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公开(公告)号:US20130055273A1
公开(公告)日:2013-02-28
申请号:US13599495
申请日:2012-08-30
申请人: Youngki HONG , Killyeon Kim , Hyeonjin Kang , Kisuk Kweon , Yongseok Park
发明人: Youngki HONG , Killyeon Kim , Hyeonjin Kang , Kisuk Kweon , Yongseok Park
IPC分类号: G06F9/46
CPC分类号: H04L67/325
摘要: A terminal and application synchronization method is provided for simultaneously updating multiple applications. The application synchronization method includes acquiring a synchronization timing of a previously registered synchronization target application or a common synchronization timing of previously registered synchronization target applications, when an application to be synchronized is added; and adjusting the synchronization timing of the added application in consideration of the previous synchronization timing or the common synchronization timing.
摘要翻译: 提供了一种终端和应用同步方法,用于同时更新多个应用程序。 应用同步方法包括:当添加要同步的应用时,获取先前登记的同步目标应用的同步定时或先前登记的同步目标应用的公共同步定时; 以及考虑到先前的同步定时或公共同步定时来调整所添加的应用的同步定时。
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公开(公告)号:US07553430B2
公开(公告)日:2009-06-30
申请号:US11540297
申请日:2006-09-29
申请人: Sunil Chandra , Sreehari Nimmala , Suryadevara Vijayakumar Babu , Udaya B. Patri , Sharath Hedge , Youngki Hong
发明人: Sunil Chandra , Sreehari Nimmala , Suryadevara Vijayakumar Babu , Udaya B. Patri , Sharath Hedge , Youngki Hong
IPC分类号: C09K13/00
CPC分类号: C09K3/1463 , C09G1/02 , C09K3/1409 , C23F3/04 , C23F3/06 , H01L21/3212
摘要: Aqueous polishing slurries for chemical-mechanical polishing are effective for polishing copper at high polish rates. The aqueous slurries according to the present invention may include soluble salts of molybdenum dissolved in an oxidizing agent and molybdic acid dissolved in an oxidizing agent. Methods for polishing copper by chemical-mechanical planarization include polishing copper with low pressures using a polishing pad and a aqueous slurries including soluble salts of molybdenum dissolved in an oxidizing agent and molybdic acid dissolved in an oxidizing agent, particles of MoO3 dissolved in an oxidizing agent, and particles of MoO2 dissolved in an oxidizing agent.
摘要翻译: 用于化学机械抛光的水性抛光浆对于以高抛光速率抛光铜是有效的。 根据本发明的水性浆料可以包括溶解在氧化剂中的钼的可溶性盐和溶解在氧化剂中的钼酸。 通过化学机械平面化抛光铜的方法包括使用抛光垫来抛光低压铜,以及包含溶解在氧化剂中的钼的可溶性盐和溶解在氧化剂中的钼酸的水性浆料,溶解在氧化剂中的MoO 3颗粒 ,和溶解在氧化剂中的MoO 2颗粒。
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公开(公告)号:US07186653B2
公开(公告)日:2007-03-06
申请号:US11032717
申请日:2005-01-11
申请人: Sunil Chandra Jha , Sreehari Nimmala , Sharath Hegde , Youngki Hong , Suryadevera V. Babu , Udaya B. Patri
发明人: Sunil Chandra Jha , Sreehari Nimmala , Sharath Hegde , Youngki Hong , Suryadevera V. Babu , Udaya B. Patri
IPC分类号: H01I21/302 , C09K13/00
CPC分类号: C09K3/1463 , C09G1/02 , C09K3/1409 , C23F3/04 , C23F3/06 , H01L21/3212
摘要: Aqueous polishing slurries for chemical-mechanical polishing are effective for polishing copper at high polish rates. The aqueous slurries according to the present invention may include soluble salts of molybdenum dissolved in an oxidizing agent and molybdic acid dissolved in an oxidizing agent. Methods for polishing copper by chemical-mechanical planarization include polishing copper with low pressures using a polishing pad and a aqueous slurries including soluble salts of molybdenum dissolved in an oxidizing agent and molybdic acid dissolved in an oxidizing agent, particles of MoO3 dissolved in an oxidizing agent, and particles of MoO2 dissolved in an oxidizing agent.
