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    Magnetic head coil system and damascene/reactive ion etching method for manufacturing the same
    1.
    发明申请
    Magnetic head coil system and damascene/reactive ion etching method for manufacturing the same 失效
    磁头线圈系统和镶嵌/反应离子蚀刻方法制造相同

    公开(公告)号：US20050152064A1

    公开(公告)日：2005-07-14

    申请号：US11040387

    申请日：2005-01-20

    申请人： Daniel Bedell ,  Richard Hsiao ,  James Jarratt ,  Patrick Webb ,  Sue Zhang

    发明人： Daniel Bedell ,  Richard Hsiao ,  James Jarratt ,  Patrick Webb ,  Sue Zhang

    IPC分类号： G11B5/17 ,  G11B5/31 ,  G11B5/147

    CPC分类号： G11B5/313 ,  G11B5/3123 ,  G11B5/3163 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/4906 ,  Y10T29/49064 ,  Y10T29/49073

    摘要： A system and method are provided for manufacturing a coil structure for a magnetic head. Initially, an insulating layer is deposited with a photoresist layer deposited on the insulating layer. Moreover, a silicon dielectric layer is deposited on the photoresist layer as a hard mask. The silicon dielectric layer is then masked. A plurality of channels is subsequently formed in the silicon dielectric layer using reactive ion etching (i.e. CF4/CHF3). The silicon dielectric layer is then used as a hard mask to transfer the channel pattern in the photoresist layer using reactive ion etching with, for example, H2/N2/CH3F/C2H4 reducing chemistry. To obtain an optimal channel profile with the desired high aspect ratio, channel formation includes a first segment defining a first angle and a second segment defining a second angle. Thereafter, a conductive seed layer is deposited in the channels and the channels are filled with a conductive material to define a coil structure. Chemical-mechanical polishing may then be used to planarize the conductive material.

    摘要翻译： 提供一种用于制造用于磁头的线圈结构的系统和方法。 首先，沉积有沉积在绝缘层上的光致抗蚀剂层的绝缘层。 此外，硅介电层作为硬掩模沉积在光致抗蚀剂层上。 然后掩蔽硅介电层。 随后使用反应离子蚀刻（即CF 4 / CH 3）3在硅介电层中形成多个通道。 然后将硅介电层用作硬掩模，以使用例如H 2/2 N 2 / CH的反应离子蚀刻将光致抗蚀剂层中的沟道图案转印 还原化学反应。 为了获得具有期望的高纵横比的最佳通道轮廓，通道形成包括限定第一角度的第一段和限定第二角度的第二段。 此后，导电种子层沉积在通道中，并且通道填充有导电材料以限定线圈结构。 然后可以使用化学机械抛光来平坦化导电材料。

    Methods of making magnetic heads with improved contiguous junctions
    6.
    发明授权
    Methods of making magnetic heads with improved contiguous junctions 失效
    制造具有改进的连续结的磁头的方法

    公开(公告)号：US06996894B2

    公开(公告)日：2006-02-14

    申请号：US10109110

    申请日：2002-03-28

    申请人： Richard Hsiao ,  Wipul Pemsiri Jayasekara ,  Mustafa Pinarbasi ,  Patrick Rush Webb

    发明人： Richard Hsiao ,  Wipul Pemsiri Jayasekara ,  Mustafa Pinarbasi ,  Patrick Rush Webb

    IPC分类号： G11B5/127 ,  B44C1/22

    CPC分类号： B82Y10/00 ,  G11B5/3116 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/3903 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

    摘要： Methods of making a read head with improved contiguous junctions are described. After sensor layer materials are deposited over a substrate, a lift-off mask is formed over the sensor layer materials in a central region which is surrounded by end regions. Ion milling is performed with use of the lift-off mask such that the sensor layer materials in the end regions are removed and those in the central region remain to form a read sensor. A high-angle ion mill (e.g. between 45–80 degrees) is then performed to remove redeposited material from side walls of the lift-off mask. Next, a reactive ion etch (RIE) is used to reduce the thickness and the width of the lift-off mask and to remove capping layer materials from the top edges of the read sensor. With the reduced-size lift-off mask in place, hard bias and lead layers are deposited adjacent the read sensor as well as over the mask. The reduced-size lift-off mask allows the amount of hard bias to be increased in the contiguous junction region, and the edges of the leads to be deposited more closely over the top edges of the read sensor. Advantageously, the stability of the sensor is enhanced and the transfer curve is improved using a method which can be controlled independently from the initial mask structure and ion milling process. No critical alignments or multiple photoresist processes are necessary.

