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1.发明申请Methods and Structures for Rapid Switching Between Different Process Gases in an Inductively-Coupled Plasma (ICP) Ion Source 有权在电感耦合等离子体（ICP）离子源中不同工艺气体之间快速切换的方法和结构公开(公告)号：US20130015765A1
公开(公告)日：2013-01-17
申请号：US13182187
申请日：2011-07-13
IPC分类号： H05H1/46
CPC分类号： H01J37/3002 , H01J37/08 , H01J37/18 , H01J2237/006 , H01J2237/08 , H01J2237/0827
摘要： An openable gas passage provides for rapid pumpout of process or bake out gases in an inductively coupled plasma source in a charged particle beam system. A valve, typically positioned in the source electrode or part of the gas inlet, increases the gas conductance when opened to pump out the plasma chamber and closes during operation of the plasma source.
摘要翻译： 可打开的气体通道提供在带电粒子束系统中的电感耦合等离子体源中快速抽出工艺或烘烤气体。 通常定位在源电极或气体入口的一部分中的阀在打开时增加气体导电性，以便在等离子体源的操作期间泵出等离子体室并关闭。
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公开(公告)号：US08928210B2
公开(公告)日：2015-01-06
申请号：US13307830
申请日：2011-11-30
申请人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
发明人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
IPC分类号： H01J1/02
摘要： An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.
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公开(公告)号：US08759764B2
公开(公告)日：2014-06-24
申请号：US13538851
申请日：2012-06-29
IPC分类号： H01J37/256
CPC分类号： H01J37/256 , H01J37/244 , H01J37/28 , H01J2237/2448
摘要： A split grid multi-channel secondary particle detector for a charged particle beam system includes a first grid segment and a second grid segment, each having independent bias voltages creating an electric field such that the on-axis secondary particles that are emitted from the target are directed to one of the grids. The bias voltages of the grids can be changed or reversed so that each grid can be used to detect the secondary particles and the multi-channel particle detector as a whole can extend its lifetime.
摘要翻译： 用于带电粒子束系统的分裂网格多通道二次粒子检测器包括第一栅格区段和第二栅极区段，每个区段具有独立的偏置电压，从而产生电场，使得从靶发射的轴上二次颗粒为 指向其中一个网格。 网格的偏置电压可以改变或反转，以便每个网格可以用于检测次级粒子，并且多通道粒子检测器作为一个整体可以延长其寿命。
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公开(公告)号：US09053895B2
公开(公告)日：2015-06-09
申请号：US13307830
申请日：2011-11-30
申请人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
发明人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
CPC分类号： H01J37/32605 , H01J9/02 , H01J27/16 , H01J37/04 , H01J37/08 , H01J2237/032
摘要： An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.
摘要翻译： 用于聚焦离子束系统的电感耦合等离子体带电粒子源包括具有可拆卸地附接的源电极的等离子体反应室。 紧固机构将源电极与等离子体反应室连接，并形成导热的真空密封。 使用可移动的源电极，现在可以提高等离子体源管的可用性和再利用。
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公开(公告)号：US08987678B2
公开(公告)日：2015-03-24
申请号：US13437599
申请日：2012-04-02
CPC分类号： H01J27/16 , H01J37/08 , H01J37/321 , H01J2237/002 , H01J2237/061 , H01J2237/0817 , H01J2237/31749 , H05H1/28 , H05H1/30 , H05H1/46 , H05H2001/4652 , H05H2001/4682
摘要： An inductively-coupled plasma source for a focused charged particle beam system includes a conductive shield that provides improved electrical isolation and reduced capacitive RF coupling and a dielectric fluid that insulates and cools the plasma chamber. The conductive shield may be enclosed in a solid dielectric media. The dielectric fluid may be circulated by a pump or not circulated by a pump. A heat tube can be used to cool the dielectric fluid.
摘要翻译： 用于聚焦带电粒子束系统的电感耦合等离子体源包括提供改进的电隔离和减小的电容RF耦合的导电屏蔽以及绝缘和冷却等离子体室的介电流体。 导电屏蔽可以封闭在固体电介质中。 电介质流体可以由泵循环或不被泵循环。 热管可用于冷却介电流体。
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6.发明申请Encapsulation of Electrodes in Solid Media for use in conjunction with Fluid High Voltage Isolation 审中-公开固体介质中的电极封装，与流体高压隔离结合使用公开(公告)号：US20120261587A1
公开(公告)日：2012-10-18
申请号：US13437599
申请日：2012-04-02
IPC分类号： G21K5/04
CPC分类号： H01J27/16 , H01J37/08 , H01J37/321 , H01J2237/002 , H01J2237/061 , H01J2237/0817 , H01J2237/31749 , H05H1/28 , H05H1/30 , H05H1/46 , H05H2001/4652 , H05H2001/4682
摘要： An inductively-coupled plasma source for a focused charged particle beam system includes a conductive shield that provides improved electrical isolation and reduced capacitive RF coupling and a dielectric fluid that insulates and cools the plasma chamber. The conductive shield may be enclosed in a solid dielectric media. The dielectric fluid may be circulated by a pump or not circulated by a pump. A heat tube can be used to cool the dielectric fluid.
