公开(公告)号：US20150221845A1

公开(公告)日：2015-08-06

申请号：US14421202

申请日：2012-08-31

申请人： Chisaki Takubo ,  Hideaki Takano ,  Kengo Asai ,  Takashi Naito ,  Tadashi Fujieda ,  Yuichi Sawai ,  Noriyuki Sakuma

发明人： Chisaki Takubo ,  Hideaki Takano ,  Kengo Asai ,  Takashi Naito ,  Tadashi Fujieda ,  Yuichi Sawai ,  Noriyuki Sakuma

IPC分类号： H01L35/04 ,  H01L35/18 ,  H01L35/20 ,  H01L35/16

CPC分类号： H01L35/04 ,  C03C14/006 ,  H01L35/14 ,  H01L35/16 ,  H01L35/18 ,  H01L35/20 ,  H01L35/32 ,  H01L35/34

摘要： In a thermoelectric conversion device, support substrates (13, 14), electrodes (11, 12) formed on the support substrates and thermoelectric conversion parts (7, 10) formed on the electrodes and containing semiconductor glass are disposed. The semiconductor glass is non-lead glass containing vanadium, and the electrodes contain any of Al, Ti, Ti nitride, W, W nitride, W silicide, Ta, Cr and Si.This constitution makes it possible to provide a device structure which can be produced by an inexpensive production process, uses a composite material with an excellent thermoelectric conversion characteristic and can solve the characteristic problem of the composite material. As a result, it is possible to provide a thermoelectric conversion device with excellent characteristics and high reliability at a low cost.

摘要翻译： 在热电转换装置中，设置支撑基板（13,14），形成在支撑基板上的电极（11,12）和形成在电极上并且包含半导体玻璃的热电转换部（7,10）。 半导体玻璃是含有钒的非铅玻璃，电极中含有Al，Ti，Ti的氮化物，W，W氮化物，W，硅化物，Ta，Cr，Si中的任意一种。 这种结构使得可以提供可以通过廉价的制造工艺制造的器件结构，使用具有优异的热电转换特性的复合材料，并且可以解决复合材料的特征问题。 结果，可以以低成本提供具有优异特性和高可靠性的热电转换装置。

公开(公告)号：US07886594B2

公开(公告)日：2011-02-15

申请号：US12699170

申请日：2010-02-03

申请人： Noriyuki Sakuma

发明人： Noriyuki Sakuma

IPC分类号： G01F1/68

CPC分类号： G01F1/6845 ,  G01F1/692 ,  Y10T29/49085

摘要： A thermal-type fluid flow sensor is provided to measure an air flow rate flowing through an air intake passage. The thermal-type fluid flow sensor includes a heating resistive element; a first temperature-measuring resistive element for detecting a temperature of the heating resistive element; a second temperature-measuring resistive element for detecting the temperature of air on an upstream side of air heated by the heating resistive element; a third temperature-measuring resistive element for detecting the temperature of air on a downstream side of air heated by the heating resistive element, and a fourth temperature-measuring resistive element for detecting the temperature of air, wherein the heating resistive element and the first, second, third and fourth temperature-measuring resistive elements are formed on a substrate, the heating resistive element is disposed in an upper layer or a lower layer of the first temperature-measuring resistive element, and a resistance ratio of materials of the heating resistive element is larger than a resistance ratio of materials of the first temperature-measuring resistive element.

摘要翻译： 提供热型流体流量传感器来测量流过进气通道的空气流量。 热式流体流量传感器包括加热电阻元件; 第一温度测量电阻元件，用于检测加热电阻元件的温度; 第二温度测量电阻元件，用于检测由加热电阻元件加热的空气的上游侧的空气的温度; 第三温度测量电阻元件，用于检测由加热电阻元件加热的空气的下游侧的空气的温度;以及第四温度测量电阻元件，用于检测空气的温度，其中加热电阻元件和第一， 第二，第三和第四温度测量电阻元件形成在基板上，加热电阻元件设置在第一温度测量电阻元件的上层或下层中，加热电阻元件的材料的电阻比 大于第一温度测量电阻元件的材料的电阻比。

