摘要:
A vapor deposition apparatus and method in which pulse waveform light is applied to a sample sealed in a reaction chamber. The sample is exposed to gaseous material while the pulse waveform light is applied creating one or plural atomic layers. Alternate layers of plural substances or alternate multiple layers of plural substances can be formed by alternating the introduction of gaseous materials with the application of pulse waveform light.
摘要:
A depletion operation is realized by using a depletion type MOSFET even at the room temperature or the liquid nitrogen temperature without doping the channel portion below the gate electrode with impurities having a conductivity type, which is opposite to the conductivity type of the semiconductor substrate. Further this FET can construct an inverter together with an enhancement type FET and these can be integrated on one substrate.
摘要:
A scanning type tunnel microscope comprises a sample holding member for supporting a sample and a scanning probe which is arranged to face the sample to be separated therefrom by a very small distance and a supported by a scanning probe holding member. A tunnel current is flowed between the sample and scanning probe upon application of a voltage thereacross. A first actuator is coupled to the sample holding member and a second actuator is coupled to the scanning probe holding member so that the first and second actuators relatively drive said sample and said scanning probe in an axial direction and in a planar direction through said sample holding member and said scanning probe holding member. A differential micrometer is connected to the first actuator to move the actuator in the axial direction, and the micrometer and the second actuator are fixed on a substrate.
摘要:
An acoustic surface wave device includes a substrate made of an elastic material, a multilayer structure disposed on a surface of the substrate and having a silicon dioxide layer and an aluminum nitride layer superimposed on each other, and electrodes having predetermined configurations formed on the multilayer structure. The main component of the elastic material is a silicon monocrystal, whose temperature coefficient of delay time for acoustic surface waves is positive, and the piezo-electric axis of the aluminum nitride is either perpendicular or parallel to the surface of the substrate, with a negative delay coefficient, counteracting that of the substrate.
摘要:
By providing a deposited film formation method in which aluminum or a metal composed mainly of aluminum of good quality is selectively deposited according to the CVD method utilizing an alkyl aluminum hydride and hydrogen, and then pure aluminum or a metal composed mainly of aluminum is non-selectively deposited, it becomes possible to form an electroconductive film of good quality within fine openings or on an insulating layer.
摘要:
A bias voltage U.sub.B including a sine-wave voltage U.sub.T sin.omega. .sub.o t and an off-set voltage U.sub.REG is applied to an electrode on a sample. A potential U.sub.1 of the electrode is represented by: U.sub.1 =U.sub.REG +U.sub.T sin.omega. .sub.o t. A voltage including the bias voltage U.sub.B and a voltage .DELTA.U is applied to an electrode on the sample. A probe is approached to the sample by several nm, and a tunnel current I.sub.T flows therebetween. And the probe scans the surface of the sample. During the scan, the position of the probe is servo-controlled in the z-direction, to make constant the average absolute value of the tunnel current. The servo voltage is recorded thereby obtaining an STM image. Given that the potential difference between the electrode and a surface portion facing the probe is U.sub.S (x), the average of U.sub.1 +U.sub.S (x) becomes zero when the average of the tunnel current I.sub.T is zero. Accordingly, =0, that is, U.sub.S (x)=-U.sub.REG. Thus, by recording-U.sub.REG the potential distribution U.sub.S (x) on the sample surface is determined. Spectroscopic data is obtained by an analog operation unit, on the basis of a differential conductance .differential.I.sub.T /.differential.U.sub.T calculated from the tunnel current signal I.sub.T and the bias voltage U.sub.T.
摘要:
By providing a deposited film formation method in which aluminum or a metal composed mainly of aluminum of good quality is selectively deposited according to the CVD method utilizing an alkyl aluminum hydride and hydrogen, and then pure aluminum or a metal composed mainly of aluminum is non-selectively deposited, it becomes possible to form an electroconductive film of good quality within fine openings or on an insulating layer.
摘要:
A deposited film formation method which forms an aluminum film by use of the plasma CVD method,wherein a substrate having an electron donative surface (A) and a non-electron donative surface (B) is arranged in a space for deposited film formation having a portion which is increased in cross-sectional area toward said substrate is arranged, and a gas of trimethylaluminum and hydrogen gas are introduced into said space for deposited film formation to deposit an aluminum film selectively on said electron donative surface (A).A deposited film formation method which forms an aluminum film by use of the plasma CVD method, comprising:(a) the step of arranging a substrate having an electron donative surface (a) and a non-electron donative surface (B) in a space for deposited film formation equipped with a reverse flow preventive means into plasma, and(b) the step of introducing a gas of trimethylaluminum and hydrogen gas into said space for deposited film formation, said aluminum film being selectively formed on said electron donative surface (A).
摘要:
A crystal defect analyzer comprises acousto-electric transducer means disposed in close adherence to a sample to be analyzed through the medium of a filter layer which functions to intercept light or electrons or particles emitted from said excitation means and to transmit only acoustic waves produced within said sample by excitation, thereby it can attain higher response and sensitivity, smaller size, higher resistance to vibration and superior operationality.
摘要:
A frequency selector apparatus which effects a frequency selection by providing at least one reflecting electrode at a position adjacent elastic surface wave transducer or transducers provided in an acoustic wave propagation track in a piezoelectric medium so as to reflect a frequency component selected by a parametric interaction with an a.c. electrical signal applied to said reflecting electrode.