CHEMICAL MECHANICAL POLISHING SLURRY, CMP PROCESS AND ELECTRONIC DEVICE PROCESS
    2.
    发明申请
    CHEMICAL MECHANICAL POLISHING SLURRY, CMP PROCESS AND ELECTRONIC DEVICE PROCESS 审中-公开
    化学机械抛光浆,CMP工艺和电子设备工艺

    公开(公告)号:US20070270085A1

    公开(公告)日:2007-11-22

    申请号:US11679215

    申请日:2007-02-27

    IPC分类号: B24B1/00

    摘要: To provide a slurry for Chemical Mechanical Polishing, a Chemical Mechanical Polishing method using said slurry, and a method of producing electronic devices using said method that makes it possible to achieve a low scratch process capability in processing surfaces such as SiO2 film surfaces and the like and also to enable speed polishing to attain a high processing efficiency.Slurry for Chemical Mechanical Polishing characterized in comprising abrasive grains and water, wherein said abrasive grains are composite particles coated with ceria particles consisting of organic host particles and ceria particles, zeta potential of said composite particles being a negative potential, the organic host particles constituting the composite particles coated with ceria particles are organic host particles to which carboxyl groups and sulfonyl groups are introduced; the slurry is added with panarization additive; and the planarization additive is poly(methyl)acrylic acid ammonium salt.

    摘要翻译: 为了提供化学机械抛光的浆料,使用所述浆料的化学机械抛光方法,以及使用所述方法制造电子器件的方法,其使得可以在诸如SiO 2的处理表面中实现低的划痕处理能力, / SUB>膜表面等,并且还能够进行速度抛光以获得高处理效率。 用于化学机械抛光的浆料,其特征在于包括磨粒和水,其中所述磨粒是由有机主体颗粒和二氧化铈颗粒组成的二氧化铈颗粒涂覆的复合颗粒,所述复合颗粒的ζ电位为负电位,有机主体颗粒构成 涂覆有二氧化铈颗粒的复合颗粒是引入羧基和磺酰基的有机主体颗粒; 将浆料加入泛化添加剂; 平面化添加剂是聚(甲基)丙烯酸铵盐。

    Vehicular control apparatus and method
    3.
    发明授权
    Vehicular control apparatus and method 有权
    车载控制装置及方法

    公开(公告)号:US08755983B2

    公开(公告)日:2014-06-17

    申请号:US12879195

    申请日:2010-09-10

    IPC分类号: G06F7/70 G06F7/00

    摘要: In vehicular control apparatus and method, a traveling environment of a forward position of an advance direction of a vehicle in which an actuator for a vehicular control purpose is mounted is detected, a reliability of a result of measurement of the traveling environment by the traveling environment measurement section is determined, and an operation of the actuator is determined with the determined reliability as a requiring condition.

    摘要翻译: 在车辆控制装置和方法中,检测安装有用于车辆控制目的的致动器的车辆的前进方向的前进位置的行驶环境,行驶环境的行驶环境的测量结果的可靠性 确定测量部分,并且以确定的可靠性确定致动器的操作作为需要条件。

    FLUORESCENCE SENSOR, NEEDLE-TYPE FLUORESCENCE SENSOR, AND METHOD FOR MEASURING ANALYTE
    4.
    发明申请
    FLUORESCENCE SENSOR, NEEDLE-TYPE FLUORESCENCE SENSOR, AND METHOD FOR MEASURING ANALYTE 有权
    荧光传感器,针型荧光传感器和测量分析仪的方法

    公开(公告)号:US20120029328A1

    公开(公告)日:2012-02-02

    申请号:US13271732

    申请日:2011-10-12

    IPC分类号: A61B5/1455

    摘要: A needle-type fluorescence sensor that measures glucose based on fluorescence produced by excitation light is provided. The needle-type fluorescence sensor includes a needle body section including a sensor portion disposed in a needle distal end portion and metal lines disposed from the sensor portion to a needle proximal end portion, and a connector which is integrated with the needle body section and in which the metal lines extend. The sensor portion includes a silicon substrate having first and second principal surfaces, a PD device that converts fluorescence into an electric signal, an LED device that transmits fluorescence and emits excitation light, and an indicator layer that interacts with an analyte under the excitation light to produce fluorescence. The PD device, the LED device, and the indicator layer overlap with each other above the first principal surface of the silicon substrate.

