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    SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    1.
    发明申请
    SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 失效
    基板加工装置及制造半导体装置的方法

    公开(公告)号：US20110234100A1

    公开(公告)日：2011-09-29

    申请号：US13071227

    申请日：2011-03-24

    申请人： Masayuki TOMITA ,  Katsunori FUNAKI ,  Shinji YASHIMA ,  Ryuichi SHIMADA

    发明人： Masayuki TOMITA ,  Katsunori FUNAKI ,  Shinji YASHIMA ,  Ryuichi SHIMADA

    IPC分类号： H05H1/46 ,  H05H1/24

    CPC分类号： H01J37/32183 ,  H01J37/32091

    摘要： A processing speed may be easily controlled over the wide range within the impedance variation range. A substrate processing apparatus includes: a processing chamber configured to process a substrate; a substrate support unit configured to support the substrate in the processing chamber; a processing gas supply unit configured to supply a processing gas into the processing chamber; a plasma generation electrode configured to convert the processing gas supplied into the processing chamber to be in a plasma state; a radio frequency power source configured to apply a radio frequency power to the plasma generation electrode; a variable impedance electrode installed at the substrate support unit and configured to control an electric potential of the substrate; a variable impedance mechanism connected to the variable impedance electrode and configured to vary an impedance according to a reciprocal of a peak-to-peak voltage of the plasma generation electrode; an exhaust unit configured to exhaust an atmosphere in the processing chamber; and a controller configured to control at least the variable impedance mechanism.

    摘要翻译： 可以在阻抗变化范围内的宽范围内容易地控制处理速度。 基板处理装置包括：处理室，被配置为处理基板; 衬底支撑单元，其构造成在所述处理室中支撑所述衬底; 处理气体供给单元，其构造成将处理气体供给到所述处理室中; 等离子体产生电极，被配置为将供应到处理室中的处理气体转换成等离子体状态; 射频电源，被配置为向所述等离子体产生电极施加射频电力; 可变阻抗电极，其安装在所述基板支撑单元处并且被配置为控制所述基板的电位; 连接到所述可变阻抗电极并被配置为根据所述等离子体产生电极的峰 - 峰电压的倒数改变阻抗的可变阻抗机构; 排气单元，其构造成排出处理室中的气氛; 以及控制器，被配置为至少控制所述可变阻抗机构。

    Waveform generation device, waveform generation method, and computer readable medium
    2.
    发明授权
    Waveform generation device, waveform generation method, and computer readable medium 失效
    波形生成装置，波形生成方法和计算机可读介质

    公开(公告)号：US07999578B2

    公开(公告)日：2011-08-16

    申请号：US12614761

    申请日：2009-11-09

    申请人： Takeshi Takahashi ,  Masayuki Tomita

    发明人： Takeshi Takahashi ,  Masayuki Tomita

    IPC分类号： H03B21/00

    CPC分类号： G01R31/2841 ,  G06F1/0321

    摘要： Provided is a waveform generating apparatus that generates a signal having an arbitrary waveform, comprising a waveform memory that stores a plurality of pieces of waveform data that each include a sequence of signal values; a filtering section that (i) reads from the waveform memory a piece of waveform data serving as a basis for a waveform to be generated, from among the plurality of pieces of waveform data, (ii) performs a conversion by filtering the read piece of waveform data to obtain a piece of converted waveform data, and (iii) writes to the waveform memory the piece of converted waveform data; and a waveform output section that reads the piece of converted waveform data from the waveform memory and outputs a signal having a waveform corresponding to the sequence of signal values of the read piece of converted waveform data.