    摘要翻译： 描述了制造具有改进的连续结的读取头的方法。 在传感器层材料沉积在衬底上之后，在由端部区域包围的中心区域中的传感器层材料上形成剥离掩模。 使用剥离掩模进行离子铣削，使得端部区域中的传感器层材料被去除，并且在中心区域中的传感器层材料保持形成读取传感器。 然后执行高角度离子磨（例如在45-80度之间）以从剥离掩模的侧壁去除再沉积的材料。 接下来，使用反应离子蚀刻（RIE）来减小剥离掩模的厚度和宽度，并从读取传感器的顶部边缘去除封盖层材料。 随着尺寸减小的剥离掩模就位，硬读取传感器以及掩模附近沉积了硬偏置和引线层。 缩小尺寸的剥离掩模允许在连续接合区域中增加硬偏置的量，并且引线的边缘更紧密地沉积在读取传感器的顶部边缘上。 有利地，增强了传感器的稳定性，并且使用可以独立于初始掩模结构和离子铣削过程进行控制的方法来提高传递曲线。 不需要临界对准或多个光刻胶工艺。

    Method of making magnetic head having narrow pole tip and fine pitch coil
    7.
    发明授权
    Method of making magnetic head having narrow pole tip and fine pitch coil 失效
    制造具有窄极尖和细间距线圈的磁头的方法

    公开(公告)号：US06987646B2

    公开(公告)日：2006-01-17

    申请号：US10632729

    申请日：2003-07-31

    申请人： Richard Hsiao ,  Hugo Alberto Emilio Santini

    发明人： Richard Hsiao ,  Hugo Alberto Emilio Santini

    IPC分类号： G11B5/127

    CPC分类号： G11B5/3163 ,  G11B5/012 ,  G11B5/17 ,  G11B5/3116 ,  G11B5/313 ,  Y10T29/49046

    摘要： Following the deposition of an insulation layer, a patterned P2 pole tip seed layer is deposited. Significantly, the pole tip seed layer is not deposited beneath the induction coil area of the magnetic head. A dielectric layer is next deposited and a patterned RIE etching mask that includes both a P2 pole tip trench opening and an induction coil trench opening is fabricated upon the dielectric layer. Thereafter, in a single RIE etching step, the P2 pole tip trench is etched through the dielectric material down to the seed layer, and the induction coil trench is etched through the dielectric material down to the insulation layer. The P2 pole tip is first electroplated up into its trench, an induction coil seed layer is next deposited, and the induction coil is then electroplated up into the induction coil trench.

    摘要翻译： 在沉积绝缘层之后，沉积图案化的P2极端子种子层。 重要的是，极尖种子层没有沉积在磁头的感应线圈区域之下。 接下来沉积电介质层，并且在电介质层上制造包括P2极尖沟槽开口和感应线圈沟槽开口的图案化RIE蚀刻掩模。 此后，在单个RIE蚀刻步骤中，通过电介质材料将P2极尖沟槽蚀刻到种子层，并且感应线圈沟槽通过电介质材料被蚀刻到绝缘层。 首先将P2极端电镀到其沟槽中，然后沉积感应线圈种子层，然后将感应线圈电镀到感应线圈沟槽中。

    Perpendicular pole structure and method of fabricating the same
    8.
    发明申请
    Perpendicular pole structure and method of fabricating the same 有权

    公开(公告)号：US20050184840A1

    公开(公告)日：2005-08-25

    申请号：US10882507

    申请日：2004-06-30

    申请人： Richard Hsiao ,  Wipul Jayasekara ,  Jeffrey Lille

    发明人： Richard Hsiao ,  Wipul Jayasekara ,  Jeffrey Lille

    IPC分类号： B24B1/00 ,  G11B5/127 ,  G11B5/147 ,  G11B5/187 ,  G11B5/265

    CPC分类号： G11B5/1278

    摘要： A magnetic structure, such as a pole tip, and method for forming the same includes forming a pole tip layer of magnetic material. A layer of polyimide precursor material is added above the pole tip layer and cured. A silicon-containing resist layer is added above the layer of polyimide precursor material and patterned. The resist layer is exposed to oxygen plasma for converting the resist into a glass-like material. Exposed portions of the cured polyimide precursor material are removed for exposing portions of the pole tip layer. The exposed portions of the pole tip layer are removed for forming a pole tip. Chemical mechanical polishing (CMP) can then be performed to remove any unwanted material remaining above the pole tip.

