SYSTEMS AND METHODS FOR A GAS FIELD IONIZATION SOURCE
    1.
    发明申请
    SYSTEMS AND METHODS FOR A GAS FIELD IONIZATION SOURCE 有权
    用于气田离子源的系统和方法

    公开(公告)号:US20080217555A1

    公开(公告)日:2008-09-11

    申请号:US12100570

    申请日:2008-04-10

    IPC分类号: H01J27/26

    摘要: In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.

    摘要翻译: 在一个方面,本发明提供了一种气体离子源组件,其包括与光学柱连接的离子源,使得在离子源处产生的离子束穿过光学柱。 离子源包括具有与包含少量原子的尖端逐渐变细的宽度的发射体。 在其它方面,该方法提供制造,维持和增强气体离子源的性能,包括原位锐化离子源的尖端。

    Systems and methods for a gas field ionization source
    2.
    发明授权
    Systems and methods for a gas field ionization source 有权
    气田电离源的系统和方法

    公开(公告)号:US09159527B2

    公开(公告)日:2015-10-13

    申请号:US12100570

    申请日:2008-04-10

    IPC分类号: H01J27/00 H01J37/08 H01J27/26

    摘要: In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.

    摘要翻译: 在一个方面,本发明提供了一种气体离子源组件,其包括与光学柱连接的离子源,使得在离子源处产生的离子束穿过光学柱。 离子源包括具有与包含少量原子的尖端逐渐变细的宽度的发射体。 在其它方面,该方法提供制造,维持和提高气体离子源的性能,包括原位锐化离子源的尖端。