    摘要翻译： 提供一种波形发生装置，其生成具有任意波形的信号，包括：波形存储器，其存储多个波形数据，每个波形数据包括信号值序列; （i）从波形存储器中读取作为要生成的波形的基础的一条波形数据，从多条波形数据中读出，（ii）通过对读取的片段进行滤波来进行转换 波形数据以获得一段转换的波形数据，以及（iii）向波形存储器写入该转换的波形数据; 以及波形输出部分，其从波形存储器读取转换的波形数据，并输出具有对应于读取的转换波形数据的信号值序列的波形的信号。

    Multi-link engine
    3.
    发明授权
    Multi-link engine 有权
    多链路引擎

    公开(公告)号：US07980207B2

    公开(公告)日：2011-07-19

    申请号：US12255370

    申请日：2008-10-21

    申请人： Naoki Takahashi ,  Masayuki Tomita ,  Kenshi Ushijima ,  Koji Hiraya ,  Hirofumi Tsuchida ,  Shunichi Aoyama

    发明人： Naoki Takahashi ,  Masayuki Tomita ,  Kenshi Ushijima ,  Koji Hiraya ,  Hirofumi Tsuchida ,  Shunichi Aoyama

    IPC分类号： F02B75/04

    CPC分类号： F02B75/048

    摘要： A multi-link engine has a piston that moves inside a cylinder. A piston pin connects the piston to an upper link, which is connected to a lower link. A crank pin of a crankshaft supports the lower link thereon. The lower link is pivotally connected to one end of a control link, which is connected at another end to the engine block body by a control shaft. The control shaft is lower than a crank journal of the crankshaft, and disposed on a first side of a plane that is parallel to a cylinder center axis and that contains a center rotational axis of the crank journal. The cylinder center axis is located on a second (i.e., opposite the first side) plane. The control link has a center axis that is parallel to the cylinder center axis when the piston is near top and bottom dead centers.

    摘要翻译： 多连杆发动机具有在气缸内移动的活塞。 活塞销将活塞连接到连接到下部连杆的上部连杆。 曲轴的曲柄销支撑其上的下连杆。 下连杆枢转地连接到控制连杆的一端，控制链的另一端通过控制轴连接到发动机机体主体。 控制轴低于曲轴的曲柄轴颈，并且设置在平行于气缸中心轴线并且包含曲柄轴颈的中心旋转轴线的平面的第一侧上。 气缸中心轴位于第二侧（即，与第一侧相对）的平面上。 当活塞靠近上下死点时，控制连杆具有平行于气缸中心轴线的中心轴线。

    MEASUREMENT APPARATUS AND RECORDING MEDIUM
    4.
    发明申请
    MEASUREMENT APPARATUS AND RECORDING MEDIUM 失效
    测量装置和记录介质

    公开(公告)号：US20100315061A1

    公开(公告)日：2010-12-16

    申请号：US12614728

    申请日：2009-11-09

    申请人： Masayuki TOMITA ,  Masahiko MUTO ,  Takeshi TAKAHASHI

    发明人： Masayuki TOMITA ,  Masahiko MUTO ,  Takeshi TAKAHASHI

    IPC分类号： G01R23/14

    CPC分类号： H04L25/03159 ,  G01R23/16 ,  H04B17/318 ,  H04L1/206

    摘要： Provided is a measurement apparatus that measures power of a modulated signal that is modulated with a carrier signal having a prescribed frequency, comprising an AD converting section that outputs a digital modulated signal obtained by AD converting the modulated signal; a frequency converting section that converts the digital modulated signal into a frequency component signal representing a plurality of signal components at respective frequencies; a correction coefficient output section that outputs, for each frequency, a correction coefficient corresponding to a frequency characteristic of a transmission path on which the modulated signal is transmitted; a correcting section that corrects the signal component of each frequency in the frequency component signal using the correction coefficient of the corresponding frequency; and a power calculating section that calculates the power of the modulated signal based on the signal component of each frequency in the corrected frequency component signal.

    摘要翻译： 提供一种测量装置，其测量利用具有规定频率的载波信号进行调制的调制信号的功率，包括：AD转换部，其输出通过AD转换所获得的调制信号而获得的数字调制信号; 频率转换部分，其将数字调制信号转换成表示各个频率的多个信号分量的频率分量信号; 校正系数输出部，对于每个频率，输出与发送所述调制信号的传输路径的频率特性相对应的校正系数; 校正部，其使用相应频率的校正系数校正频率分量信号中的每个频率的信号分量; 以及功率计算部，其基于所述校正后的频率分量信号中的各频率的信号分量来计算所述调制信号的功率。

