公开(公告)号：US06875709B2

公开(公告)日：2005-04-05

申请号：US10383710

申请日：2003-03-07

申请人： Chun-Hsien Lin ,  Henry Lo ,  Anthony Liu ,  Yu-Liang Lin

发明人： Chun-Hsien Lin ,  Henry Lo ,  Anthony Liu ,  Yu-Liang Lin

IPC分类号： H01L21/3105 ,  H01L21/312 ,  H01L21/768 ,  H01L21/31 ,  H01L21/469

CPC分类号： H01L21/02134 ,  H01L21/02118 ,  H01L21/02137 ,  H01L21/02203 ,  H01L21/02282 ,  H01L21/02343 ,  H01L21/31058 ,  H01L21/312 ,  H01L21/3124 ,  H01L21/76826 ,  H01L21/76829

摘要： A method and apparatus for curing and modifying a low k dielectric layer in an interconnect structure is disclosed. A spin-on low k dielectric layer which includes an organic silsesquioxane, polyarylether, bisbenzocyclobuene, or SiLK is spin coated on a substrate. The substrate is placed in a process chamber in a supercritical CO2 system and is treated at a temperature between 30° C. and 150° C. and at a pressure from 70 to 700 atmospheres. A co-solvent such as CF3—X or F—X is added that selectively replaces C—CH3 bonds with C—CF3 or C—F bonds. Alternatively, H2O2 is employed as co-solvent to replace a halogen in a C—Z bond where Z=F, Cl, or Br with an hydroxyl group. Two co-solvents may be combined with CO2 for more flexibility. The cured dielectric layer has improved properties that include better adhesion, lower k value, increased hardness, and a higher elastic modulus.

摘要翻译： 公开了一种用于固化和修饰互连结构中的低k电介质层的方法和装置。 将包含有机倍半硅氧烷，聚芳醚，双苯并环丁烯或SiLK的旋涂低k电介质层旋涂在基材上。 将基材置于超临界CO 2体系的处理室中，并在30℃至150℃的温度和70至700大气压的压力下进行处理。 加入共溶剂如CF 3 -X或F-X，其选择性地用C-CF 3或C-F键取代C-CH 3键。 或者，使用H 2 O 2作为助溶剂代替C-Z键中的卤素，其中Z = F，Cl或Br与羟基。 两种共溶剂可以与二氧化碳组合以获得更大的灵活性。 固化的介电层具有改进的性能，其包括更好的附着力，较低的k值，更高的硬度和更高的弹性模量。

公开(公告)号：US20090306454A1

公开(公告)日：2009-12-10

申请号：US12083586

申请日：2006-05-03

申请人： Kimberly P. Cockerham ,  Harvey A. Fishman ,  Anthony Liu ,  Alissa M. Fitzgeral ,  Dorian Liepmann ,  Benjamin W. Chul ,  Michael F. Marmor ,  Wentai Liu ,  Juan G. Santiago

发明人： Kimberly P. Cockerham ,  Harvey A. Fishman ,  Anthony Liu ,  Alissa M. Fitzgeral ,  Dorian Liepmann ,  Benjamin W. Chul ,  Michael F. Marmor ,  Wentai Liu ,  Juan G. Santiago

IPC分类号： A61N1/36 ,  A61N2/00

CPC分类号： A61N1/36067 ,  A61M5/14276 ,  A61M2205/0244 ,  A61M2210/0612 ,  A61N1/0543 ,  A61N1/36017 ,  A61N1/36046 ,  A61N1/37205 ,  A61N1/37288 ,  A61N1/375 ,  A61N1/3787

摘要： Devices, systems and methods are provided for directly stimulating tissues, particularly muscle tissues, to modulate muscle contractions (i.e. provide reanimation of the muscle or to suppress undesired muscle contractions). Reanimation of muscles may be desired when damage to the brain, nervous system or neuromuscular junctions have occurred, causing a muscle tissue to lack sufficient motor control. Suppression of muscle contractions may be desired in situations of pathologically hyperactive muscles, such as in conditions of muscle spasm (e.g. blepharospasm and hemifacial spasm) or muscle dystonia. Direct stimulation is achieved by delivering a chemical agent directly to the muscle tissue, particularly the motor end plate, bypassing the nerves and neuromuscular junctions which may be damaged or diseased. Implanted hybrid chemical and electromagnetic stimulation devices can modulate muscle contraction in response to signals from a controller.

摘要翻译： 提供装置，系统和方法用于直接刺激组织，特别是肌肉组织，以调节肌肉收缩（即，提供肌肉的再生或抑制不需要的肌肉收缩）。 当发生对脑，神经系统或神经肌肉接头的损伤时，可能需要恢复肌肉，导致肌肉组织缺乏足够的运动控制。 在病理性活动过度肌肉的情况下，例如肌肉痉挛（例如睑痉挛和半面肌痉挛）或肌肉肌张力障碍的情况下，可能需要抑制肌肉收缩。 直接刺激通过将化学药剂直接递送到肌肉组织，特别是马达端板，绕过可能被损坏或患病的神经和神经肌肉接头来实现。 植入式混合化学和电磁刺激装置可以响应于来自控制器的信号来调节肌肉收缩。