公开(公告)号：US5955811A

公开(公告)日：1999-09-21

申请号：US598375

申请日：1996-02-08

申请人： Akira Chiba ,  Tadashi Fukao ,  Yasushi Maejima

发明人： Akira Chiba ,  Tadashi Fukao ,  Yasushi Maejima

IPC分类号： F16C32/04 ,  F16C39/06 ,  H02K7/09 ,  H02K17/16 ,  H02K17/42

CPC分类号： F16C32/0459 ,  F16C32/0491 ,  F16C32/0493 ,  H02K17/165 ,  H02K7/09

摘要： A high speed electromagnetic rotating machine is arranged to avoid heat generation due to mutual inductance between a stator and rotor and has a stator provided with drive windings for generating a rotating magnetic field to rotate the rotor and position control windings fitted to the stator for generating a magnetic field having a different number of poles than that of the drive windings for controlling the axial or radial position of the rotor when an electric current sufficient to unbalance the magnetic field applied to the rotor by the drive windings is supplied to the position control windings. The rotor has a cage conductors interconnected to form a plurality of closed circuits mounted to the rotor, the closed circuits having a number of poles set so that there is no mutual inductance between the position control windings and the cage conductors. The cage conductors are connected by circumferentially-divided end rings rigidly connected by a retaining ring or by axially divided end rings directly connected to the rotor shaft. In one embodiment, the cage conductors are arranged in four-pole closed circuits, the drive windings have four poles, and the position control windings have two poles. In an alternative embodiment, the cage conductors may be arranged in two-pole closed circuits, the drive windings have two poles and the position control windings have four poles.

摘要翻译： 布置高速电磁旋转机器，以避免由于定子和转子之间的互感引起的热量产生，并且具有设置有用于产生旋转磁场的驱动绕组的定子，以使转子和装配到定子上的位置控制绕组产生 磁场具有与用于控制转子的轴向或径向位置的驱动绕组数不同的极数，当通过驱动绕组将足以不平衡施加到转子的磁场的电流提供给位置控制绕组时。 转子具有互连以形成安装到转子的多个闭合回路的保持架导体，闭合回路具有多个极点，使得位置控制绕组和保持架导体之间不存在互感。 笼式导体通过由保持环刚性连接的周向分隔的端环或直接连接到转子轴的轴向分开的端环连接。 在一个实施例中，保持架导体布置在四极闭合电路中，驱动绕组具有四个极，并且位置控制绕组具有两个极。 在替代实施例中，保持架导体可以布置在两极闭合电路中，驱动绕组具有两个极，并且位置控制绕组具有四个极。

公开(公告)号：US20130164124A1

公开(公告)日：2013-06-27

申请号：US13820468

申请日：2011-07-21

申请人： Yoshinobu Ohtachi ,  Yasushi Maejima ,  Tsutomu Takaada

发明人： Yoshinobu Ohtachi ,  Yasushi Maejima ,  Tsutomu Takaada

IPC分类号： F04D1/00

CPC分类号： F04D19/042 ,  F04D1/00 ,  F04D19/044 ,  F04D29/023 ,  F04D29/058 ,  F04D29/32 ,  F04D29/644 ,  F05D2230/10

摘要： Provided is an exhaust pump that is suitable for enhancing durability, processability of connecting opening portions in a pump production stage, and evacuation performance. An exhaust pump includes: a cylindrical rotating member; a support unit of the cylindrical rotating member; a driving unit for rotationally driving the cylindrical rotating member; an outer cylindrical fixed member disposed so as to surround the outer periphery of the cylindrical rotating member; an inner cylindrical fixed member disposed so as to be surrounded by the inner periphery of the cylindrical rotating member; a helical outer thread groove exhaust passage provided between the cylindrical rotating member and the outer cylindrical fixed member; a helical inner thread groove exhaust passage provided between the cylindrical rotating member and the inner cylindrical fixed member; connecting opening portions that are opened in the cylindrical rotating member and that lead a part of gas existing in the vicinity of the outer periphery of the cylindrical rotating member towards the inner thread groove exhaust passage. A gap between an upstream end of the connecting opening portions and lowermost stage rotor blades provided at the outer periphery of the cylindrical rotating member which is located upstream of the connecting opening portions has a dimension equal to or greater than a dimension that enables insertion, into the gap, of a tool for opening the connecting opening portions.