公开(公告)号：US20080168650A1

公开(公告)日：2008-07-17

申请号：US11964105

申请日：2007-12-26

申请人： Noriyuki Sakuma

发明人： Noriyuki Sakuma

IPC分类号： H01C7/02 ,  G01F1/68 ,  C23F1/00

CPC分类号： G01F1/6845 ,  G01F1/692 ,  Y10T29/49085

摘要： A thermal-type fluid flow sensor technology for measuring more precisely the temperature of the heater for an improved sensibility of detecting flow measurements. The thermal-type fluid flow sensor for measuring the air flow rate includes a heating resistive element formed on the semiconductor substrate through a first insulating layer, temperature-measuring resistive elements for heating resistive element for measuring the temperature of the heating resistive element, upstream and downstream temperature-measuring resistive elements for detecting the temperature of air on the upstream side and the downstream side of the air heated by the heating resistive element, and an air temperature measuring resistive element for measuring the temperature of the air heated by the heating resistive element, and at least the temperature-measuring resistive element for the heating resistive element is disposed in the upper layer or lower layer of the heating resistive element.

摘要翻译： 一种热式流体流量传感器技术，用于更精确地测量加热器的温度，以提高检测流量测量的灵敏度。 用于测量空气流量的热式流体流量传感器包括通过第一绝缘层形成在半导体衬底上的加热电阻元件，用于加热电阻元件的温度测量电阻元件，用于测量上游的加热电阻元件的温度， 用于检测由加热电阻元件加热的空气的上游侧和下游侧的空气的温度的下游温度测量电阻元件，以及用于测量由加热电阻元件加热的空气的温度的空气温度测量电阻元件 并且至少用于加热电阻元件的温度测量电阻元件设置在加热电阻元件的上层或下层中。

公开(公告)号：US07183212B2

公开(公告)日：2007-02-27

申请号：US10898252

申请日：2004-07-26

申请人： Seiichi Kondo ,  Masaaki Fujimori ,  Noriyuki Sakuma ,  Yoshio Homma

发明人： Seiichi Kondo ,  Masaaki Fujimori ,  Noriyuki Sakuma ,  Yoshio Homma

IPC分类号： H01L21/302

CPC分类号： C23F1/18 ,  C09G1/04 ,  C23F3/06 ,  H01L21/3212 ,  H01L21/7684

摘要： Described is a polishing technique adapted for multilevel metallization of an electronic circuit device, which comprises polishing a metal film with a polishing liquid containing an oxidizing substance, a phosphoric acid and a protection-layer forming agent. The present invention makes it possible to polishing a metal film at a high removal rate while suppressing occurrence of scratches, delamination, dishing or erosion.

摘要翻译： 描述了适用于电子电路器件的多层金属化的抛光技术，其包括用包含氧化物质，磷酸和保护层形成剂的抛光液抛光金属膜。 本发明能够在抑制划痕，分层，凹陷或侵蚀的发生的同时以高的去除率对金属膜进行研磨。

公开(公告)号：US06750128B2

公开(公告)日：2004-06-15

申请号：US10396410

申请日：2003-03-26

申请人： Seiichi Kondo ,  Noriyuki Sakuma ,  Yoshio Homma

发明人： Seiichi Kondo ,  Noriyuki Sakuma ,  Yoshio Homma

IPC分类号： H01L213205

CPC分类号： H01L21/3212 ,  B24B37/044 ,  C09G1/02 ,  H01L21/7684

摘要： The present invention provides a technique to reduce and suppress scratches and delamination, to suppress and control the development of dishing and erosion, and to polish at high polishing rate. Polishing is performed using a polishing solution, which contains an oxidizer, phosphoric acid, organic acid, a chemical to form inhibition layer, and water.

