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公开(公告)号：US08542365B2
公开(公告)日：2013-09-24
申请号：US12729482
申请日：2010-03-23
Applicant: Marcel W. Pruessner , Todd H. Stievater , William S Rabinovich
Inventor： Marcel W. Pruessner , Todd H. Stievater , William S Rabinovich
IPC: G01B9/02
CPC classification number: G01N21/75 , G01B9/02004 , G01B9/02051 , G01B2290/25 , G01G3/165 , G01N21/17 , G01N29/036 , G01N2021/757 , G01N2291/0256
Abstract: A change in mass of a microbridge in a mass sensor can be sensed by applying a time-varying amplitude modulated electrostatic force to excite the microbridge into resonance at the frequency of amplitude modulation. An optical energy is then transmitted at a wavelength close to a resonant wavelength of a Fabry-Perot microcavity, which is formed by etching a movable reflective mirror into a region of the microbridge and by etching a fixed reflective minor in a region spaced apart from the microbridge. The two mirrors are interconnected by an optical waveguide. The movable mirror and fixed mirror reflect the optical energy to a receiver, and a change in the Fabry-Perot microcavity's reflectivity is interferometrically determined. The change in reflectivity indicates a change in the microbridge's resonant frequency due to increased mass of the microbridge resulting from sorption of a target chemical by a layer of chemoselective material deposited on the microbridge.
Abstract translation: 质量传感器中的微桥质量的变化可以通过施加时变幅度调制的静电力来感测，以便以幅度调制的频率激励微桥进入谐振。 然后以接近于法布里 - 珀罗微腔的谐振波长的波长传输光能，该法是通过将可移动反射镜蚀刻到微桥的区域而形成的，并且通过在与 微桥。 两个反射镜通过光波导相互连接。 可移动镜和固定镜将光能反射到接收器，并且法布里 - 珀罗微腔的反射率的变化被干涉测量。 反射率的变化表明由于通过沉积在微桥上的化学选择材料层吸附目标化学物而导致的微桥的质量增加，微桥的谐振频率发生变化。
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2.发明授权Optically addressed spatial light modulator using an intrinsic semiconductor active material and high resistivity cladding layers 失效使用本征半导体活性材料和高电阻率覆层的光学寻址空间光调制器
公开(公告)号：US5637883A
公开(公告)日：1997-06-10
申请号：US399102
申请日：1995-02-27
Applicant: Steven R. Bowman , William S. Rabinovich , Douglas S. Katzer , Harry B. Dietrich
Inventor： Steven R. Bowman , William S. Rabinovich , Douglas S. Katzer , Harry B. Dietrich
IPC: G02F1/01 , G02F1/017 , H01L31/0352 , H01L29/06 , H01L31/0328
CPC classification number: B82Y20/00 , G02F1/017 , H01L31/035236 , G02F1/0126 , G02F2203/12
Abstract: An optically addressed spatial light modulator includes top and bottom conductive layers sandwiching an intrinsic semiconductor multilayer structure. A cladding layer having a high trapping density is sandwiched between at least one of the electrodes and the intrinsic semiconductor layer structure. Typically, one cladding layer will be sandwiched between the top conductive layer and the intrinsic semiconductor multilayer structure and another cladding layer will be sandwiched between the bottom conductive layer and the intrinsic semiconductor structure. The cladding layer or layers laterally confine the photocarriers generated within the intrinsic semiconductor multilayer structure.
Abstract translation: 光学寻址的空间光调制器包括夹着本征半导体多层结构的顶部和底部导电层。 具有高俘获密度的覆层被夹在至少一个电极和本征半导体层结构之间。 通常，一个包覆层将被夹在顶部导电层和本征半导体多层结构之间，而另一个包覆层将夹在底部导电层和本征半导体结构之间。 包覆层或层横向限制在本征半导体多层结构内产生的光载流子。
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公开(公告)号：US5036520A
公开(公告)日：1991-07-30
申请号：US597127
申请日：1990-10-15
Applicant: Steven R. Bowman , William S. Rabinovich
Inventor： Steven R. Bowman , William S. Rabinovich
Abstract: A solid-state laser device includes a neodymium laser pump source capable outputting a pump beam of about 1.1 .mu.m wavelength, and a holmium laser being pumped by said 1.1 .mu.m pump beam to generate an output laser beam of about 3 .mu.m wavelength.
