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    GAS SUPPLY ASSEMBLY, COMPONENTS THEREOF, AND REACTOR SYSTEM INCLUDING SAME
    1.
    发明申请
    GAS SUPPLY ASSEMBLY, COMPONENTS THEREOF, AND REACTOR SYSTEM INCLUDING SAME 有权

    公开(公告)号：US20210207269A1

    公开(公告)日：2021-07-08

    申请号：US17136659

    申请日：2020-12-29

    Applicant: ASM IP Holding B.V.

    Inventor： Jianqiu Huang ,  Gejian Zhao ,  Kyle Fondurulia

    IPC: C23C16/455 ,  F16K7/14

    Abstract: Gas supply assemblies and reactors systems including the gas supply assemblies are disclosed. An exemplary gas supply assembly includes a vessel, a valve plate, a housing encasing the vessel and the valve plate, a gas feedthrough having a first end interior of the housing and a second end exterior of the housing, and one or more valves attached to the valve plate, wherein at least one valve is fluidly coupled to an interior of the vessel. The assemblies can further include a removable gas line having a first end coupled to the at least one valve and a second end coupled to the gas feedthrough. Additionally or alternatively, a gas supply assembly can include one or more valve plate leveling devices coupled to the valve plate.

    SOLID SOURCE PRECURSOR VESSEL
    2.
    发明申请
    SOLID SOURCE PRECURSOR VESSEL 有权

    公开(公告)号：US20210340671A1

    公开(公告)日：2021-11-04

    申请号：US17239768

    申请日：2021-04-26

    Applicant: ASM IP Holding B.V.

    Inventor： Jianqiu Huang ,  Ankit Kimtee ,  Sudhanshu Biyani ,  Jonathan Robert Bakke ,  Eric James Shero

    IPC: C23C16/448 ,  C23C16/44 ,  C23C16/455 ,  C23C16/50

    Abstract: The present disclosure is generally directed to a solid source precursor delivery system. More specifically, the present disclosure is directed to a solid source precursor vessel that can be utilized to vaporize a supply of solid precursor stored within the vessel. The disclosed source vessel utilizes a plurality of individual cavities or pockets within the interior of the vessel. Each individual pocket may be loaded with precursor. In an arrangement, the pockets may be loaded with pre-formed blocks of compressed precursor material that typically have a higher density than was previously achieved when packing solid precursor within a source vessel. The increased density of the solid precursor material increases a capacity of the source vessel resulting in longer intervals between replacement and/or refilling the source vessel.

    Solid source precursor vessel
    6.
    发明授权
    Solid source precursor vessel 有权

    公开(公告)号：US11959168B2

    公开(公告)日：2024-04-16

    申请号：US17239768

    申请日：2021-04-26

    Applicant: ASM IP Holding B.V.

    Inventor： Jianqiu Huang ,  Ankit Kimtee ,  Sudhanshu Biyani ,  Jonathan Robert Bakke ,  Eric James Shero

    IPC: C23C16/455 ,  C23C16/44 ,  C23C16/448 ,  C23C16/50

    CPC classification number: C23C16/448 ,  C23C16/44 ,  C23C16/4408 ,  C23C16/45525 ,  C23C16/50

    Abstract: The present disclosure is generally directed to a solid source precursor delivery system. More specifically, the present disclosure is directed to a solid source precursor vessel that can be utilized to vaporize a supply of solid precursor stored within the vessel. The disclosed source vessel utilizes a plurality of individual cavities or pockets within the interior of the vessel. Each individual pocket may be loaded with precursor. In an arrangement, the pockets may be loaded with pre-formed blocks of compressed precursor material that typically have a higher density than was previously achieved when packing solid precursor within a source vessel. The increased density of the solid precursor material increases a capacity of the source vessel resulting in longer intervals between replacement and/or refilling the source vessel.

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