公开(公告)号：US5591980A

公开(公告)日：1997-01-07

申请号：US492878

申请日：1995-06-20

申请人： Mitsuo Ogasawara ,  Hiroyuki Kobayashi ,  Morioki Kubozoe

发明人： Mitsuo Ogasawara ,  Hiroyuki Kobayashi ,  Morioki Kubozoe

IPC分类号： H01J37/20

CPC分类号： H01J37/20 ,  H01J2237/20242 ,  H01J2237/20285 ,  H01J2237/26

摘要： In a eucentric side entry goniometer stage used in an electron microscope controlled in five-axes of specimen positions (x, y, z) and specimen tilt angles (.theta..sub.x, .theta..sub.y), image shifting during tilting a specimen is automatically corrected. Assuming that the coordinates of an observed point are (x, y, z), shifting of observed image is automatically corrected by calculating correction values of image shifting .DELTA.y and .DELTA.z using a calculator based on the following equations and by shifting the observed point to a coordinates (x, y-.DELTA.y, z-.DELTA.z) using a specimen position and tilt angle controller when the tilt angle .theta..sub.y is varied from .theta..sub.y1 to .theta..sub.y2 wherein.DELTA.y=y(1-cos .theta..sub.y2 /cos .theta..sub.y1).DELTA.z=y(sin .theta..sub.y2 -sin .theta..sub.y1)/cos .theta..sub.y1.

摘要翻译： 在用于在五轴样本位置（x，y，z）和样本倾斜角度（θx，θy）中控制的电子显微镜中使用的偏心侧入口测角器台中，自动校正样品倾斜期间的图像偏移。 假设观测点的坐标为（x，y，z），则通过使用基于以下等式的计算器计算图像偏移DELTA y和DELTA z的校正值来自动校正观察图像的偏移，并且通过将观测点 当倾斜角θy从θ1到θ2变化时，使用样本位置和倾斜角度控制器到坐标（x，y-DELTA y，z-DELTA z），其中DELTA y = y（1-cosθy2 / cosθy1）DELTA z = y（sinθy2-sinθy1）/cosθy1。

公开(公告)号：US4480220A

公开(公告)日：1984-10-30

申请号：US318404

申请日：1981-11-05

申请人： Shigeto Isakozawa ,  Morioki Kubozoe

发明人： Shigeto Isakozawa ,  Morioki Kubozoe

IPC分类号： H01J37/22 ,  G01N23/06 ,  G01N23/225 ,  H01J37/252 ,  G01N27/00

CPC分类号： G01N23/225 ,  H01J37/252

摘要： An electron energy analyzing apparatus is disclosed in which electrons having passed through a sample are subjected to energy analysis, respective energy values of the crest and trough of an energy peak characterizing a predetermined substance in the sample are selected, subtraction is performed beetween output signals of a detector obtained respectively at the energy values, the sign of a difference between the output signals is judged to separate a background signal from an energy loss peak signal, and a distribution image of the substance is displayed on the basis of the energy loss peak signal containing no background signal.

摘要翻译： 公开了一种电子能量分析装置，其中通过样品的电子进行能量分析，选择表征样品中预定物质的能量峰的波峰和谷的各自的能量值，在 分别以能量值获得的检测器，输出信号之间的差异的符号被判断为将背景信号与能量损失峰值信号分开，并且基于能量损失峰值信号显示物质的分布图像 不含背景信号。

