公开(公告)号：US06349670B1

公开(公告)日：2002-02-26

申请号：US09442539

申请日：1999-11-18

申请人： Akira Nakano ,  Koichi Fukuda ,  Sung Chul Kim ,  Yasuhiko Kasama ,  Tadahiro Ohmi ,  Shoichi Ono

发明人： Akira Nakano ,  Koichi Fukuda ,  Sung Chul Kim ,  Yasuhiko Kasama ,  Tadahiro Ohmi ,  Shoichi Ono

IPC分类号： C23C1600

CPC分类号： H01J37/32082 ,  G01R1/06772 ,  G01R27/02 ,  H01J37/32935

摘要： The invention provides a plasma equipment which is advantageous in that the suscepter impedance is small, the dependence on the frequency is low, the power consumption efficiency is high, the film forming speed is faster as compared with conventional plasma equipment, and the film quality is high. Metal plates AC short between a chamber wall and a shield of an electrode of the same DC potential as the chamber.

摘要翻译： 本发明提供一种等离子体设备，其优点在于，与常规等离子体设备相比，阻抗较小，对频率的依赖性低，功耗效率高，成膜速度更快，膜质量 高。 金属板在室壁与与室相同的DC电位的电极的屏蔽之间交流短路。

公开(公告)号：US06270618B1

公开(公告)日：2001-08-07

申请号：US09205800

申请日：1998-12-04

申请人： Akira Nakano ,  Sung Chul Kim ,  Koichi Fukuda ,  Yasuhiko Kasama ,  Tadahiro Ohmi ,  Shoichi Ono

发明人： Akira Nakano ,  Sung Chul Kim ,  Koichi Fukuda ,  Yasuhiko Kasama ,  Tadahiro Ohmi ,  Shoichi Ono

IPC分类号： C23F102

CPC分类号： H01J37/32174 ,  C23C16/4405 ,  H01J37/32082

摘要： A plasma processing apparatus is provided which does not require replacement of a band eliminator according to a frequency used, which is capable of performing chamber cleaning without replacing a resonance circuit, and which is capable of performing plasma cleaning of the inside of the chamber without using a bellows. The plasma processing apparatus includes a resonance circuit (band eliminator) for causing series resonance with a microwave circuit formed of at least a susceptor electrode and a processing chamber in order to trap plasma between a plasma excitation electrode and the susceptor electrode when the surface of a workpiece placed on the susceptor electrode is processed by plasma generated between the plasma excitation electrode and the susceptor electrode, which are provided inside the processing chamber; and for causing parallel resonance with the microwave circuit in order to diffuse plasma inside the processing chamber when performing plasma cleaning.

摘要翻译： 提供一种等离子体处理装置，其不需要根据所使用的频率来更换带除器，其能够执行腔室清洁而不更换谐振电路，并且能够在不使用腔室内进行等离子体清洁室内 一个波纹管。 等离子体处理装置包括用于与由至少一个基座电极和一个处理室形成的微波电路进行串联谐振的谐振电路（去波器），以便在等离子体激发电极和基座电极之间捕获等离子体时 放置在基座电极上的工件通过设置在处理室内部的等离子体激发电极和基座电极之间产生的等离子体进行处理; 并且用于与微波电路并联谐振，以便在进行等离子体清洗时在等离子体清洗中扩散处理室内的等离子体。

公开(公告)号：US06155202A

公开(公告)日：2000-12-05

申请号：US199944

申请日：1998-11-25

申请人： Akira Nakano ,  Sung Chul Kim ,  Koichi Fukuda ,  Yasuhiro Takeda ,  Yasuhiko Kasama ,  Tadahiro Ohmi ,  Shoichi Ono

发明人： Akira Nakano ,  Sung Chul Kim ,  Koichi Fukuda ,  Yasuhiro Takeda ,  Yasuhiko Kasama ,  Tadahiro Ohmi ,  Shoichi Ono

