公开(公告)号：US09390841B2

公开(公告)日：2016-07-12

申请号：US13795399

申请日：2013-03-12

申请人： Jin-Kwang Kim ,  Seung-Yong Song ,  Myung-Soo Huh ,  Suk-Won Jung ,  Choel-Min Jang ,  Jae-Hyun Kim ,  Sung-Chul Kim

发明人： Jin-Kwang Kim ,  Seung-Yong Song ,  Myung-Soo Huh ,  Suk-Won Jung ,  Choel-Min Jang ,  Jae-Hyun Kim ,  Sung-Chul Kim

IPC分类号： C23C16/00 ,  H01B13/30 ,  C23C14/24 ,  C23C14/56 ,  C23C16/44 ,  C23C16/455

CPC分类号： H01L51/0021 ,  C23C14/24 ,  C23C14/564 ,  C23C16/4401 ,  C23C16/4412 ,  C23C16/45536 ,  C23C16/45544 ,  C23C16/45551 ,  C23C16/50 ,  H01B13/30 ,  H01L27/3244 ,  H01L51/5206 ,  H01L51/5221 ,  H01L51/5253 ,  H01L51/56 ,  H01L2227/323

摘要： A vapor deposition apparatus in which a deposition process is performed by moving a substrate, the vapor deposition apparatus including a supply unit that injects at least one raw material gas towards the substrate, and a blocking gas flow generation unit that is disposed corresponding to the supply unit and generates a gas-flow that blocks a flow of the raw material gas.

摘要翻译： 一种气相沉积装置，其中通过移动基板进行沉积工艺，所述气相沉积设备包括向基板注入至少一种原料气体的供应单元和对应于供应设置的阻塞气体流产生单元 并且产生阻挡原料气体流动的气流。

公开(公告)号：US09028613B2

公开(公告)日：2015-05-12

申请号：US13443268

申请日：2012-04-10

申请人： Jin-Kwang Kim ,  Sang-Joon Seo ,  Seung-Hun Kim

发明人： Jin-Kwang Kim ,  Sang-Joon Seo ,  Seung-Hun Kim

IPC分类号： C23C16/458 ,  C23C14/50 ,  B01J19/18 ,  B01J19/22 ,  C23C16/455

CPC分类号： C23C16/458 ,  B01J19/1887 ,  B01J19/22 ,  C23C14/50 ,  C23C16/45551

摘要： A rotating type thin film deposition apparatus having an improved structure that allows continuous deposition, and a thin film deposition method used by the rotating type thin film deposition apparatus are provided. The rotating type thin film deposition apparatus includes a deposition device; a circulation running unit that runs a deposition target on a circulation track via a deposition region of the deposition device; and a support unit that supports the deposition target and moves along the circulation track. Thin layers can be precisely and uniformly formed on the entire surface of a deposition target, and since deposition is performed while a plurality of deposition targets move along a caterpillar track, a working speed is faster compared to a method involving a general reciprocating motion, and the size of the thin film deposition apparatus can be reduced.

摘要翻译： 提供一种旋转型薄膜沉积设备，其具有能够连续沉积的改进的结构，以及由旋转型薄膜沉积设备使用的薄膜沉积方法。 旋转型薄膜沉积设备包括沉积设备; 循环运行单元，其经由沉积装置的沉积区域在循环轨道上运行沉积靶; 以及支撑单元，其支撑沉积靶并沿着循环轨迹移动。 可以在沉积靶的整个表面上精确均匀地形成薄层，并且由于在多个沉积靶沿着履带轨道移动时进行沉积，与涉及一般往复运动的方法相比，加工速度更快， 可以减小薄膜沉积装置的尺寸。

公开(公告)号：US08883267B2

公开(公告)日：2014-11-11

申请号：US13431880

申请日：2012-03-27

申请人： Sang-Joon Seo ,  Myung-Soo Huh ,  Seung-Hun Kim ,  Jin-Kwang Kim ,  Seung-Yong Song

发明人： Sang-Joon Seo ,  Myung-Soo Huh ,  Seung-Hun Kim ,  Jin-Kwang Kim ,  Seung-Yong Song

IPC分类号： C23C16/04 ,  C23C16/50 ,  C23C16/458 ,  C23C16/455

CPC分类号： C23C16/45542 ,  C23C16/45551 ,  C23C16/4587

摘要： A vapor deposition apparatus and method for efficiently performing a deposition process to form a thin film with improved characteristics on a substrate, and a method of manufacturing an organic light-emitting display apparatus. The vapor deposition apparatus includes a chamber including an exhaust port; a stage disposed in the chamber, and including a mounting surface on which the substrate is to be disposed; an injection portion including at least one injection opening through which a gas is injected in a direction parallel with a surface of the substrate on which the thin film is to be formed; and a plasma generator disposed apart from the substrate to face the substrate.

