公开(公告)号：US20070122929A1

公开(公告)日：2007-05-31

申请号：US10500196

申请日：2002-12-17

申请人： Bernard Diem ,  Stephane Caplet ,  Marie-Therese Delaye

发明人： Bernard Diem ,  Stephane Caplet ,  Marie-Therese Delaye

IPC分类号： H01L21/00

CPC分类号： B81B7/0077

摘要： The invention concerns a sealing zone between two microstructure substrates. Said sealing zone comprises at least the following parts: on a first wafer level (20), a lower edging (22A) made of an adhesive material capable of causing the first substrate (20) to adhere to a sealing material, said sealing material being adapted to spontaneously diffuse jointly with the material of the second wafer level (30); on said lower edging (22A), a layer of said sealing material; and on said layer of sealing material, a protuberance (36) formed on said second wafer level (30) containing a certain amount of sealing material. The invention is applicable to microstructures comprising vacuum-operated components.

摘要翻译： 本发明涉及两个微结构基片之间的密封区。 所述密封区至少包括以下部分：在第一晶片级（20）上，由能够使第一基板（20）粘附到密封材料上的粘合材料制成的下边缘（22A），所述密封材料 适于与第二晶片级（30）的材料共同扩散; 在所述下边缘（22A）上形成一层所述密封材料; 并且在所述密封材料层上形成有包含一定量的密封材料的所述第二晶片级（30）上的突起（36）。 本发明适用于包括真空操作部件的微结构。

公开(公告)号：US5912499A

公开(公告)日：1999-06-15

申请号：US579063

申请日：1995-12-22

申请人： Bernard Diem ,  Marie-Therese Delaye

发明人： Bernard Diem ,  Marie-Therese Delaye

IPC分类号： G01L9/04 ,  B81B3/00 ,  G01L9/00 ,  G01L9/12 ,  H01L29/84 ,  H01L29/82

CPC分类号： B81C1/00158 ,  G01L9/0042 ,  G01L9/0055 ,  G01L9/0073 ,  B81B2201/0264 ,  Y10S148/135 ,  Y10S148/159

摘要： An integrated pressure sensitive transducer incorporating a pressure sensitive structure having a silicon substrate, and at least one monocrystalline silicon diaphragm deformable in a direction perpendicular to the substrate. The diaphragm, which is joined to the substrate at its periphery by means of an etched insulating layer, has a centered insulating stud which bears on the substrate in order to increase the rigidity of the diaphragm. Completing the transducer and for measuring the deformation of the diaphragm is at least one first electrode located in the substrate facing a high deformation region of the diaphragm and remote from the periphery of the diaphragm and the insulating stud, and at least one second electrode facing at least one low deformation region of the diaphragm and in the vicinity of the periphery and/or the insulating stud.

摘要翻译： 一种集成压敏传感器，其包括具有硅衬底的压敏结构，以及至少一个在垂直于衬底的方向上可变形的单晶硅膜片。 通过蚀刻绝缘层在其周边连接到基板的隔膜具有承载在基板上的中心绝缘柱，以增加隔膜的刚性。 完成传感器并测量隔膜的变形是至少一个位于基板中的第一电极，该第一电极面对隔膜的高变形区域并且远离隔膜和绝缘支柱的周边，以及至少一个第二电极 膜片的至少一个低变形区域和周边附近和/或绝缘柱。

公开(公告)号：US5780885A

公开(公告)日：1998-07-14

申请号：US698066

申请日：1996-08-15

申请人： Bernard Diem ,  Marie-Therese Delaye

发明人： Bernard Diem ,  Marie-Therese Delaye

IPC分类号： G01P15/125 ,  B81B3/00 ,  G01P15/08 ,  G01P15/13 ,  H01L21/306 ,  H01L29/84 ,  H01L29/82

CPC分类号： B81C1/0015 ,  B81B3/0051 ,  G01P15/0802 ,  B81B2201/0235 ,  B81B2203/0109 ,  B81B2203/053 ,  B81C2201/0166 ,  B81C2201/0177 ,  G01P2015/0814 ,  G01P2015/0828 ,  Y10S73/01 ,  Y10S73/04

摘要： Process for the production of accelerometers using the silicon on insulator method. The process comprises the following stages: a) producing a conductive monocrystalline silicon film on a silicon substrate and separated from the latter by an insulating layer; b) etching the silicon film and the insulating layer up to the substrate in order to fix the shape of the mobile elements and the measuring device; c) producing electric contacts for the measuring devices; d) partial elimination of the insulating layer in order to free the mobile elements, the remainder of the insulating layer rendering integral the substrate and the moving elements.