Abstract translation: 固态激光器件包括能够输出约1.1μm波长的泵浦光束的钕激光泵浦源，以及由所述1.1μm泵浦光束泵浦的钬激光器，以产生约3μm波长的输出激光束 。
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公开(公告)号：US09395177B2
公开(公告)日：2016-07-19
申请号：US14538831
申请日：2014-11-12
Applicant: Marcel W. Pruessner , Todd H. Stievater , William S. Rabinovich
Inventor： Marcel W. Pruessner , Todd H. Stievater , William S. Rabinovich
CPC classification number: G01B11/161 , G01B9/02023 , G01B9/02051 , G01B11/026 , G01B11/14 , G01D5/35329
Abstract: A method and system described for sensing a displacement by receiving and propagating a laser light signal with an etched waveguide that is configured to enable an evanescent optical field above the waveguide surface. A movable perturber can be positioned so the perturber interacts with the evanescent optical field above the waveguide surface. An optical phase shift can be induced in the waveguide when the movable perturber is displaced in the evanescent optical field, and the optical phase shift can be measured with an optical readout circuit.
Abstract translation: 一种用于通过接收和传播具有蚀刻波导的激光信号来感测位移的方法和系统，所述蚀刻波导被配置为使能在波导表面上方的渐逝光场。 可以定位可移动的perturber，使得扰波器与波导表面上方的渐逝光场相互作用。 当可逆超声波在渐逝光场中移位时，可以在波导中引起光学相移，并且可以用光学读出电路测量光学相移。
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公开(公告)号：US09335271B2
公开(公告)日：2016-05-10
申请号：US14466090
申请日：2014-08-22
Applicant: Marcel W. Pruessner , Todd H. Stievater , William S. Rabinovich
Inventor： Marcel W. Pruessner , Todd H. Stievater , William S. Rabinovich
IPC: G01B9/02 , G01N21/75 , G01G3/16 , G01N29/036 , G01N21/17
CPC classification number: G01N21/75 , G01B9/02004 , G01B9/02051 , G01B2290/25 , G01G3/165 , G01N21/17 , G01N29/036 , G01N2021/757 , G01N2291/0256
Abstract: A mass sensor system including multiple Fabry-Perot microcavities connected in parallel by multiple waveguides. Each of the mass sensors includes a microbridge having a fundamental resonance frequency, and a movable reflective mirror etched into the microbridge; a fixed reflective mirror etched in a substrate, the fixed reflective mirror being fixed to the substrate in a region spaced apart from the movable reflective mirror; and an optical waveguide etched in the substrate that connects the movable mirror and the fixed mirror forming the Fabry-Perot microcavity interferometer. The system includes a tunable continuous-wave laser operative to optically interrogate the Fabry-Perot microcavity of each of the plurality of mass sensors, and a receiver operative to receive sensor signals from each of the plurality of mass sensors, the sensor signals comprising reflective signals and transmitted signals. A continuous-wave laser may generate optical forces that modify the motion, dynamics, or mechanical Q-factor of the microbridge.
Abstract translation: 一种质量传感器系统，包括由多个波导并联连接的多个法布里 - 珀罗微腔。 每个质量传感器包括具有基本共振频率的微桥和蚀刻到微桥中的可移动反射镜; 在基板中蚀刻的固定反射镜，所述固定反射镜在与所述可移动反射镜间隔开的区域中固定到所述基板; 以及在连接可移动镜和形成法布里 - 珀罗微腔干涉仪的固定镜的基板中蚀刻的光波导。 该系统包括可调谐的连续波激光器，用于光学询问多个质量传感器中的每一个的法布里 - 珀罗微腔，以及接收器，用于接收来自多个质量传感器中的每一个的传感器信号，传感器信号包括反射信号 并发送信号。 连续波激光器可以产生改变微桥的运动，动力学或机械Q因子的光学力。
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Patent Agency Ranking
公开(公告)号：US20150323466A1
公开(公告)日：2015-11-12
申请号：US14466090
申请日：2014-08-22
Applicant: Marcel W. Pruessner , Todd H. Stievater , William S. Rabinovich
Inventor： Marcel W. Pruessner , Todd H. Stievater , William S. Rabinovich
IPC: G01N21/75
CPC classification number: G01N21/75 , G01B9/02004 , G01B9/02051 , G01B2290/25 , G01G3/165 , G01N21/17 , G01N29/036 , G01N2021/757 , G01N2291/0256
Abstract: A mass sensor system including multiple Fabry-Perot microcavities connected in parallel by multiple waveguides. Each of the mass sensors includes a microbridge having a fundamental resonance frequency, and a movable reflective mirror etched into the microbridge; a fixed reflective mirror etched in a substrate, the fixed reflective mirror being fixed to the substrate in a region spaced apart from the movable reflective mirror; and an optical waveguide etched in the substrate that connects the movable mirror and the fixed mirror forming the Fabry-Perot microcavity interferometer. The system includes a tunable continuous-wave laser operative to optically interrogate the Fabry-Perot microcavity of each of the plurality of mass sensors, and a receiver operative to receive sensor signals from each of the plurality of mass sensors, the sensor signals comprising reflective signals and transmitted signals. A continuous-wave laser may generate optical forces that modify the motion, dynamics, or mechanical Q-factor of the microbridge.
