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公开(公告)号：US09175123B2
公开(公告)日：2015-11-03
申请号：US13223884
申请日：2011-09-01
申请人： David Christoph Mueller , Toby Cull , Pawel Miskiewicz , Miguel Carrasco-Orozco , Andrew Bell , Edmund Elce , Larry F. Rhodes , Kazuyoshi Fujita , Hendra Ng , Pramod Kandanarachchi , Steven Smith
发明人： David Christoph Mueller , Toby Cull , Pawel Miskiewicz , Miguel Carrasco-Orozco , Andrew Bell , Edmund Elce , Larry F. Rhodes , Kazuyoshi Fujita , Hendra Ng , Pramod Kandanarachchi , Steven Smith
IPC分类号： B32B27/32 , C08F132/08 , C08F232/00 , H01L51/05
CPC分类号： H01L51/052 , C08F32/04 , C08F232/00 , C08L45/00 , H01L51/0035 , H01L51/004 , H01L51/0043 , H01L51/0537 , H01L51/0541 , H01L51/0545 , H01L51/107
摘要： Embodiments in accordance with the present invention provide for the use of polycycloolefins in electronic devices and more specifically to the use of such polycycloolefins as gate insulator layers used in the fabrication of electronic devices, the electronic devices that encompass such polycycloolefin gate insulator and processes for preparing such polycycloolefin gate insulator layers and electronic devices encompassing such layers.
摘要翻译： 根据本发明的实施方案提供了聚环烯烃在电子器件中的用途，更具体地说，涉及使用这种聚环烯烃作为用于制造电子器件的栅极绝缘体层，包括这种聚环烯烃栅极绝缘体的电子器件以及用于制备 这种多环烯烃栅极绝缘体层和包含这些层的电子器件。
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公开(公告)号：US20120056183A1
公开(公告)日：2012-03-08
申请号：US13223884
申请日：2011-09-01
申请人： David Christoph Mueller , Toby Cull , Pawel Miskiewicz , Miguel Carrasco-Orozco , Andrew Bell , Edmund Elce , Larry F. Rhodes , Kazuyoshi Fujita , Hendra Ng , Pramod Kandanarachchi , Steven Smith
发明人： David Christoph Mueller , Toby Cull , Pawel Miskiewicz , Miguel Carrasco-Orozco , Andrew Bell , Edmund Elce , Larry F. Rhodes , Kazuyoshi Fujita , Hendra Ng , Pramod Kandanarachchi , Steven Smith
IPC分类号： H01L29/786 , H01L21/336 , H01L29/04
CPC分类号： H01L51/052 , C08F32/04 , C08F232/00 , C08L45/00 , H01L51/0035 , H01L51/004 , H01L51/0043 , H01L51/0537 , H01L51/0541 , H01L51/0545 , H01L51/107
摘要： Embodiments in accordance with the present invention provide for the use of polycycloolefins in electronic devices and more specifically to the use of such polycycloolefins as gate insulator layers used in the fabrication of electronic devices, the electronic devices that encompass such polycycloolefin gate insulator and processes for preparing such polycycloolefin gate insulator layers and electronic devices encompassing such layers.
摘要翻译： 根据本发明的实施方案提供了聚环烯烃在电子器件中的用途，更具体地说，涉及使用这种聚环烯烃作为用于制造电子器件的栅极绝缘体层，包括这种聚环烯烃栅极绝缘体的电子器件以及用于制备 这种多环烯烃栅极绝缘体层和包含这些层的电子器件。
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公开(公告)号：US20120056249A1
公开(公告)日：2012-03-08
申请号：US13223784
申请日：2011-09-01
申请人： David Christoph Mueller , Pawel Miskiewicz , Toby Cull , Piotr Wierzchowiec , Andrew Bell , Edmund Elce , Larry F. Rhodes , Kazuyoshi Fujita , Hendra Ng , Pramod Kandanarachchi , Steven Smith
发明人： David Christoph Mueller , Pawel Miskiewicz , Toby Cull , Piotr Wierzchowiec , Andrew Bell , Edmund Elce , Larry F. Rhodes , Kazuyoshi Fujita , Hendra Ng , Pramod Kandanarachchi , Steven Smith
IPC分类号： B32B27/32 , C08F136/20 , H01L21/336 , C08F232/08 , H01L29/78 , C08F236/20 , C08F132/08
CPC分类号： H01L51/0043 , C08F232/00 , C08L65/00 , C08L2203/20 , H01L51/0035 , H01L51/0529 , H01L51/0541 , H01L51/0545 , Y10T428/31938
摘要： Embodiments in accordance with the present invention provide for the use of polycycloolefins in electronic devices and more specifically to the use of such polycycloolefins as interlayers applied to fluoropolymer layers used in the fabrication of electronic devices, the electronic devices that encompass such polycycloolefin interlayers and processes for preparing such polycycloolefin interlayers and electronic devices.