摘要翻译： 使用绝缘体上硅法生产加速度计的方法。 该方法包括以下步骤：a）在硅衬底上制造导电单晶硅膜，并通过绝缘层与其分离; b）将硅膜和绝缘层刻蚀直到基板，以固定移动元件和测量装置的形状; c）产生用于测量装置的电触头; d）绝缘层的部分消除以便移动移动元件，绝缘层的其余部分使基板和移动元件成为一体。

公开(公告)号：US5510276A

公开(公告)日：1996-04-23

申请号：US167503

申请日：1993-12-15

申请人： Bernard Diem ,  Marie-Therese Delaye

发明人： Bernard Diem ,  Marie-Therese Delaye

IPC分类号： G01L9/04 ,  B81B3/00 ,  G01L9/00 ,  G01L9/12 ,  H01L29/84 ,  H01L21/265 ,  H01L21/74 ,  H01L21/764

CPC分类号： B81C1/00158 ,  G01L9/0042 ,  G01L9/0055 ,  G01L9/0073 ,  B81B2201/0264 ,  Y10S148/135 ,  Y10S148/159

摘要： A process for producing a pressure transducer or sensor using the silicon-on-insulator method is provided. The process includes the following steps: (a) producing a monocrystalline silicon film (44) on a silicon substrate (6) at least locally separated from the latter by an insulating layer (42), (b) producing an opening (24) in the silicon film down to the insulating layer, (c) partially eliminating the insulating layer via the opening in order to form the diaphragm in the silicon film, and (d) resealing the opening (26).

摘要翻译： 提供了使用绝缘体上硅法制造压力传感器或传感器的方法。 该方法包括以下步骤：（a）通过绝缘层（42）至少局部地与硅衬底（6）局部分离，在硅衬底（6）上产生单晶硅膜（44），（b）产生开口 所述硅膜向下延伸至所述绝缘层，（c）通过所述开口部分地去除所述绝缘层，以便在所述硅膜中形成所述隔膜，以及（d）重新密封所述开口（26）。

公开(公告)号：US5576250A

公开(公告)日：1996-11-19

申请号：US172827

申请日：1993-12-27

申请人： Bernard Diem ,  Marie-Therese Delaye

发明人： Bernard Diem ,  Marie-Therese Delaye

IPC分类号： G01P15/125 ,  B81B3/00 ,  G01P15/08 ,  G01P15/13 ,  H01L21/306 ,  H01L29/84 ,  H01L21/465

CPC分类号： B81C1/0015 ,  B81B3/0051 ,  G01P15/0802 ,  B81B2201/0235 ,  B81B2203/0109 ,  B81B2203/053 ,  B81C2201/0166 ,  B81C2201/0177 ,  G01P2015/0814 ,  G01P2015/0828 ,  Y10S73/01 ,  Y10S73/04

摘要： A process for the production of accelerometers using the silicon on insulator method. The process comprises the following stages: a) producing a conductive monocrystalline silicon film on a silicon substrate and separated from the latter by an insulating layer; b) etching the silicon film and the insulating layer up to the substrate in order to fix the shape of the mobile elements and the measuring devices; c) producing electric contacts for the measuring devices; d) partial elimination of the insulating layer in order to free the mobile elements, the remainder of the insulating layer rendering integral the substrate and the moving elements.