公开(公告)号：US4494000A

公开(公告)日：1985-01-15

申请号：US393332

申请日：1982-06-29

申请人： Kazuo Shii ,  Hiroyuki Kobayashi ,  Morioki Kubozoe ,  Shigeto Isakozawa

发明人： Kazuo Shii ,  Hiroyuki Kobayashi ,  Morioki Kubozoe ,  Shigeto Isakozawa

IPC分类号： H01J37/141 ,  H01J37/04 ,  H01J37/10 ,  H01J37/26 ,  G01N23/00

CPC分类号： H01J37/04 ,  H01J37/265

摘要： A transmission electron microscope comprises an imaging electron lens system constituted in at least five stages by an objective lens, a group of intermediate lenses and a group of projector lenses to which excitation currents are applied with alternately different polarities. Lens current control means is provided for controlling the excitation currents in such a manner that the lenses belonging to the intermediate lens group and the projector lens group, respectively, serve as reduction lens when the microscope is operated in a predetermined range of low magnifications, while all the electron lenses serve as magnifying lenses in a predetermined range of high magnitudes. When the magnification is changed over, the lens current control means regulates the excitation currents in such a manner that the difference between the excitation currents supplied to the intermediate lens group and the projector lens group, respectively, is maintained substantially constant.

摘要翻译： 透射电子显微镜包括通过物镜至少五级构成的成像电子透镜系统，一组中间透镜和一组投影透镜，以相反的极性施加激励电流。 提供透镜电流控制装置，用于控制激励电流，使得属于中间透镜组的透镜组和投影透镜组的透镜在显微镜在低倍率的预定范围内操作时分别用作还原透镜，同时 所有电子透镜都用作预定范围的高倍数的放大透镜。 当倍率变化时，透镜电流控制装置以这样的方式调节激励电流，使得分别提供给中间透镜组的激励电流和投影透镜组之间的差保持基本上恒定。

公开(公告)号：US4468560A

公开(公告)日：1984-08-28

申请号：US348018

申请日：1982-02-11

申请人： Morioki Kubozoe ,  Hisasi Satow ,  John E. Johnson, Jr.

发明人： Morioki Kubozoe ,  Hisasi Satow ,  John E. Johnson, Jr.

IPC分类号： G01B9/04 ,  G01B11/02 ,  H01J37/22 ,  G01N23/04

CPC分类号： H01J37/224 ,  G01B11/02 ,  G01B9/04

摘要： Electron microscope imparted with measuring functions comprises an electron microscope system for forming an electron-microscopic image, a fluorescent screen for displaying the electron-microscopic image, and an optical microscope for observing the electron-microscopic image on the fluorescent screen. A pattern which provides convenience for measurements of the electron-microscopic image is imaged on an object plane of an eyepiece of the optical microscope.

摘要翻译： 具有测量功能的电子显微镜包括用于形成电子显微图像的电子显微镜系统，用于显示电子显微图像的荧光屏和用于观察荧光屏上的电子显微镜图像的光学显微镜。 为电子显微图像的测量提供便利的图案被成像在光学显微镜的目镜的物平面上。

公开(公告)号：US5350918A

公开(公告)日：1994-09-27

申请号：US936008

申请日：1992-08-27

申请人： Sadao Terakado ,  Hiroyuki Kobayashi ,  Morioki Kubozoe

发明人： Sadao Terakado ,  Hiroyuki Kobayashi ,  Morioki Kubozoe

IPC分类号： H01J37/22 ,  H01J37/26

CPC分类号： H01J37/224

摘要： In a transmission electron microscope, an electron beam from an electron gun is irradiated on a specimen by an illuminating lens system and a transmission image of the specimen is formed on a photographic film by an image forming lens system. The transmission image is picked up by a TV camera and displayed on a television display screen and a view field range of recording image with the photographic film is manifested on the display screen.

摘要翻译： 在透射电子显微镜中，通过照明透镜系统将来自电子枪的电子束照射在样本上，并且通过图像形成透镜系统在照相胶片上形成样本的透射图像。 传输图像由TV摄像机拾取并显示在电视显示屏幕上，并且在摄影胶片上的记录图像的视场范围表现在显示屏幕上。

