Pressure sensor device
    2.
    发明授权

    公开(公告)号:US11137305B2

    公开(公告)日:2021-10-05

    申请号:US16967868

    申请日:2019-02-07

    申请人: Soichiro Suzu

    发明人: Soichiro Suzu

    IPC分类号: G01L9/00 G01L19/00

    摘要: A pressure sensor device of the present invention includes a first board including external connection terminals, a second board stacked on an upper surface of the first board and including a first through hole and a second through hole, a pressure sensor element including a diaphragm structure and mounted on an upper surface of the second board such that the first through hole is closed by the diaphragm structure, and a cover that is mounted on the upper surface of the second board to cover the pressure sensor element and in which a first channel for guiding a first fluid to an upper surface of the diaphragm structure is formed. A second channel is formed between the first board and the second board to lead from the second through hole to the first through hole and guide a second fluid to a lower surface of the diaphragm structure.