Method for depositing a Tio.sub.2 layer using a periodic and
simultaneous tilting and rotating platform motion
    4.
    发明授权
    Method for depositing a Tio.sub.2 layer using a periodic and simultaneous tilting and rotating platform motion 失效
    使用周期性和同时倾斜和旋转平台运动沉积Tio2层的方法

    公开(公告)号:US5081069A

    公开(公告)日:1992-01-14

    申请号:US457113

    申请日:1989-12-26

    CPC classification number: H01L31/1884 C23C16/405 C23C16/4588 Y02E10/50

    Abstract: Method and apparatus are disclosed for depositing a uniform layer of material, such as titanium dioxide, on the surface of an object, such as a silicon sphere of a solar array (7). Component gases are injected at predetermined rates into a heated reaction chamber (5) where they react. Because of the reaction rate and injection velocities of the gases, the reaction is substantially completed at a calculated location inside the reaction chamber (5). The object which is to receive the layer, such as the solar array (7), is placed at the calculated location in the reaction chamber (5). The platform (68) to which the solar array (7) is attached is simultaneously tilted and rotated such that all areas of the surface of the array (7) are uniformly exposed to the titanium dioxide reactant.

    Abstract translation: 公开了用于在诸如太阳能阵列(7)的硅球体的表面上沉积均匀的材料层(例如二氧化钛)的方法和装置。 组分气体以预定速率注入加热的反应室(5)中,在这些反应室中它们反应。 由于气体的反应速度和喷射速度,反应基本上在反应室(5)内的计算位置完成。 接收该层的物体(例如太阳能阵列(7))被放置在反应室(5)中计算的位置处。 太阳能电池阵列(7)所连接的平台(68)同时倾斜并旋转,使得阵列(7)的表面的所有区域均匀地暴露于二氧化钛反应物。

    Mosaic pattern of infrared detectors of different cut off wave lengths
    5.
    发明授权
    Mosaic pattern of infrared detectors of different cut off wave lengths 失效
    不同截止波长的红外探测器的马赛克图案

    公开(公告)号:US4620209A

    公开(公告)日:1986-10-28

    申请号:US656059

    申请日:1984-09-28

    CPC classification number: H01L27/14669

    Abstract: The disclosure relates to an infrared detector and method of making an infrared detector having HgCdTe detectors in the same focal plane of different compositions responsive to two or more different infrared frequency windows. This is accomplished by using SiO.sub.2 and/or Si.sub.x O.sub.y N.sub.z for masking and/or isolation during liquid phase epitaxial growth of the HgCdTe. The SiO.sub.2 and/or Si.sub.x O.sub.y N.sub.z are formed by plasma deposition.

    Abstract translation: 本公开涉及一种红外检测器和在响应于两个或更多个不同的红外频率窗口的同一焦平面上制造具有HgCdTe检测器的红外检测器的方法。 这通过在HgCdTe的液相外延生长期间使用SiO 2和/或SixOyNz来进行掩模和/或隔离来实现。 通过等离子体沉积形成SiO2和/或SixOyNz。

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