Norbornene-type polymers, compositions thereof and lithographic process using such compositions
    5.
    发明授权
    Norbornene-type polymers, compositions thereof and lithographic process using such compositions 有权
    降冰片烯型聚合物,其组合物和使用这种组合物的平版印刷方法

    公开(公告)号:US08541523B2

    公开(公告)日:2013-09-24

    申请号:US13079240

    申请日:2011-04-04

    IPC分类号: C08F4/46 C08K5/06

    摘要: Embodiments in accordance with the present invention provide for non-self imageable norbornene-type polymers useful for immersion lithographic processes, methods of making such polymers, compositions employing such polymers and immersion lithographic processes that make use of such compositions. More specifically the embodiments of the present invention are related to norbornene-type polymers useful for forming top-coat layers for overlying photoresist layers in immersion lithographic process and the process thereof.

    摘要翻译: 根据本发明的实施方案提供了可用于浸渍式光刻工艺的非自成像降冰片烯型聚合物,制备这种聚合物的方法,使用这种聚合物的组合物和使用这种组合物的浸渍光刻工艺。 更具体地说,本发明的实施方案涉及可用于在浸没式光刻工艺中形成覆盖光致抗蚀剂层的顶涂层的降冰片烯型聚合物及其工艺。

    Use of a combination chain transfer and activating agent to control molecular weight and optical density of Pd catalyzed norbornene polymers
    7.
    发明授权
    Use of a combination chain transfer and activating agent to control molecular weight and optical density of Pd catalyzed norbornene polymers 有权
    使用组合链转移和活化剂来控制Pd催化降冰片烯聚合物的分子量和光密度

    公开(公告)号:US07759439B2

    公开(公告)日:2010-07-20

    申请号:US12056481

    申请日:2008-03-27

    IPC分类号: C08F32/04

    CPC分类号: C08F4/70 C08F2/38

    摘要: A method of controlling the molecular weight of poly(cyclic)olefin (norbornene-type) polymers and activating the polymerization thereof with a single material is provided. Such method include adding a chain transfer/activating agent to a mixture of monomer(s), catalyst, solvent and an optional cocatalyst and polymerizing the mixture to form a polymer. It is shown that the amount of chain transfer/activating agent in the mixture can serve to control the molecular weight of the resulting polymer, its percent conversion or both, and in some embodiments the optical density of the resulting polymer.

    摘要翻译: 提供了一种控制聚(环状)烯烃(降冰片烯型)聚合物的分子量并用单一材料活化其聚合的方法。 这种方法包括向单体,催化剂,溶剂和任选的助催化剂的混合物中加入链转移/活化剂并使混合物聚合以形成聚合物。 显示混合物中链转移/活化剂的量可用于控制所得聚合物的分子量,其转化百分率或两者,并且在一些实施方案中可用于所得聚合物的光密度。

    Use of a Combination Chain Transfer and Activating Agent to Control Molecular Weight and Optical Density of Pd Catalyzed Norbornene Polymers
    8.
    发明申请
    Use of a Combination Chain Transfer and Activating Agent to Control Molecular Weight and Optical Density of Pd Catalyzed Norbornene Polymers 有权
    使用组合链转移和活化剂来控制Pd催化的降冰片烯聚合物的分子量和光密度

    公开(公告)号:US20080242810A1

    公开(公告)日:2008-10-02

    申请号:US12056481

    申请日:2008-03-27

    IPC分类号: C08F4/06

    CPC分类号: C08F4/70 C08F2/38

    摘要: A method of controlling the molecular weight of poly(cyclic) olefin (norbornene-type) polymers and activating the polymerization thereof with a single material is provided. Such method include adding a chain transfer/activating agent to a mixture of monomer(s), catalyst, solvent and an optional cocatalyst and polymerizing the mixture to form a polymer. It is shown that the amount of chain transfer/activating agent in the mixture can serve to control the molecular weight of the resulting polymer, its percent conversion or both, and in some embodiments the optical density of the resulting polymer.

    摘要翻译: 提供了一种控制聚(环状)烯烃(降冰片烯型)聚合物的分子量并用单一材料活化其聚合的方法。 这种方法包括向单体,催化剂,溶剂和任选的助催化剂的混合物中加入链转移/活化剂并使混合物聚合以形成聚合物。 显示混合物中链转移/活化剂的量可用于控制所得聚合物的分子量,其转化百分比或两者,并且在一些实施方案中可用于所得聚合物的光密度。

    Use Of A Combination Chain Transfer And Activating Agent To Control Molecular Weight And Optical Density Of Pd Catalyzed Norbornene Polymers
    9.
    发明申请
    Use Of A Combination Chain Transfer And Activating Agent To Control Molecular Weight And Optical Density Of Pd Catalyzed Norbornene Polymers 审中-公开
    使用组合链转移和活化剂来控制Pd催化的降冰片烯聚合物的分子量和光密度

    公开(公告)号:US20110009578A1

    公开(公告)日:2011-01-13

    申请号:US12838641

    申请日:2010-07-19

    IPC分类号: C08F4/26

    CPC分类号: C08F4/70 C08F2/38

    摘要: A method of controlling the molecular weight of poly(cyclic) olefin (norbornene-type) polymers and activating the polymerization thereof with a single material is provided. Such method include adding a chain transfer/activating agent to a mixture of monomer(s), catalyst, solvent and an optional cocatalyst and polymerizing the mixture to form a polymer. It is shown that the amount of chain transfer/activating agent in the mixture can serve to control the molecular weight of the resulting polymer, its percent conversion or both, and in some embodiments the optical density of the resulting polymer.

    摘要翻译: 提供了一种控制聚(环状)烯烃(降冰片烯型)聚合物的分子量并用单一材料活化其聚合的方法。 这种方法包括向单体,催化剂,溶剂和任选的助催化剂的混合物中加入链转移/活化剂并使混合物聚合以形成聚合物。 显示混合物中链转移/活化剂的量可用于控制所得聚合物的分子量,其转化百分率或两者,并且在一些实施方案中可用于所得聚合物的光密度。