摘要翻译： 一种用于有效地执行沉积工艺以形成具有改善的基板特性的薄膜的蒸镀装置和方法，以及制造有机发光显示装置的方法。 该蒸镀装置具备包括排气口的室， 设置在所述室中的台，并且包括将要设置所述基板的安装表面; 注射部分，其包括至少一个注射开口，气体在与要形成所述薄膜的所述基底的表面平行的方向上被注入; 以及等离子体发生器，其与衬底分离设置以面对衬底。

公开(公告)号：US20130017633A1

公开(公告)日：2013-01-17

申请号：US13356301

申请日：2012-01-23

申请人： Sang-Joon Seo ,  Seung-Hun Kim ,  Jin-Kwang Kim ,  Seung-Yong Song

发明人： Sang-Joon Seo ,  Seung-Hun Kim ,  Jin-Kwang Kim ,  Seung-Yong Song

IPC分类号： H01L51/56 ,  C23C16/458 ,  C23C16/00 ,  C23C16/455

CPC分类号： C23C16/042 ,  C23C16/45544 ,  C23C16/45563 ,  C23C16/4587 ,  H01L51/001

摘要： A vapor deposition apparatus, which is capable of performing a thin film deposition process and improving characteristics of a formed thin film, includes a chamber having an exhaust opening; a stage located in the chamber, and including a plurality of mounting surfaces on which the plurality of substrates may be mounted; and an injection unit having at least one injection opening for injecting a gas into the chamber in a direction parallel with surfaces of the plurality of substrates.

摘要翻译： 能够进行薄膜沉积工艺并改善所形成的薄膜特性的气相沉积设备包括具有排气口的室; 位于所述室中的台，并且包括多个安装表面，所述多个基板可以安装在所述多个安装表面上; 以及具有至少一个注射开口的注射单元，所述注射开口用于沿着与所述多个基底的表面平行的方向将气体注入所述腔室。

公开(公告)号：US20130017343A1

公开(公告)日：2013-01-17

申请号：US13431880

申请日：2012-03-27

申请人： Sang-Joon Seo ,  Myung-Soo Huh ,  Seung-Hun Kim ,  Jin-Kwang Kim ,  Seung-Yong Song

发明人： Sang-Joon Seo ,  Myung-Soo Huh ,  Seung-Hun Kim ,  Jin-Kwang Kim ,  Seung-Yong Song

IPC分类号： H05B33/10 ,  H05H1/24 ,  C23C16/04 ,  C23C16/50

CPC分类号： C23C16/45542 ,  C23C16/45551 ,  C23C16/4587

摘要： A vapor deposition apparatus and method for efficiently performing a deposition process to form a thin film with improved characteristics on a substrate, and a method of manufacturing an organic light-emitting display apparatus. The vapor deposition apparatus includes a chamber including an exhaust port; a stage disposed in the chamber, and including a mounting surface on which the substrate is to be disposed; an injection portion including at least one injection opening through which a gas is injected in a direction parallel with a surface of the substrate on which the thin film is to be formed; and a plasma generator disposed apart from the substrate to face the substrate.

摘要翻译： 一种用于有效地执行沉积工艺以形成具有改善的基板特性的薄膜的蒸镀装置和方法，以及制造有机发光显示装置的方法。 该蒸镀装置具备包括排气口的室， 设置在所述室中的台，并且包括将要设置所述基板的安装表面; 注射部分，其包括至少一个注射开口，气体在与要形成所述薄膜的所述基底的表面平行的方向上被注入; 以及等离子体发生器，其与衬底分离设置以面对衬底。

公开(公告)号：US20120242221A1

公开(公告)日：2012-09-27

申请号：US13297586

申请日：2011-11-16

申请人： Jin-Kwang KIM ,  Sang-Joon SEO ,  Seung-Hun KIM ,  Jun-Hyuk Cheon

发明人： Jin-Kwang KIM ,  Sang-Joon SEO ,  Seung-Hun KIM ,  Jun-Hyuk Cheon

IPC分类号： H01J1/62 ,  H01J9/00

CPC分类号： H01L51/5253

摘要： A method of fabricating an organic light-emitting display includes forming an organic light-emitting device (OLED) on a substrate, forming a first encapsulation layer, which has a first thin-film density and contains a first inorganic material, on the substrate, and forming a second encapsulation layer, which has a second thin-film density higher than the first thin-film density and contains a second inorganic material, on the first encapsulation layer.

摘要翻译： 一种制造有机发光显示器的方法包括在衬底上形成有机发光器件（OLED），在衬底上形成具有第一薄膜密度并包含第一无机材料的第一封装层， 以及在所述第一封装层上形成具有比所述第一薄膜密度高的第二薄膜密度并且包含第二无机材料的第二封装层。

公开(公告)号：US08153312B2

公开(公告)日：2012-04-10

申请号：US11711010

申请日：2007-02-27

申请人： Ju-Yong Kim ,  Sung-Chul Lee ,  Chan-Ho Lee ,  Jin-Goo Ahn ,  Jin-Kwang Kim

发明人： Ju-Yong Kim ,  Sung-Chul Lee ,  Chan-Ho Lee ,  Jin-Goo Ahn ,  Jin-Kwang Kim

IPC分类号： H01M8/06

CPC分类号： H01M8/0618 ,  H01M8/04014 ,  H01M8/1004 ,  H01M8/2475 ,  H01M2008/1095 ,  H01M2250/30 ,  Y02B90/18

摘要： A fuel cell system includes a fuel cell body to generate electrical energy using a reaction of hydrogen and oxygen; a reformer to generate a reformed gas containing hydrogen by reforming fuel and to supply the reformed gas to the fuel cell body; a fuel tank to store the fuel in a partially liquefied state and to supply the fuel to the reformer; a case to encase the fuel cell body and the reformer; and a refrigeration unit attached to the case to store ambient air of the fuel tank, the ambient air of the fuel tank being cooled by latent heat of vaporization of the fuel.

