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公开(公告)号：US11515468B2
公开(公告)日：2022-11-29
申请号：US16263290
申请日：2019-01-31
发明人： Makoto Kubota , Yasushi Shimizu , Takanori Matsuda , Tatsuo Furuta , Kaoru Miura , Miki Ueda , Kanako Oshima
IPC分类号： H01L41/18 , H01L41/187 , H01L41/083 , H01L41/047 , H01L41/09 , C04B35/468 , H01L41/43 , C04B35/626
摘要： Provided is a piezoelectric ceramics having a gradual change in piezoelectric constant depending on an ambient temperature. Specifically, provided is a single-piece piezoelectric ceramics including as a main component a perovskite-type metal oxide represented by a compositional formula of ABO3, wherein an A site element in the compositional formula contains Ba and M1, the M1 being formed of at least one kind selected from the group consisting of Ca and Bi, wherein a B site element in the compositional formula contains T1 and M2, the M2 being formed of at least one kind selected from the group consisting of Zr, Sn, and Hf, wherein concentrations of the M1 and the M2 change in at least one direction of the piezoelectric ceramics, and wherein increase and decrease directions of concentration changes of the M1 and the M2 are directions opposite to each other.
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公开(公告)号：US09917245B2
公开(公告)日：2018-03-13
申请号：US15354349
申请日：2016-11-17
发明人： Makoto Kubota , Takanori Matsuda , Kaoru Miura
IPC分类号： B41J2/045 , H01L41/187 , B06B1/06 , B41J2/14 , H01L41/047 , H01L41/08 , H01L41/09 , H01L41/27 , H01L41/297 , H02N2/18 , H03H9/64 , A61B8/00 , G01C19/56 , G02B26/04 , H01L41/318
CPC分类号： H01L41/1871 , A61B8/00 , B06B1/06 , B06B1/0644 , B41J2/14233 , B41J2202/03 , G01C19/56 , G02B26/04 , H01L41/047 , H01L41/0471 , H01L41/0815 , H01L41/09 , H01L41/0973 , H01L41/0986 , H01L41/27 , H01L41/297 , H01L41/318 , H02N2/186 , H03H3/02 , H03H9/02015 , H03H9/02543 , H03H9/64
摘要： Provided is a piezoelectric element including a substrate, electrodes, and a piezoelectric film, the piezoelectric film including an oxide including Ba, Ca, Ti, and Zr, and at least one element of Mn and Bi in which: 0.09≦x≦0.30 is satisfied, where x is a mole ratio of Ca to a sum of Ba and Ca; 0.025≦y≦0.085 is satisfied, where y is a mole ratio of Zr to a sum of Ti, Zr, and Sn; and 0≦z≦0.02 is satisfied, where z is a mole ratio of Sn to the sum of Ti, Zr, and Sn; a total content Save of Mn and Bi is 0.0020 moles or more and 0.0150 moles or less for 1 mole of the oxide; and a total content Sbou of Mn and Bi in a region of the piezoelectric film adjacent to one of the electrodes is smaller than Save.
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公开(公告)号：US20170155037A1
公开(公告)日：2017-06-01
申请号：US15354349
申请日：2016-11-17
发明人： Makoto Kubota , Takanori Matsuda , Kaoru Miura
IPC分类号： H01L41/187 , H01L41/09 , H01L41/08 , B41J2/14 , H01L41/27 , H02N2/18 , H03H9/64 , B06B1/06 , H01L41/047 , H01L41/297
CPC分类号： H01L41/1871 , A61B8/00 , B06B1/06 , B06B1/0644 , B41J2/14233 , B41J2202/03 , G01C19/56 , G02B26/04 , H01L41/047 , H01L41/0471 , H01L41/0815 , H01L41/09 , H01L41/0973 , H01L41/0986 , H01L41/27 , H01L41/297 , H01L41/318 , H02N2/186 , H03H3/02 , H03H9/02015 , H03H9/02543 , H03H9/64
摘要： Provided is a piezoelectric element including a substrate, electrodes, and a piezoelectric film, the piezoelectric film including an oxide including Ba, Ca, Ti, and Zr, and at least one element of Mn and Bi in which: 0.09≦x≦0.30 is satisfied, where x is a mole ratio of Ca to a sum of Ba and Ca; 0.025≦y≦0.085 is satisfied, where y is a mole ratio of Zr to a sum of Ti, Zr, and Sn; and 0≦z≦0.02 is satisfied, where z is a mole ratio of Sn to the sum of Ti, Zr, and Sn; a total content Save of Mn and Bi is 0.0020 moles or more and 0.0150 moles or less for 1 mole of the oxide; and a total content Sbou of Mn and Bi in a region of the piezoelectric film adjacent to one of the electrodes is smaller than Save.
