Semiconductor integrated circuit device forming on a common substrate
MISFETs isolated by a field oxide and bipolar transistors isolated by a
groove
    4.
    发明授权
    Semiconductor integrated circuit device forming on a common substrate MISFETs isolated by a field oxide and bipolar transistors isolated by a groove 失效
    在公共衬底上形成的半导体集成电路器件通过由沟槽隔离的场氧化物和双极晶体管隔离的MISFET

    公开(公告)号:US5214302A

    公开(公告)日:1993-05-25

    申请号:US807411

    申请日:1991-12-13

    CPC classification number: H01L29/7325 H01L27/0623 H01L27/1112

    Abstract: A semiconductor integrated circuit device having a structure in which each of the following regions, that is, a first region for forming the base and emitter regions of each of the bipolar transistors, a second region for forming the collector lead-out region of the bipolar transistor, and a third region for forming each of the MISFETs, is projected from the main surface of a semiconductor substrate, whereby it is possible to effect isolation between the MISFETs and between these MISFETs and the bipolar transistors with the same isolation structure and in the same manufacturing step as those for the isolation between the bipolar transistors. In this device, furthermore, the base region of the bipolar transistor is electrically and self-alignedly connected to a base electrode which is formed over the main surface so as to surround the emitter region. The bipolar transistor is characterized as a self-alignment transistor and that the insulating side wall spacers corresponding to the gate and base (emitter) electrodes are formed by a same lever.

    Abstract translation: 一种半导体集成电路器件,具有以下结构,其中以下各个区域,即用于形成每个双极晶体管的基极和发射极区域的第一区域,用于形成双极性的集电极导出区域的第二区域 晶体管和用于形成每个MISFET的第三区域从半导体衬底的主表面突出,由此可以实现MISFET之间以及这些MISFET与具有相同隔离结构的双极晶体管之间的隔离,并且在 与双极晶体管之间的隔离相同的制造步骤。 此外,在该器件中,双极晶体管的基极区域电自自对准地连接到形成在主表面上以围绕发射极区域的基极。 双极晶体管的特征在于自对准晶体管,并且与栅极和基极(发射极)电极对应的绝缘侧壁间隔物由相同的杆形成。

    Method of manufacturing a semiconductor device
    5.
    发明授权
    Method of manufacturing a semiconductor device 失效
    制造半导体器件的方法

    公开(公告)号:US4260430A

    公开(公告)日:1981-04-07

    申请号:US50202

    申请日:1979-06-20

    CPC classification number: H01L21/8226 H01L27/0237

    Abstract: An I.sup.2 L device is disclosed wherein the P type injector region of a PNP transistor is formed so as to be buried in an N.sup.- type epitaxial layer below the P type collector region of the PNP transistor, whereby the carrier injection efficiency of the transistor is improved and a high switching speed is obtained. The I.sup.2 L device further includes an inversed NPN transistor wherein the abovementioned P type collector region of the PNP transistor works as a base region of the NPN transistor, an N type collector region is formed in the P type base region, and the abovementioned P type injector region extends between the N.sup.- type epitaxial layer and an N.sup.+ type substrate except below the N type collector region so that the effective emitter portion of the NPN transistor is limited to a specific area immediately below the N type collector region, thereby to reduce the power consumption.

    Abstract translation: 公开了一种I2L器件,其中PNP晶体管的P型注入器区域被形成为埋入在PNP晶体管的P型集电极区域之下的N型外延层中,从而提高了晶体管的载流子注入效率 并获得高切换速度。 I2L器件还包括反向NPN晶体管,其中PNP晶体管的上述P型集电极区域用作NPN晶体管的基极区域,在P型基极区域中形成N型集电极区域,并且上述P型注入器 区域在N型外延层和除了N型集电极区域之外的N +型衬底之间延伸,使得NPN晶体管的有效发射极部分被限制在紧邻N型集电极区域的特定区域,从而降低功率 消费。

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