摘要翻译： 根据本发明的实施方案提供了聚环烯烃在电子器件中的用途，更具体地说，涉及使用这种聚环烯烃作为中间层，其用于制备电子器件的氟聚合物层，包含这种聚环烯夹层的电子器件和 制备这种聚环烯夹层和电子器件。
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公开(公告)号：US09583713B2
公开(公告)日：2017-02-28
申请号：US13223784
申请日：2011-09-01
申请人： David Christoph Mueller , Pawel Miskiewicz , Toby Cull , Piotr Wierzchowiec , Andrew Bell , Edmund Elce , Larry F. Rhodes , Kazuyoshi Fujita , Hendra Ng , Pramod Kandanarachchi , Steven Smith
发明人： David Christoph Mueller , Pawel Miskiewicz , Toby Cull , Piotr Wierzchowiec , Andrew Bell , Edmund Elce , Larry F. Rhodes , Kazuyoshi Fujita , Hendra Ng , Pramod Kandanarachchi , Steven Smith
IPC分类号： B32B27/32 , C08F132/08 , H01L51/00 , C08L65/00 , C08F232/00 , H01L51/05
CPC分类号： H01L51/0043 , C08F232/00 , C08L65/00 , C08L2203/20 , H01L51/0035 , H01L51/0529 , H01L51/0541 , H01L51/0545 , Y10T428/31938
摘要： Embodiments in accordance with the present invention provide for the use of polycycloolefins in electronic devices and more specifically to the use of such polycycloolefins as interlayers applied to fluoropolymer layers used in the fabrication of electronic devices, the electronic devices that encompass such polycycloolefin interlayers and processes for preparing such polycycloolefin interlayers and electronic devices.
摘要翻译： 根据本发明的实施方案提供了聚环烯烃在电子器件中的用途，更具体地说，涉及使用这种聚环烯烃作为中间层，其用于制备电子器件的氟聚合物层，包含这种聚环烯夹层的电子器件和 制备这种聚环烯夹层和电子器件。
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5.发明授权Self-imageable film forming polymer, compositions thereof and devices and structures made therefrom 有权可自成像的成膜聚合物，其组合物和由其制成的器件和结构公开(公告)号：US08753790B2
公开(公告)日：2014-06-17
申请号：US12803602
申请日：2010-06-30
申请人： Osamu Onishi , Haruo Ikeda , Larry Rhodes , Paul Evans , Edmund Elce , Andrew Bell , Chad Brick , Hendra Ng , Pramod Kandanarachchi
发明人： Osamu Onishi , Haruo Ikeda , Larry Rhodes , Paul Evans , Edmund Elce , Andrew Bell , Chad Brick , Hendra Ng , Pramod Kandanarachchi
CPC分类号： C08G61/08 , C08G2261/3324 , C08G2261/418 , C08L65/00 , G03F7/0233 , G03F7/0382
摘要： Embodiments in accordance with the present invention encompass self-imageable film forming compositions that comprise norbornene-type polymers and that can be formulated to be either positive tone imaging or negative tone. The films formed thereby are useful in the forming of microelectronic and optoelectronics devices.
摘要翻译： 根据本发明的实施方案包括包含降冰片烯型聚合物并且可以配制为正色调成像或负色调的自成像成膜组合物。 由此形成的膜可用于形成微电子和光电子器件。
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6.发明申请Self-imageable film forming polymer, compositions thereof and devices and structures made therefrom 有权可自成像的成膜聚合物，其组合物和由其制成的装置和结构公开(公告)号：US20110104614A1
公开(公告)日：2011-05-05
申请号：US12803602
申请日：2010-06-30
申请人： Osamu Onishi , Haruo Ikeda , Larry Rhodes , Paul Evans , Edmund Elce , Andrew Bell , Chad Brick , Hendra Ng , Pramod Kandanarachchi
发明人： Osamu Onishi , Haruo Ikeda , Larry Rhodes , Paul Evans , Edmund Elce , Andrew Bell , Chad Brick , Hendra Ng , Pramod Kandanarachchi
CPC分类号： C08G61/08 , C08G2261/3324 , C08G2261/418 , C08L65/00 , G03F7/0233 , G03F7/0382
摘要： Embodiments in accordance with the present invention encompass self-imageable film forming compositions that comprise norbornene-type polymers and that can be formulated to be either positive tone imaging or negative tone. The films formed thereby are useful in the forming of microelectronic and optoelectronics devices.