摘要翻译: 用于化学机械抛光的水性抛光浆对于以高抛光速率抛光铜是有效的。 根据本发明的水性浆料可以包括溶解在氧化剂中的钼的可溶性盐和溶解在氧化剂中的钼酸。 通过化学 - 机械平面化抛光铜的方法包括使用抛光垫对低压抛光铜和包含溶解在氧化剂中的钼的可溶性盐和溶解在氧化剂中的钼酸的水性浆料,MoO 3的颗粒, / SUB>溶解在氧化剂中的MoO 2 N 2 O 3的颗粒溶解在氧化剂中。
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公开(公告)号:US20070043230A1
公开(公告)日:2007-02-22
申请号:US11527429
申请日:2006-09-26
申请人: Sunil Jha , Sreehari Nimmala , Sharath Hegde , Youngki Hong , S.V. Babu , Udaya Patri
发明人: Sunil Jha , Sreehari Nimmala , Sharath Hegde , Youngki Hong , S.V. Babu , Udaya Patri
IPC分类号: C07F11/00
CPC分类号: C09K3/1463 , C09G1/02 , C09K3/1409 , C23F3/04 , C23F3/06 , H01L21/3212
摘要: Aqueous polishing slurries for chemical-mechanical polishing are effective for polishing copper at high polish rates. The aqueous slurries according to the present invention may include soluble salts of molybdenum dissolved in an oxidizing agent and molybdic acid dissolved in an oxidizing agent. Methods for polishing copper by chemical-mechanical planarization include polishing copper with low pressures using a polishing pad and a aqueous slurries including soluble salts of molybdenum dissolved in an oxidizing agent and molybdic acid dissolved in an oxidizing agent, particles of MoO3 dissolved in an oxidizing agent, and particles of MoO2 dissolved in an oxidizing agent.
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5.
公开(公告)号:US20050026444A1
公开(公告)日:2005-02-03
申请号:US10846718
申请日:2004-05-13
申请人: S. Babu , Sharath Hegde , Sunil Jha , Udaya Patri , Youngki Hong
发明人: S. Babu , Sharath Hegde , Sunil Jha , Udaya Patri , Youngki Hong
IPC分类号: C09G1/02 , C09K3/14 , C23F3/06 , H01L21/321 , H01L21/302 , H01L21/311 , H01L21/461
CPC分类号: C09K3/1463 , C09G1/02 , C09K3/1409 , C23F3/06 , H01L21/3212
摘要: The claimed invention involves a novel aqueous slurry for chemical-mechanical planarization that is effective for polishing copper at high polish rates. The aqueous slurry according to the present invention comprises particles of MoO3 dissolved in an oxidizing agent. A method for polishing copper by chemical-mechanical planarization includes contacting copper with a polishing pad and an aqueous slurry comprising particles of MoO3 dissolved in an oxidizing agent.
摘要翻译: 所要求保护的发明涉及用于化学 - 机械平面化的新型含水浆料,其有效地以高抛光速率抛光铜。 根据本发明的含水浆料包含溶解在氧化剂中的MoO 3颗粒。 通过化学机械平面化抛光铜的方法包括使铜与抛光垫接触,以及包含溶解在氧化剂中的MoO 3颗粒的含水浆料。
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公开(公告)号:US20050211953A1
公开(公告)日:2005-09-29
申请号:US11032717
申请日:2005-01-11
申请人: Sunil Jha , Sreehari Nimmala , Sharath Hegde , Youngki Hong , S.V. Babu , Udaya Patri
发明人: Sunil Jha , Sreehari Nimmala , Sharath Hegde , Youngki Hong , S.V. Babu , Udaya Patri
CPC分类号: C09K3/1463 , C09G1/02 , C09K3/1409 , C23F3/04 , C23F3/06 , H01L21/3212
摘要: Aqueous polishing slurries for chemical-mechanical polishing are effective for polishing copper at high polish rates. The aqueous slurries according to the present invention may include soluble salts of molybdenum dissolved in an oxidizing agent and molybdic acid dissolved in an oxidizing agent. Methods for polishing copper by chemical-mechanical planarization include polishing copper with low pressures using a polishing pad and a aqueous slurries including soluble salts of molybdenum dissolved in an oxidizing agent and molybdic acid dissolved in an oxidizing agent, particles of MoO3 dissolved in an oxidizing agent, and particles of MoO2 dissolved in an oxidizing agent.