摘要翻译： 本发明提供一种适于提高泵生产阶段的连接开口部的耐久性，加工性以及排气性能的排气泵。 排气泵包括：圆筒形旋转构件; 圆柱形旋转构件的支撑单元; 用于旋转地驱动所述圆筒形旋转构件的驱动单元; 设置成围绕所述圆筒形旋转构件的外周的外圆柱形固定构件; 内圆筒状固定部件，被配置成被圆筒状旋转部件的内周围包围; 螺旋形外螺纹槽排气通道，设置在圆筒形旋转构件和外圆柱形固定构件之间; 设置在所述圆筒形旋转构件和所述内圆柱形固定构件之间的螺旋形内螺纹槽排气通道; 连接开口部，其在所述圆筒状的旋转构件中开口，并且将存在于所述圆筒状的旋转构件的外周的附近的气体的一部分朝向所述内螺纹槽排出通路。 连接开口部分的上游端和设置在圆筒形旋转部件的位于连接开口部分上游侧的外周的最下级转子叶片之间的间隙具有等于或大于能插入的尺寸的尺寸 用于打开连接开口部分的工具的间隙。

公开(公告)号：US07753661B2

公开(公告)日：2010-07-13

申请号：US10566774

申请日：2004-08-03

申请人： Satoshi Okudera ,  Yasushi Maejima ,  Yoshiyuki Sakaguchi

发明人： Satoshi Okudera ,  Yasushi Maejima ,  Yoshiyuki Sakaguchi

IPC分类号： F04B39/06 ,  H02K7/09

CPC分类号： F04D19/042 ,  F04D25/06 ,  F04D29/5806 ,  F04D29/584

摘要： A vacuum pump evacuates gas from a chamber by coaction of a rotationally driven rotor and a stator. An electrical equipment section that rotates the rotor is housed within a stator column integral with the stator. A cooling water pipe is buried in a wall of the stator column near the electrical equipment section. One end of the cooling water pipe branches into a plurality of water inlet ports and the other end branches into a plurality of water outlet ports. One pair of water inlet and outlet ports opens to the outside of the vacuum pump at a side surface of the stator column and another pair of water inlet and outlet ports opens to the outside at the underside of the stator column.

摘要翻译： 真空泵通过旋转驱动的转子和定子的共同作用从腔室排出气体。 旋转转子的电气设备部分容纳在与定子一体的定子柱内。 冷却水管埋在电气设备部分附近的定子柱的壁上。 冷却水管的一端分支成多个进水口，另一端分支成多个出水口。 一对水入口和出口在定子柱的侧面向真空泵的外部开口，另一对进水和出口通向定子柱下侧的外部。

公开(公告)号：US06709226B2

公开(公告)日：2004-03-23

申请号：US10187573

申请日：2002-07-02

申请人： Yasushi Maejima ,  Yoshiyuki Sakaguchi

发明人： Yasushi Maejima ,  Yoshiyuki Sakaguchi

IPC分类号： F04D1904

CPC分类号： F04D19/04 ,  F04D27/0292 ,  F04D29/662

摘要： To provide a vacuum pump used for semiconductor manufacturing, which has improved reliability and safety and in which damages to a pump casing, peripheral apparatuses, or the like are prevented from occurring by preventing the occurrence of rotor breakage due to corrosion. A balancer is provided in the outer circumferential surface of the rotor so as to face the inside of the gas passageway. A balancer main body is supported against the outer circumferential surface of a rotor through a fragile portion that is weak with respect to corrosive gasses, the fragile portion of the balancer is damaged by corrosion before any corrosive gas influence appears in rotor blades or the rotor, and the balancer falls off, thus forcibly causing an unbalanced state to appear in the rotor. The balancer thus possesses a function for balancing the rotor and a corrosion detecting function. The unbalanced state of the rotor is then detected by a sensor, and damages to the vacuum pump itself and to the peripheral apparatuses can be prevented by stopping the pump.