    Direct fuel injection/spark ignition engine control device
    8.
    发明授权
    Direct fuel injection/spark ignition engine control device 失效
    直接燃油喷射/火花点火发动机控制装置

    公开(公告)号：US07096853B2

    公开(公告)日：2006-08-29

    申请号：US11038620

    申请日：2005-01-21

    申请人： Masayuki Tomita

    发明人： Masayuki Tomita

    IPC分类号： F02P5/00 ,  F02P5/145

    CPC分类号： F02D37/02 ,  F02D41/401 ,  F02D41/402 ,  F02D41/403 ,  F02D2041/389

    摘要： A control apparatus is configured to enhance turbulence in the cylinder produced by the fuel spray, and to improve combustion stability (promote flame propagation) in an ATDC designed to reduce HC and/or achieve early activation of the catalyst. Ignition timing is set to compression top dead center or later when for example the catalyst requires warming. In one fuel injection timing, a single fuel injection is injected prior to ignition timing at compression stroke top dead center or later. Alternatively, the fuel is injected in two fuel injections with a first fuel injection occurring during either the intake stroke or the compression stroke and the second fuel injection occurring at compression stroke top dead center or later.

    摘要翻译： 控制装置被配置为增强由燃料喷雾产生的气缸中的湍流，并且改善设计成减少HC的催化剂和/或实现催化剂的早期活化的ATDC中的燃烧稳定性（促进火焰传播）。 点火正时设定为压缩上止点或稍后当催化剂需要变暖时。 在一个燃料喷射正时中，在压缩冲程上死点或更晚的点火正时之前喷射单次燃料喷射。 或者，燃料在两次燃料喷射中被注入，在进气冲程或压缩冲程期间发生第一次燃料喷射，而第二次燃料喷射发生在压缩冲程上死点或更后。

    Start-up control of in-cylinder fuel injection spark ignition internal combustion engine
    10.
    发明授权
    Start-up control of in-cylinder fuel injection spark ignition internal combustion engine 失效
    缸内燃油喷射火花点火内燃机启动控制

    公开(公告)号：US06904890B2

    公开(公告)日：2005-06-14

    申请号：US10885014

    申请日：2004-07-07

    申请人： Takao Maitani ,  Masayuki Tomita ,  Tsutomu Kikuchi ,  Masahiko Yuya

    发明人： Takao Maitani ,  Masayuki Tomita ,  Tsutomu Kikuchi ,  Masahiko Yuya

    IPC分类号： F02D45/00 ,  F02D41/06 ,  F02D41/30 ,  F02D41/34 ,  F02D41/38 ,  F02B3/00

    CPC分类号： F02D41/3076 ,  F02D41/062 ,  F02D41/3029 ,  F02D2041/0015 ,  F02D2041/389 ,  F02D2200/0602

    摘要： During start-up of an in-cylinder fuel injection spark ignition engine (1), an engine controller (21) calculates a start-up fuel injection pulse width TIST on the basis of a cooling water temperature Tw, an engine rotation speed Ne, and a fuel supply pressure Pf to a fuel injector (8) (S1). When the fuel supply pressure Pf exceeds a required fuel pressure, the engine controller (21) executes stratified combustion by means of compression stroke fuel injection. By setting the required fuel pressure precisely in accordance with a start-up condition defined by the start-up fuel injection pulse width TIST and the engine rotation speed Ne, the opportunities for stratified combustion during start-up increase, and the amount of hydrocarbon discharge decreases.

    摘要翻译： 在缸内燃料喷射火花点火发动机（1）的启动期间，发动机控制器（21）基于冷却水温度Tw，发动机转速Ne来计算起动燃料喷射脉冲宽度TIST， 和燃料喷射器（8）的燃料供给压力Pf（S1）。 当燃料供给压力Pf超过所需的燃料压力时，发动机控制器（21）通过压缩冲程燃料喷射来进行分层燃烧。 通过根据由启动燃料喷射脉冲宽度TIST和发动机转速Ne定义的启动条件精确地设定所需的燃料压力，启动期间分层燃烧的机会增加，并且碳氢化合物排出量 减少