摘要翻译： 根据本发明的实施方案包括包含降冰片烯型聚合物并且可以配制为正色调成像或负色调的自成像成膜组合物。 由此形成的膜可用于形成微电子和光电子器件。
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7.发明授权Norbornene-type polymers, compositions thereof and lithographic process using such compositions 有权降冰片烯型聚合物，其组合物和使用这种组合物的平版印刷方法公开(公告)号：US08541523B2
公开(公告)日：2013-09-24
申请号：US13079240
申请日：2011-04-04
CPC分类号： G03F7/11 , C08F232/08 , G03F7/0046 , G03F7/2041
摘要： Embodiments in accordance with the present invention provide for non-self imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming top-coat layers for overlying photoresist layers in immersion lithographic process and the process thereof.
摘要翻译： 根据本发明的实施方案提供了可用于浸渍式光刻工艺的非自成像降冰片烯型聚合物，制备这种聚合物的方法，使用这种聚合物的组合物和使用这种组合物的浸渍光刻工艺。 更具体地说，本发明的实施方案涉及可用于在浸没式光刻工艺中形成覆盖光致抗蚀剂层的顶涂层的降冰片烯型聚合物及其工艺。
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8.发明申请Norbornene-Type Polymers, Compositions Thereof and Lithographic Process Using Such Compositions 有权降冰片烯型聚合物，其组合物和使用这种组合物的平版印刷方法公开(公告)号：US20110244400A1
公开(公告)日：2011-10-06
申请号：US13079240
申请日：2011-04-04
CPC分类号： G03F7/11 , C08F232/08 , G03F7/0046 , G03F7/2041
摘要： Embodiments in accordance with the present invention provide for non-self imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming top-coat layers for overlying photoresist layers in immersion lithographic process and the process thereof.
摘要翻译： 根据本发明的实施方案提供了可用于浸渍式光刻工艺的非自成像降冰片烯型聚合物，制备这种聚合物的方法，使用这种聚合物的组合物和使用这种组合物的浸渍光刻工艺。 更具体地说，本发明的实施方案涉及可用于在浸没式光刻工艺中形成覆盖光致抗蚀剂层的顶涂层的降冰片烯型聚合物及其工艺。
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9.发明授权Use of a combination chain transfer and activating agent to control molecular weight and optical density of Pd catalyzed norbornene polymers 有权使用组合链转移和活化剂来控制Pd催化降冰片烯聚合物的分子量和光密度公开(公告)号：US07759439B2
公开(公告)日：2010-07-20
申请号：US12056481
申请日：2008-03-27
IPC分类号： C08F32/04
摘要： A method of controlling the molecular weight of poly(cyclic)olefin (norbornene-type) polymers and activating the polymerization thereof with a single material is provided. Such method include adding a chain transfer/activating agent to a mixture of monomer(s), catalyst, solvent and an optional cocatalyst and polymerizing the mixture to form a polymer. It is shown that the amount of chain transfer/activating agent in the mixture can serve to control the molecular weight of the resulting polymer, its percent conversion or both, and in some embodiments the optical density of the resulting polymer.
摘要翻译： 提供了一种控制聚（环状）烯烃（降冰片烯型）聚合物的分子量并用单一材料活化其聚合的方法。 这种方法包括向单体，催化剂，溶剂和任选的助催化剂的混合物中加入链转移/活化剂并使混合物聚合以形成聚合物。 显示混合物中链转移/活化剂的量可用于控制所得聚合物的分子量，其转化百分率或两者，并且在一些实施方案中可用于所得聚合物的光密度。
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10.发明申请Use Of A Combination Chain Transfer And Activating Agent To Control Molecular Weight And Optical Density Of Pd Catalyzed Norbornene Polymers 审中-公开使用组合链转移和活化剂来控制Pd催化的降冰片烯聚合物的分子量和光密度公开(公告)号：US20110009578A1
公开(公告)日：2011-01-13
申请号：US12838641
申请日：2010-07-19
IPC分类号： C08F4/26
摘要： A method of controlling the molecular weight of poly(cyclic) olefin (norbornene-type) polymers and activating the polymerization thereof with a single material is provided. Such method include adding a chain transfer/activating agent to a mixture of monomer(s), catalyst, solvent and an optional cocatalyst and polymerizing the mixture to form a polymer. It is shown that the amount of chain transfer/activating agent in the mixture can serve to control the molecular weight of the resulting polymer, its percent conversion or both, and in some embodiments the optical density of the resulting polymer.
摘要翻译： 提供了一种控制聚（环状）烯烃（降冰片烯型）聚合物的分子量并用单一材料活化其聚合的方法。 这种方法包括向单体，催化剂，溶剂和任选的助催化剂的混合物中加入链转移/活化剂并使混合物聚合以形成聚合物。 显示混合物中链转移/活化剂的量可用于控制所得聚合物的分子量，其转化百分率或两者，并且在一些实施方案中可用于所得聚合物的光密度。
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