摘要翻译： 提供一种用于半导体制造的真空泵，其具有提高的可靠性和安全性，并且通过防止由腐蚀引起的转子断裂的发生而防止对泵壳体，外围设备等的损坏。 平衡器设置在转子的外周面上，以便面对气体通道的内部。 平衡器主体通过相对于腐蚀性气体较弱​​的脆弱部分支撑在转子的外周面上，在转子叶片或转子中出现任何腐蚀性气体影响之前，平衡器的脆弱部分被腐蚀损坏， 并且平衡器脱落，从而强制地导致转子中出现不平衡状态。 因此，平衡器具有平衡转子和腐蚀检测功能的功能。 然后由传感器检测转子的不平衡状态，并且可以通过停止泵来防止对真空泵本身和外围设备的损坏。

公开(公告)号：US06465924B1

公开(公告)日：2002-10-15

申请号：US09537940

申请日：2000-03-29

申请人： Yasushi Maejima

发明人： Yasushi Maejima

IPC分类号： H02K709

CPC分类号： F04D29/058 ,  F04D19/048 ,  F16C32/0459 ,  F16C2360/45

摘要： To facilitate the fabrication work of a stator column assembly and improve full and wise use of resources, as well as to prevent contact accident between a mold portion of a stator column and a rotor shaft due to the thermal inflation. A first electromagnet unit (30), a stator coil unit (20), and a second electromagnet unit (40) are engaged to and arranged in a cylindrical stator column (11) in the order stated, the first electromagnet unit (30) comprising an electromagnet (31) of a first active radial magnetic bearing and a radial displacement sensor (32) for the electromagnet (31) which are attached in a first circular holding member (30c) to be coated and molded with a resin mold (30d), the stator coil unit (20) comprising a stator coil (21a) that is attached in a circular yoke member (20c) to be coated and molded with a resin mold (20d), the second electromagnet unit (40) comprising an electromagnet (41) of a second active radial magnetic bearing and a radial displacement sensor (42) for the electromagnet (41) which are attached in a second circular holding member (40c) to be coated and molded with a resin mold (40d).

摘要翻译： 为了促进定子柱组件的制造工作，并改善资源的充分和明智的使用，并且防止由于热膨胀引起的定子柱的模具部分和转子轴之间的接触事故。 第一电磁体单元（30），定子线圈单元（20）和第二电磁体单元（40）按照所述顺序接合并布置在圆柱形定子柱（11）中，第一电磁体单元（30）包括 第一有源径向磁轴承的电磁体（31）和用于电磁体（31）的径向位移传感器（32），其安装在待涂覆并用树脂模具（30d）模制的第一圆形保持构件（30c）中， 定子线圈单元（20）包括定子线圈（21a），该定子线圈（21a）被安装在待涂覆的环形轭构件（20c）中并用树脂模具（20d）模制，第二电磁体单元（40）包括电磁体 41）和用于电磁体（41）的径向位移传感器（42），所述径向位移传感器（42）安装在第二圆形保持构件（40c）中以被涂覆并用树脂模具（40d）模制。

公开(公告)号：US20110103934A1

公开(公告)日：2011-05-05

申请号：US12999137

申请日：2009-07-14

申请人： Yoshinobu Ohtachi ,  Manabu Nabaka ,  Yasushi Maejima

发明人： Yoshinobu Ohtachi ,  Manabu Nabaka ,  Yasushi Maejima

IPC分类号： F04B49/00

CPC分类号： F04D19/042 ,  F04D27/001 ,  F04D27/0292 ,  F04D29/661 ,  F05D2260/607

摘要： Provided is a vacuum pump which can detect precisely physical contact between a rotor portion and a stator portion, and contact between the rotor portion and the stator portion that occurs as the amount of deposited solid product reaches the clearance between the rotor portion and the stator portion.A vibration sensor is provided, taking advantage of a clearance, at the outer peripheral of a thread groove spacer. Contact between the rotor portion and the stator portion is decided, when a particular vibration during contact between the rotor portion and the stator portion exceeds a predetermined threshold value. The vibration sensor is mounted on the outer peripheral of the thread groove spacer at the end of the side of an exhaust port. The thread groove spacer is fixed on a casing via an elastic member (an O-ring) that have a vibration absorption (vibration damping) function of a cutoff frequency (fc1). A vibration signal outputted from the vibration sensor is converted into a digital vibration signal, and is inputted to a digital filter having a passing band of fc1 to fc2 [Hz]. If the vibration level of the vibration signal having passed through the digital filter exceeds a predetermined threshold value, it is detected that contact between the rotor portion and the stator portion has occurred in a turbo-molecular pump.