摘要翻译： 本发明提供减少和抑制划痕和分层，抑制和控制凹陷和侵蚀的发展并以高抛光速率抛光的技术。 使用包含氧化剂，磷酸，有机酸，形成抑制层的化学品和水的抛光溶液进行抛光。

公开(公告)号：US06596638B1

公开(公告)日：2003-07-22

申请号：US09618999

申请日：2000-07-18

申请人： Seiichi Kondo ,  Yoshio Homma ,  Noriyuki Sakuma ,  Kenichi Takeda ,  Kenji Hinode

发明人： Seiichi Kondo ,  Yoshio Homma ,  Noriyuki Sakuma ,  Kenichi Takeda ,  Kenji Hinode

IPC分类号： H01L21302

CPC分类号： C23F3/06 ,  B24B37/04 ,  C09G1/02 ,  C09K3/1463 ,  H01L21/02074 ,  H01L21/3212 ,  H01L21/7684

摘要： A polishing technique wherein scratches, peeling, dishing and erosion are suppressed, a complex cleaning process and slurry supply/processing equipment are not required, and the cost of consumable items, such as slurries and polishing pads, is reduced. A metal film formed on an insulating film having a groove is polished with a polishing solution containing an oxidizer and a substance which renders oxides water-soluble, but not containing a polishing abrasive.

摘要翻译： 抑制了划痕，剥离，凹陷和侵蚀的抛光技术，不需要复杂的清洁处理和浆料供应/处理设备，并且消耗品如浆料和抛光垫的成本降低。 在具有凹槽的绝缘膜上形成的金属膜用含有氧化剂和使氧化物水溶性但不含抛光磨料的物质的抛光溶液抛光。

公开(公告)号：US06561875B1

公开(公告)日：2003-05-13

申请号：US09558593

申请日：2000-04-26

申请人： Yoshio Homma ,  Noriyuki Sakuma ,  Naofumi Ohashi ,  Toshinori Imai

发明人： Yoshio Homma ,  Noriyuki Sakuma ,  Naofumi Ohashi ,  Toshinori Imai

IPC分类号： B24B2900

CPC分类号： B24B49/006 ,  B24B37/042 ,  B24B49/16 ,  B24B57/02

摘要： The apparatus and method for producing a substrate whose surface includes a metallic wire by polishing the substrate surface. A polishing liquid is supplied to a clearance between the substrate and the surface of a polishing pad. The polishing liquid includes an acid which dissolves the oxidized part of the substrate surface and is substantially free of solid abrasive powder. A relative movement is generated between the substrate surface and the polishing pad surface while the substrate surface is pressed against the polishing pad surface while the polishing liquid is supplied so that the dissolved oxidized part of the substrates surface can be removed from the substrate.

摘要翻译： 通过研磨基板表面来制造表面包括金属线的基板的装置和方法。 将研磨液供给到基板与研磨垫的表面之间的间隙。 抛光液包括溶解基材表面的氧化部分并基本上不含固体磨料粉末的酸。 当衬底表面被压靠在抛光垫表面上时，在衬底表面和抛光垫表面之间产生相对运动，同时提供抛光液体，使得可以从衬底去除基底表面的溶解的氧化部分。

公开(公告)号：US4891684A

公开(公告)日：1990-01-02

申请号：US81231

申请日：1987-08-04

申请人： Yasushiro Nishioka ,  Hiroshi Shinriki ,  Noriyuki Sakuma ,  Kiichiro Mukai

发明人： Yasushiro Nishioka ,  Hiroshi Shinriki ,  Noriyuki Sakuma ,  Kiichiro Mukai

IPC分类号： H01L21/314 ,  H01G4/005 ,  H01G4/33 ,  H01L21/822 ,  H01L27/04 ,  H01L27/108 ,  H01L29/94

CPC分类号： H01L29/94 ,  H01G4/005 ,  H01G4/33 ,  H01L27/10805

摘要： A reaction-preventing film is provided between a capacitor insulating film made of a material having a high dielectric constant, such as Ta.sub.2 O.sub.5, and an upper electrode in order to prevent a reaction of the upper electrode with the capacitor insulating film. This effectively prevents the reaction between the upper electrode and the capacitor caused by a heat treatment conducted after formation of the capacitor, and hence prevents an increase in leakage current caused by the reaction. Thus, the reliability of a semiconductor device is remarkably increased.