    摘要翻译: 提供了一种根据由激发光产生的荧光测量葡萄糖的针型荧光传感器。 针型荧光传感器包括:针体部,其包括设置在针前端部的传感器部和从传感器部到针基端部的金属线;以及连接器,其与针体部一体化, 金属线延伸。 传感器部分包括具有第一和第二主表面的硅衬底,将荧光转换为电信号的PD器件,透射荧光并发射激发光的LED器件,以及在激发光下与分析物相互作用的指示器层 产生荧光。 PD器件,LED器件和指示层在硅衬底的第一主表面之上彼此重叠。

    SPM cantilever and manufacturing method thereof
    5.
    发明授权
    SPM cantilever and manufacturing method thereof 有权
    SPM悬臂及其制造方法

    公开(公告)号:US07735357B2

    公开(公告)日:2010-06-15

    申请号:US11587207

    申请日:2005-04-20

    IPC分类号: G01B5/28

    摘要: An SPM cantilever of the present invention including: a support portion (1) fabricated by processing a single crystal silicon wafer; a lever portion (2) formed in a manner extended from the support portion; a probe (3) disposed at a free end side of the lever portion; a coating of graphite film (5) covering all over the side on which the probe is formed and the entire probe; and a piece of thin line (6) consisting of a carbon nanofiber (CNF) or carbon nanotube (CNT) or graphite nanofiber (GNF) grown/formed from the graphite film at a probe terminal end portion (3a).

    摘要翻译: 本发明的SPM悬臂包括:通过处理单晶硅晶片制造的支撑部分(1); 以从所述支撑部延伸的方式形成的杆部(2) 设置在所述杆部的自由端侧的探针(3) 覆盖在其上形成探针的一侧的整个探针的石墨膜(5)涂层; 以及由在探针末端部分(3a)由石墨膜生长/形成的碳纳米纤维(CNF)或碳纳米管(CNT)或石墨纳米纤维(GNF)组成的细线(6)。

    Traveling environment recognition device
    6.
    发明授权
    Traveling environment recognition device 有权
    旅行环境识别装置

    公开(公告)号:US08620025B2

    公开(公告)日:2013-12-31

    申请号:US13059741

    申请日:2009-06-24

    IPC分类号: G06K9/00 G06K9/36 G06K9/32

    摘要: In order to perform vehicle control, a warning process, and the like which do not give a driver an uncomfortable feeling in speed adjustment, a warning process, and the like corresponding to a road shape such as a curve, it is necessary to recognize not only a near road shape but also a far road shape with high accuracy. A traveling environment recognition device includes: a measurement unit which measures a target object; a three-dimensional object detection unit which detects a three-dimensional object on the basis of a signal acquired by the measurement unit; a road shape prediction unit which predicts a road shape on which a target vehicle is traveling; a three-dimensional object selection unit which selects, from among the three-dimensional objects detected by the three-dimensional object detection unit, only a three-dimensional object within a predetermined range from a point of the road predicted by the road shape prediction unit; and a road shape estimation unit which estimates the road shape on the basis of position information of the three-dimensional object selected by the three-dimensional object selection unit.

    摘要翻译: 为了执行车辆控制,警告处理等,其不给驾驶员在与曲线等道路形状对应的速度调节,警告处理等中感到不舒适的感觉,因此不需要识别 只有近路形状,但也具有高精度的远道形状。 行驶环境识别装置包括:测量目标物体的测量单元; 三维物体检测单元,其基于由测量单元获取的信号来检测三维物体; 道路形状预测单元,其预测目标车辆行驶的道路形状; 三维物体选择单元,从三维物体检测单元检测到的三维物体中,仅从道路形状预测单元预测的道路上的预定范围内的三维物体中, ; 以及道路形状估计单元,其基于由三维物体选择单元选择的三维物体的位置信息来估计道路形状。

    RUNNING-ENVIRONMENT RECOGNITION APPARATUS
    7.
    发明申请
    RUNNING-ENVIRONMENT RECOGNITION APPARATUS 有权
    运行环境识别装置

    公开(公告)号:US20120140039A1

    公开(公告)日:2012-06-07

    申请号:US13283011

    申请日:2011-10-27

    IPC分类号: H04N13/02 H04N7/18 G01S13/91

    摘要: A running-environment recognition apparatus includes an information recognition section mounted in a vehicle and configured to recognize an information of at least a frontward region of the vehicle relative to a traveling direction of the vehicle; and a road-surface calculating section configured to calculate a road surface of a traveling road and a portion lower than the road surface in the frontward region of the vehicle, from the information recognized by the information recognition section.