摘要翻译： 提供一种真空泵，其可精确地检测转子部分和定子部分之间的物理接触，以及转子部分和定子部分之间的接触，其随着沉积的固体产物的量达到转子部分和定子部分之间的间隙而发生 。 在螺纹槽间隔件的外周设有利用间隙的振动传感器。 当转子部分和定子部分之间的接触期间的特定振动超过预定阈值时，决定转子部分和定子部分之间的接触。 振动传感器安装在排气口侧端部的螺纹槽隔离件的外周上。 螺纹槽间隔件通过具有截止频率（fc1）的振动吸收（减振）功能的弹性部件（O形环）固定在壳体上。 从振动传感器输出的振动信号被转换为数字振动信号，并被输入到具有通过频带fc1至fc2 [Hz]的数字滤波器。 如果通过数字滤波器的振动信号的振动水平超过预定阈值，则检测到在涡轮分子泵中发生了转子部分和定子部分之间的接触。

公开(公告)号：US20090081056A1

公开(公告)日：2009-03-26

申请号：US12225041

申请日：2007-03-15

申请人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

发明人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

IPC分类号： F04D19/04 ,  F04D27/02 ,  F04D29/60 ,  F16L19/03

CPC分类号： F04D19/042 ,  F04D27/0292 ,  F04D29/522 ,  F04D29/601 ,  F04D29/644

摘要： To form a shock absorbing structure more easily.A shock absorbing structure for consuming shock energy is provided on the flange of a molecular pump. An insertion hole is provided in the flange, and a shock absorbing member formed by an independent and small part is fitted and fixed in this insertion hole. A bolt hole is provided to cause a bolt for fixing the flange and a vacuum vessel in the shock absorbing member to pass therethrough. The shock absorbing member is provided with a thin-wall portion by forming a cavity portion. In the case where a shock in the rotation direction of a rotor portion is produced in the molecular pump, for example, by fracture of the rotor portion, the flange slides in the rotation direction of the rotor portion together with the molecular pump. Thus, the bolt that fixes the flange to the flange of the vacuum pump hits the shock absorbing member, thereby the shock absorbing member is subjected to plastic deformation. By this plastic deformation of the shock absorbing member, the energy for rotating the molecular pump is consumed, so that a shock produced in the molecular pump can be absorbed.

摘要翻译： 更容易形成减震结构。 在分子泵的凸缘上设有用于消耗冲击能量的减震结构。 在凸缘中设置有插入孔，并且将由独立且小的部分形成的冲击吸收部件嵌合并固定在该插入孔中。 提供螺栓孔以使得用于固定凸缘的螺栓和冲击吸收构件中的真空容器通过。 冲击吸收构件通过形成空腔部分而设置有薄壁部分。 在分子泵中产生转子部分的旋转方向的冲击，例如通过转子部分的断裂，凸缘与分子泵一起在转子部分的旋转方向上滑动。 因此，将凸缘固定到真空泵的凸缘上的螺栓撞击减震构件，从而冲击吸收构件受到塑性变形。 通过冲击吸收构件的塑性变形，消耗了分子泵旋转的能量，从而可以吸收分子泵产生的冲击。

公开(公告)号：US20070031270A1

公开(公告)日：2007-02-08

申请号：US10571642

申请日：2004-08-27

申请人： Yasushi Maejima ,  Yutaka Inayoshi ,  Shinji Kawanishi ,  Kou Sakurai ,  Hiroyuki Suda ,  Takesi Akimoto

发明人： Yasushi Maejima ,  Yutaka Inayoshi ,  Shinji Kawanishi ,  Kou Sakurai ,  Hiroyuki Suda ,  Takesi Akimoto

IPC分类号： F04D19/04 ,  F04B17/00

CPC分类号： F04D19/042 ,  F04D19/04 ,  F04D29/266

摘要： Provided are a fixing structure for fixing a rotor to a rotor shaft, in which the contact state of the contact surfaces of the rotor shaft and the rotor is stabilized to thereby maintain the rotation balance of the rotor shaft and the rotor, making it possible to prevent oscillation, and a turbo molecular pump having such a fixing structure. On the outer peripheral portion of the upper surface of a fastening portion (253), there is concentrically formed a rotor shaft (213) side contact surface (257) to be brought into contact with a rotor (103). Further, in the inner periphery of the contact surface (257), there is formed a spot facing portion (259) whose upper surface is recessed from the contact surface (257). Thus, when the rotor shaft (213) is fastened to the rotor (103), there is formed, at the portion where the spot facing portion (259) is formed, a gap (265) which has a depth corresponding to the depth of the spot facing portion (259) and which is between the contact surface (187) of the rotor (103) and the spot facing portion (259).

