900/60 ,  Y10T16/53834 ,  Y10T16/53885 ,  Y10T16/5402

    摘要： A hinge assembly and methods for mounting a hatch relative to a port defined in a cover of a vacuum chamber to close and open the port. A torsion rod mounted between the port and the hatch is in torsion when the hatch is in a closed position relative to the port, assisting port-opening motion. A sleeve surrounds the rod and is movable with the hatch. Friction hinge structures between the cover and the sleeve, and between the hatch and a second sleeve are in a friction-engaging relationship with the corresponding sleeve. Each friction hinge structure provides high resistance to relative motion between a friction spring and the corresponding sleeve. During the port-opening motion of the hatch the friction springs provide low resistance to such relative motion. The hinge structures provide tolerance resistance and vacuum compliance by allowing relative movement between a hinge mounting plate and the hatch. During vacuum pumping, the hinges allow the hatch to move from an O-ring pre-load position, to an intermediate position, and then to a final position so that the pre-loaded O-ring compresses to an operational O-ring compression. Since the hinges permit the O-ring pre-load position to exist prior to vacuum operation and under all variations of certain manufacturing tolerances, the full range of relative motion between the plate and the hatch is permitted, such that the sealing surfaces seal in a tolerance resistance and vacuum compliant manner.

    摘要翻译： 铰链组件和用于相对于限定在真空室的盖中的端口安装舱口以闭合和打开端口的方法。 当舱口处于相对于端口的关闭位置时，安装在端口和舱口之间的扭杆处于扭转状态，有助于开启开启运动。 套筒环绕杆，可以用舱口移动。 盖和套筒之间以及舱口与第二套筒之间的摩擦铰链结构与相应的套筒处于摩擦接合关系。 每个摩擦铰链结构为摩擦弹簧和相应的套筒之间的相对运动提供了很高的阻力。 在舱口开口运动期间，摩擦弹簧对这种相对运动提供较低的阻力。 铰链结构通过允许铰链安装板和舱口之间的相对运动来提供公差阻力和真空顺从性。 在真空泵送期间，铰链允许舱口从O形环预载位置移动到中间位置，然后到最终位置，使得预加载的O形环压缩到可操作的O形环压缩。 由于铰链允许在真空操作之前和在某些制造公差的所有变化下存在O形环预加载位置，所以允许板和舱口之间的相对运动的全范围，使得密封表面密封在 耐公差和真空兼容的方式。

    Wafer atmospheric transport module having a controlled mini-environment
    9.
    发明授权
    Wafer atmospheric transport module having a controlled mini-environment 有权
    晶圆大气输送模块具有受控的微型环境

    公开(公告)号：US06364762B1

    公开(公告)日：2002-04-02

    申请号：US09410190

    申请日：1999-09-30

    申请人： Farro F. Kaveh ,  David E. Jacob ,  Dean Jay Larson ,  Martin R. Maraschin

    发明人： Farro F. Kaveh ,  David E. Jacob ,  Dean Jay Larson ,  Martin R. Maraschin

    IPC分类号： B01L104

    CPC分类号： H01L21/67778

    摘要： An atmospheric transport module is provided. The module includes an enclosed housing having a top region, a central region, a bottom region, and a load cell region. A blower is located in the top region of the enclosed housing and is configured to generate a flow of air downward into the central region. A shelf in the load cell region defines a separation between the central region and the bottom region of the enclosed housing. The shelf is at least partially spaced apart from a wall of the load cell region to thereby define a slot behind the shelf. A perforated sheet is configured to extend horizontally from the shelf and further define the separation between the central region and the bottom region. In this example, air flow generated by the blower is restricted from freely flowing through the perforated sheet and is partially caused to be redirected toward the shelf of the load cell, through the slot and into the bottom region of the enclosure housing. A cassette having one or more wafers is configured to sit on the shelf in the load cell and thus be subjected to the redirected air flow. This redirected air flow will thus gently flow over the surfaces of the wafers and assist in removing post-process gases and particles from over the wafer surfaces while the wafers temporarily sit in the atmospheric transport module.

    摘要翻译： 提供大气传输模块。 模块包括具有顶部区域，中心区域，底部区域和负载单元区域的封闭壳体。 鼓风机位于封闭壳体的顶部区域中并且构造成产生向下流入中心区域的空气流。 称重传感器区域中的搁架限定了封闭壳体的中心区域和底部区域之间的间隔。 搁板至少部分地与称重传感器区域的壁间隔开，从而在搁板后面限定狭槽。 穿孔板被构造成从搁架水平延伸，并进一步限定中心区域和底部区域之间的间隔。 在该示例中，由鼓风机产生的空气流被限制为自由地流过穿孔板，并且部分地被引导通过该狭槽重新定向到测力传感器的搁架，并进入外壳壳体的底部区域。 具有一个或多个晶片的盒被配置为坐在称重传感器中的搁架上，并因此受到重定向的空气流。 因此，这种重新定向的空气流将轻轻地流过晶片的表面，并且有助于在晶片临时位于大气输送模块中时从晶片表面上除去后处理气体和颗粒。