Fabrication processes of a MEMS alloy probe
    6.
    发明申请
    Fabrication processes of a MEMS alloy probe 审中-公开
    MEMS合金探针的制造工艺

    公开(公告)号:US20080124828A1

    公开(公告)日:2008-05-29

    申请号:US11601753

    申请日:2006-11-20

    IPC分类号: H01L21/56

    CPC分类号: G01R1/06744 G01R3/00

    摘要: MEMS processes for fabrication of a MEMS alloy probe are revealed. Multiple layers of the MEMS alloy probe are formed on the substrate in sequences as a first surface layer, a first conductive layer, a core layer, a second conductive layer, and a second surface layer where the width of the first conductive layer is smaller than the one of first surface layer so that all the exposed edges of the first surface layer are not covered by the first conductive layer. The second surface layer is extended from the sidewalls of the core layer to the exposed edges of the first surface layer to encapsulate the core layer, the first conductive layer, and the second conductive layer. The MEMS alloy probe fabricated by the MEMS processes can eliminate the issue of oxidation.

    摘要翻译: 揭示了用于制造MEMS合金探针的MEMS工艺。 多层MEMS合金探针以顺序形成在基板上,作为第一表面层,第一导电层,芯层,第二导电层和第二表面层,其中第一导电层的宽度小于 第一表面层中的一个,使得第一表面层的所有暴露边缘都不被第一导电层覆盖。 第二表面层从芯层的侧壁延伸到第一表面层的暴露边缘,以封装芯层,第一导电层和第二导电层。 通过MEMS工艺制造的MEMS合金探针可以消除氧化问题。