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公开(公告)号：US09660175B2
公开(公告)日：2017-05-23
申请号：US14388717
申请日：2013-03-21
发明人： Hiroshi Saito , Shunsuke Murakami , Miki Ueda , Hidenori Tanaka , Takanori Matsuda , Takayuki Watanabe , Makoto Kubota
IPC分类号： C04B35/49 , C04B35/468 , H01L41/187 , H02N2/00 , B06B1/06 , H01L41/083 , H01L41/09 , H02N2/10 , H02N2/16 , B41J2/14 , B08B7/02 , H04N5/217 , H04N5/232 , C04B35/626 , C04B35/64 , H01L21/64 , H01L41/047 , G02B7/04 , G02B27/00
CPC分类号： H01L41/1871 , B06B1/06 , B08B7/028 , B41J2/14209 , B41J2/14233 , B41J2002/14217 , B41J2202/03 , C04B35/4682 , C04B35/6261 , C04B35/62695 , C04B35/64 , C04B2235/3208 , C04B2235/3236 , C04B2235/3244 , C04B2235/3248 , C04B2235/3262 , C04B2235/3267 , C04B2235/3281 , C04B2235/3409 , C04B2235/3418 , C04B2235/449 , C04B2235/5445 , C04B2235/5454 , C04B2235/6567 , C04B2235/77 , C04B2235/785 , C04B2235/786 , C04B2235/79 , G02B7/04 , G02B27/0006 , H01L21/64 , H01L41/0471 , H01L41/0477 , H01L41/083 , H01L41/0973 , H02N2/106 , H02N2/163 , H04N5/2171 , H04N5/23209
摘要： A piezoelectric ceramic contains a main component, Mn as a first auxiliary component, and a second auxiliary component containing at least one element selected from the group consisting of Cu, B, and Si. The main component contains a perovskite metal oxide having the following general formula (1): (Ba1-xCax)a(Ti1-yZry)O3(0.100≦x≦0.145,0.010≦y≦0.039) (1) The amount b (mol) of Mn per mole of the metal oxide is in the range of 0.0048≦b≦0.0400, the second auxiliary component content on a metal basis is 0.001 parts by weight or more and 4.000 parts by weight or less per 100 parts by weight of the metal oxide, and the value a of the general formula (1) is in the range of 0.9925+b≦a≦1.0025+b.
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公开(公告)号：US20160284976A1
公开(公告)日：2016-09-29
申请号：US15175392
申请日：2016-06-07
IPC分类号： H01L41/187 , H01L41/083 , H01L41/18
CPC分类号： H01L41/1873 , B08B7/02 , B41J2/14201 , B41J2/14233 , B41J2202/03 , C04B35/495 , C04B35/6261 , C04B2235/3201 , C04B2235/3215 , C04B2235/3232 , C04B2235/3236 , C04B2235/3255 , C04B2235/3262 , C04B2235/3263 , C04B2235/3279 , C04B2235/3281 , C04B2235/3284 , C04B2235/3409 , C04B2235/3418 , C04B2235/768 , C04B2235/77 , G02B27/0006 , H01L41/0471 , H01L41/08 , H01L41/083 , H01L41/09 , H01L41/0973 , H01L41/18 , H01L41/43 , H02N2/106 , H02N2/163
摘要： A piezoelectric material that does not use lead and potassium and has a high piezoelectric constant and good insulating properties and a piezoelectric element that uses the piezoelectric material are provided. The piezoelectric material contains a perovskite-type metal oxide represented by general formula (1): (NaxBa1-y)(NbyTi1-y)O3 (1) (where 0.80≦x≦0.95 and 0.85≦y≦0.95), and an auxiliary component containing at least one selected from the group consisting of Si and B. A content of the auxiliary component on a metal basis is 0.001 parts by weight or more and 4.000 parts by weight or less relative to 100 parts by weight of the perovskite-type metal oxide.