IPC分类号： H01J37/32 ,  C23C16/00 ,  H01J7/24 ,  H01J21/00

CPC分类号： H01J37/32082 ,  H01J37/32183

摘要： In a plasma processing apparatus, in a matching circuit intervening between a high-frequency power source and a plasma excitation electrode for achieving impedance matching between the high-frequency power source and the plasma excitation electrode, one of the two electrodes which form a tuning capacitor also serves as the plasma excitation electrode. Alternatively, in a plasma processing apparatus, the side wall of a housing made from an electrically conductive member and accommodating a matching circuit intervening between a high-frequency power source and a plasma excitation electrode for achieving impedance matching between the high-frequency power source and the plasma excitation electrode and a feeder for supplying high-frequency electric power from the high-frequency power source to the plasma excitation electrode through the matching circuit is formed not in parallel to the feeder.

摘要翻译： 在等离子体处理装置中，在高频电源和等离子体激励电极之间插入用于实现高频电源和等离子体激励电极之间的阻抗匹配的匹配电路中，形成调谐电容器的两个电极之一 也用作等离子体激发电极。 或者，在等离子体处理装置中，由导电构件制成的壳体的侧壁，并且容纳插入在高频电源和等离子体激励电极之间的匹配电路，以实现高频电源与高频电源之间的阻抗匹配 等离子体激励电极和用于通过匹配电路从高频电源向等离子体激励电极提供高频电力的馈线形成为不与馈线并联。

公开(公告)号：US06452408B1

公开(公告)日：2002-09-17

申请号：US09843062

申请日：2001-04-26

申请人： Akira Nakano ,  Koichi Fukuda ,  Tadahiro Ohmi ,  Shoichi Ono

发明人： Akira Nakano ,  Koichi Fukuda ,  Tadahiro Ohmi ,  Shoichi Ono

IPC分类号： G01R3122

CPC分类号： H01J37/32082

摘要： The invention provides a plasma equipment which is advantageous in that the suscepter impedance is small, the dependence on the frequency is low, the power consumption efficiency is high, the film forming speed is faster as compared with conventional plasma equipment, and the film quality is high. Metal plates AC short between a chamber wall and a shield of an electrode of the same DC potential as the chamber.

摘要翻译： 本发明提供一种等离子体设备，其优点在于，与常规等离子体设备相比，阻抗较小，对频率的依赖性低，功耗效率高，成膜速度更快，膜质量 高。 金属板在室壁与与室相同的DC电位的电极的屏蔽之间交流短路。

公开(公告)号：US5089483A

公开(公告)日：1992-02-18

申请号：US468128

申请日：1990-01-22

申请人： Kenji Tsuda ,  Shoichi Ono

发明人： Kenji Tsuda ,  Shoichi Ono

IPC分类号： A01N55/08 ,  A01N33/04 ,  A01N59/14 ,  B27K3/34 ,  B27K3/52

CPC分类号： B27K3/36 ,  A01N33/04 ,  A01N59/14 ,  B27K3/52 ,  Y10S424/11

摘要： The antidecay and antitermite agent for timber of the invention contains alkyldimethylamine tetraborate as an effective component; the compound can be applied as it is or in a form of preparation to the sites where termites are generated, termitoria, construction members such as pillars, buildings and soils surrounding the buildings, waterproof sheets, paving materials and covering materials for wires or cables or the like by such means as painting, blowing, soaking, injecting, spraying, mixing and kneading.