摘要翻译： 使用绝缘体上的方法生产加速度计的方法。 该方法包括以下步骤：a）在硅衬底上制造导电单晶硅膜，并通过绝缘层与其分离; b）将硅膜和绝缘层蚀刻直到基板，以固定移动元件和测量装置的形状; c）产生用于测量装置的电触头; d）绝缘层的部分消除以便移动移动元件，绝缘层的其余部分使基板和移动元件成为一体。

公开(公告)号：US07700457B2

公开(公告)日：2010-04-20

申请号：US10500196

申请日：2002-12-17

申请人： Bernard Diem ,  Stephane Caplet ,  Marie-Thérèse Delaye

发明人： Bernard Diem ,  Stephane Caplet ,  Marie-Thérèse Delaye

IPC分类号： H01L21/30

CPC分类号： B81B7/0077

摘要： The invention concerns a sealing zone between two microstructure substrates. Said sealing zone comprises at least the following parts: on a first wafer level (20), a lower edging (22A) made of an adhesive material capable of causing the first substrate (20) to adhere to a sealing material, said sealing material being adapted to spontaneously diffuse jointly with the material of the second wafer level (30); on said lower edging (22A), a layer of said sealing material; and on said layer of sealing material, a protuberance (36) formed on said second wafer level (30) containing a certain amount of sealing material. The invention is applicable to microstructures comprising vacuum-operated components.

摘要翻译： 本发明涉及两个微结构基片之间的密封区。 所述密封区域至少包括以下部分：在第一晶片级（20）上，由能够使第一基板（20）粘附到密封材料上的粘合剂材料制成的下边缘（22A），所述密封材料 适于与第二晶片级（30）的材料共同扩散; 在所述下边缘（22A）上形成一层所述密封材料; 并且在所述密封材料层上形成有包含一定量的密封材料的所述第二晶片级（30）上的突起（36）。 本发明适用于包括真空操作部件的微结构。

公开(公告)号：US09448070B2

公开(公告)日：2016-09-20

申请号：US13459618

申请日：2012-04-30

申请人： Arnaud Walther ,  Bernard Diem ,  Philippe Robert ,  Jerome Willemin

发明人： Arnaud Walther ,  Bernard Diem ,  Philippe Robert ,  Jerome Willemin

IPC分类号： G01C19/56 ,  G01C19/5762 ,  G01C19/5712

CPC分类号： G01C19/5762 ,  G01C19/5712

摘要： Gyrometer including a substrate and an inertial mass suspended above the substrate, the inertial mass including an excitation part and a detection part, means of moving the excitation part is movable in at least one direction contained in the plane of the inertial mass, and capacitive detection device detecting movement of the detection part outside the plane of the mass. The capacitive detection device includes comprising at least one suspended electrode, located above the detection part located facing the substrate so as to form a variable capacitor with the detection part, the electrode being held above the detection part by at least one pillar passing through the inertial mass.

摘要翻译： 包括衬底和悬浮在衬底上的惯性块的测微计，包括激励部分和检测部分的惯性质量块，使激发部分移动的装置可以在包含在惯性质量平面中的至少一个方向上移动，并且电容检测 设备检测检测部件在质量平面外的运动。 所述电容检测装置包括至少一个悬置电极，位于所述检测部分的与所述基板相对的位置上，以便与所述检测部分形成可变电容器，所述电极通过至少一个通过所述惯性的柱的所述检测部分 质量

公开(公告)号：US20100190301A1

公开(公告)日：2010-07-29

申请号：US12693867

申请日：2010-01-26

申请人： Gilles DELAPIERRE ,  Bernard Diem ,  François Perruchot

发明人： Gilles DELAPIERRE ,  Bernard Diem ,  François Perruchot

IPC分类号： H01L21/60 ,  H01L21/56

CPC分类号： B81C1/00293 ,  B81C2203/0145 ,  G01P1/023 ,  G01P15/0802 ,  H01L23/10 ,  H01L2924/0002 ,  H01L2924/00

摘要： A process for closure of at least one cavity intended to encapsulate or be part of a microelectronic device, comprising the following steps: a) Producing a cavity in a first substrate comprising a first layer traversed by an opening forming an access to the cavity; b) Producing a portion of bond material around the opening, on a surface of the first layer located on the side opposite the cavity; c) Producing, on a second substrate, a portion of fusible material, with a deposition of the fusible material on the second substrate and the use of a mask; d) Placing the portion of fusible material in contact with the portion of bond material; e) Forming a plug for the opening, which adheres to the portion of bond material, by melting and then solidification of the fusible material; f) Separating the plug and the second substrate.

