Methods of Manufacturing Semiconductor Memory Devices with Unit Cells Having Charge Trapping Layers
    2.
    发明申请
    Methods of Manufacturing Semiconductor Memory Devices with Unit Cells Having Charge Trapping Layers 失效
    制造具有电荷陷阱层的单元电池的半导体存储器件的方法

    公开(公告)号:US20070264793A1

    公开(公告)日:2007-11-15

    申请号:US11746761

    申请日:2007-05-10

    IPC分类号: H01L21/76

    摘要: In a method of manufacturing a semiconductor device such as a SONOS type semiconductor device, a trench is formed on a substrate. An isolation layer protruding from the substrate is formed to fill the trench. After a first layer is formed on the substrate, a preliminary second layer pattern is formed on the first layer. The preliminary second layer pattern has an upper face substantially lower than or substantially equal to an upper face of the isolation layer. A third layer is formed on the preliminary second layer and the isolation layer. A fourth layer is formed on the third layer. The fourth layer, the third layer, the preliminary second layer pattern and the first layer are partially etched to form a gate structure on the substrate. Source/drain regions are formed at portions of the substrate adjacent to the gate structure.

    摘要翻译: 在制造诸如SONOS型半导体器件的半导体器件的方法中,在衬底上形成沟槽。 形成从衬底突出的隔离层以填充沟槽。 在基板上形成第一层之后,在第一层上形成预备的第二层图案。 预备的第二层图案具有基本上低于或基本上等于隔离层的上表面的上表面。 在初步第二层和隔离层上形成第三层。 在第三层上形成第四层。 部分蚀刻第四层,第三层,初步第二层图案和第一层,以在基板上形成栅极结构。 源极/漏极区域形成在与栅极结构相邻的衬底的部分处。

    Fuel supply device for direct methanol fuel cells
    3.
    发明申请
    Fuel supply device for direct methanol fuel cells 失效
    直接甲醇燃料电池燃料供应装置

    公开(公告)号:US20050069736A1

    公开(公告)日:2005-03-31

    申请号:US10932298

    申请日:2004-09-02

    摘要: A fuel supply device for direct methanol fuel cells includes a fuel tank for storing liquid fuel, a wick structure formed on the fuel tank, the wick structure for receiving the liquid fuel from the fuel tank, a sheet stack disposed on the wick structure, the sheet stack for absorbing and transferring, in an upward direction, the liquid fuel supplied to the wick structure, and an electrode plate disposed on the sheet stack for supplying, in an upward direction, the liquid fuel absorbed into the sheet stack. The fuel supply device may continuously and uniformly supply a proper amount of liquid fuel and effectively remove by-products generated in a fuel cell. Thus, a long life, efficient fuel cell may be created with the fuel supply device.

    摘要翻译: 用于直接甲醇燃料电池的燃料供应装置包括用于储存液体燃料的燃料箱,形成在燃料箱上的灯芯结构,用于从燃料箱接收液体燃料的灯芯结构,设置在灯芯结构上的片堆, 用于沿向上的方向吸收和传送供给到芯结构的液体燃料的片材堆叠;以及设置在片材堆叠上的电极板,用于沿向上的方向供应吸收到片材堆叠中的液体燃料。 燃料供给装置可以连续均匀地供给适量的液体燃料,并有效地除去在燃料电池中产生的副产物。 因此,可以利用燃料供应装置产生长寿命,高效率的燃料电池。

    APPARATUS FOR TREATING SUBSTRATES USING SUPERCRITICAL FLUIDS, SUBSTRATE TREATMENT SYSTEM INCLUDING THE SAME AND METHOD OF TREATING SUBSTRATES USING THE SAME
    5.
    发明申请
    APPARATUS FOR TREATING SUBSTRATES USING SUPERCRITICAL FLUIDS, SUBSTRATE TREATMENT SYSTEM INCLUDING THE SAME AND METHOD OF TREATING SUBSTRATES USING THE SAME 审中-公开
    用于使用超临界流体处理基板的装置,包括其的基板处理系统和使用该基板处理基板的方法

    公开(公告)号:US20170008040A1

    公开(公告)日:2017-01-12

    申请号:US15069994

    申请日:2016-03-15

    IPC分类号: B08B7/00 H01L21/02 H01L21/67

    摘要: Disclosed are an apparatus for treating a substrate and a method of treating substrates. The apparatus includes an inlet valve through which the supercritical fluid flows into the process chamber until an inner pressure of the process chamber reaches a first pressure and a turbulent flow generator turbulently supplementing the supercritical fluid into the process chamber until the inner pressure of the process chamber is recovered to the first pressure. A pressure drop module partially removes a supercritical mixture from the process chamber until the inner pressure of the process chamber is dropped to the second pressure. A pressure drop mode and a supplemental mode may be alternately repeated by the flow controller.