摘要翻译： 为了防止上部电极与电容绝缘膜的反应，在由具有高介电常数的材料制成的电容器绝缘膜（例如Ta 2 O 5）和上部电极之间设置防反射膜。 这有效地防止了在形成电容器之后进行的热处理引起的上部电极和电容器之间的反应，从而防止了由反应引起的漏电流的增加。 因此，半导体器件的可靠性显着增加。

公开(公告)号：US4809052A

公开(公告)日：1989-02-28

申请号：US860413

申请日：1986-05-07

申请人： Yasushiro Nishioka ,  Takeo Shiba ,  Hiroshi Shinriki ,  Kiichiro Mukai ,  Akihisa Uchida ,  Ichiro Mitamura ,  Keiichi Higeta ,  Katsumi Ogiue ,  Kunihiko Yamaguchi ,  Noriyuki Sakuma

发明人： Yasushiro Nishioka ,  Takeo Shiba ,  Hiroshi Shinriki ,  Kiichiro Mukai ,  Akihisa Uchida ,  Ichiro Mitamura ,  Keiichi Higeta ,  Katsumi Ogiue ,  Kunihiko Yamaguchi ,  Noriyuki Sakuma

IPC分类号： G11C11/411 ,  H01L27/102 ,  H01L27/10 ,  H01L29/40 ,  H01L29/48

CPC分类号： G11C11/4116 ,  H01L27/1025

摘要： A semiconductor memory device is provided such as the type having flip-flop memory cells each including two bipolar transistors in cross connection with each other. In certain embodiments, at least a part of a Schottky barrier diode or capacitor in the memory cell is formed under a digit line. This memory device is greatly reduced in its required area, and the Schottky barrier diode and capacitor are negligibly influenced by the digit line. In other embodiments, it is arranged to provide different electrodes for the Schottky barrier diode and the capacitor to optimize construction in a minimized space.

摘要翻译： 提供半导体存储器件，例如具有触发器存储单元的类型，每个触发器存储单元包括彼此交叉连接的两个双极晶体管。 在某些实施例中，在数字线下形成存储单元中的肖特基势垒二极管或电容器的至少一部分。 该存储器件的所需面积大大降低，肖特基势垒二极管和电容器受数字线影响不大。 在其他实施例中，它被设置为为肖特基势垒二极管和电容器提供不同的电极，以在最小化的空间中优化结构。

公开(公告)号：US08714008B2

公开(公告)日：2014-05-06

申请号：US13351157

申请日：2012-01-16

申请人： Noriyuki Sakuma

发明人： Noriyuki Sakuma

IPC分类号： G01F1/68

CPC分类号： H01L35/34 ,  G01F1/6845 ,  G01F1/692 ,  H01L2224/48091 ,  Y10T29/49082 ,  Y10T29/49124 ,  H01L2924/00014

摘要： In a thermal sensor with a detection part and a circuit part formed on the same substrate, an insulating film for protection of the circuit part causes problems of lowering in sensitivity of a heater, deterioration in accuracy due to variation of a residual stress in the detection part, etc. A layered film including insulating films is formed on a heating resistor, an intermediate layer is formed thereon, and a layered film including insulating films is formed further thereon. The intermediate layer is specified to be a layer made up of any one of aluminum nitride, aluminum oxide, silicon carbide, titanium nitride, tungsten nitride, and titanium tungsten. This configuration enables the layered film on the upper part of the detection part to be removed using the intermediate layer as an etch stop layer, which solves problems of lowering in sensitivity, a variation in residual stress, etc. resulting from these.

摘要翻译： 在具有检测部件和形成在同一基板上的电路部件的热传感器中，用于保护电路部件的绝缘膜导致加热器的灵敏度降低的问题，由于检测中的残余应力的变化导致的精度劣化 部分等。在加热电阻器上形成包括绝缘膜的分层膜，在其上形成中间层，并且还在其上形成包括绝缘膜的层压膜。 中间层被指定为由氮化铝，氧化铝，碳化硅，氮化钛，氮化钨和钛钨中的任一种构成的层。 该配置使得可以使用中间层作为蚀刻停止层来去除检测部分的上部的分层膜，这解决了由此产生的灵敏度降低，残余应力等的变化的问题。