    摘要翻译: 运行环境识别装置包括安装在车辆中的信息识别部件,其构造成能够相对于车辆的行进方向识别车辆的至少前方区域的信息; 以及路面计算部,其从所述信息识别部识别出的信息,计算出所述行驶道路的路面和所述车辆前方的低于所述路面的部分。

    Solder ball
    8.
    发明授权
    Solder ball 有权
    焊球

    公开(公告)号:US08020745B2

    公开(公告)日:2011-09-20

    申请号:US12620781

    申请日:2009-11-18

    IPC分类号: B23K35/14 B23K31/02

    摘要: An object of the present invention is to improve a yield of electronic devices in a ball mounting process by preventing a micro-bonding and change in color of the solder balls, and to improve a bonding reliability of the solder balls by reducing an oxide film on a surface of the solder ball. The solder ball has a surface thereof coated with an organic compound containing a cyclic structure and an aliphatic hydrocarbon group.

    摘要翻译: 本发明的目的是通过防止焊球的微结合和颜色变化来提高球安装工艺中的电子器件的产量,并且通过减少氧化膜来提高焊球的接合可靠性 焊球表面。 焊球的表面涂布有含有环状结构和脂肪族烃基的有机化合物。

    SOLDER BALL
    9.
    发明申请
    SOLDER BALL 有权
    焊球

    公开(公告)号:US20100127044A1

    公开(公告)日:2010-05-27

    申请号:US12620781

    申请日:2009-11-18

    IPC分类号: B23K35/14 B23K35/22

    摘要: An object of the present invention is to improve a yield of electronic devices in a ball mounting process by preventing a micro-bonding and change in color of the solder balls, and to improve a bonding reliability of the solder balls by reducing an oxide film on a surface of the solder ball.The solder ball has a surface thereof coated with an organic compound containing a cyclic structure and an aliphatic hydrocarbon group.

    摘要翻译: 本发明的目的是通过防止焊球的微结合和颜色变化来提高球安装工艺中的电子器件的产量,并且通过减少氧化膜来提高焊球的接合可靠性 焊球表面。 焊球的表面涂布有含有环状结构和脂肪族烃基的有机化合物。

    CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND PRODUCTION METHOD OF SAME
    10.
    发明申请
    CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND PRODUCTION METHOD OF SAME 有权
    电容式MICROMACHINED超声波传感器及其生产方法

    公开(公告)号:US20080067895A1

    公开(公告)日:2008-03-20

    申请号:US11942364

    申请日:2007-11-19

    IPC分类号: H01L41/00

    摘要: A capacitive micromachined ultrasonic transducer (cMUT) is constituted by a plurality of transducer elements comprising plural transducer cells that are mutually connected in parallel and comprises: a silicon substrate; a bottom electrode placed on the top surface of the silicon substrate; an upper electrode placed opposite to the bottom electrode and apart therefrom by a prescribed air or vacuum; a membrane for supporting the bottom electrode; and a membrane supporting part for supporting the membrane, wherein the cMUT comprises a third electrode which has an electrical continuity to the bottom electrode and which corresponds to either one of the transducer cells of a prescribed number of the transducer subelement or of the transducer elements, and a fourth electrode which is a ground electrode electrically connected to the bottom electrode.

    摘要翻译: 电容微加工超声波换能器(cMUT)由多个换能器元件构成,多个换能器元件包括并联的多个换能器单元,包括:硅基底; 放置在硅衬底的顶表面上的底电极; 上电极通过规定的空气或真空与底电极相对设置并与其分离; 用于支撑底部电极的膜; 以及用于支撑所述膜的膜支撑部分,其中所述cMUT包括与所述底部电极具有电连续性并且对应于规定数量的所述换能器子元件或所述换能器元件中的任一个换能器单元的第三电极, 以及第四电极,其是与所述底部电极电连接的接地电极。