摘要翻译： 提供不使用铅和钾并具有高压电常数和良好绝缘性能的压电材料和使用压电材料的压电元件。 压电材料含有通式（1）表示的钙钛矿型金属氧化物：（NaxBa1-y）（NbyTi1-y）O3（1）（其中0.80≤x≤0.95和0.85≤y≤0.95），辅助 含有选自Si和B中的至少一种的组分。基于金属的辅助组分的含量相对于100重量份的钙钛矿型为0.001重量份以上且4.000重量份以下 金属氧化物。
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公开(公告)号：US09159903B2
公开(公告)日：2015-10-13
申请号：US14329689
申请日：2014-07-11
发明人： Kanako Oshima , Takayuki Watanabe , Shunsuke Murakami , Hidenori Tanaka , Jumpei Hayashi , Hiroshi Saito , Takanori Matsuda
IPC分类号： B41J2/045 , H01L41/18 , B41J2/14 , C04B35/468 , H01L41/09 , H01L41/187 , H02N2/10 , H02N2/16 , B06B1/06 , G02B27/00 , H01L41/047 , H01L41/083 , H02N2/00
CPC分类号： H01L41/183 , B06B1/0644 , B41J2/045 , B41J2/14 , B41J2/14233 , B41J2002/14258 , B41J2202/03 , C04B35/4682 , C04B2235/3203 , C04B2235/3208 , C04B2235/3244 , C04B2235/3262 , C04B2235/3293 , C04B2235/3298 , C04B2235/3409 , C04B2235/3418 , C04B2235/449 , C04B2235/5445 , C04B2235/77 , C04B2235/785 , C04B2235/786 , C04B2235/79 , G02B27/0006 , H01L41/0477 , H01L41/083 , H01L41/09 , H01L41/0973 , H01L41/1871 , H01L41/43 , H02N2/001 , H02N2/10 , H02N2/16
摘要： A piezoelectric material contains a main component containing a perovskite-type metal oxide having the formula (1); a first auxiliary component composed of Mn; and a second auxiliary component composed of Bi or Bi and Li, wherein the Mn content is 0.04 parts by weight or more and 0.400 parts by weight or less on a metal basis per 100 parts by weight of the metal oxide, the Bi content is 0.042 parts by weight or more and 0.850 parts by weight or less on a metal basis per 100 parts by weight of the metal oxide, and the Li content is 0.028 parts by weight or less (including 0 parts by weight) on a metal basis per 100 parts by weight of the metal oxide. (Ba1-xCax)a(Ti1-y-zSnyZrz)O3 (1) (wherein 0≦x≦0.080, 0.013≦y≦0.060, 0≦z≦0.040, and 0.986≦a≦1.020.)
摘要翻译： 压电材料包含含有具有式（1）的钙钛矿型金属氧化物的主要成分; 由Mn构成的第一辅助成分; 以及由Bi或Bi和Li构成的第二辅助成分，其中，Mn含量相对于金属氧化物为100重量份为0.04重量份以上且0.400重量份以下，Bi含量为0.042 以金属计，每100重量份的金属氧化物为0.850重量份以下，Li为0.028重量份以下（包含0重量份），以金属为基准，每100重量份 重量份的金属氧化物。 （Ba1-xCax）a（Ti1-y-zSnyZrz）O3（1）（其中0＆nlE; x＆amp; nlE; 0.080,0.013＆nlE; y＆nlE; 0.060,0和nlE; z＆nlE; 0.040和0.986＆nlE; a＆nlE; 1.020）
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公开(公告)号：US20210328131A1
公开(公告)日：2021-10-21
申请号：US17222120
申请日：2021-04-05
IPC分类号： H01L41/43 , B06B1/06 , H02N2/10 , H01L41/187 , G02B7/09 , B08B7/02 , C04B35/645 , C04B35/468 , A61B8/00 , H04N5/217 , G01H11/08
摘要： Provided are a piezoelectric ceramics which does not contain lead, has small temperature dependence of a piezoelectric constant within an operating temperature range, and has high density, a high mechanical quality factor, a satisfactory piezoelectric constant, and a small surface roughness, and a method of manufacturing the piezoelectric ceramics. The method of manufacturing a piezoelectric ceramics is characterized by including: sintering a compact containing a raw material at 1,000° C. or more to obtain a sintered compact; abrading the sintered compact; and annealing the abraded sintered compact at a temperature of 800° C. or more and less than 1,000° C.
