摘要:
A composition for removing photoresist, including an alkyl ammonium fluoride salt in an amount ranging from about 0.5 weight percent to about 10 weight percent, based on a total weight of the composition; an organic sulfonic acid in an amount ranging from about 1 weight percent to about 20 weight percent, based on the total weight of the composition; and a lactone-based solvent in an amount ranging from about 70 weight percent to about 98.5 weight percent, based on the total weight of the composition.
摘要:
In a method of manufacturing a semiconductor device such as a SONOS type semiconductor device, a trench is formed on a substrate. An isolation layer protruding from the substrate is formed to fill the trench. After a first layer is formed on the substrate, a preliminary second layer pattern is formed on the first layer. The preliminary second layer pattern has an upper face substantially lower than or substantially equal to an upper face of the isolation layer. A third layer is formed on the preliminary second layer and the isolation layer. A fourth layer is formed on the third layer. The fourth layer, the third layer, the preliminary second layer pattern and the first layer are partially etched to form a gate structure on the substrate. Source/drain regions are formed at portions of the substrate adjacent to the gate structure.
摘要:
A fuel supply device for direct methanol fuel cells includes a fuel tank for storing liquid fuel, a wick structure formed on the fuel tank, the wick structure for receiving the liquid fuel from the fuel tank, a sheet stack disposed on the wick structure, the sheet stack for absorbing and transferring, in an upward direction, the liquid fuel supplied to the wick structure, and an electrode plate disposed on the sheet stack for supplying, in an upward direction, the liquid fuel absorbed into the sheet stack. The fuel supply device may continuously and uniformly supply a proper amount of liquid fuel and effectively remove by-products generated in a fuel cell. Thus, a long life, efficient fuel cell may be created with the fuel supply device.
摘要:
Provided is a curable composition comprising a partially fluorinated fluoropolymer, optionally an organo-onium accelerator an acid acceptor; and a crosslinking component of the formula.
摘要:
Disclosed are an apparatus for treating a substrate and a method of treating substrates. The apparatus includes an inlet valve through which the supercritical fluid flows into the process chamber until an inner pressure of the process chamber reaches a first pressure and a turbulent flow generator turbulently supplementing the supercritical fluid into the process chamber until the inner pressure of the process chamber is recovered to the first pressure. A pressure drop module partially removes a supercritical mixture from the process chamber until the inner pressure of the process chamber is dropped to the second pressure. A pressure drop mode and a supplemental mode may be alternately repeated by the flow controller.
摘要:
Substrate treatment systems are provided. The substrate treatment systems may include a treating device configured to treat a substrate with a supercritical fluid, and a supplying device configured to supply the supercritical fluid to the treating device. The treating device may include a supercritical process zone in which the substrate is treated with the supercritical fluid, and a pre-supercritical process zone in which the supercritical fluid is expanded and then provided into the supercritical process zone to create a supercritical state in the supercritical process zone.
摘要:
In a method of forming a capacitor, a first mold layer pattern including a first insulating material may be formed on a substrate. The first mold layer pattern may have a trench. A supporting layer including a second insulating material may be formed in the trench. The second insulating material may have an etching selectivity with respect to the first insulating material. A second mold layer may be formed on the first mold layer pattern and the supporting layer pattern. A lower electrode may be formed through the second mold layer and the first mold layer pattern. The lower electrode may make contact with a sidewall of the supporting layer pattern. The first mold layer pattern and the second mold layer may be removed. A dielectric layer and an upper electrode may be formed on the lower electrode and the supporting layer pattern.
摘要:
Provided herein are etching, cleaning and drying methods using a supercritical fluid, and a chamber system for conducting the same. The etching method includes etching the material layer using a supercritical carbon dioxide in which an etching chemical is dissolved, and removing an etching by-product created from a reaction between the material layer and the etching chemical using a supercritical carbon dioxide in which a cleaning chemical is dissolved. Methods of manufacturing a semiconductor device are also provided.
摘要:
A radio-frequency (RF) switch comprises first and second heterojunction bipolar transistors (HBTs) that control transmission of an RF input signal between an input terminal and an output terminal. In some embodiments, the RF input signal is transmitted from the input terminal to the output terminal where the first and second HBTs are turned ON, and otherwise the RF input signal is not transmitted from the input terminal to the output terminal.
摘要:
An extensible, object-oriented framework describes various generic elements of legacy automation systems. That framework is used as a basis for porting one or more of those elements to another (“target”) automation system. Objects in the framework, known as “extensions,” adapt information from the legacy system to a corresponding, generic representation. Compilers express those representations in the target system. The framework thus translates the “old” automation configuration for use in a “new” automation system. The scheme can be extended to accommodate arbitrary control systems (i.e., other manufacturers and product lines), new sub-domains within the automation domain (e.g. operator interfaces, batch control etc.) and new target systems without altering the core framework.