    摘要翻译: 公开了一种处理基板的设备和处理基板的方法。 该装置包括入口阀,超临界流体通过入口阀流入处理室直到处理室的内部压力达到第一压力,湍流发生器湍流地将超临界流体补充到处理室中,直到处理室的内部压力 被恢复到第一压力。 压降模块部分地从处理室移除超临界混合物,直到处理室的内部压力下降到第二压力。 压降模式和补充模式可以由流量控制器交替重复。

    Integrated circuit capacitors having sidewall supports
    7.
    发明授权
    Integrated circuit capacitors having sidewall supports 有权
    具有侧壁支撑件的集成电路电容器

    公开(公告)号:US08766343B2

    公开(公告)日:2014-07-01

    申请号:US13356032

    申请日:2012-01-23

    IPC分类号: H01L27/108 H01L29/94

    摘要: In a method of forming a capacitor, a first mold layer pattern including a first insulating material may be formed on a substrate. The first mold layer pattern may have a trench. A supporting layer including a second insulating material may be formed in the trench. The second insulating material may have an etching selectivity with respect to the first insulating material. A second mold layer may be formed on the first mold layer pattern and the supporting layer pattern. A lower electrode may be formed through the second mold layer and the first mold layer pattern. The lower electrode may make contact with a sidewall of the supporting layer pattern. The first mold layer pattern and the second mold layer may be removed. A dielectric layer and an upper electrode may be formed on the lower electrode and the supporting layer pattern.

    摘要翻译: 在形成电容器的方法中,可以在基板上形成包括第一绝缘材料的第一模层图案。 第一模层图案可以具有沟槽。 可以在沟槽中形成包括第二绝缘材料的支撑层。 第二绝缘材料可以具有相对于第一绝缘材料的蚀刻选择性。 可以在第一模层图案和支撑层图案上形成第二模层。 可以通过第二模具层和第一模具层图案形成下部电极。 下电极可以与支撑层图案的侧壁接触。 可以去除第一模层图案和第二模层。 电介质层和上电极可以形成在下电极和支撑层图案上。

    RADIO FREQUENCY SWITCH COMPRISING HETEROJUNCTION BIOPOLAR TRANSISTORS
    9.
    发明申请
    RADIO FREQUENCY SWITCH COMPRISING HETEROJUNCTION BIOPOLAR TRANSISTORS 审中-公开
    包含异位双极晶体管的无线电频率开关

    公开(公告)号:US20130293283A1

    公开(公告)日:2013-11-07

    申请号:US13464145

    申请日:2012-05-04

    IPC分类号: H03K17/60

    CPC分类号: H03K17/68

    摘要: A radio-frequency (RF) switch comprises first and second heterojunction bipolar transistors (HBTs) that control transmission of an RF input signal between an input terminal and an output terminal. In some embodiments, the RF input signal is transmitted from the input terminal to the output terminal where the first and second HBTs are turned ON, and otherwise the RF input signal is not transmitted from the input terminal to the output terminal.

    摘要翻译: 射频(RF)开关包括控制输入端和输出端之间的RF输入信号的传输的第一和第二异质结双极晶体管(HBT)。 在一些实施例中,RF输入信号从输入端子发送到第一和第二HBT导通的输出端子,否则RF输入信号不从输入端子发送到输出端子。

    Generic framework for porting legacy process automation assets to a new control system
    10.
    发明授权
    Generic framework for porting legacy process automation assets to a new control system 有权
    将传统流程自动化资产移植到新的控制系统的通用框架

    公开(公告)号:US08533233B2

    公开(公告)日:2013-09-10

    申请号:US10894624

    申请日:2004-07-20

    IPC分类号: G06F7/00

    摘要: An extensible, object-oriented framework describes various generic elements of legacy automation systems. That framework is used as a basis for porting one or more of those elements to another (“target”) automation system. Objects in the framework, known as “extensions,” adapt information from the legacy system to a corresponding, generic representation. Compilers express those representations in the target system. The framework thus translates the “old” automation configuration for use in a “new” automation system. The scheme can be extended to accommodate arbitrary control systems (i.e., other manufacturers and product lines), new sub-domains within the automation domain (e.g. operator interfaces, batch control etc.) and new target systems without altering the core framework.

    摘要翻译: 可扩展的面向对象框架描述了传统自动化系统的各种通用元素。 该框架用作将这些元素中的一个或多个移植到另一个(“目标”)自动化系统的基础。 框架中的对象(称为“扩展”)将信息从遗留系统适应到相应的通用表示。 编译者在目标系统中表达这些表示。 该框架因此翻译了“旧”自动化配置,用于“新”自动化系统。 该方案可以扩展到适应任意控制系统(即,其他制造商和产品线),自动化域内的新子域(例如操作员接口,批处理控制等)和新目标系统,而不改变核心框架。