    Magnetic head having short pole yoke length and method for fabrication thereof
    9.
    发明授权
    Magnetic head having short pole yoke length and method for fabrication thereof 失效
    具有短极轭长度的磁头及其制造方法

    公开(公告)号：US06870705B2

    公开(公告)日：2005-03-22

    申请号：US10052719

    申请日：2002-01-17

    申请人： Richard Hsiao ,  Edward Hin Pong Lee

    发明人： Richard Hsiao ,  Edward Hin Pong Lee

    IPC分类号： G11B5/00 ,  G11B5/187 ,  G11B5/31 ,  G11B5/147

    CPC分类号： G11B5/3116 ,  G11B5/1871 ,  G11B5/3163 ,  G11B2005/0013

    摘要： The induction coil of the magnetic head of the present invention is fabricated in a patterned electrical insulation material, preferably utilizing reactive ion etch (RIE) techniques. The electrical insulation material is particularly patterned such that it is formed away from the ABS surface and in the location of the induction coil. A fill layer is deposited around the patterned electrical insulation material layer, such that the fill layer is disposed at the ABS surface. In a preferred embodiment, the patterned electrical insulation material is initially fabricated from hard baked photoresist and subsequent to the deposition of the fill layer the hard baked photoresist material is removed and replaced by SiO2. The SiO2 is thereby located away from the ABS surface and the induction coil is subsequently fabricated within the SiO2 material.

    摘要翻译： 本发明的磁头的感应线圈以图案化的电绝缘材料制成，优选利用反应离子蚀刻（RIE）技术。 电绝缘材料被特别图案化，使得其形成为远离ABS表面并且在感应线圈的位置。 填充层沉积在图案化的电绝缘材料层周围，使得填充层设置在ABS表面。 在优选实施例中，图案化电绝缘材料最初由硬烘烤的光致抗蚀剂制造，并且在沉积填充层之后，去除硬烘烤的光致抗蚀剂材料并用SiO 2代替。 因此，SiO 2远离ABS表面并且随后在SiO 2材料内制造感应线圈。

    Magnetic transducer with electrically conductive shield for reducing electromagnetic interference
    10.
    发明授权
    Magnetic transducer with electrically conductive shield for reducing electromagnetic interference 失效
    具有导电屏蔽的磁性换能器，用于减少电磁干扰

    公开(公告)号：US06859347B2

    公开(公告)日：2005-02-22

    申请号：US09756377

    申请日：2001-01-04

    申请人： Richard Hsiao ,  Klaas Berend Klaassen ,  Edward Hing Pong Lee ,  Timothy J. Moran ,  Vladimir Nikitin ,  Michael Paul Salo ,  Samuel Wei-San Yuan

    发明人： Richard Hsiao ,  Klaas Berend Klaassen ,  Edward Hing Pong Lee ,  Timothy J. Moran ,  Vladimir Nikitin ,  Michael Paul Salo ,  Samuel Wei-San Yuan

    IPC分类号： G11B5/11 ,  G11B5/31 ,  G11B5/33 ,  G11B5/39 ,  G11B5/48

    CPC分类号： G11B5/4853 ,  G11B5/11 ,  G11B5/3143 ,  G11B5/33 ,  G11B5/3903 ,  G11B5/486 ,  Y10T29/49032

    摘要： A magnetic transducer including an electrically conductive shield (ECS) which is disposed between the substrate and first magnetic shield is described. The ECS is preferably embedded in an insulating undercoat layer. The ECS is preferably electrically isolated from the magnetic sensor element and is externally connected to a ground available in the disk drive through the arm electronics. Two alternative ways for connecting the ECS to a ground are described. In one embodiment which is only effective with single-ended input type arm electronics, the ECS is connected to a ground through a via to a lead pad for the read head which is connected to the ground of the arm electronics. In a second and more preferred embodiment a separate lead pad is included on the head to allow the ECS to be connected to electronic or case ground when the head is installed in the arm. The extent of the ECS should be sufficiently large to cover the read head portion of the transducer, i.e., from the edge of the first magnetic shield to the outer edges of the read contact pads, but should preferably not cover the write head pads.

    摘要翻译： 描述了包括设置在基板和第一磁屏蔽之间的导电屏蔽（ECS）的磁换能器。 ECS优选地嵌入绝缘底涂层中。 ECS优选地与磁传感器元件电隔离，并且通过臂电子器件外部连接到盘驱动器中可用的地面。 描述了将ECS连接到地面的两种替代方式。 在一个实施例中，其仅对单端输入型臂电子器件有效，ECS通过通孔连接到地面，用于连接到臂电子器件的地面的用于读头的引线板。 在第二和更优选的实施例中，头部包括单独的引线板，以便当头部安装在臂中时，允许ECS连接到电子或壳体接地。 ECS的范围应该足够大以覆盖换能器的读头部分，即从第一磁屏蔽的边缘到读接触焊盘的外边缘，但是最好不覆盖写头焊盘。