公开(公告)号：US4806767A

公开(公告)日：1989-02-21

申请号：US68834

申请日：1987-06-11

申请人： Morioki Kubozoe ,  Hisasi Sato

发明人： Morioki Kubozoe ,  Hisasi Sato

IPC分类号： H01J37/141 ,  H01L21/027 ,  G21K1/08 ,  H01J3/14

CPC分类号： H01J37/141

摘要： An electron lens assembly comprises at least a pair of magnetic pole pieces disposed in opposition to each other and each having a bore allowing an electron beam to pass therethrough, an exciting coil for producing a magnetic field between the magnetic pole pieces, a yoke coupled to the magnetic pole pieces and constituted by two divided yoke members so that the exciting coil can be accommodated, at least one of the two yoke members being detachably coupled to one of the magnetic pole pieces, and a pipe disposed along the electron beam path for defining a passage for the electron beam except for a space formed between the magnetic pole pieces. A metal O-ring is disposed on a surface of the detachable yoke member so as to prevent the air from entering the space defined between the opposite magnetic pole pieces along the surface of the detachable yoke member from a space accommodating the exciting coil. The electron beam passage defining pipe is coupled integrally to the detachable yoke member. With the electron lens structure, an ultra-high vacuum can be sustained within the column.

摘要翻译： 电子透镜组件包括至少一对彼此相对设置的磁极片，每对磁极片具有允许电子束通过的孔，用于在磁极片之间产生磁场的励磁线圈，耦合到 所述磁极片由两个分开的磁轭构件构成，使得可以容纳励磁线圈，两个轭构件中的至少一个可拆卸地联接到一个磁极片，以及沿电子束路设置的管，用于限定 除了形成在磁极片之间的空间之外的电子束通道。 金属O形环设置在可拆卸轭构件的表面上，以便防止空气从容纳励磁线圈的空间沿着可拆卸的轭构件的表面进入限定在相对的磁极片之间的空间。 电子束通道限定管一体地连接到可拆卸的轭构件。 利用电子透镜结构，可以在柱内维持超高真空。

公开(公告)号：US4698503A

公开(公告)日：1987-10-06

申请号：US821454

申请日：1986-01-22

申请人： Setsuo Nomura ,  Morioki Kubozoe ,  Shigeto Isakozawa

发明人： Setsuo Nomura ,  Morioki Kubozoe ,  Shigeto Isakozawa

IPC分类号： H01J37/21 ,  H01J37/26

CPC分类号： H01J37/21 ,  H01J37/265

摘要： A focus control system used in a transmission electron microscope includes an electron lens for imaging the electron beam transmitted through a specimen onto the imaging plate, apparatus for deflecting the electron beam irradiation angle, and several electron beam sensors disposed of the imaging plane. Output signals produced by each sensor at two irradiation angles are integrated and stored in the memory separately. The difference between each pair of integrated values in the memory is calculated, and all differences for all sensor output pairs are summed up. The lens current of the electron lens is controlled so that the summed output is a minimum value.

摘要翻译： 在透射电子显微镜中使用的聚焦控制系统包括用于将通过样本透射的电子束成像到成像板上的电子透镜，用于偏转电子束照射角度的装置和设置在成像平面上的几个电子束传感器。 由两个照射角度的每个传感器产生的输出信号被分离存储在存储器中。 计算存储器中每对积分值之间的差异，并且总结所有传感器输出对的所有差异。 控制电子透镜的透镜电流，使得相加的输出为最小值。

公开(公告)号：US4121100A

公开(公告)日：1978-10-17

申请号：US788538

申请日：1977-04-18

申请人： Morioki Kubozoe ,  Yoshihisa Minamikawa ,  Shinjiro Katagiri

发明人： Morioki Kubozoe ,  Yoshihisa Minamikawa ,  Shinjiro Katagiri

IPC分类号： H01J37/26 ,  H01J37/04 ,  H01J37/28

CPC分类号： H01J37/04

摘要： An electron beam from an electron gun is made to focus on a first position by a focussing lens system. The focussed beam is then magnified and projected on a screen through a magnification lens system having an objective lens, an intermediate lens and a projection lens.The excitation is so variable that the electron beam may be focussed also on a second position behind the projection lens.A specimen is positioned at the first position for normal electron microscope analysis, while, for a scanning electron microscope analysis, another specimen is put at the second position.

摘要翻译： 通过聚焦透镜系统使来自电子枪的电子束聚焦在第一位置上。 然后通过具有物镜，中间透镜和投影透镜的放大透镜系统将聚焦光束放大并投影在屏幕上。