Abstract translation: 一种质量传感器系统，包括由多个波导并联连接的多个法布里 - 珀罗微腔。 每个质量传感器包括具有基本共振频率的微桥和蚀刻到微桥中的可移动反射镜; 在基板中蚀刻的固定反射镜，所述固定反射镜在与所述可移动反射镜间隔开的区域中固定到所述基板; 以及在连接可移动镜和形成法布里 - 珀罗微腔干涉仪的固定镜的基板中蚀刻的光波导。 该系统包括可调谐的连续波激光器，用于光学询问多个质量传感器中的每一个的法布里 - 珀罗微腔，以及接收器，用于接收来自多个质量传感器中的每一个的传感器信号，传感器信号包括反射信号 并发送信号。 连续波激光器可以产生改变微桥的运动，动力学或机械Q因子的光学力。
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公开(公告)号：US20130330232A1
公开(公告)日：2013-12-12
申请号：US13945075
申请日：2013-07-18
Applicant: Marcel W. Pruessner , Todd H. Stievater , William S. Rabinovich
Inventor： Marcel W. Pruessner , Todd H. Stievater , William S. Rabinovich
IPC: G01N21/17
CPC classification number: G01N21/75 , G01B9/02004 , G01B9/02051 , G01B2290/25 , G01G3/165 , G01N21/17 , G01N29/036 , G01N2021/757 , G01N2291/0256
Abstract: A mass sensor system including multiple Fabry-Perot microcavities connected in parallel by multiple waveguides. Each of the mass sensors includes a microbridge having a fundamental resonance frequency, and a movable reflective mirror etched into the microbridge; a fixed reflective mirror etched in a substrate, the fixed reflective mirror being fixed to the substrate in a region spaced apart from the movable reflective mirror; and an optical waveguide etched in the substrate that connects the movable mirror and the fixed mirror forming the Fabry-Perot microcavity interferometer. The system includes a tunable continuous-wave laser operative to optically interrogate the Fabry-Perot microcavity of each of the plurality of mass sensors, and a receiver operative to receive sensor signals from each of the plurality of mass sensors, the sensor signals comprising reflective signals and transmitted signals. A continuous-wave laser may generate optical forces that modify the motion, dynamics, or mechanical Q-factor of the microbridge.
Abstract translation: 一种质量传感器系统，包括由多个波导并联连接的多个法布里 - 珀罗微腔。 每个质量传感器包括具有基本共振频率的微桥和蚀刻到微桥中的可移动反射镜; 在基板中蚀刻的固定反射镜，所述固定反射镜在与所述可移动反射镜间隔开的区域中固定到所述基板; 以及在连接可移动镜和形成法布里 - 珀罗微腔干涉仪的固定镜的基板中蚀刻的光波导。 该系统包括可调谐的连续波激光器，用于光学询问多个质量传感器中的每一个的法布里 - 珀罗微腔，以及接收器，用于接收来自多个质量传感器中的每一个的传感器信号，传感器信号包括反射信号 并发送信号。 连续波激光器可以产生改变微桥的运动，动力学或机械Q因子的光学力。
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8.发明授权Micromechanical chemical sensors with multiple chemoselective resonant elements and frequency division multiplexed readout 有权具有多个化学选择性谐振元件和频分复用读出的微机械化学传感器公开(公告)号：US08459123B2
公开(公告)日：2013-06-11
申请号：US12569691
申请日：2009-09-29
Applicant: Todd H. Stievater , William S Rabinovich , Nicolas A Papanicolaou , Robert Bass , Jennifer L Stepnowski , R Andrew McGill
Inventor： Todd H. Stievater , William S Rabinovich , Nicolas A Papanicolaou , Robert Bass , Jennifer L Stepnowski , R Andrew McGill
IPC: G01B9/02
CPC classification number: G01N29/036 , G01N2291/0256
Abstract: Micro-opto-mechanical chemical sensors and methods for simultaneously detecting and discriminating between a variety of vapor-phase analytes. One embodiment of the sensor is a photonic microharp chemical sensor with an array of closely spaced microbridges, each differing slightly in length and coated with a different sorbent polymer. The microbridges can be excited photothermally, and the microbridges can be optically interrogated using microcavity interferometry. Other actuation methods include piezoelectric, piezoresistive, electrothermal, and magnetic. Other read-out techniques include using a lever arm and other interferometric techniques.