摘要翻译： 用于封闭旨在封装或成为微电子器件的一部分的至少一个空腔的方法，包括以下步骤：a）在第一衬底中产生空腔，该第一衬底包括由开口形成的第一层，形成对腔的通路; b）在位于与空腔相对的一侧的第一层的表面上，在开口周围产生粘合材料的一部分; c）在第二基板上产生可熔材料的一部分，在第二基板上沉积可熔材料并使用掩模; d）将可熔材料的一部分放置在与粘合材料部分接触的位置; e）通过熔化然后固化可熔材料，形成粘合到粘合材料部分上的开口的塞子; f）分离插头和第二基板。

公开(公告)号：US20090325335A1

公开(公告)日：2009-12-31

申请号：US12488854

申请日：2009-06-22

申请人： François Perruchot ,  Bernard Diem ,  Vincent Larrey ,  Laurent Clavelier ,  Emmanuel Defay

发明人： François Perruchot ,  Bernard Diem ,  Vincent Larrey ,  Laurent Clavelier ,  Emmanuel Defay

IPC分类号： H01L21/302 ,  H01L21/02

CPC分类号： B81C1/00595 ,  B81B2201/0271 ,  B81C2201/0109 ,  B81C2201/014

摘要： The invention relates to a method of making a component from a heterogeneous substrate comprising first and second portions in at least one monocrystalline material, and a sacrificial layer constituted by at least one stack of at least one layer of monocrystalline Si situated between two layers of monocrystalline SiGe, the stack being disposed between said first and second portions of monocrystalline material, wherein the method consists in etching said stack by making: e) at least one opening in the first and/or second portion and the first and/or second layer of SiGe so as to reach the layer of Si; and f) eliminating all or part of the layer of Si.

摘要翻译： 本发明涉及一种从包含至少一种单晶材料中的第一和第二部分的异质衬底制备组分的方法，以及由位于两层单晶之间的至少一层单晶硅的至少一个叠层构成的牺牲层 SiGe，堆叠设置在单晶材料的第一和第二部分之间，其中该方法包括通过以下步骤蚀刻所述堆叠：e）在第一和/或第二部分中的至少一个开口，以及第一和/ SiGe，以达到Si层; 和f）消除Si的全部或部分层。

公开(公告)号：US07631558B2

公开(公告)日：2009-12-15

申请号：US11889182

申请日：2007-08-09

申请人： Bernard Diem

发明人： Bernard Diem

IPC分类号： G01P9/04

CPC分类号： G01C19/5747

摘要： The microgyrometer is provided in a flat substrate and comprises detection means for detecting the movement of two oscillating masses in a measuring direction perpendicular to an excitation direction. The detection means comprise an excitation frame associated with each oscillating mass and a mobile detection element surrounded by a corresponding excitation frame and comprising a plurality of mobile electrodes, and first and second sets of interconnected fixed electrodes fixedly secured to the substrate on which they are formed. Each mobile electrode is disposed between associated fixed electrodes of the first and second sets to form two variable differential capacitors. The fixed electrodes of each set are interconnected by means of interconnection bars made of electrically conducting material extending above the fixed electrodes in a plane substantially parallel to the substrate.

摘要翻译： 微型计量器设置在平坦基板中，并且包括检测装置，用于检测垂直于激励方向的测量方向上的两个振荡块的移动。 检测装置包括与每个振动质量块相关联的激励框架和由对应的激励框架包围并包括多个移动电极的移动检测元件以及固定地固定到其上形成基板的第一组和第二组互连的固定电极 。 每个移动电极设置在第一和第二组的相关联的固定电极之间以形成两个可变差分电容器。 每组的固定电极通过在基本上平行于衬底的平面中在固定电极上方延伸的导电材料制成的互连条相互连接。