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公开(公告)号：US20200169192A1
公开(公告)日：2020-05-28
申请号：US16775561
申请日：2020-01-29
发明人： Takanori Matsuda , Makoto Kubota , Hisato Yabuta , Miki Ueda , Kanako Oshima , Fumio Uchida , Hiroki Imai , Kenji Maeda , Chiemi Shimizu
IPC分类号： H02N2/10 , H01L41/047 , H01L41/083 , H01L41/09 , H01L41/187 , H01L41/273 , C04B35/495 , C04B35/626 , C04B35/63 , C04B35/64 , H04N5/225 , B41J2/14
摘要： A lead-free piezoelectric material includes perovskite-type metal oxide containing Na, Nb, Ba, Ti, and Mg and indicates excellent piezoelectric properties. The piezoelectric material satisfies the following relational expression (1): 0.430≤a≤0.460, 0.433≤b≤0.479, 0.040≤c≤0.070, 0.0125≤d≤0.0650, 0.0015≤e≤0.0092, 0.9×3e≤c−d≤1.1×3e, a+b+c+d+e=1, where a, b, c, d, and e denote the relative numbers of Na, Nb, Ba, Ti, and Mg atoms, respectively.
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公开(公告)号：US20200169190A1
公开(公告)日：2020-05-28
申请号：US16775523
申请日：2020-01-29
发明人： Kanako Oshima , Miki Ueda , Takanori Matsuda , Makoto Kubota , Hisato Yabuta , Fumio Uchida , Hiroki Imai , Kenji Maeda , Chiemi Shimizu
IPC分类号： H02N2/10 , H01L41/047 , H01L41/083 , H01L41/09 , H01L41/187 , H01L41/273 , C04B35/495 , C04B35/64 , H04N5/217 , B41J2/14
摘要： Provided is a lead-free piezoelectric material reduced in dielectric loss tangent, and achieving both a large piezoelectric constant and a large mechanical quality factor. A piezoelectric material according to at least one embodiment of the present disclosure is a piezoelectric material including a main component formed of a perovskite-type metal oxide represented by the general formula (1): Nax+s(1−y)(BiwBa1−s−w)1−yNbyTi1−yO3 (where 0.84≤x≤0.92, 0.84≤y≤0.92, 0.002≤(w+s)(1−y)≤0.035, and 0.9≤w/s≤1.1), and a Mn component, wherein the content of the Mn is 0.01 mol % or more and 1.00 mol % or less with respect to the perovskite-type metal oxide.
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公开(公告)号：US20190334458A1
公开(公告)日：2019-10-31
申请号：US16473154
申请日：2017-12-21
发明人： Tatsuo Furuta , Takayuki Watanabe , Miki Ueda , Shinya Koyama , Makoto Kubota , Takanori Matsuda , Akira Uebayashi , Jumpei Hayashi , Hitoshi Nishitani
摘要： The present invention provides a vibrator made of a non-lead-based piezoelectric material and capable of being driven at a sufficient speed with low power consumption, and provides a vibration wave drive device and an electronical device each using the vibrator. To that end, the vibrator according to the present invention includes a piezoelectric element including a piezoelectric material and electrodes, and an elastic body, wherein a Pb component contained in the piezoelectric material is less than 1000 ppm, and a resonance frequency fA in a vibration mode A and a resonance frequency fB in a vibration mode B satisfy a relation of an absolute value of (fB−fA)>2 (kHz), the vibration mode A and the vibration mode B generating vibration waves in the elastic body with wave fronts of the vibration waves intersecting each other.
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