摘要翻译： 用于聚焦带电粒子束系统的电感耦合等离子体源包括提供改进的电隔离和减小的电容RF耦合的导电屏蔽以及绝缘和冷却等离子体室的介电流体。 导电屏蔽可以封闭在固体电介质中。 电介质流体可以由泵循环或不被泵循环。 热管可用于冷却介电流体。
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7.发明授权Encapsulation of electrodes in solid media for use in conjunction with fluid high voltage isolation 有权固体介质中的电极封装，与流体高压隔离结合使用公开(公告)号：US08642974B2
公开(公告)日：2014-02-04
申请号：US13165556
申请日：2011-06-21
申请人： Sean Kellogg , Andrew B. Wells , James B. McGinn , N. William Parker , Mark W. Utlaut , Anthony Graupera
发明人： Sean Kellogg , Andrew B. Wells , James B. McGinn , N. William Parker , Mark W. Utlaut , Anthony Graupera
IPC分类号： H01J3/14
CPC分类号： H05H1/24 , H01J27/16 , H01J37/08 , H01J37/321 , H01J2237/002 , H01J2237/061 , H01J2237/0817 , H01J2237/31749 , H05H1/46 , H05H2001/4652
摘要： An inductively-coupled plasma source for a focused charged particle beam system includes a conductive shield that provides improved electrical isolation and reduced capacitive RF coupling and a dielectric fluid that insulates and cools the plasma chamber. The conductive shield may be enclosed in a solid dielectric media. The dielectric fluid may be circulated by a pump or not circulated by a pump. A heat tube can be used to cool the dielectric fluid.
摘要翻译： 用于聚焦带电粒子束系统的电感耦合等离子体源包括提供改进的电隔离和减小的电容RF耦合的导电屏蔽以及绝缘和冷却等离子体室的介电流体。 导电屏蔽可以封闭在固体电介质中。 电介质流体可以由泵循环或不被泵循环。 热管可用于冷却介电流体。
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8.发明授权Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion source 有权在电感耦合等离子体（ICP）离子源中不同工艺气体之间快速切换的方法和结构公开(公告)号：US08633452B2
公开(公告)日：2014-01-21
申请号：US13182187
申请日：2011-07-13
IPC分类号： H01J27/00
CPC分类号： H01J37/3002 , H01J37/08 , H01J37/18 , H01J2237/006 , H01J2237/08 , H01J2237/0827
摘要： An openable gas passage provides for rapid pumpout of process or bake out gases in an inductively coupled plasma source in a charged particle beam system. A valve, typically positioned in the source electrode or part of the gas inlet, increases the gas conductance when opened to pump out the plasma chamber and closes during operation of the plasma source.
摘要翻译： 可打开的气体通道提供在带电粒子束系统中的电感耦合等离子体源中快速抽出工艺或烘烤气体。 通常定位在源电极或气体入口的一部分中的阀在打开时增加气体导电性，以便在等离子体源的操作期间泵出等离子体室并关闭。
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9.发明申请System for Attachment of an Electrode into an Inductively Coupled Plasma Source 有权将电极连接到电感耦合等离子体源的系统公开(公告)号：US20130134855A1
公开(公告)日：2013-05-30
申请号：US13307830
申请日：2011-11-30
申请人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
发明人： Sean Kellogg , Anthony Graupera , N. William Parker , Andrew B. Wells , Mark W. Utlaut , Walter Skoczylas , Gregory A. Schwind , Shouyin Zhang , Noel Smith
CPC分类号： H01J37/32605 , H01J9/02 , H01J27/16 , H01J37/04 , H01J37/08 , H01J2237/032
摘要： An inductively coupled plasma charged particle source for focused ion beam systems includes a plasma reaction chamber with a removably attached source electrode. A fastening mechanism connects the source electrode with the plasma reaction chamber and allows for a heat-conductive, vacuum seal to form. With a removable source electrode, improved serviceability and reuse of the plasma source tube are now possible.
摘要翻译： 用于聚焦离子束系统的电感耦合等离子体带电粒子源包括具有可拆卸地附接的源电极的等离子体反应室。 紧固机构将源电极与等离子体反应室连接，并形成导热的真空密封。 使用可移动的源电极，现在可以提高等离子体源管的可用性和再利用。
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公开(公告)号：US20140001357A1
公开(公告)日：2014-01-02
申请号：US13538851
申请日：2012-06-29
IPC分类号： H01J37/26
CPC分类号： H01J37/256 , H01J37/244 , H01J37/28 , H01J2237/2448
摘要： A split grid multi-channel secondary particle detector for a charged particle beam system includes a first grid segment and a second grid segment, each having independent bias voltages creating an electric field such that the on-axis secondary particles that are emitted from the target are directed to one of the grids. The bias voltages of the grids can be changed or reversed so that each grid can be used to detect the secondary particles and the multi-channel particle detector as a whole can extend its lifetime.
摘要翻译： 用于带电粒子束系统的分裂网格多通道二次粒子检测器包括第一栅格区段和第二栅极区段，每个区段具有独立的偏置电压，从而产生电场，使得从靶发射的轴上二次颗粒为 指向其中一个网格。 网格的偏置电压可以改变或反转，以便每个网格可以用于检测次级粒子，并且多通道粒子检测器作为一个整体可以延长其寿命。
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