摘要翻译: 用于化学机械抛光的水性抛光浆对于以高抛光速率抛光铜是有效的。 根据本发明的水性浆料可以包括溶解在氧化剂中的钼的可溶性盐和溶解在氧化剂中的钼酸。 通过化学 - 机械平面化抛光铜的方法包括使用抛光垫对低压抛光铜和包含溶解在氧化剂中的钼的可溶性盐和溶解在氧化剂中的钼酸的水性浆料,MoO 3的颗粒, / SUB>溶解在氧化剂中的MoO 2 N 2 O 3的颗粒溶解在氧化剂中。
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公开(公告)号:US20090224200A1
公开(公告)日:2009-09-10
申请号:US12469193
申请日:2009-05-20
申请人: Sunil Chandra Jha , Sreehari Nimmala , Sharath Hedge , Youngki Hong , Suryadevara Vijayakumar Babu , Udaya B. Patri
发明人: Sunil Chandra Jha , Sreehari Nimmala , Sharath Hedge , Youngki Hong , Suryadevara Vijayakumar Babu , Udaya B. Patri
CPC分类号: C09K3/1463 , C09G1/02 , C09K3/1409 , C23F3/04 , C23F3/06 , H01L21/3212
摘要: The aqueous slurries according to the present invention include soluble salts of molybdenum dissolved in an oxidizing agent and deionized water. Other aqueous polishing slurries include dissolved and undissolved nanoparticles of MoO3 in a solution of deionized water and an oxidizing agent.
摘要翻译: 根据本发明的水性浆料包括溶解在氧化剂中的钼的可溶性盐和去离子水。 其他水性抛光浆料包括在去离子水和氧化剂溶液中的溶解和未溶解的MoO 3纳米颗粒。
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公开(公告)号:US20080277378A1
公开(公告)日:2008-11-13
申请号:US12163385
申请日:2008-06-27
申请人: S.V. Babu , Sharath Hegde , Sunil Chandra Jha , Udaya B. Patri , Youngki Hong
发明人: S.V. Babu , Sharath Hegde , Sunil Chandra Jha , Udaya B. Patri , Youngki Hong
IPC分类号: B44C1/22
CPC分类号: C09K3/1463 , C09G1/02 , C09K3/1409 , C23F3/06 , H01L21/3212
摘要: Method for polishing copper by chemical-mechanical planarization. The method of the present invention includes dissolving MoO3 in an oxidizing agent and deionized water to form a first slurry; filtering the first slurry; adding supplemental ceramic/metal oxide nano-particles to the first slurry after filtering, forming an aqueous slurry; introducing the aqueous slurry between the copper and a polishing pad; and, polishing the copper by moving the polishing pad and the copper relative to one another.
摘要翻译: 通过化学机械平面化抛光铜的方法。 本发明的方法包括将MoO 3 N 3在氧化剂和去离子水中溶解以形成第一浆料; 过滤第一浆料; 在过滤后向第一浆料中加入补充的陶瓷/金属氧化物纳米颗粒,形成含水浆料; 在铜和抛光垫之间引入含水浆料; 并且通过相对于彼此移动抛光垫和铜来抛光铜。
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公开(公告)号:US20070023731A1
公开(公告)日:2007-02-01
申请号:US11540297
申请日:2006-09-29
申请人: Sunil Jha , Sreehari Nimmala , Sharath Hedge , Youngki Hong , S.V. Babu , Udaya Patri
发明人: Sunil Jha , Sreehari Nimmala , Sharath Hedge , Youngki Hong , S.V. Babu , Udaya Patri
CPC分类号: C09K3/1463 , C09G1/02 , C09K3/1409 , C23F3/04 , C23F3/06 , H01L21/3212
摘要: Aqueous polishing slurries for chemical-mechanical polishing are effective for polishing copper at high polish rates. The aqueous slurries according to the present invention may include soluble salts of molybdenum dissolved in an oxidizing agent and molybdic acid dissolved in an oxidizing agent. Methods for polishing copper by chemical-mechanical planarization include polishing copper with low pressures using a polishing pad and a aqueous slurries including soluble salts of molybdenum dissolved in an oxidizing agent and molybdic acid dissolved in an oxidizing agent, particles of MoO3 dissolved in an oxidizing agent, and particles of MoO2 dissolved in an oxidizing agent.
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