摘要翻译： 提供了一种用于将转子固定到转子轴的固定结构，其中转子轴和转子的接触表面的接触状态稳定，从而保持转子轴和转子的旋转平衡，使得可以 防止振动，以及具有这种固定结构的涡轮分子泵。 在紧固部（253）的上表面的外周部上同心地形成与转子（103）接触的转子轴（213）侧接触面（257）。 此外，在接触面（257）的内周形成有上表面从接触面（257）凹陷的光斑对置部（259）。 因此，当转子轴（213）紧固到转子（103）时，在形成有点对面部分（259）的部分形成有与深度相对应的深度的间隙（265） 位于转子（103）的接触表面（187）和光斑对向部分（259）之间的光斑对置部分（259）。

公开(公告)号：US06854956B2

公开(公告)日：2005-02-15

申请号：US10387058

申请日：2003-03-12

申请人： Tooru Miwata ,  Satoshi Okudera ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima

发明人： Tooru Miwata ,  Satoshi Okudera ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima

IPC分类号： F04D19/04 ,  F04D27/02 ,  F04D29/52 ,  F04D29/60 ,  F16B2/06 ,  F16B5/06 ,  F01D1/36

CPC分类号： F04D19/042 ,  F04D27/0292 ,  F04D29/601

摘要： A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected together with fastening bolts. A clamping structure separately clamps the first and second flanges together by surrounding a portion of each of the first and second flanges.

摘要翻译： 涡轮分子泵具有主体和用于覆盖主体的泵壳体。 第一凸缘与泵壳一体地形成，用于与真空室一体地连接到第二凸缘。 泵壳的法兰和真空室的法兰通过紧固螺栓一体连接在一起。 夹持结构通过围绕第一和第二凸缘中的每一个的一部分而将第一和第二凸缘分别夹紧在一起。

公开(公告)号：US06824349B2

公开(公告)日：2004-11-30

申请号：US10294829

申请日：2002-11-14

申请人： Satoshi Okudera ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima

发明人： Satoshi Okudera ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima

IPC分类号： F04D1904

CPC分类号： F04D19/04 ,  F04D29/601

摘要： A vacuum pump is removably connected to the underside of a chamber for exhausting gas molecules from the chamber. The vacuum pump has a pump case having a flange extending circumferentially around a top portion thereof, a suction port and an exhaust port. Stator blades are fixedly mounted within the pump case, and a rotor is rotatably mounted in the pump case and has rotor blades alternately disposed with respect to the stator blades. A driving motor rotationally drives the rotor so that the rotating rotor blades coact with the stator blades to evacuate gas molecules from the chamber and pump the gas molecules from the suction port to the exhaust port. Bolt insertion holes are formed in the flange and each hole has a smaller diameter portion opening at a lower surface of the flange and a larger diameter portion opening at an upper surface of the flange which faces the underside of the chamber. Bolts extend through respective ones of the bolt insertion holes for removably connecting the flange of the pump case to the underside of the chamber, and buffer members are disposed in respective ones of the bolt insertion holes and surround at least a portion of the corresponding bolt in the region between the upper and lower surfaces of the flange.

摘要翻译： 真空泵可拆卸地连接到室的下侧，用于从室排出气体分子。 真空泵具有泵壳体，其具有围绕其顶部周向延伸的凸缘，吸入口和排气口。 定子叶片固定地安装在泵壳内，并且转子可旋转地安装在泵壳体中并具有相对于定子叶片交替设置的转子叶片。 驱动电动机旋转地驱动转子，使得旋转的转子叶片与定子叶片共同作用以从气室排出气体分子并将气体分子从吸入口泵送到排气口。 螺栓插入孔形成在凸缘中，并且每个孔在凸缘的下表面处具有较小的直径部分开口，并且在凸缘的上表面处面向腔室下侧的较大直径部分开口。 螺栓延伸通过相应的螺栓插入孔，用于将泵壳的凸缘可拆卸地连接到室的下侧，并且缓冲构件设置在相应的螺栓插入孔中并且围绕相应的螺栓的至少一部分 凸缘的上表面和下表面之间的区域。