Abstract translation: 微光机械化学传感器和同时检测和区分各种气相分析物的方法。 传感器的一个实施例是具有紧密间隔的微桥阵列的光子微量化学传感器，每个微桥长度略微不同，并涂覆有不同的吸附剂聚合物。 微桥可以光热激发，微桥可以使用微腔干涉法进行光学询问。 其他致动方法包括压电，压阻，电热和磁性。 其他读出技术包括使用杠杆臂和其他干涉测量技术。
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9.发明授权Dual-purpose electrode/mirror design for optoelectronic devices in a focusing assembly 有权聚焦组件中光电器件的双用途电极/镜面设计公开(公告)号：US08223422B2
公开(公告)日：2012-07-17
申请号：US12942063
申请日：2010-11-09
Applicant: Peter G. Goetz , William S. Rabinovich
Inventor： Peter G. Goetz , William S. Rabinovich
CPC classification number: G02F1/015 , B82Y20/00 , G02F2201/122 , G02F2203/02 , G02F2203/12 , H01L31/022408 , H01L31/035254 , H01L31/105
Abstract: An electro-optic device with a doped semiconductor base and a plurality of pixels on the semiconductor base. Pixels include oppositely doped semiconductor layer and a top electrode formed on the oppositely doped semiconductor layer. The top electrode has a grid pattern with at least one busbar and a plurality of fingers extending from the busbar, and spacing between the fingers decreases with distance from the bondpad along the busbar. Each pixel can also include a multiple quantum well formed on the semiconductor base. The top electrode shape produces an approximately uniform lateral resistance in the pixel. An embodiment is a large area modulator for modulating retro-reflector systems, which typically use large area surface-normal modulators with large lateral current flow. Uniform resistance to each part of the modulator decreases location dependence of frequency response. A chirped grid electrode balances semiconductor sheet resistance and metal line resistance components of the series resistance.
Abstract translation: 一种具有掺杂半导体基底和半导体基底上的多个像素的电光器件。 像素包括相对掺杂的半导体层和形成在相对掺杂的半导体层上的顶部电极。 顶部电极具有至少一个母线和从母线延伸的多个指状物的栅格图案，并且指状物之间的间隔随着沿着母线的接合板的距离而减小。 每个像素还可以包括在半导体基底上形成的多量子阱。 顶部电极形状在像素中产生大致均匀的横向电阻。 一个实施例是用于调制后向反射器系统的大面积调制器，其通常使用具有大横向电流流动的大面积表面正常调制器。 对调制器各部分的均匀电阻降低了频率响应的位置依赖性。 啁啾的栅电极平衡了串联电阻的半导体薄层电阻和金属线电阻分量。
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10.发明授权High performance chirped electrode design for large area optoelectronic devices 有权用于大面积光电子器件的高性能啁啾电极设计公开(公告)号：US07719746B2
公开(公告)日：2010-05-18
申请号：US12210665
申请日：2008-09-15
Applicant: Peter G. Goetz , William S Rabinovich
Inventor： Peter G. Goetz , William S Rabinovich
CPC classification number: G02F1/015 , B82Y20/00 , G02F2201/122 , G02F2203/02 , G02F2203/12 , H01L31/022408 , H01L31/035254 , H01L31/105
Abstract: An electro-optic device with a doped semiconductor base and a plurality of pixels on the semiconductor base, each pixel including: a multiple quantum well formed on the semiconductor base, an oppositely doped semiconductor layer on the multiple quantum well, and a top electrode on the semiconductor layer, the top electrode shaped to produce an approximately uniform lateral resistance in the pixel. An embodiment is a large area modulator for modulating retro-reflector systems, which typically use large area surface-normal modulators with large lateral current flow. Uniform resistance to each part of the modulator decreases location dependence of frequency response. A chirped grid electrode balances semiconductor sheet resistance and metal line resistance components of the series resistance.
Abstract translation: 一种具有掺杂半导体基底和半导体基底上的多个像素的电光器件，每个像素包括：形成在半导体基底上的多量子阱，多量子阱上相对掺杂的半导体层，以及顶部电极 半导体层，顶部电极成形为在像素中产生大致均匀的横向电阻。 一个实施例是用于调制后向反射器系统的大面积调制器，其通常使用具有大横向电流流动的大面积表面正常调制器。 对调制器各部分的均匀电阻降低了频率响应的位置依赖性。 啁啾栅格电极平衡串联电阻的半导体薄层电阻和金属线电阻分量。
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