Method for producing nanoparticle/block copolymer composites and devices containing the same
    1.
    发明授权
    Method for producing nanoparticle/block copolymer composites and devices containing the same 有权
    制备纳米颗粒/嵌段共聚物复合材料的方法及其制备方法

    公开(公告)号:US08535973B2

    公开(公告)日:2013-09-17

    申请号:US12458232

    申请日:2009-07-06

    IPC分类号: H01L51/40

    摘要: A method for producing nanoparticle/block copolymer composites is provided. The method includes mixing nanoparticles having an organic ligand L and a block copolymer A-b-B having block repeating units A and B with different solubility parameters in a solvent S to form micelles by self-assembly. The solubility parameters of the organic ligand L, the block repeating units A and B of the block copolymer A-b-B and the solvent S satisfy the following inequalities: 29≦δS−δA  (1) δS−δB≦29  (2) |δL−δA|≦5 or |δL−δB|≦5  (3) in which δS, δA, δB and δL represent the solubility parameters of the solvent S, the block repeating unit A, the block repeating unit B and the ligand L, respectively. According to the method, the inherent electrical, magnetic, optical, chemical and mechanical properties of the nanoparticles can be maintained or improved without the need to modify the surface of the nanoparticles.

    摘要翻译: 提供了制备纳米颗粒/嵌段共聚物复合材料的方法。 该方法包括将具有有机配体L的纳米颗粒和具有不同溶解度参数的嵌段重复单元A和B的嵌段共聚物A-b-B混合在溶剂S中以通过自组装形成胶束。 有机配体L,嵌段共聚物AbB和溶剂S的嵌段重复单元A和B的溶解度参数满足以下不等式:29 @ delta-δA(1)δS-ΔB@ 29(2)|δL-ΔA |δ5或ΔL-ΔB| @ 5(3)其中δS,δA,δB和δL分别表示溶剂S,嵌段重复单元A,嵌段重复单元B和配体L的溶解度参数。 根据该方法,可以维持或改善纳米颗粒的固有电,磁,光学,化学和机械性能,而不需要改变纳米颗粒的表面。

    Ultra-Low Dielectrics Film for Copper Interconnect
    2.
    发明申请
    Ultra-Low Dielectrics Film for Copper Interconnect 审中-公开
    用于铜互连的超低介电膜

    公开(公告)号:US20080287573A1

    公开(公告)日:2008-11-20

    申请号:US10581165

    申请日:2004-05-12

    IPC分类号: C08K5/1545

    摘要: The present invention relates to an ultra-low dielectric film for a copper interconnect, in particular, to an porous film prepared in such a manner that coating with an organic solution containing a polyalkyl silsesquioxane precursor or its copolymer as a matrix and acetylcyclodextrin nanoparticles as a template and then performing a sol-gel reaction and heat treatment at higher temperature. The present films may contain the template of up to 60 vol %, due to the use of acetylcyclodextrin, and have homogeneously distributed pores with the size of no more than 5 nm in the matrix. In addition, the present films exhibit a relatively low dielectric constant of about 1.5, and excellent interconnectivity between pores, so that they are considered a promising ultra-low dielectric film for a copper interconnect.

    摘要翻译: 本发明涉及一种用于铜互连的超低电介质膜,特别涉及一种多孔膜,其制备方法是用含有聚烷基倍半硅氧烷前体或其共聚物作为基质的有机溶液和乙酰基环糊精纳米颗粒作为 模板,然后进行溶胶 - 凝胶反应并在较高温度下进行热处理。 由于使用乙酰基环糊精,本发明的膜可以含有高达60体积%的模板,并且在基质中具有不超过5nm的尺寸的均匀分布的孔。 此外,本发明的膜具有约1.5的相对低的介电常数和孔之间的优异的互连性,因此它们被认为是用于铜互连的有希望的超低介电膜。

    Method for producing nanoparticle/block copolymer composites
    7.
    发明申请
    Method for producing nanoparticle/block copolymer composites 有权
    制备纳米颗粒/嵌段共聚物复合材料的方法

    公开(公告)号:US20100148156A1

    公开(公告)日:2010-06-17

    申请号:US12458232

    申请日:2009-07-06

    IPC分类号: H01L51/30 H01L51/40

    摘要: A method for producing nanoparticle/block copolymer composites is provided. The method includes mixing nanoparticles having an organic ligand L and a block copolymer A-b-B having block repeating units A and B with different solubility parameters in a solvent S to form micelles by self-assembly. The solubility parameters of the organic ligand L, the block repeating units A and B of the block copolymer A-b-B and the solvent S satisfy the following inequalities: 29≦δS−δA  (1) δS−δB≦29  (2) |δL−δA|≦5 or |δL−δB|≦5  (3) in which δS, δA, δB and δL represent the solubility parameters of the solvent S, the block repeating unit A, the block repeating unit B and the ligand L, respectively. According to the method, the inherent electrical, magnetic, optical, chemical and mechanical properties of the nanoparticles can be maintained or improved without the need to modify the surface of the nanoparticles.

    摘要翻译: 提供了制备纳米颗粒/嵌段共聚物复合材料的方法。 该方法包括将具有有机配体L的纳米颗粒和具有不同溶解度参数的嵌段重复单元A和B的嵌段共聚物A-b-B混合在溶剂S中以通过自组装形成胶束。 有机配体L,嵌段共聚物AbB和溶剂S的嵌段重复单元A和B的溶解度参数满足以下不等式:29≦̸δS-δA(1)δS-δB≦̸ 29(2)|δL-δA 其中δS,δA,δB和δL表示溶剂S的溶解度参数,嵌段重复单元A,嵌段重复单元B和配体L,其中δS,δA,δB和δL代表溶剂S的溶解度参数, 分别。 根据该方法,可以维持或改善纳米颗粒的固有电,磁,光学,化学和机械性能,而不需要改变纳米颗粒的表面。