摘要翻译： 燃料电池系统包括使用氢和氧的反应产生电能的燃料电池体; 重整器，通过重整燃料生成含氢气的重整气体，并向燃料电池体供给重整气体; 燃料箱，用于储存处于部分液化状态的燃料并将燃料供应至重整器; 封装燃料电池体和重整器的情况; 以及附接到壳体以储存燃料箱的环境空气的制冷单元，燃料箱的环境空气被燃料的蒸发潜热所冷却。

公开(公告)号：US07061955B2

公开(公告)日：2006-06-13

申请号：US09953576

申请日：2001-09-14

申请人： Jin Kwang Kim ,  Andrew Sumika Huntington

发明人： Jin Kwang Kim ,  Andrew Sumika Huntington

IPC分类号： H01S5/00

CPC分类号： H01L33/145 ,  H01L31/03046 ,  H01L33/10 ,  H01L33/30 ,  H01S5/18311 ,  H01S5/18316 ,  H01S5/2215 ,  H01S5/3201 ,  Y02E10/544

摘要： The present invention creates oxide and air apertures in material systems, such as InP, that do not usually accommodate epitaxial incorporation of highly oxidizing materials, such as AlAs, of sufficient thickness to adequately provide optical as well as current aperturing. A composite structure of relatively slowly oxidizing layer or layers (e.g. AlInAs on InP) with a faster-oxidizing layer or layers (e.g. AlAs on InP) can be used to produce oxide and air apertures of various shapes and sizes, and to also increase the oxidation rate.

公开(公告)号：US08957583B2

公开(公告)日：2015-02-17

申请号：US13297586

申请日：2011-11-16

申请人： Jin-Kwang Kim ,  Sang-Joon Seo ,  Seung-Hun Kim ,  Jun-Hyuk Cheon

发明人： Jin-Kwang Kim ,  Sang-Joon Seo ,  Seung-Hun Kim ,  Jun-Hyuk Cheon

IPC分类号： H01J1/62 ,  H01J63/04 ,  H01L51/52

CPC分类号： H01L51/5253

摘要： A method of fabricating an organic light-emitting display includes forming an organic light-emitting device (OLED) on a substrate, forming a first encapsulation layer, which has a first thin-film density and contains a first inorganic material, on the substrate, and forming a second encapsulation layer, which has a second thin-film density higher than the first thin-film density and contains a second inorganic material, on the first encapsulation layer.

摘要翻译： 一种制造有机发光显示器的方法包括在衬底上形成有机发光器件（OLED），在衬底上形成具有第一薄膜密度并包含第一无机材料的第一封装层， 以及在所述第一封装层上形成具有比所述第一薄膜密度高的第二薄膜密度并且包含第二无机材料的第二封装层。

公开(公告)号：US20130115373A1

公开(公告)日：2013-05-09

申请号：US13443268

申请日：2012-04-10

申请人： Jin-Kwang Kim ,  Sang-Joon Seo ,  Seung-Hun Kim

发明人： Jin-Kwang Kim ,  Sang-Joon Seo ,  Seung-Hun Kim

IPC分类号： C23C16/458

CPC分类号： C23C16/458 ,  B01J19/1887 ,  B01J19/22 ,  C23C14/50 ,  C23C16/45551

摘要： A rotating type thin film deposition apparatus having an improved structure that allows continuous deposition, and a thin film deposition method used by the rotating type thin film deposition apparatus are provided. The rotating type thin film deposition apparatus includes a deposition device; a circulation running unit that runs a deposition target on a circulation track via a deposition region of the deposition device; and a support unit that supports the deposition target and moves along the circulation track. Thin layers can be precisely and uniformly formed on the entire surface of a deposition target, and since deposition is performed while a plurality of deposition targets move along a caterpillar track, a working speed is faster compared to a method involving a general reciprocating motion, and the size of the thin film deposition apparatus can be reduced.

摘要翻译： 提供一种旋转型薄膜沉积设备，其具有能够连续沉积的改进的结构，以及由旋转型薄膜沉积设备使用的薄膜沉积方法。 旋转型薄膜沉积设备包括沉积设备; 循环运行单元，其经由沉积装置的沉积区域在循环轨道上运行沉积靶; 以及支撑单元，其支撑沉积靶并沿着循环轨迹移动。 可以在沉积靶的整个表面上精确均匀地形成薄层，并且由于在多个沉积靶沿着履带轨道移动时进行沉积，与涉及一般往复运动的方法相比，加工速度更快， 可以减小薄膜沉积装置的尺寸。