摘要翻译： 本发明的木材的防干燥剂和抗微生物剂含有作为有效成分的烷基二甲基胺四硼酸盐; 该化合物可以原样应用或以制备形式施用于生成白蚁的位置，术语，建筑物，建筑物，建筑物周围的建筑物和建筑物周围的土壤，防水片材，铺路材料和电线或电缆的覆盖材料，或 通过喷涂，吹塑，浸泡，喷射，喷雾，混合和捏合等方式进行。

公开(公告)号：US4988956A

公开(公告)日：1991-01-29

申请号：US427473

申请日：1989-10-27

申请人： Shoichi Ono ,  Kuniyoshi Yokoo ,  Tadashi Okamoto

发明人： Shoichi Ono ,  Kuniyoshi Yokoo ,  Tadashi Okamoto

IPC分类号： H01J23/18 ,  H01J23/20 ,  H01J23/26 ,  H01J25/02

CPC分类号： H01J25/025

摘要： In a peniotron, a hollow electron beam is generated from a cathode gun assembly and a DC magnetic field is applied to the electron beam from solenoid coils. Thus, each electron of the electron beam is gyrated into a resonant cavity and into propagating waveguide sections which are maintained in auto-resonant conditions so that the electrons interact with an electromagnetic waves of TE mode not only in the resonant cavity section but also in a waveguide section. Accordingly, the electromagnetic wave is oscillated in the resonant waveguide section and amplified in the propagating waveguide section in such a manner that the level of the electromagnetic wave in the resonant cavity section is far less than the output power from said propagating waveguide.

公开(公告)号：US4389165A

公开(公告)日：1983-06-21

申请号：US190913

申请日：1980-09-26

申请人： Shoichi Ono ,  Kuniyoshi Yokoo

发明人： Shoichi Ono ,  Kuniyoshi Yokoo

IPC分类号： H01J41/12 ,  H01J41/20 ,  F04B37/02

CPC分类号： H01J41/20

摘要： An ion pump for producing an ultrahigh degree of vacuum comprising a space formed between a first perforated flat plate-shaped electrode and a second flat plate-shaped electrode and having a high frequency electric source connected between the first and second electrodes, said space being operative to induce multipactor effect between said first and second electrodes, and an ionization space adjacent to one of said first and second electrodes and formed between a first perforated getter electrode and a second getter electrode applied with a negative potential, said ionization space being operative to cause the moving electrons produced by the multipactor effect to collide with gas molecules and ionize the latter.

摘要翻译： 一种用于产生超高真空度的离子泵，包括形成在第一穿孔平板状电极和第二平板状电极之间并且具有连接在第一和第二电极之间的高频电源的空间，所述空间是可操作的 以在所述第一和第二电极之间诱导多反应器效应，以及与所述第一和第二电极之一相邻的电离空间，并形成在施加有负电位的第一穿孔吸气剂电极和第二吸气剂电极之间，所述电离空间可操作地引起 由多反应器产生的运动电子效应与气体分子碰撞并使其离子化。

公开(公告)号：US07523524B2

公开(公告)日：2009-04-28

申请号：US10650393

申请日：2003-08-27

申请人： Kenichi Mitsumori ,  Yasuhiko Kasama ,  Nobuaki Haga ,  Shoichi Ono ,  Junichiro Soejima ,  Norihisa Takahashi ,  Akio Fujie ,  Mineo Iwasaki

发明人： Kenichi Mitsumori ,  Yasuhiko Kasama ,  Nobuaki Haga ,  Shoichi Ono ,  Junichiro Soejima ,  Norihisa Takahashi ,  Akio Fujie ,  Mineo Iwasaki

IPC分类号： B08B5/04

CPC分类号： H01L21/67057 ,  B08B3/12 ,  H01L21/67051

摘要： A second housing whose center portion is depressed and whose end portion around the center portion is formed like a visor is arranged around a first housing whose center portion is depressed and whose end portion around the center portion is formed like a visor, and a hollow portion is formed between the first housing and the second housing by sandwiching a packing between the end portions of the housings. Further, degassed water for preventing empty heating is filled in the hollow portion, and an ultrasonic transducer is placed on the surface of the center portion of the first housing. A weight for preventing the vibration of the wall is provided on the wall surface of the second housing. Since the vibration of the wall of the housing is suppressed by the weight, vibration energy returns toward the bottom surface of the center of the housing through water and is radiated from the bottom surface efficiently as ultrasonic waves.

摘要翻译： 中心部分被压下并且其中心部分的端部形成为遮阳板的第二壳体围绕中心部分被压下并且其中心部分周围的端部形成为遮阳板的第一壳体布置，并且中空部分 通过在壳体的端部之间夹住填料而形成在第一壳体和第二壳体之间。 此外，用于防止空加热的脱气水填充在中空部分中，并且超声换能器被放置在第一壳体的中心部分的表面上。 用于防止壁的振动的重量设置在第二壳体的壁表面上。 由于壳体的壁的振动受到重量的抑制，振动能量通过水返回到壳体中心的底面，并且作为超声波有效地从底面辐射。

公开(公告)号：US5946969A

公开(公告)日：1999-09-07

申请号：US68991

申请日：1998-05-26

申请人： Mutsuo Munekata ,  Susumu Matsuno ,  Shoichi Ono ,  Koji Kawasaki ,  Kokichi Uzawa ,  Hiroshi Kinugawa

发明人： Mutsuo Munekata ,  Susumu Matsuno ,  Shoichi Ono ,  Koji Kawasaki ,  Kokichi Uzawa ,  Hiroshi Kinugawa

IPC分类号： H01L41/09 ,  F16H21/44

CPC分类号： H02N2/043 ,  Y10T74/18992

摘要： The invention provides a lever displacement enlarging mechanism which is applicable for a positioning apparatus of an optical stage, is provided with bisymmetrical levers enlarging and transmitting a displacing force of an actuator element, and in which the distance between the leading end sides of boundary grooves and outer edges of coupling posts is smaller than that between the trailing end sides thereof and the outer edges and action point hinges are located closer to the axis of symmetry so that the fulcrum hinges and the force point hinges are closer to the outer edges of the coupling posts.

摘要翻译： PCT No.PCT / JP96 / 02823 Sec。 371日期：1998年5月26日 102（e）日期1998年5月26日PCT提交1996年9月27日PCT公布。 出版物WO98 / 日期：1998年4月2日本发明提供了一种适用于光学平台的定位装置的杠杆位移放大机构，其具有放大并传递致动器元件的移动力的双对称杆，其中前端 边界槽的边缘和连接柱的外边缘小于其后端之间，并且外边缘和动作点铰链位于更靠近对称轴线处，使得支点铰链和力点铰链更靠近 连接柱的外边缘。

公开(公告)号：US5705224A

公开(公告)日：1998-01-06

申请号：US393821

申请日：1995-01-31

申请人： Junichi Murota ,  Shoichi Ono ,  Masao Sakuraba ,  Nobuo Mikoshiba ,  Harushige Kurokawa ,  Fumihide Ikeda

发明人： Junichi Murota ,  Shoichi Ono ,  Masao Sakuraba ,  Nobuo Mikoshiba ,  Harushige Kurokawa ,  Fumihide Ikeda

IPC分类号： C23C16/48 ,  C30B25/10 ,  C30B23/00 ,  C23C16/00

CPC分类号： C30B25/105 ,  C23C16/482 ,  C30B29/08

摘要： A vapor deposition apparatus and method in which pulse waveform light is applied to a sample sealed in a reaction chamber. The sample is exposed to gaseous material while the pulse waveform light is applied creating one or plural atomic layers. Alternate layers of plural substances or alternate multiple layers of plural substances can be formed by alternating the introduction of gaseous materials with the application of pulse waveform light.

摘要翻译： 一种气相沉积设备和方法，其中脉冲波形光被施加到密封在反应室中的样品。 样品暴露于气体材料，同时施加脉冲波形光产生一个或多个原子层。 可以通过施加脉冲波形光交替引入气态材料来形成多个物质的交替层或多个物质的交替多层。